Supports low to high viscosity resist! Equipment can be manufactured for any wafer size!
This is a high-viscosity dedicated spin coater that uniformly applies high-viscosity polyimide with a viscosity of around 10,000 cP. It also achieves material savings with a rotating cup-type chuck!
By using the wafer inversion unit, both sides of the wafer can be automatically coated!
Proposing the development and prototyping of functional thin film coatings. (It is possible to develop and prototype thin film formation even from small lots of rare liquid agents without purchasing coating equipment.)
This is a belt conveyor type track system spin coater. It offers high throughput while being capable of transporting any warped wafer!
We manufacture small, low-cost, and quick-delivery equipment suitable for research, prototype production, die, gravure, roll coat, and roll-to-roll applications! *Test coating services are also available!
A compact slit coater (die coater) that flexibly accommodates various coating conditions and materials, achieving high-precision coating uniformity.
Leave the technical services for semiconductor manufacturing equipment to us.
Thin film formation at room temperature and atmospheric pressure! Using inexpensive film materials! Immediate delivery campaign ongoing.
San-Yu Electronics, sputtering devices, vacuum deposition equipment, SEM/electron microscope-related equipment.

















































































































