Semiconductor Manufacturing Equipmentの製品一覧

Reduce the workload from handling heavy objects! Here are five case studies that solved customer challenges! We are also accepting free consultations and tests tailored to your work!

• Other conveying machines

Strong cold wind from room temperature to -13°C! Depending on the usage environment, you can choose between the combo type or the separate type!

• Cooling system

You can freely choose from the plasma cleaning chamber, organic deposition chamber, electrode deposition chamber, sealing chamber, and more!

• Evaporation Equipment

Maximum substrate heating temperature of 1000℃! Reduces element loss specific to the substrate surface heating process!

• Heating device
• Annealing furnace

It is a versatile and compact device that enables etching, ashing, and ion cleaning!

• Etching Equipment
• Ashing device

Demo units available for loan! Ideal for spin drying silicon wafers, masks, and film substrates!

• Other clean room equipment and facilities
• Other semiconductor manufacturing equipment

Demo units available for loan! This is a cassette-type batch cleaning device that can accommodate up to Φ300.

• Other semiconductor manufacturing equipment

Demo units available for loan! This is a sheet-type cleaning device that can accommodate up to Φ300.

• Other semiconductor manufacturing equipment

Demo units available for loan! This is a device that performs a series of cleaning and etching processes, including pure water treatment and drying.

• Etching Equipment

【Demo unit available for loan!】A semi-automatic device that transports wafers from the processing tank to the rinse tank via an arc.

• Etching Equipment

Demo units available for loan! Wafers are loaded and processed in a dedicated barrel.

• Etching Equipment

Demo units available for loan! After pre-processing with a cassette, automatic etching is performed with a dedicated barrel.

• Etching Equipment

Demo units available for loan! A clean filter is installed at the top to ensure cleanliness within the chamber.

• Other semiconductor manufacturing equipment

Demo units available for loan! We offer a variety of options including batch type and scrub cleaning.

• Other semiconductor manufacturing equipment

Demo units available for loan! We will accommodate according to the shape of the quartz tube, so please consult with us.

• Other semiconductor manufacturing equipment

Possible at 10,000 rpm with a compact small option!

• Coater
• Other semiconductor manufacturing equipment

Target work: Applicable to 2"□ to 5"□ substrates or φ2" to φ5" substrates!

• Coater
• Other semiconductor manufacturing equipment

Technology has been incorporated to achieve a uniform high-precision coating!

• Coater
• Other semiconductor manufacturing equipment

Automatic and manual operation will perform developing, rinsing, washing, and spin drying!

• Coater
• Other semiconductor manufacturing equipment

Install a 3-axis multi-joint clean robot at the center of the device for wafer transport!

• Etching Equipment

Install a 3-axis multi-joint clean robot at the center of the device for substrate transport!

• Other semiconductor manufacturing equipment

Customization is okay! We offer quick responses and after-sales support unique to manufacturers.

• Other semiconductor manufacturing equipment

Coating is possible up to a 3L container! It contributes to reducing logistics costs through lightweight containers.

• CVD Equipment

Achieving a substrate temperature of 900℃! Equipped with a 3-axis mechanism on the substrate stage to realize a uniform film thickness distribution.

• Sputtering Equipment

A simple structure with high versatility! It adopts a unique plasma control method.

• CVD Equipment

A high-temperature process of up to 900°C is possible! This product is suitable for single crystal film formation due to the epitaxial promotion mechanism.

• Evaporation Equipment

For semiconductors, MEMS, electronic components, etc.! High-speed and stable continuous film deposition is possible from single crystal epitaxial buffer layers to piezoelectric films!

• Sputtering Equipment

For semiconductors, MEMS, electronic components, etc.! High-speed and stable continuous film deposition is possible from single crystal epitaxial buffer layers to piezoelectric films!

• Sputtering Equipment

Space-saving and large capacity! Custom-made options are also available to meet various requests!

• Sputtering Equipment

Demo units available for loan! Various designs can also be produced according to user specifications!

• Other semiconductor manufacturing equipment

【Demo unit available for loan!】Wafer High-Pressure Jet Scrubber HPC-8654-H

• Wafer processing/polishing equipment
• Wafer

Demo units available for loan! We also create various designs tailored to user specifications.

• Other semiconductor manufacturing equipment

Demo units available for loan! We offer cleaning methods tailored to various processes (hoop compatibility available).

• Other semiconductor manufacturing equipment

【Demo units available for rental!】Both the loader and unloader can be operated by one person on the same side.

• Other semiconductor manufacturing equipment

【Demo units available for rental!】Both the loader and unloader can be operated by one person on the same side.

• Other semiconductor manufacturing equipment
• Coater

Demo units available for loan! Automatic N2 replacement, solvent gas introduction, vacuum state, etc.

• Other semiconductor manufacturing equipment
• Coater

Demo units available for loan! You can process several sheets at once.

• Other semiconductor manufacturing equipment

Demo units available for loan! This is a tabletop manual type compatible with 300mm square glass substrates.

• Other semiconductor manufacturing equipment
• Coater

Demo units available for loan! High-quality drying equipment with a single carrier (25 sheets or 13 sheets) processing type.

• Other semiconductor manufacturing equipment

Demo units available for loan! Equipped with ULP or HEPA filters in the lid, significantly improving cleanliness.

• Other semiconductor manufacturing equipment

Demo units available for loan! The tabletop model is lightweight, making it easy to move.

• Other semiconductor manufacturing equipment

【Demo units available for loan!】For small-scale processing of silicon or compound semiconductor wafers. Compact tabletop model.

• Other semiconductor manufacturing equipment

Demo units available for loan! It includes brush cleaning and fine jet cleaning.

• Other semiconductor manufacturing equipment

Demo units available for loan! It includes brush cleaning and fine jet cleaning.

• Other semiconductor manufacturing equipment

Demo units available for loan! It includes brush cleaning and fine jet cleaning.

• Other semiconductor manufacturing equipment

Tabletop manual type compatible with φ2" to φ6" substrates! With dispenser.

• Coater
• Other semiconductor manufacturing equipment

Desktop manual type compatible with 300mm square glass substrates!

• Coater
• Other semiconductor manufacturing equipment