List of Vacuum pump products

Reduce the workload from handling heavy objects! Here are five case studies that solved customer challenges! We are also accepting free consultations and tests tailored to your work!

• Other conveying machines

Presentation of explanatory materials on JIS and ISO standards. We propose suitable safety barriers from a rich product series! Free rental of demo kits.

• Other safety and hygiene products

Industry-leading basic performance

• Vacuum pump

Industry-leading basic performance

• Vacuum pump

Top-class basic performance in the industry.

• Vacuum pump

Industry-leading basic performance such as compression ratio, achieved vacuum level, and gas flow rate.

• Vacuum pump

Industry-leading basic performance

• Vacuum pump

Industry-leading basic performance

• Vacuum pump

Magnetic bearing turbo molecular pump compatible with a wide range of exhaust from low to ultra-high vacuum.

• Other pumps
• Vacuum Equipment
• Vacuum pump

Wide-range exhaust: Magnetic bearing turbo molecular pump compatible with exhaust from low to ultra-high vacuum.

• Other pumps
• Vacuum Equipment
• Vacuum pump

Magnetic bearing turbo molecular pump compatible with a wide range of exhaust from low to ultra-high vacuum.

• Other pumps
• Vacuum Equipment
• Vacuum pump

Significantly reduced the deposition of reaction products generated in the process onto the pump through unique generation product countermeasures!

• Other pumps
• Vacuum Equipment
• Vacuum pump

A low-vibration pump that suppresses the vibration value to below 1nm. By installing an anti-vibration damper, it can be further reduced by one order of magnitude (0.1nm)!

• Other pumps
• Vacuum Equipment
• Vacuum pump

Wide-range exhaust: It supports exhaust from low to ultra-high vacuum across a wide range.

• Other pumps
• Vacuum Equipment
• Vacuum pump

Wide-range exhaust: Magnetic bearing turbo molecular pump compatible with exhaust from low to ultra-high vacuum.

• Other pumps
• Vacuum Equipment
• Vacuum pump

Ultra-high vacuum specification turbo molecular pump

• Other pumps
• Vacuum Equipment
• Vacuum pump

High flow rate turbo molecular pump compatible with exhaust and low vibration.

• Other pumps
• Vacuum Equipment
• Vacuum pump

Turbo molecular pump developed for use in radiation environments!

• Other pumps
• Vacuum Equipment
• Vacuum pump

Equipped with user flexibility, consistent performance anywhere in the world.

• Vacuum pump

We provide solutions for demanding chemical process applications with a combination of vacuum pumps and vacuum solutions that have a proven track record overseas.

• Other pumps
• Vacuum pump
• Positive Displacement Pump

We will introduce vacuum solutions related to the manufacturing process of lithium batteries.

• Vacuum pump
• Other pumps
• Positive Displacement Pump

Edwards has extensive experience in many thin film processes, including vacuum deposition, sputtering, CVD, and plasma polymerization.

• Other pumps
• Vacuum pump
• Positive Displacement Pump

We would like to introduce Edwards' water-sealed pumps, which have a proven track record of implementation worldwide.

• Positive Displacement Pump
• Other pumps
• Vacuum pump

The installation position is flexible! A compact-sized combined molecular pump with an integrated controller!

• Other pumps
• Vacuum Equipment
• Vacuum pump

A turbo molecular pump that is strong against atmospheric entry and allows for flexible mounting positions.

• Other pumps
• Vacuum Equipment
• Vacuum pump

Versatile installation posture grease-lubricated bearing type turbo molecular pump

• Other pumps
• Vacuum Equipment
• Vacuum pump

Versatile installation posture grease-lubricated bearing type turbo molecular pump

• Other pumps
• Vacuum Equipment
• Vacuum pump

Versatile installation posture grease-lubricated bearing type turbo molecular pump

• Other pumps
• Vacuum Equipment
• Vacuum pump

Versatile mounting posture integrated power supply turbo molecular pump

• Other pumps
• Vacuum Equipment
• Vacuum pump

Versatile installation posture integrated power supply turbo molecular pump

• Other pumps
• Vacuum Equipment
• Vacuum pump

Versatile installation posture grease-lubricated bearing type turbo molecular pump

• Other pumps
• Vacuum Equipment
• Vacuum pump

Versatile installation posture grease-lubricated bearing type turbo molecular pump

• Other pumps
• Vacuum Equipment
• Vacuum pump