"Complete Case Study of Flow Paths" No need for wire or lock installation! Presenting cases of lockable valves that prevent erroneous operation of valves due to human error.
Small quantities and wide varieties. NSG(SiO2)/PSG/BPSG deposition. Single-wafer processing atmospheric pressure CVD (APCVD) system (Compatible with 8-inch SiC wafers)
Eliminate concerns about vacuum piping equipment! Presenting examples of measures against degradation of centering due to plasma and heat.
As an effect of Aqua Plasma, we are publishing results of surface depth analysis by ESCA.
It has excellent properties such as heat resistance, non-stickiness, wear resistance, low friction, chemical resistance, and insulation that cannot be achieved with other resin coatings.
It has excellent properties such as heat resistance, non-stickiness, wear resistance, low friction, chemical resistance, and insulation that cannot be achieved with other resin coatings.
Mass production / NSG(SiO2)/PSG/BPSG deposition High-productivity / Continuous atmospheric pressure CVD (APCVD) system (for 12-inch wafers)
We provide vacuum deposition equipment and related maintenance services.

























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