High-performance metal seals!! Ideal for various vacuum equipment and semiconductor manufacturing devices!
A compact and space-efficient device! The substrate supports φ4 inch, and it comes with a heating mechanism and T/S variable mechanism!
The O-ring cherry seals are made from a special material that can withstand harsh temperature conditions and strong chemicals, and they are molded into various sizes.
The O-ring cherry seal molds O-rings of various sizes according to the AS568 standard (aerospace standard) and other specifications, using a wide variety of materials.
Three types of sedimentation devices are available! Please choose according to your needs.
Since the pipe is narrow, we can solve the problem of the adhesive clogging or corroding in a short time!
At Daito Kasei, we can apply fluororesin coating and fluororesin lining to the inner surfaces of thin pipes ranging from 8A to 25A.
Advanced digital MFC/MFM with excellent versatility, compatible with many systems.
Metal bellows are components used in various vacuum devices and semiconductor manufacturing equipment.
White type of ternary fluorine rubber material with cherry blossom seal of O-ring.
Standard type Bition ETP (FFKM-E) material with O-ring cherry seal.
The O-ring cherry seal incorporates not only JIS standard sizes but also intermediate, extended, and derived sizes into the standards, and is molded in a variety of materials.
The O-ring cherry seal is made from various materials including PTFE (Teflon / polytetrafluoroethylene resin) and can produce O-rings in a wide range of sizes.
A very compact atomic layer deposition device with a rich process recipe.
Early detection of liquid leaks to minimize accidents! The OD-7, compliant with RoHS and CE, has been added to the oil and organic solvent detectors.
Forming a dense thin film by chemically reacting gases! Low-temperature processing is also possible.
Suitable for commercial use! It has very stable and predictable characteristics and behavior.
We offer sizes ranging from 3.0x3.0mm to 10.0x10.0mm!
Developed a gas filter with a high filtration accuracy of 0.003 μm in a consistently stable state.
The SPC series is designed to be ultra-compact (φ21×84mm) and lightweight (90g).
It will lead to cost reduction by shortening the installation time.
With a space-saving design, the vacuum pump module can be installed up to 18 meters away from the process module.
CVD coating equipment that can be used without restrictions on any shape of item.
As an effect of Aqua Plasma, we are publishing results of surface depth analysis by ESCA.
Film formation speed up & high adhesion! DLC coating equipment with low introduction costs and maintenance expenses.
Holes in ceramic substrates and FPC substrates can be transferred non-contact regardless of the position of the holes.
Heat-resistant tweezers for non-contact removal of wafers from a high-temperature susceptor.
The compound semiconductor wafers (GaAs, InP, GaP) are transported to a designated position non-contactly through manual operation.
Adopts a mechanism that discharges exhaust upward. It picks up and transfers surrounding chips non-contact without blowing them away with the ejected gas.
Piping components are materials applied in various vacuum devices and semiconductor manufacturing equipment.
Standard type perfluoroelastomer material with O-ring cherry seal.
White type perfluoroelastomer material with O-ring cherry seal.
Standard type 3-component fluororubber material with O-ring cherry seal.
Heat-resistant trivalent fluorine rubber (high temperature resistance: 250°C) material with O-ring cherry seal.
Old grade of heat-resistant perfluoroelastomer (high temperature resistance -300℃) material with O-ring cherry seal.
White type heat-resistant perfluoroelastomer (high temperature resistance: 280°C) material with O-ring cherry blossom seal.
White type of Bition ETP (FFKM-E) material with O-ring cherry seal.
Standard type Aflas (FEPM) material with O-ring cherry seal.
Low adhesion and low outgassing fluororubber (FKM) material with O-ring cherry seal.
Low adhesion and low outgassing fluororubber (FKM) material with O-ring cherry seal.
Heat-resistant perflo (high temperature resistance: 300°C) material without filler using O-ring cherry seal.
Special material (fluororubber + fluororesin) without the use of a compound material with O-ring cherry seal.
High hardness type Afuras (FEPM) material with O-ring cherry seal.
- A wide range of standard-sized products - Easy installation - Precision sintering diffusion bonding (simultaneous sintering) - High flow rate
MOCVD, filter, AIXTRON, LED, made in China, high-temperature vacuum dust filtration.
MOCVD equipment VEECO K465i G2
Meeting the high cleanliness standards required in the semiconductor and medical device fields. We carry out everything from precision cleaning to packaging and assembly in a consistent clean environment.
Silicon nitride, which has heat resistance and excellent thermal shock resistance, is a material with strong mechanical strength and good balance.
We handle all types of casting processing, including sand casting, mold casting, die casting, and gypsum casting, with a maximum size of 900×900×1000 mm.
Leave the technical services for semiconductor manufacturing equipment to us.
Not only can we achieve significant cost reductions by utilizing used equipment, but we also offer affordable support for after-sales service, maintenance, and specification changes after installation.
It prevents the deposition of powder regardless of the pipe shape, prevents clogging in the pipes through localized concentration, and extends the performance of the pump.
Compact and energy-efficient! Plasma CVD equipment for synthesizing single crystal high-purity diamonds for device fabrication.
A film deposition platform for semiconductor wafers and advanced packaging capable of various film deposition treatments.
The horizontal tolerance is +0.2/0-0mm, and the thickness tolerance is +/-0.05mm! Let me introduce the electronic grade CVD.
We offer a lineup of sizes ranging from 3.0x3.0mm to 10.0x10.0mm!
The surface roughness Ra is polished, Ra < 5nm! We introduce optical grade single crystals.
Introducing polycrystalline mechanical options with thicknesses of 0.25mm and 0.50mm!
Designing thermal conductivity from 1,000 W/mK to over 2,000 W/mK! Introducing polycrystalline thermal materials.
The horizontal tolerance is +0.1/0-0mm! Introducing single crystal mechanical components.
We offer a lineup of sizes ranging from 3.0x3.0mm to 10.0x10.0mm!
There is a track record of growing nitride semiconductor crystals on various semiconductor substrates. Customization is also possible according to your requests.
High voltage pulse discharge ceramic capacitor
This is a compact thermal cathode ionization vacuum gauge with an integrated sensor, circuit, and display. It supports 16 types of gases and also uses a metal sensor!
You can convert thermal conductivity into pressure and perform vacuum measurements.
Used semiconductor manufacturing equipment