It enables extremely precise flow control, achieving a very low pulsation and smooth flow of liquid.
This is a high-viscosity dedicated spin coater that uniformly applies high-viscosity polyimide with a viscosity of around 10,000 cP. It also achieves material savings with a rotating cup-type chuck!
A method of micro-particle layering (spray coating method) has been proposed that enables the application of thin films of photoresist to devices with difficult-to-coat uneven surfaces.
Leave everything from the production of all types of rolls to surface treatment to us!
We manufacture small, low-cost, and quick-delivery equipment suitable for research, prototype production, die, gravure, roll coat, and roll-to-roll applications! *Test coating services are also available!
San-Yu Electronics, sputtering devices, vacuum deposition equipment, SEM/electron microscope-related equipment.
A slim and high-performance syringe pump that simplifies the design of flow path systems and their integration into devices.
By using the wafer inversion unit, both sides of the wafer can be automatically coated!
This is a belt conveyor type track system spin coater. It offers high throughput while being capable of transporting any warped wafer!
Supports low to high viscosity resist! Equipment can be manufactured for any wafer size!
We propose a particle layering method (spray coating method) that enables uniform ultra-thin film application to devices where large-area and thin film coating is difficult.
Ideal for prototypes! Compatible with small sizes! We provide suitable coaters with a variety of application methods in a short delivery time. We also showcase our production achievements.









































































































