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  6. Low-temperature DLC film deposition device (multi-layer ta-C, hydrogen-free)

Low-temperature DLC film deposition device (multi-layer ta-C, hydrogen-free)

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last updated:Mar 20, 2025

Creative Coatings Co., Ltd.
Creative Coatings Co., Ltd.
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It is now possible to achieve low-temperature DLC (Diamond-like carbon) thin film hard coatings with improved adhesion compared to conventional ta-C!

High-density and stable high-quality film formation is possible! By performing DLC film formation that is highly hard (wear-resistant), has a low friction coefficient (wear-resistant), is corrosion-resistant, adhesion-resistant, and smooth, we contribute to the longevity of mold parts for semiconductor manufacturing equipment, resin molding molds, sliding components, and tools. This is not only optimal for reducing customer costs but also for reducing maintenance work hours, such as cleaning tasks, and for business improvement. It is also possible to achieve "high adhesion, smooth & hard low-temperature DLC film formation" for three-dimensional ultra-precise complex-shaped molds and machine parts. In addition to improving hardness and wear resistance, we also accept "peeling treatment and re-coating," contributing to the reduction of product life cycle costs and material waste, thus reducing environmental impact. ++++++++++++++++++++++++++++++ DLC stands for Diamond-Like Carbon, which refers to a hard thin-film coating with good sliding properties that has intermediate characteristics between diamond and graphite. By adjusting the ratio of SP3 (diamond bonds) to SP2 (graphite bonds) and the ratio of H (hydrogen) contained within, as well as by applying multilayer coatings, it is possible to create thin films with various physical properties and characteristics (industrial value).

    Other semiconductor manufacturing equipmentPlasma surface treatment equipmentSurface treatment contract service
低温DLC_構造図ta-C.jpg

Low-temperature DLC film deposition device (multi-layer ta-C, hydrogen-free)

低温DLC_構造図ta-C.jpg
低温DLC_構造図ta-C.jpg

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basic information

【Effects】 - Improved high hardness and wear resistance - Enhanced anti-adhesion properties 【Film Type】 ta-C multilayer (base layer Cr/Cr-N) 【Film Thickness】 1 to 2 μm 【Stress】 50 GPa 【Friction Coefficient】 0.08 【Processing Temperature】 180℃

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Applications/Examples of results

【Applications】 - Automotive drive components (gears, shafts, etc.) - Precision sliding parts (bearings and other mechanical components) 【Reference Achievements】 It is possible to "form a film without reducing the hardness or quality of the base material for low-temperature treatment," and the base material can be not only metal but also rubber products (O-rings, etc.). 【Consultation for Film Formation and Test Coating Available】 At Creative Coatings, we accept requests for test coatings and sample creation. We can listen to your needs and provide optimal DLC structure ratios, coating conditions, and film thickness adjustments and suggestions according to your application and material. Please feel free to consult with us. 【Evaluation Requests】 Requests for various evaluations, including tribology tests, are also possible. We can also accept requests for evaluations of coatings from other companies. Please feel free to consult with us. 【Contract Coating】 We can also accept contract coating from small lots of various types to mass production. Please feel free to consult with us. *Please consult us about the effects you want to improve with coating and the coating specifications. We will provide the optimal coating process.

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Model number overview
Low-temperature DLC film deposition device (multi-layer a-C:H, hydrogen-containing Cr system) Improved load-bearing capacity through multi-layer film formation, extended mold lifespan (enhanced release properties and improved wear resistance), and reduced mold contamination enable shorter autonomous operation and cleaning tasks.
Low-temperature DLC film deposition device (multi-layer CrN/TiAIN, hydrogen-containing Ti-based) Improved impact resistance through multi-layer film formation, enhanced load-bearing capacity and impact resistance, and improved component lifespan with high adhesion and no film peeling.

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Low-temperature ALD equipment CVA series

Low-temperature ALD equipment CVA series

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Low-temperature high-frequency excitation DLC film deposition device CVC series

Low-temperature high-frequency excitation DLC film deposition device CVC series

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Company information

Creative

Creative Coatings Co., Ltd.

Electronic Components and Semiconductors

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One of the key technologies for achieving carbon neutrality is next-generation batteries, along with nanoscale functional particles with various capabilities, the proliferation of 5G and 6G communication systems and environmentally friendly vehicles, and the advancements in advanced driver-assistance systems (ADAS). There is a growing expectation for our coating technology in various fields of society, including passive components such as MLCCs, which require miniaturization and high reliability, high-quality healthcare through digital transformation (DX), and medical devices advancing with AI and digitalization.

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