Vertical diffusion furnace compatible with Φ300mm.
This is a vertical diffusion furnace compatible with Φ300mm. 【Features】 ◆ Equipped with a user-friendly, in-house developed new controller ◆ Efficient fully automated transport system ◆ High-performance control system ◆ High-performance LGO heater installed
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basic information
This is a vertical diffusion furnace compatible with Φ300mm. 【Features】 ◆ Equipped with a user-friendly, in-house developed new controller ◆ Efficient fully automated transport system ◆ High-performance control system ◆ High-performance LGO heater installed
Price information
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Delivery Time
Applications/Examples of results
◆Oxidation (Pyrogenic Oxidation, Dry Oxidation) ◆Diffusion (POCl3) ◆LPCVD (Poly-Si, Si3N4, P-Doped-PS) ◆Cu Annealing ◆Low-k Cure ◆Polyimide Cure ◆Annealing, etc.
Company information
JTEKT Thermo System started its business by manufacturing and selling heat treatment equipment for bearing materials. Since then, it has quickly responded to technological innovations and changes in industrial structures, and has been engaged in the development of various manufacturing equipment, not only for metals but also for semiconductors, electronic components, displays, and more.
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