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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Sputtering Equipment
  6. Sputtering device

Sputtering device

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last updated:Oct 04, 2021

長州産業
長州産業
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Sputtering device

We offer the "Mirrortron sputtering device," which features unique technology developed by Choshu Industries and employs a counter-target method. It achieves low plasma damage and low substrate temperatures while allowing for the desired functional films to be obtained. In the organic EL field, it is ideal for forming transparent conductive films and sealing films in top-emission structures. We provide optimal processes across various fields, including organic devices such as organic solar cells and organic semiconductors, electronic components, and resin films. Additionally, we also offer sputtering devices using parallel plate and cylindrical methods.

    Sputtering Equipment
スパッタ装置.png

Sputtering device

スパッタ装置.png
スパッタ装置.png

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basic information

We offer the "Mirrortron sputtering device" featuring unique technology from Choshu Industries, utilizing a counter-target method. It achieves low plasma damage and low substrate temperatures while allowing for the desired functional films to be obtained. In the organic EL field, it is ideal for forming transparent conductive films and sealing films in top-emission structures. We provide optimal processes across various fields, including organic devices such as organic solar cells and organic semiconductors, electronic components, and resin films. Additionally, we also offer sputtering devices using parallel plate and cylindrical methods.

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    Due to its ability to achieve low-damage sputter deposition, it is widely used for the deposition of transparent electrode films in top-emission devices.

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長州産業

長州産業

Industrial Machinery

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Choshu Industry is a manufacturing company with advanced technology in a wide range of fields, including cutting-edge energy equipment and organic EL device manufacturing equipment. In the field of energy equipment, centered around renewable energy, it holds a top-class share in the industry and is also engaged in advanced technologies such as hydrogen energy. Additionally, its technology in the manufacturing equipment sector is highly regarded in the industry, and its activities have expanded not only domestically but also internationally.

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