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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Electron beam lithography equipment
  6. Double-sided simultaneous exposure device for inner layer boards Light HDE110S

Double-sided simultaneous exposure device for inner layer boards Light HDE110S

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Light HDE110S

last updated:Apr 11, 2012

豊和工業 機械事業部CE営業グループ電子機械チーム
豊和工業 機械事業部CE営業グループ電子機械チーム
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The productivity is different from previous exposure devices!

The usual tact time of 12 seconds has been reduced to an incredible 9 seconds! When converted to a minute, this allows for an increase in production of 1 to 2 more units compared to before.

    Resist DeviceElectron beam lithography equipmentOther semiconductor manufacturing equipment
豊和様ss.jpg

Double-sided simultaneous exposure device for inner layer boards Light HDE110S

豊和様ss.jpg
豊和様ss.jpg

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basic information

◆High Productivity ・High Throughput: Up to 5 sheets/min ・Large Substrate Size Support: Up to 30×24 inches ◆High Precision Exposure ・High Precision Alignment: New Image Processing System ・Stable Exposure: Wedge Vacuum Bonding Method *For more details, please refer to 'Catalog Download' or 'Contact Us'.

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Applications/Examples of results

◆When you want to achieve a balance between quality and high productivity. ◆When you want to enhance productivity while maintaining flexibility in substrate size.

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Dual-Sided Simultaneous Exposure Device for Inner Layer Boards Light HDE110S

Dual-Sided Simultaneous Exposure Device for Inner Layer Boards Light HDE110S

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Company information

豊和工業

豊和工業 機械事業部CE営業グループ電子機械チーム

Industrial Machinery

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Our company was established in 1907 (Meiji 40) with the aim of manufacturing and selling the Toyoda loom invented by Sakichi Toyoda. We have continued our business activities amid a rapidly changing era, marking a century of history since our founding. The machinery and inspection equipment we provide leverage the manufacturing know-how we have cultivated over many years, and by integrating our unique technology with the latest high-tech parts, we contribute significantly to the electronics industry.

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