List of CVD Equipment products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

Bernoulli chuck for non-contact transport of wafer chips, high-temperature wafers, lenses, and micro-objects.

• Other semiconductor manufacturing equipment
• Other conveying machines
• CVD Equipment

Custom-made vertical gas jet non-contact transport device "Float Chuck SAC Type"

• Other semiconductors
• CVD Equipment
• LCD display

Heat-resistant tweezers for non-contact removal of wafers from a high-temperature susceptor.

• CVD Equipment
• Other machine elements
• Laser marker

The compound semiconductor wafers (GaAs, InP, GaP) are transported to a designated position non-contactly through manual operation.

• CVD Equipment
• Plasma surface treatment equipment
• Heating device

It is a device with numerous achievements in mass production of power devices, LEDs, MEMS, etc.

• CVD Equipment

For repairs of vacuum device peripheral equipment and valves, leave it to us! We will solve the problems of "high prices and long lead times" associated with manufacturer maintenance.

• CVD Equipment
• Etching Equipment
• LCD display

Leave the maintenance and servicing of semiconductor, LCD, and solar cell manufacturing equipment to us.

• Other semiconductor manufacturing equipment
• CVD Equipment
• Etching Equipment

Slit valve seal

• CVD Equipment
• Etching Equipment
• Other semiconductor manufacturing equipment

Adhesion prevention seal

• Oxidation/Diffusion Device
• CVD Equipment
• Pneumatic Equipment

Perfluoroelastomer!! It is a perfluoroelastomer with excellent heat resistance and chemical resistance. Our company is the official distributor of Kalrez in Japan.

• Oxidation/Diffusion Device
• CVD Equipment
• Etching Equipment

Fluororubber with excellent long-term durability!! It can withstand high temperatures (200-220°C) compared to conventional fluororubber.

• Oxidation/Diffusion Device
• CVD Equipment
• Vacuum Equipment

High-performance metal seals!! Ideal for various vacuum equipment and semiconductor manufacturing devices!

• Oxidation/Diffusion Device
• CVD Equipment
• Sealing

Energy-saving environment and safety system engineering in a wide range of fields handled by trading companies!

• CVD Equipment

We provide vacuum deposition equipment and related maintenance services.

• Evaporation Equipment
• CVD Equipment
• Sputtering Equipment

Heater module for manufacturing a single wafer in the electronics and semiconductor industry!

• Other heaters
• CVD Equipment
• Annealing furnace