Last Updated： Aggregation Period:Feb 04, 2026～Mar 03, 2026
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1～28 item / All 28 items
Uniform CVD carbon coating on the surface of Si-based and graphite-based anode materials for lithium-ion batteries.
A device that enables the CVD process by rotating the core tube and stirring the powder sample. The stirring action allows for uniform CVD treatment.
Capable of handling high temperatures up to 3200℃! Can be introduced into graphite furnaces, CVD furnaces, and more.
The "FVS-I Induction Heating Type" is an industrial heating device that uses electricity as its energy source. It can handle high temperatures of up to 3200°C. The tank shape is round, with a proven effective internal dimension of φ800×1000H (mm). It can accommodate various thermal processing methods required in different industries, such as melting, sintering, firing, and hot pressing, and can be introduced into graphite furnaces, CVD furnaces, and more. 【Features】 ■ Capable of handling high temperatures up to 3200°C ■ Proven effective internal dimension of φ800×1000H (mm) in a round tank shape ■ Can accommodate various thermal processing methods required in different industries ■ Responsible for the entire process from design, manufacturing, installation, adjustment, trial operation, to maintenance in-house *For more details, please refer to the PDF document or feel free to contact us.
Place it on the table and experiment immediately! It can be used as a small vacuum furnace! By connecting gas systems and vacuum devices, you can complete a CVD system.
【Features】 - Completion of the CVD system by connecting gas systems (optional) and vacuum devices (optional) - Standard equipped with a computer communication-compatible program controller with 9 patterns and 9 steps (16×16 programmable as an option) - Possible to link to a computer using dedicated MPCS (optional) - MAX 1200℃ (when using R:t/c) - Power supply is A.C. 100V 1.3Kw energy-saving type - Comes standard with a Bourdon vacuum gauge
We are constantly pursuing new technologies and striving to create products of a higher level!
Since its establishment, our company has grown as a specialized manufacturer of industrial furnaces, overcoming numerous challenges such as the oil shock, the burst of the bubble economy, and the Lehman shock, remaining dedicated to industrial furnaces to this day. In 2015, we built a new heat treatment plant, transforming it into a "showcase factory" with the theme of incorporating IoT environments to enhance productivity and evolve into a real-time visualized factory. Our matured vacuum furnace manufacturing technology and accumulated processing know-how have gained immense trust, providing services to hundreds of users. 【Business Activities】 ■ Design, manufacturing, and construction of vacuum furnaces, electric furnaces, combustion furnaces, and ancillary machinery and equipment, combustion equipment, and control devices. ■ Contract processing for metal heat treatment and CVD coating. *For more details, please refer to the PDF document or feel free to contact us.
![Special furnace [special gas treatment device]](https://image.mono.ipros.com/public/product/image/484/68420024/IPROS_11073796513559108000.jpg?w=280&h=280)
Marusho Electric Company handles "Special Furnace [Special Gas Treatment Device]."
Electric furnace and atmosphere furnace / Experts in heating and heat treatment technology This is an introduction to the "Special Furnace [Special Gas Treatment Equipment]" handled by Marusho Electric Co., Ltd. Marusho Electric Co., Ltd.'s technology is applicable to food baking and preservation treatment, curing for printing and films, continuous annealing for wire materials and CVD, high-precision atmosphere treatment for superconductors, glass melting for optical lenses, pressing and annealing, rare heaters for glass float, preform furnaces for synthetic quartz, brazing, bright annealing, debinding and sintering for ceramics and sintered metals, ash melting furnaces, main burner test furnaces, single crystal pulling furnaces, titanium high-purity devices, gas heating devices, and more, catering to a wide range of industries. With heater design technology, insulation design technology, vacuum technology, gas atmosphere control, dew point and oxygen concentration technology, and various heating experiences, we handle everything from small experimental devices to production equipment across a wide range of fields. For more details, please contact us.
![Special furnace [Aluminum melting and holding device]](https://image.mono.ipros.com/public/product/image/b3e/68420023/IPROS_14544285923749474000.jpg?w=280&h=280)
Marusho Electric Co. handles the "Special Furnace [Aluminum Melting and Holding Device]."
Electric Furnace / Atmosphere Furnace / Expert Company in Heating and Heat Treatment Technology This is an introduction to the 'Special Furnace [Aluminum Melting and Holding Device]' handled by Marusho Electric Co., Ltd. ■□■Features■□■ ■Melting Furnace Operating/Maximum Temperature: 750℃/950℃ Marusho Electric Co., Ltd.'s technology is applicable in various fields such as food baking and preservation treatment, curing for printing and films, continuous annealing for wire materials and CVD, high-precision atmosphere processing for superconductors, glass melting for optical lenses, pressing and annealing, rare heaters for glass float, preform furnaces for synthetic quartz, brazing, bright annealing, debinding and sintering for ceramics and sintered metals, ash melting furnaces, main fuel test furnaces, single crystal pulling furnaces, high-purity titanium processing equipment, gas heating devices, and more, catering to a wide range of industries. With heater design technology, insulation design technology, vacuum technology, gas atmosphere control, dew point and oxygen concentration technology, and various heating experiences, we handle everything from small experimental devices to production equipment across a wide range of fields. ■For more details, please contact us.
![Special Furnace [Atmosphere Press Furnace]](https://image.mono.ipros.com/public/product/image/db3/68420022/IPROS_17215877793930359000.jpg?w=280&h=280)
Special furnace with a maximum press pressure of 14 MPa (atmospheric pressure furnace)
Expert company in electric furnaces and atmosphere furnaces / heating and heat treatment technology. This is an introduction to the "Special Furnace [Atmosphere Press Furnace]" handled by Marusho Electric Co., Ltd. ■□■Features■□■ ■Operating/Maximum Temperature: 900℃/1000℃ ■Press Pressure: Up to 14MPa ■For more details, please contact us.
Introducing the Thermocera Japan research and development experimental furnace. It can be utilized for material development such as fuel cells and ceramics, as well as ultra-high temperature experiments involving graphite and more.
We introduce various experimental devices for research and development fields. ◉ Mini-BENCH Ultra-High Temperature Tabletop Furnace Max 2000℃ ◉ Mini-BENCH-prism Semi-Automatic Ultra-High Temperature Furnace Max 2000℃ ◉ MiniLab-WCF Ultra-High Temperature Wafer Firing Furnace Max 2000℃ In addition, we design and manufacture custom high-temperature furnaces for research and development. Others.
Thermal system business providing various industrial heating systems powered by electricity.
We would like to introduce Fujidenpa Kogyo Co., Ltd.'s "Thermal System Business." Starting as a manufacturer of induction heating equipment, we have flexibly responded to changes in industrial structures. We have expanded our variety to include melting furnaces for metals such as steel, firing furnaces for fine ceramics, silicon melting, various surface treatments like CVD, and heat treatment equipment. By understanding the diverse needs of customers in various industries that require thermal processing, we provide suitable, systematized solutions ranging from high temperatures to low temperatures. 【Features】 ■ Flexibly responds to changes in industrial structures ■ Expanding variety ■ Understanding the diverse needs of customers in various industries that require thermal processing ■ Providing suitable, systematized solutions from high temperatures to low temperatures *For more details, please refer to the PDF materials or feel free to contact us.
Low-cost minimum necessary configuration (manual control) applicable as tubular furnace, diffusion furnace, and thermal CVD.
Manual lift vertical experimental furnace for small substrates from small samples to 3-inch wafers. A low-cost version of a vertical furnace ideal for basic experiments in university and corporate research labs. 【Applications】 ◉ Heat treatment for semiconductors, solar cells, fuel cells, electronic substrates, etc. ◉ Basic experiments: simple heat treatment experiments such as vertical tubular furnaces, oxidation diffusion furnaces, LPCVD, etc.
Vertical furnace with automatic transport compatible with Φ200mm wafers, usable from R&D to mass production.
The "VF-3000" is a mini-batch vertical furnace that achieves low costs suitable for downstream users. It is capable of processing mini-batches of 50 to 75 wafers and accommodates a wide range of wafer sizes up to Φ200mm. It allows for ultra-high temperature processing, making it suitable for power device manufacturing and VCSEL vertical thermal processing systems. 【Features】 - Capable of selecting mini-batch processing of 50 to 75 wafers, suitable for both R&D and mass production lines - Accommodates a wide range of wafer sizes up to Φ200mm - Maximum of 4 cassette stockers - Equipped with LGO heaters, demonstrating excellent temperature characteristics from low to medium-high temperatures - High-speed wafer transport using a single wafer handling robot *For more details, please refer to the PDF document or feel free to contact us.
Place it on the table and experiment immediately! It can be used as a high-temperature small vacuum furnace!
【Features】 - By connecting gas systems (optional) and vacuum devices (optional), a high-temperature vacuum tubular atmosphere furnace is completed. - A computer communication-compatible program controller with 16 patterns and 16 steps is standard equipment (32×32 programmable as an option). - Can be linked to a computer using a dedicated MPCS (optional). - Power supply is A.C. 200V 1P 4Kw energy-saving type. - Comes standard with a Bourdon vacuum gauge.
Up to 16 FOUP stockers! Large batch vertical furnace compatible with 300mm wafers.
The "VF-5900" is a flagship model of a large batch vertical furnace equipped with a high-capacity stocker, achieving short takt times. It can process up to 100 pieces of 300mm/12-inch wafers and 16 FOUPs at once. The adoption of LGO heaters provides excellent temperature characteristics from low to medium-high temperatures. It is suitable for thermal processing of materials other than silicon wafers, such as IGBTs, polyimides, and thin wafers. 【Features】 ■ Large batch processing, capable of handling up to 100 pieces at once ■ Stocker for up to 16 FOUPs ■ Excellent temperature characteristics from low to medium-high temperatures due to LGO heater installation ■ High-speed wafer transport with a single wafer + 5-piece batch transport robot ■ Equipped with a user-friendly high-function control system *For more details, please refer to the PDF document or feel free to contact us.
Introducing a vacuum sintering furnace with a heater and insulation made primarily of graphite, which excels in thermal uniformity.
The "FVS-R Series" is a resistance heating vacuum sintering furnace that can handle high temperatures up to 2500°C. In terms of tank shape, in addition to the standard horizontal round and square types, we have adopted our unique "front-split type" (vertical placement with front door), which makes loading and unloading samples easy and offers excellent maintenance. We also have a wealth of experience in designing and manufacturing continuous systems, so please feel free to consult us. 【Features】 ■ Capable of high temperatures up to 2500°C ■ Proven track record of achieving high vacuum levels down to 6.65×10^-4 Pa ■ Metal heaters such as molybdenum can be used depending on sintering conditions ■ Cooling method: Combines heat exchangers and fans to enhance the cooling rate of samples after sintering ■ Debinding: Sublimates and recovers the binder *For more details, please refer to the PDF materials or feel free to contact us.
![Special Furnace [High-Temperature Behavior Observation Furnace]](https://image.mono.ipros.com/public/product/image/ab4/68420018/IPROS_14883789128515674000.jpg?w=280&h=280)
Furnace for in-situ observation of ceramics sintering at high temperatures and glass melting state.
Expert company in electric furnaces and atmosphere furnaces / heating and heat treatment technology. Here is an introduction to the "High-Temperature Behavior Observation Furnace" handled by Marusho Electric Co. ■□■Features■□■ ■Internal dimensions: W100mm × D100mm × H150mm ■Maximum temperature: 1400℃ ■Programmable oxygen concentration control Observation windows: one on the ceiling, two on the sides ■For more details, please contact us.
![Special furnace [Hot air circulation type degreasing furnace]](https://image.mono.ipros.com/public/product/image/83b/68420021/IPROS_17511701107501705000.jpg?w=280&h=280)
Special furnace equipped with a program cooling system and exhaust gas deodorization device.
Electric furnace and atmosphere furnace / Experts in heating and heat treatment technology This is an introduction to the "Special Furnace [Hot Air Circulation Type Degreasing Furnace]" handled by Marusho Electric Co., Ltd. ■□■Features■□■ ■Internal dimensions: W1000mm × D1000mm × H1000mm ●Operating/Maximum temperature: 700℃/750℃ Equipped with a programmed cooling system and exhaust gas deodorization device ■For more details, please contact us.
![Special furnace [single crystal pulling device]](https://image.mono.ipros.com/public/product/image/6c5/68420017/IPROS_15688610209793421000.jpg?w=280&h=280)
Marusho Electric Co., Ltd. handles the "Special Furnace [Single Crystal Pulling Device]."
Electric Furnace / Atmosphere Furnace / Expert Company in Heating and Heat Treatment Technology This is an introduction to the "Special Furnace [Single Crystal Pulling Device]" handled by Marusho Electric Co. ■□■Features■□■ ■Furnace Internal Dimensions: Ф100mm × H250mm ■Maximum Temperature: 2500℃ ■Heater: Graphite Heater ■Vacuum Exhaust: 10^-4 Pa level ■Equipped with sample rotation and lifting mechanism ■For more details, please contact us.
![Special furnace [Small carbon nanofiber manufacturing device]](https://image.mono.ipros.com/public/product/image/ed2/68420025/IPROS_10736125073149917000.jpg?w=280&h=280)
Small-scale experimental manufacturing device using vapor phase method (carbon nanofiber manufacturing device)
This is an introduction to the "Special Furnace [Small Carbon Nanofiber Production Device]" handled by Marusho Denki, an expert company in electric furnaces, atmosphere furnaces, heating, and heat treatment technology. ■□■Features■□■ ■Small experimental production device using the vapor phase method ■Can produce homogeneous nanofibers through uniform gas dispersion and precise temperature control ■Can be used for experimental production of carbon nanofibers and carbon nanotubes ■For more details, please contact us.
![Special Furnace [Vertical Multi-Atmosphere Furnace]](https://image.mono.ipros.com/public/product/image/2f6/68420020/IPROS_14114209340060324000.jpg?w=280&h=280)
Special furnace equipped with a furnace pressure control system.
Electric Furnace / Atmosphere Furnace / Expert Company in Heating and Heat Treatment Technology This is an introduction to the "Vertical Multi-Atmosphere Furnace" handled by Marusho Electric Co., Ltd. ■□■Features■□■ ■Internal dimensions: Ф380mm×H600mm ■Operating/maximum temperature: 700℃/800℃ ■Internal pressure: up to 0.1MPa ■Heater: Our own modular heater (Kanthal wire element) Equipped with vertical 3-zone control, vacuum replacement type, and internal pressure cap program control system. ■For more details, please contact us.
![Special furnace [Dew point control high-temperature atmosphere furnace]](https://image.mono.ipros.com/public/product/image/c1c/68420019/IPROS_17353115289800909000.jpg?w=280&h=280)
High-temperature atmosphere furnace with dew point control handled by Marusho Electric Co.
The dew point controlled high-temperature atmosphere furnace can be used for various research and development and small-scale production of ceramics, electronic components, etc., under advanced atmosphere control such as reducing atmosphere and dew point controlled atmosphere, and can also accommodate special specifications according to user requests. ■□■Features■□■ - Internal dimensions: W150mm×D150mm×H180mm to W300mm×D300mm×H300mm - Operating temperature: Normal use 1600℃, maximum 1700℃ - Vacuum replacement type - Equipped with a dew point control system (maximum 80℃ for wetters) ■For more details, please contact us.
FST / FZS – Horizontal and vertical dual-use split tube furnace (maximum temperature 1300°C)
The FST (1 Zone) and FZS (3 Zone) are split tube furnaces that can operate at temperatures up to 1300°C and can be used both horizontally and vertically. The split heating modules make it easy to load working tubes and reaction vessels with fixed end flanges. The separable structure also allows for increased cooling rates of samples. Cooling grooves are incorporated into the housing to promote convective cooling of the outer casing. The upper half of the furnace body is equipped with a handle, and a one-touch clamp allows for safe locking and unlocking. The furnace body is made of ceramic fiber modules, and high-quality APM wire heating elements are embedded in insulation held by ceramic ridges. When the furnace body is opened, a safety switch is activated, cutting off power to the heating elements, ensuring the safety of the operator.
Capable of handling temperatures up to 1200℃ in the furnace! A variety of options available, including surface hardening treatment and binder removal treatment.
The "Ceramic Fiber Heater" from Teitokusha is a heater that can handle temperatures up to 1200°C inside the furnace. The "Strip Heating Element Heater" can accommodate a large power load per unit surface area, allowing for high output in a compact space. It excels in heat uniformity, enabling even heating of the objects being heated. Additionally, we offer standard products such as the "Round Wire Coil Heating Element Heater" and high-performance, large-capacity types like the "Irregular Heating Element Heater." Since we design and produce in-house, we can respond flexibly to various needs, from large industrial furnaces to small test furnaces. 【Product Features】 ■ Supports up to 1200°C inside the furnace ■ High output in a compact space ■ Excellent heat uniformity ■ In-house design and production ■ Abundant options *For more details, please refer to the PDF document or feel free to contact us.
Vertical diffusion furnace compatible with Φ300mm.
This is a vertical diffusion furnace compatible with Φ300mm. 【Features】 ◆ Equipped with a user-friendly, in-house developed new controller ◆ Efficient fully automated transport system ◆ High-performance control system ◆ High-performance LGO heater installed
This is a batch-type vacuum reflow furnace compatible with voidless and fluxless reflow. We offer a variety of lineups that support everything from development to mass production.
In conventional atmospheric reflow, there are approximately 20% void areas remaining in the solder, which leads to a deterioration in joint strength. The batch-type vacuum reflow furnace "c.VACUNITE series" from Centrolsam (Germany) can reduce the void areas to less than 2% by using vacuum. Additionally, it can accommodate fluxless reflow by using 100% hydrogen or reducing effect gases such as formic acid. As an option, it also supports plasma cleaning of the bonding surface using MW plasma.
Possession of high-precision heat treatment technology as proprietary technology under various environmental conditions.
Our company operates in the fields of magnetic material heat treatment equipment for hard disk drives (HDD), manufacturing equipment for ceramics and magnetic materials in various electronic device sectors, various single crystal growth equipment and technology development, and the development of manufacturing equipment related to new materials. We possess high-precision heat treatment technology for various environments as our proprietary technology, and we have obtained many patents, especially for heat treatment technology in magnetic fields. We also have a track record in the development of new process equipment through joint development with customers. 【Business Activities】 ■ Design, manufacture, and sales of magnetic head-related equipment ■ Design, manufacture, and sales of single crystal growth-related equipment ■ Design, manufacture, and sales of various high-temperature electric furnaces for fine ceramics ■ Design, manufacture, and sales of equipment related to new material development ■ Contract research and development in the above fields and others, as well as design, manufacture, and sales of related equipment and processes *For more details, please download the PDF (English version) or feel free to contact us.
By achieving ultra-high temperature treatment and excellent temperature uniformity, batch processing of boule ingots and wafers is possible, minimizing defects and dislocations.
To improve the yield of wide bandgap semiconductor devices, it is necessary to minimize defects and dislocations caused by stress. One of the methods to achieve this is through ultra-high temperature thermal treatment of semiconductor crystals. The c.CRYSCOO HTA high-temperature annealing furnace has been developed to significantly enhance productivity in the value chain from bulk crystals of wide bandgap semiconductors to devices. With excellent temperature control (maximum temperature of 2200°C), uniformity, and low cross-contamination, the c.CRYSCOO HTA demonstrates superior performance compared to conventional furnaces. It is capable of simultaneously processing more than 10 boule ingots or over 100 unprocessed wafers.
A well-equipped environment unique to an industrial furnace manufacturer! As a specialized manufacturer, there are things we can do.
We would like to introduce the equipment owned by Chūnippōn Rōkōgyō Co., Ltd. We have a "horizontal vacuum heat treatment furnace" suitable for small lot products and mold components, a "three-chamber continuous vacuum heat treatment furnace" for mass production parts, an "oil-cooled vacuum heat treatment furnace" for oil-cooled steel, a "vacuum replacement vacuum heat treatment furnace" dedicated to tempering, a "thermal CVD device" with a TiC three-layer structure, a sub-zero device for preventing aging changes, and a "vacuum degreasing cleaning device" for degreasing cleaning, among others. Please feel free to contact us when you need our services. 【Equipment Owned (Partial)】 ■ Horizontal Vacuum Heat Treatment Furnace - NVF-30P - NVF-50P - NVF-50PC - NVF-200PC - NVF-500P *For more details, please refer to the related links or feel free to contact us.
Selective removal of accumulated films and reaction products through chloride volatilization! Maintains the dimensions and surface roughness of the base material.
The "Small Chlorine Furnace" is a dry cleaning device for fixtures that utilizes "selective chlorination → volatilization" with Cl2/HCl. It targets GaN/AlN/Si-based products adhered to MOCVD/epitaxial furnace susceptors, quartz boats, and tubes, converting them into chlorides at temperature stages and gas compositions suited to the materials, and removing them through volatilization at low temperatures. Additionally, it minimizes waste liquid burden without the need for acid washing, and reduces dimensional changes, distortion, and grain boundary damage. 【Features】 ■Selective chlorination × staged temperature: Converts adhered substances to chlorides → volatilizes at low temperatures, suppressing substrate damage. ■Dry process with minimal waste liquid: No acid washing, shortening cleaning and drying processes. ■Maintains dimensions and surfaces: Operates under negative pressure and controls oxygen partial pressure to minimize distortion and roughness changes. ■Compatible with multiple materials: Applicable to fixtures made of quartz, SiC, C/C, metals (Mo/W/Al-based), etc. *For more detailed information, please download or feel free to contact us.
