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Furnace(CVD) - List of Manufacturers, Suppliers, Companies and Products

Last Updated: Aggregation Period:Sep 17, 2025~Oct 14, 2025
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Furnace Product List

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Rotating CVD furnace

Uniform CVD carbon coating on the surface of Si-based and graphite-based anode materials for lithium-ion batteries.

A device that enables the CVD process by rotating the core tube and stirring the powder sample. The stirring action allows for uniform CVD treatment.

  • Other processing machines

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Vacuum Sintering Furnace FVS-I Induction Heating Type

Capable of handling high temperatures up to 3200℃! Can be introduced into graphite furnaces, CVD furnaces, and more.

The "FVS-I Induction Heating Type" is an industrial heating device that uses electricity as its energy source. It can handle high temperatures of up to 3200°C. The tank shape is round, with a proven effective internal dimension of φ800×1000H (mm). It can accommodate various thermal processing methods required in different industries, such as melting, sintering, firing, and hot pressing, and can be introduced into graphite furnaces, CVD furnaces, and more. 【Features】 ■ Capable of handling high temperatures up to 3200°C ■ Proven effective internal dimension of φ800×1000H (mm) in a round tank shape ■ Can accommodate various thermal processing methods required in different industries ■ Responsible for the entire process from design, manufacturing, installation, adjustment, trial operation, to maintenance in-house *For more details, please refer to the PDF document or feel free to contact us.

  • Incinerators and incinerators

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Horizontal Experimental Tube Electric Furnace FT-201P

Place it on the table and experiment immediately! It can be used as a small vacuum furnace! By connecting gas systems and vacuum devices, you can complete a CVD system.

【Features】 - Completion of the CVD system by connecting gas systems (optional) and vacuum devices (optional) - Standard equipped with a computer communication-compatible program controller with 9 patterns and 9 steps (16×16 programmable as an option) - Possible to link to a computer using dedicated MPCS (optional) - MAX 1200℃ (when using R:t/c) - Power supply is A.C. 100V 1.3Kw energy-saving type - Comes standard with a Bourdon vacuum gauge

  • Electric furnace
  • Heating device
  • Ceramics

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Chubu Nippon Ro Co., Ltd. Company Profile

We are constantly pursuing new technologies and striving to create products of a higher level!

Since its establishment, our company has grown as a specialized manufacturer of industrial furnaces, overcoming numerous challenges such as the oil shock, the burst of the bubble economy, and the Lehman shock, remaining dedicated to industrial furnaces to this day. In 2015, we built a new heat treatment plant, transforming it into a "showcase factory" with the theme of incorporating IoT environments to enhance productivity and evolve into a real-time visualized factory. Our matured vacuum furnace manufacturing technology and accumulated processing know-how have gained immense trust, providing services to hundreds of users. 【Business Activities】 ■ Design, manufacturing, and construction of vacuum furnaces, electric furnaces, combustion furnaces, and ancillary machinery and equipment, combustion equipment, and control devices. ■ Contract processing for metal heat treatment and CVD coating. *For more details, please refer to the PDF document or feel free to contact us.

  • Electric furnace
  • Industrial Furnace
  • Other inspection equipment and devices

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Special furnace [special gas treatment device]

Marusho Electric Company handles "Special Furnace [Special Gas Treatment Device]."

Electric furnace and atmosphere furnace / Experts in heating and heat treatment technology This is an introduction to the "Special Furnace [Special Gas Treatment Equipment]" handled by Marusho Electric Co., Ltd. Marusho Electric Co., Ltd.'s technology is applicable to food baking and preservation treatment, curing for printing and films, continuous annealing for wire materials and CVD, high-precision atmosphere treatment for superconductors, glass melting for optical lenses, pressing and annealing, rare heaters for glass float, preform furnaces for synthetic quartz, brazing, bright annealing, debinding and sintering for ceramics and sintered metals, ash melting furnaces, main burner test furnaces, single crystal pulling furnaces, titanium high-purity devices, gas heating devices, and more, catering to a wide range of industries. With heater design technology, insulation design technology, vacuum technology, gas atmosphere control, dew point and oxygen concentration technology, and various heating experiences, we handle everything from small experimental devices to production equipment across a wide range of fields. For more details, please contact us.

  • Electric furnace

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Special furnace [Aluminum melting and holding device]

Marusho Electric Co. handles the "Special Furnace [Aluminum Melting and Holding Device]."

Electric Furnace / Atmosphere Furnace / Expert Company in Heating and Heat Treatment Technology This is an introduction to the 'Special Furnace [Aluminum Melting and Holding Device]' handled by Marusho Electric Co., Ltd. ■□■Features■□■ ■Melting Furnace Operating/Maximum Temperature: 750℃/950℃ Marusho Electric Co., Ltd.'s technology is applicable in various fields such as food baking and preservation treatment, curing for printing and films, continuous annealing for wire materials and CVD, high-precision atmosphere processing for superconductors, glass melting for optical lenses, pressing and annealing, rare heaters for glass float, preform furnaces for synthetic quartz, brazing, bright annealing, debinding and sintering for ceramics and sintered metals, ash melting furnaces, main fuel test furnaces, single crystal pulling furnaces, high-purity titanium processing equipment, gas heating devices, and more, catering to a wide range of industries. With heater design technology, insulation design technology, vacuum technology, gas atmosphere control, dew point and oxygen concentration technology, and various heating experiences, we handle everything from small experimental devices to production equipment across a wide range of fields. ■For more details, please contact us.

  • Electric furnace

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Products Guide: "Ultra-High Temperature Experimental Furnace Product Guide"

Introducing the Thermocera Japan research and development experimental furnace. It can be utilized for material development such as fuel cells and ceramics, as well as ultra-high temperature experiments involving graphite and more.

We introduce various experimental devices for research and development fields. ◉ Mini-BENCH Ultra-High Temperature Tabletop Furnace Max 2000℃ ◉ Mini-BENCH-prism Semi-Automatic Ultra-High Temperature Furnace Max 2000℃ ◉ MiniLab-WCF Ultra-High Temperature Wafer Firing Furnace Max 2000℃ In addition, we design and manufacture custom high-temperature furnaces for research and development. Others.

  • Electric furnace

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Special Furnace [Atmosphere Press Furnace]

Special furnace with a maximum press pressure of 14 MPa (atmospheric pressure furnace)

Expert company in electric furnaces and atmosphere furnaces / heating and heat treatment technology. This is an introduction to the "Special Furnace [Atmosphere Press Furnace]" handled by Marusho Electric Co., Ltd. ■□■Features■□■ ■Operating/Maximum Temperature: 900℃/1000℃ ■Press Pressure: Up to 14MPa ■For more details, please contact us.

  • Electric furnace

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Thermal System Business

Thermal system business providing various industrial heating systems powered by electricity.

We would like to introduce Fujidenpa Kogyo Co., Ltd.'s "Thermal System Business." Starting as a manufacturer of induction heating equipment, we have flexibly responded to changes in industrial structures. We have expanded our variety to include melting furnaces for metals such as steel, firing furnaces for fine ceramics, silicon melting, various surface treatments like CVD, and heat treatment equipment. By understanding the diverse needs of customers in various industries that require thermal processing, we provide suitable, systematized solutions ranging from high temperatures to low temperatures. 【Features】 ■ Flexibly responds to changes in industrial structures ■ Expanding variety ■ Understanding the diverse needs of customers in various industries that require thermal processing ■ Providing suitable, systematized solutions from high temperatures to low temperatures *For more details, please refer to the PDF materials or feel free to contact us.

  • Incinerators and incinerators

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Vertical Mini-Batch Furnace "VF-3000"

Vertical furnace with automatic transport compatible with Φ200mm wafers, usable from R&D to mass production.

The "VF-3000" is a mini-batch vertical furnace that achieves low costs suitable for downstream users. It is capable of processing mini-batches of 50 to 75 wafers and accommodates a wide range of wafer sizes up to Φ200mm. It allows for ultra-high temperature processing, making it suitable for power device manufacturing and VCSEL vertical thermal processing systems. 【Features】 - Capable of selecting mini-batch processing of 50 to 75 wafers, suitable for both R&D and mass production lines - Accommodates a wide range of wafer sizes up to Φ200mm - Maximum of 4 cassette stockers - Equipped with LGO heaters, demonstrating excellent temperature characteristics from low to medium-high temperatures - High-speed wafer transport using a single wafer handling robot *For more details, please refer to the PDF document or feel free to contact us.

  • Heating device

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◆◇◆ Small Vertical Experimental Furnace for R&D TVF-110 ◆◇◆

Low-cost minimum necessary configuration (manual control) applicable as tubular furnace, diffusion furnace, and thermal CVD.

Manual lift vertical experimental furnace for small substrates from small samples to 3-inch wafers. A low-cost version of a vertical furnace ideal for basic experiments in university and corporate research labs. 【Applications】 ◉ Heat treatment for semiconductors, solar cells, fuel cells, electronic substrates, etc. ◉ Basic experiments: simple heat treatment experiments such as vertical tubular furnaces, oxidation diffusion furnaces, LPCVD, etc.

  • Oxidation/Diffusion Device

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1200℃ rotary tubular furnace 'OSK 93TI152'

The heating length is 300mm × 3 zones! It rotates smoothly and stably even at the minimum rotation speed of 0.7 rpm.

The "OSK 93TI152" is a rotary kiln suitable for laboratory and small-scale production, widely used in processes such as biomass, ceramics, cement, lithium batteries, CVD, sintering, and pyrolysis. It consists of a raw material feeding section, a rotating mechanism, an electric furnace, and a recovery section, and can operate continuously. It is equipped with a 1/4" gas in/out port and a KF25 standard port for tar gas discharge. It has three built-in temperature controllers that can memorize heating programs (2 programs with a total of 30 segments). 【Features】 ■ Suitable for operation at temperatures below 1000°C ■ Equipped with a quartz observation port for easy observation of the operating conditions inside the core tube ■ The core tube can be easily replaced ■ Perfect gas sealing structure compatible with vacuum processes ■ Equipped with an overheating prevention device / CE certified ■ When used for pyrolysis, it can be connected to a cold trap at the rear end *For more details, please download the PDF or feel free to contact us.

  • Electric furnace

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1200℃ rotary tubular furnace 'OSK 93TI151'

Heating length is 300mm × 2 zones! Equipped with overheat prevention device / CE certified product.

The "OSK 93TI151" is a rotary kiln suitable for laboratory and small-scale production, widely used in processes such as biomass, ceramics, cement, lithium batteries, CVD, sintering, and pyrolysis. It consists of a raw material feeding section, a rotating mechanism, an electric furnace, and a recovery section, and can operate continuously. It is equipped with a quartz observation port that makes it easy to observe the operating conditions throughout the entire inner tube of the furnace. It has two built-in temperature controllers capable of storing heating programs (2 programs with 30 segments each). 【Features】 ■ Suitable for operation at temperatures below 1000°C ■ Equipped with 1/4" gas in/out ports and a KF25 standard port for tar gas discharge ■ The inner tube can be easily replaced ■ Perfect gas sealing structure compatible with vacuum processes ■ Smooth and stable rotation even at the minimum speed (0.7 rpm) ■ When used for pyrolysis, it can be connected to a cold trap at the rear end *For more details, please download the PDF or feel free to contact us.

  • Electric furnace

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High-temperature tubular atmosphere electric furnace FT-201P-1600

Place it on the table and experiment immediately! It can be used as a high-temperature small vacuum furnace!

【Features】 - By connecting gas systems (optional) and vacuum devices (optional), a high-temperature vacuum tubular atmosphere furnace is completed. - A computer communication-compatible program controller with 16 patterns and 16 steps is standard equipment (32×32 programmable as an option). - Can be linked to a computer using a dedicated MPCS (optional). - Power supply is A.C. 200V 1P 4Kw energy-saving type. - Comes standard with a Bourdon vacuum gauge.

  • Electric furnace
  • Heating device
  • Ceramics

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300mm wafer compatible large batch vertical furnace 'VF-5900'

Up to 16 FOUP stockers! Large batch vertical furnace compatible with 300mm wafers.

The "VF-5900" is a flagship model of a large batch vertical furnace equipped with a high-capacity stocker, achieving short takt times. It can process up to 100 pieces of 300mm/12-inch wafers and 16 FOUPs at once. The adoption of LGO heaters provides excellent temperature characteristics from low to medium-high temperatures. It is suitable for thermal processing of materials other than silicon wafers, such as IGBTs, polyimides, and thin wafers. 【Features】 ■ Large batch processing, capable of handling up to 100 pieces at once ■ Stocker for up to 16 FOUPs ■ Excellent temperature characteristics from low to medium-high temperatures due to LGO heater installation ■ High-speed wafer transport with a single wafer + 5-piece batch transport robot ■ Equipped with a user-friendly high-function control system *For more details, please refer to the PDF document or feel free to contact us.

  • Heating device

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