With a space-saving design, the vacuum pump module can be installed up to 18 meters away from the process module.
![pic_00[2].jpg](https://image.mono.ipros.com/public/product/image/b48/158146004/IPROS_13319986203052091000.jpg?w=280&h=280)
Fluororubber with excellent long-term durability!! It can withstand high temperatures (200-220°C) compared to conventional fluororubber.
High-efficiency high-frequency power supply [Low cost, energy-saving, compact design] With a reflection resistance of over 600W, it withstands rapid load fluctuations due to short circuits and open circuits.
A film deposition platform for semiconductor wafers and advanced packaging capable of various film deposition treatments.
High-performance metal seals!! Ideal for various vacuum equipment and semiconductor manufacturing devices!
Leave the latest ultrasonic cleaning to Sonosys.
Since the pipe is narrow, we can solve the problem of the adhesive clogging or corroding in a short time!
Adopting a unique LIA method plasma source, we achieve ultra-fast, high-quality vacuum deposition on resin films and metal foils!
CVD coating equipment that can be used without restrictions on any shape of item.
Five-axis machining for semiconductor manufacturing equipment parts [Leave cost reduction to Philir Co., Ltd.]
Excellent uniformity of film thickness and impurity concentration. Atmospheric pressure CVD equipment that achieves high productivity and low cost.
CVD, PVD (evaporation, sputtering, etc.) high vacuum, ultra-high temperature plate heater for wafer and small chip heating with excellent uniformity and reproducibility.
Hot Wall Type Thermal CVD Equipment: A compact, high-performance CVD device ideal for fundamental research.
White type of ternary fluorine rubber material with cherry blossom seal of O-ring.
White type heat-resistant perfluoroelastomer (high temperature resistance: 280°C) material with O-ring cherry blossom seal.
The O-ring cherry seals are available in a wide variety of materials with various properties such as heat resistance, pressure resistance, and chemical resistance, and can be molded in various sizes.
The O-ring cherry seal is made from various materials including PTFE (Teflon / polytetrafluoroethylene resin) and can produce O-rings in a wide range of sizes.
Not only can we achieve significant cost reductions by utilizing used equipment, but we also offer affordable support for after-sales service, maintenance, and specification changes after installation.
AtomSpectraDBViewer: Fast and convenient search! New version now available!
The horizontal tolerance is +0.2/0-0mm, and the thickness tolerance is +/-0.05mm! Let me introduce the electronic grade CVD.
We offer a lineup of sizes ranging from 3.0x3.0mm to 10.0x10.0mm!
The passivation MBE device is composed of various chambers specially designed for laser facet passivation and other purposes.
Adopting a unique LIA method plasma source, we achieve ultra-fast, high-quality vacuum deposition on flat substrates such as glass and metal!
Semiconductors, components for liquid crystal manufacturing equipment, heat-resistant and corrosion-resistant materials, setters, and heat dissipation plates!
ALD (Atomic Layer Deposition) equipment dedicated to particles can deposit films on nanoscale particles.
A porous silicon formation device that further applies conventional anodic oxidation equipment. Porous silicon wafers are formed depending on the chemical solution used and the current density.
Perfluoroelastomer!! It is a perfluoroelastomer with excellent heat resistance and chemical resistance. Our company is the official distributor of Kalrez in Japan.
Currently presenting a summary of three particularly popular case studies! Changing the valve can also reduce the incidence of troubles. A collection of safety measures to protect workers from danger.
Equipped with a flow management system! Processing of powders at high temperatures using CVD/PECVD is possible.
Online sales of small packs, just what you need when you need it!
We are publishing new data on the non-bosch process for silicon.
Demo available at our company! New technology launched in the market. CVD with atmospheric pressure plasma. Capable of handling small quantities and a variety of products.
It is an engineering plastic that boasts excellent heat resistance, low water absorption rate, and outstanding sliding properties.
Non-contact suspension transport of workpieces using air jets! Bernoulli chuck.
Holes in ceramic substrates and FPC substrates can be transferred non-contact regardless of the position of the holes.
Mass Production / NSG(SiO2)/PSG/BPSG deposition High-productivity/Continuous atmospheric pressure CVD (APCVD) system (for up to 8-inch wafers)
Mass production / NSG(SiO2)/PSG/BPSG deposition High-productivity / Continuous atmospheric pressure CVD (APCVD) system (for 12-inch wafers)
It is a device with numerous achievements in mass production of power devices, LEDs, MEMS, etc.
"Replace rubber O-ring to metal seal, Eliminate gas permeation and gas release." This can be possible with Delta Beta HNRV.
For repairs of vacuum device peripheral equipment and valves, leave it to us! We will solve the problems of "high prices and long lead times" associated with manufacturer maintenance.
Sales of aluminum frames up to 5800 mm are possible! Additionally, we also accept "assembled products" such as exterior booths! Compatibility with other companies is also available.
It is a vacuum chamber measuring 1000mm x 1000mm x 1000h. Material: SUS304. Operating environment: vacuum.
A very compact atomic layer deposition device with a rich process recipe.
Silicon nitride, which has heat resistance and excellent thermal shock resistance, is a material with strong mechanical strength and good balance.
Three types of sedimentation devices are available! Please choose according to your needs.
Introducing one of the largest ultra-large DLC devices in the country!
Metal bellows are components used in various vacuum devices and semiconductor manufacturing equipment.
◉ Short time: Easily conduct graphene synthesis experiments in just 30 minutes per batch. ◉ High-precision temperature and pressure control. ◉ Sophisticated software.
A compact multi-thin film device that incorporates sputtering, deposition, electron beam (EB), and annealing thin film modules in a 60-liter volume chamber, suitable for various applications.
Compact multi-film device that incorporates sputtering, deposition, EB, and annealing thin film modules in a 60L volume chamber, suitable for various applications.
Plasma CVD equipment compatible with wafer sizes of Φ3 inch and Φ4 inch. Rapid synthesis of clean, high-quality graphene while suppressing impurities.
Simulation of vacuum exhaust and analysis of gas flow under low pressure conditions, analysis software compatible with rarefied gases (rarefied fluids).
Chemical reactions caused by dilute gases can also be considered!
Meeting the high cleanliness standards required in the semiconductor and medical device fields. We carry out everything from precision cleaning to packaging and assembly in a consistent clean environment.
The O-ring cherry seals are made from a special material that can withstand harsh temperature conditions and strong chemicals, and they are molded into various sizes.
The O-ring cherry seal molds O-rings of various sizes according to the AS568 standard (aerospace standard) and other specifications, using a wide variety of materials.
Standard type perfluoroelastomer material with O-ring cherry seal.
White type perfluoroelastomer material with O-ring cherry seal.
Standard type 3-component fluororubber material with O-ring cherry seal.
Heat-resistant trivalent fluorine rubber (high temperature resistance: 250°C) material with O-ring cherry seal.
Old grade of heat-resistant perfluoroelastomer (high temperature resistance -300℃) material with O-ring cherry seal.
Standard type Bition ETP (FFKM-E) material with O-ring cherry seal.
White type of Bition ETP (FFKM-E) material with O-ring cherry seal.
Standard type Aflas (FEPM) material with O-ring cherry seal.
Low adhesion and low outgassing fluororubber (FKM) material with O-ring cherry seal.
Low adhesion and low outgassing fluororubber (FKM) material with O-ring cherry seal.
The O-ring cherry seal incorporates not only JIS standard sizes but also intermediate, extended, and derived sizes into the standards, and is molded in a variety of materials.
Heat-resistant perflo (high temperature resistance: 300°C) material without filler using O-ring cherry seal.
Special material (fluororubber + fluororesin) without the use of a compound material with O-ring cherry seal.
High hardness type Afuras (FEPM) material with O-ring cherry seal.
- A wide range of standard-sized products - Easy installation - Precision sintering diffusion bonding (simultaneous sintering) - High flow rate
MOCVD, filter, AIXTRON, LED, made in China, high-temperature vacuum dust filtration.
Leave the technical services for semiconductor manufacturing equipment to us.
It prevents the deposition of powder regardless of the pipe shape, prevents clogging in the pipes through localized concentration, and extends the performance of the pump.
Early detection of liquid leaks to minimize accidents! The OD-7, compliant with RoHS and CE, has been added to the oil and organic solvent detectors.
A compact and space-efficient device! The substrate supports φ4 inch, and it comes with a heating mechanism and T/S variable mechanism!
Forming a dense thin film by chemically reacting gases! Low-temperature processing is also possible.
Compact and energy-efficient! Plasma CVD equipment for synthesizing single crystal high-purity diamonds for device fabrication.
Can be applied inside pipes with an inner diameter of just 1mm! Excellent in lubrication, corrosion resistance, and release properties, making it suitable for a wide range of applications from kitchen equipment to aerospace devices.
It has excellent properties such as heat resistance, non-stickiness, wear resistance, low friction, chemical resistance, and insulation that cannot be achieved with other resin coatings.
It has excellent properties such as heat resistance, non-stickiness, wear resistance, low friction, chemical resistance, and insulation that cannot be obtained with other resin coatings.
It has excellent properties such as heat resistance, non-stickiness, wear resistance, low friction, chemical resistance, and insulation that cannot be achieved with other resin coatings.
It has excellent properties such as heat resistance, non-stickiness, wear resistance, low friction, chemical resistance, and insulation that cannot be achieved with other resin coatings.
It has excellent properties such as heat resistance, non-stickiness, wear resistance, low friction, chemical resistance, and insulation, which cannot be obtained with other resin coatings.
It has excellent properties such as heat resistance, non-stickiness, wear resistance, low friction, chemical resistance, and insulation, which cannot be achieved with other resin coatings.
At Daito Kasei, we specialize in various surface treatment processes, focusing primarily on fluororesin coatings and fluororesin linings.
