We manufacture small, low-cost, and quick-delivery equipment suitable for research, prototype production, die, gravure, roll coat, and roll-to-roll applications! *Test coating services are also available!
Compatible with low to high viscosity resists! We can manufacture equipment for any wafer size, from small diameter to large diameter!
The full coating process proceeds in a completely sealed state! A CED coater utilizing the latest advanced technology.
By using the wafer inversion unit, both sides of the wafer can be automatically coated!
It can uniformly and well coat large substrates up to 430mm square! It can be applied according to the application, such as square, rectangular, or irregular shapes.
Supports low to high viscosity resist! Equipment can be manufactured for any wafer size!
Real-time information feedback! High reproducibility and minimal rotation error spin coater.
Thin layer coating possible! A coater that accommodates a wide range of coating speeds from low to high.
We can accommodate short delivery times and small lots. Support from experienced technicians. We can handle materials from 50mm square sheets to 700mm wide rolls.
Achieve reduced liquid application! Realize a minimum of 5cc with a single application. Lightweight tabletop compact type, main unit 50kg.
Multilayered throttle structure! A coater that achieves simultaneous coating from single layer to multiple layers.
Faithful to the origins of "monozukuri"! We have established a system that can consistently guarantee everything from equipment assembly and inspection to shipping.
A highly versatile and widely used type primarily intended for coating cushioning materials, building materials, and food plastics!
SIBOR coating prevents oxidation up to 1600 degrees. (This is a patented product developed by Planzé.)
This is a high-viscosity dedicated spin coater that uniformly applies high-viscosity polyimide with a viscosity of around 10,000 cP. It also achieves material savings with a rotating cup-type chuck!
This is a coater with minimal in-plane uniformity of the resist film and small differences in average film thickness between wafers. It supports low to high viscosity resist (up to 10,000 cP)!
We have a proven track record with a variety of chemical solutions! The reason for our low prices is that we handle everything in-house, from design to sales.
Effective in reducing polyimide and expensive high-viscosity resists! It is a rotary cup-type spin coater.
Spinner (spin coater) that adopts AC servo for consistently stable rotation accuracy.
Spray cooler developed for MEMS devices and various semiconductor research!
A slit coater with digitally variable coating width.
Supports work widths from 300 to 1500 mm! Single-sided and double-sided narrow applications.
For production equipment and research and development! Providing a series of processes in thin-film electronic component manufacturing!
Perovskite solar cell inkjet simple coating machine
Ultra-compact roll-to-roll coater with a film thickness uniformity of ±2% or less! Works with household power supply! Easy to introduce without the need for construction. *Demonstrations of coating are also available.
General processing such as gloss treatment and matte treatment is possible! Supports small paper sizes as well.
Functions as a compact production machine! A lab coating machine that supports corporate research and development.
Slot die coating without backup roll! FSD coater unaffected by precision or dirt.
High-precision coating is easily achievable! A micro bar coater with a simple structure that is easy to handle.
At Live Terra Technologies Co., Ltd., we offer a variety of rental equipment, including spin coaters manufactured by Active.
For industrial machinery manufacturing related to converting machines and more, contact us!
Embellished printing that resonates with customers' five senses the appeal of real products and services. Digital spot UV varnishing.
Customization according to experimental purposes is possible. Small RF sputtering device.
Compatible with Ni/Cr/W and more! Achieving high-precision control through software control.
Measures against foreign matter contamination on the manufacturing line! It reliably removes foreign substances from the surface of the base material!
The popularity of our device, the dip coater, is number one due to its wide range of variable speeds.
Contract manufacturing of 10mm□ to G8 substrates is possible. Custom orders for small lots are available. We cater to a variety of needs.
Precision coating pursuing uniformity of application Viscosity: several cp to 10,000 cp Substrate size: G8 size *Coating experiments available
Ultra-compact handheld excimer UV device Body weight: 3.8kg Dimensions: W320×D260×H180mm Demo unit available for loan
Experimental small slit coater ・Substrate size: 200mm ・Viscosity: several cps to 10,000 cps ・Film thickness: 0.5 to 100μm
We will propose the optimal combination of coating methods based on various coating conditions.
Roll coater for uniformly applying liquids from low viscosity to high viscosity.
Research and development, manual equipment for small lot production! Equipped with a resist coating mechanism equivalent to that of automatic machines, unlike tabletop types!
After spin coating BARC and other chemical solutions, it can be baked at a maximum of 400°C! Automatic resist coating device with high-temperature baking capability.
We are confident in applying high-viscosity photoresist! For 10,000 cP polyimide, the standard uniformity within the plane is within ±5%, with a proven record of within ±3%.
We can create a device that accommodates both the current wafer size and the wafer size you wish to use in the future (e.g., 2-4 inches, 6-8 inches, etc.).
This is a belt conveyor type track system spin coater. It offers high throughput while being capable of transporting any warped wafer!
Desktop manual type compatible with 300mm square glass substrates!
Target work: Applicable to 2"□ to 5"□ substrates or φ2" to φ5" substrates!
Ideal for semiconductor, MEMS, and sensor devices! Thin film coating equipment for research and development of photoresists and functional materials.
We contribute to early problem solving and decarbonization in the application of fuel cell and water-splitting catalyst inks through coating-related technologies and a rich database.
A coater that allows for sample prototyping with a small amount of coating solution and sheets, specifically for development purposes.
A wide range of equipment is available, including coating machines, laminating machines, printing machines, and special devices!
For experimental use in companies and university laboratories! A compact slit coater that accommodates various coating conditions and materials, achieving high precision in coating uniformity.
Achieving high-precision coating on a lab scale. Compatible with a variety of materials in the experimental and prototype stages, from low viscosity to high viscosity.
The CMX series is great news for those who had given up on web cleaners due to space constraints.
High-precision spray coater designed for developers for process development of various nano materials such as touch panels and fuel cells!
A 3D spray coater that can be applied to any 3D shape. It reads the substrate shape with a laser scanner and automatically generates the application path.
Supports widths up to 600mm! A web coater that forms a film through sputtering.
We propose equipment that balances suitable cost and quality! Featuring production coaters and micro gravure units, among others.
Thin films can be easily molded using the micro-gravure method! Freely customizable with a variety of options.
Quick response to on-site confirmations! Introducing examples of responses to issues discovered during regular inspections.
Free circular coating with a unique slit die! A new product has arrived to replace the Spiral Coater!
This is a coating machine with a heat cover that can dry thin films at a maximum temperature of 100°C after coating.
It is a large-size coating machine designed to apply a specific film thickness.
This is an evaluation test cell that is easy to assemble without the need for a riveting machine.
It is a charging and discharging device for testing small-sized batteries such as coin cells and cylindrical cells.
On our operated site "Battery Space," we develop, design, manufacture, and sell batteries and battery packs tailored to your needs.
A jacket roll that achieves a temperature distribution within ±0.5℃ at a roll surface temperature of 250℃.
Coating equipment for manufacturing functional films for Flexible Displays.
Preprocessing of PET Film & Adjustment of Film's Thermal Shrinkage & Continuous Crystallization of ITO Film
Coating of thin films below 10μm! A coater capable of complex arbitrary pattern coating.
Excellent thin film coating performance! A coater with outstanding reproducibility due to high-precision design.
Excellent thin film coating performance! A coater that requires no skilled operators and is easy to operate.
Ideal for research and experimental purposes! A high-precision coating machine with selectable drying methods.
Improved maintainability! High-precision coater compatible with cassette change mechanism.
Leave the technical services for semiconductor manufacturing equipment to us.
Not only can we achieve significant cost reductions by utilizing used equipment, but we also offer affordable support for after-sales service, maintenance, and specification changes after installation.
Coating materials can be reduced by up to 1/30! Film formation can be carried out efficiently and at minimal cost!
Minimizes scattering with a unique spiral structure, achieving sharp edges and a masking-free coating.
The design of the coating die can be done using Excel spreadsheets.
We would like to introduce the technical advisory services provided by the D&T Lab.
A simple pursuit of a coat; it can be easily operated with just one button.
Optimal for sample preparation for SEM! It is the most compact coater in the series.
Ideal for sample preparation for scanning electron microscopy! It eliminates the hassle of sample preparation.
You can attach three types of targets simultaneously! It is possible to create a multilayer film.
San-Yu Electronics, sputtering devices, vacuum deposition equipment, SEM/electron microscope-related equipment.
Small film-forming device! It can simultaneously accommodate three types of targets.
Achieving a very low offset voltage through precise control of ion balance!