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  6. Integrated gas system compatible gas filter

Integrated gas system compatible gas filter

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FI/SI series

last updated:Jun 20, 2012

ピー・ジェイ
ピー・ジェイ
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High filtration precision

This is a gas filter compatible with the integrated gas system manufactured by Pureon Japan, used in semiconductor manufacturing gas lines and other applications.

    CVD EquipmentStepperGas Filters
FI-SI-160_120.jpg

Integrated gas system compatible gas filter

FI-SI-160_120.jpg
FI-SI-160_120.jpg

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basic information

【Features】 ○ There are ceramic element types (0.003μm) known for their high filtration precision and metal element types (0.003μm). ○ Compatible with C seals/H1G seals/W seals. (C seals/W seals are also available in 1.125-inch type) ○ A lineup ranging from low flow rates of a few LPM to high flow rates of 120 LPM is available. ● For more details, please contact us or refer to the catalog.

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Applications/Examples of results

Semiconductor manufacturing gas lines, gas cabinets, semiconductor manufacturing equipment, etc.

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01.FI SI Series

01.FI SI Series

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ピー・ジェイ

ピー・ジェイ

Electronic Components and Semiconductors

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PJ Corporation was established as the general sales agent for Pureon Japan Co., Ltd. PJ Corporation will do its utmost to promote Pureon products worldwide. Products handled: 1. All products from Pureon Japan Co., Ltd. - Ceramic gas filters - Metal gas filters - Hastelloy gas filters - PTFE gas filters - Hybrid filters - Gas purifiers - Heaters - Liquid filters - Pressure sensors - Display devices - Temperature sensors - Differential pressure gauges - Resistivity meters - Digital flow control systems 2. Fluid control equipment parts for semiconductor manufacturing equipment and general industrial machinery.

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