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Ellipsometer Product List

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Spectroscopic Ellipsometer GES5E

Non-destructive measurement of thin film optical properties! Easy and high-precision measurement with spectral ellipsometry.

The Japan Semi-Lab spectroscopic ellipsometer 'GES5E' has achieved non-destructive measurement of thin film optical properties, which was impossible with conventional optical measuring instruments. It calculates the thickness of thin films and multilayer films, as well as the wavelength dispersion of the refractive index (N, K values) of each layer. It is active in various fields, from research and development to inline production quality control. 【Measurable Physical Properties】 ■ Thickness optical refractive index ■ Refractive index gradient and material composition ■ Dopant concentration

  • Optical Measuring Instruments
  • Spectroscopic Analysis Equipment
  • probe
  • Ellipsometer

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Roll-to-roll spectral ellipsometer

Roll-to-roll spectral ellipsometer

We have a very strong track record in QC monitoring.

  • Semiconductor inspection/test equipment
  • Distance measuring device
  • Spectroscopic Analysis Equipment
  • Ellipsometer

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Rotational Compensation Type Spectroscopic Ellipsometer 'SE-2000' *Seminar Held

High-precision measurement of the thickness and refractive index of multilayer films without contact. Easy operation of the main unit and analysis tasks. *Demonstration available and technical materials provided.

The "SE-2000" is a rotating compensator type spectroscopic ellipsometer that can measure the film thickness and refractive index of thin films with high precision in a "non-contact" manner. It is equipped with user-friendly analysis software, making the analysis process easy. It supports measurements across a wide wavelength range from deep ultraviolet to near-infrared. It also accommodates inspections related to material composition ratios, anisotropy, Mueller Matrix, degree of polarization resolution, reflectance/transmittance, dopant concentration, and retardation (R0, Rth), making it versatile for a wide range of applications. 【Features】 ■ High-precision CCD and high-resolution PMT equipped ■ Rich database of optical models ■ Various expansion options available ■ Numerous sales achievements 〈 Seminar Details 〉 ■ Theme: Explanation of the Procedure for Creating Analysis Models for Spectroscopic Ellipsometers - Beginner Level - ■ Dates and Times ・ April 22 (Thursday) 10:00 AM ・ May 13 (Thursday) 4:00 PM ■ Content Using a sample of a general structure, we will explain the procedure for creating analysis models. Explanation of analyses using effective medium approximation models, Cauchy models, and Tauc-Lorentz models. * Please check our company website (link below) for participation details.

  • Optical Measuring Instruments
  • Spectroscopic Analysis Equipment
  • probe
  • Ellipsometer

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Spectroscopic ellipsometer in the infrared region

Infrared Spectroscopic Ellipsometry

- In FTIR measurements, polarization allows for the acquisition of more information. - Since reference measurements are not necessary, measurements can be conducted quickly.

  • Optical Measuring Instruments
  • Analytical Equipment and Devices
  • Other environmental analysis equipment
  • Ellipsometer

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[Technical Information] Measurement Principle of Spectroscopic Ellipsometry - What is Polarization? *Materials Available

Polarization, ellipsometer, Brewster angle, etc.! Clearly introduced with diagrams and graphs. Demonstrations available.

This document introduces the measurement principles of a spectroscopic ellipsometer. It covers topics such as "polarization," which refers to light with a regular vibration direction of electric and magnetic fields, the principles of the ellipsometer, and optical interference. The content is presented clearly along with diagrams and graphs, so please take a moment to read it. 【Contents (excerpt)】 ■ What is polarization ■ Changes to the sample surface ■ What is an ellipsometer ■ Principles of the ellipsometer ■ What is the Brewster angle 〈 We will hold a webinar! *Details 〉 ■ Theme: Explanation of the procedure for creating analysis models for spectroscopic ellipsometers – Beginner's edition – ■ Date and Time ・ April 22 (Thursday) 10:00 AM ・ May 13 (Thursday) 4:00 PM ■ Content Using a typical sample structure as an example, we will explain the procedure for creating analysis models. Explanation of analysis using effective medium approximation models, Cauchy models, and Tauc-Lorentz models. ■ Participation Please check our company website (link below) for details. *For more information, please refer to the PDF document or feel free to contact us. *If you would like a demo, please indicate "Demo request" using the contact button below.

  • Analytical Equipment and Devices
  • Spectroscopic Analysis Equipment
  • Coating thickness gauge
  • Ellipsometer

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Spectroscopic ellipsometry with a wide wavelength range (DUV to NIR)

Analysis of wavelengths from 190nm (DUV) to 3,500nm (NIR) allows for the analysis of film thickness and optical constants at user-specified wavelengths.

This is a spectroscopic ellipsometer that adopts a unique method for driving the rotating polarizer (polarization detection). We have developed proprietary software for simultaneous analysis of film thickness and optical constants (refractive index, extinction coefficient), which has undergone several revisions based on requests from long-time users, now reaching its fourth edition. This software features a convenient [Interactive Mode] for analysis and a [Recipe Mode] suitable for repeated measurements. Additionally, it can perform automatic measurements of film thickness distribution, which is helpful for evaluating thickness uniformity.

  • Analytical Equipment and Devices
  • Ellipsometer

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【Free Initial Measurement Campaign】Spectroscopic Ellipsometer Auto SE

Thickness and optical constant measurement by Auto SE is free for the first 3 samples!!

■□■□■□■□■□■□■□■□■□■□■□■□■□■□■ Exclusive offer for customers who apply in November!! We will conduct free measurements of spectral ellipsometry (film thickness and optical constant measurement) for up to 3 samples on the first occasion using Auto SE. ■□■□■□■□■□■□■□■□■□■□■□■□■□■□■ Using a newly developed optical model, we will evaluate the quality of DLC films non-destructively and non-contactly. We can perform instant non-destructive measurements from hydrogen-containing DLC films created by various manufacturing methods to hydrogen-free DLC, calculating film thickness and optical constants (refractive index and extinction coefficient). With simple operations, we can measure samples ranging from single-layer films to multilayer films with film thicknesses from 1 nm to 15 μm. Surface analysis using an XYZ electric stage and measurements of micro areas below 100 μm are possible. The imaging system allows for precise confirmation of the sample surface condition and the exact position of the measurement spot. [For more details, please download the catalog or feel free to contact us]

  • Coating thickness gauge
  • Other inspection equipment and devices
  • Ellipsometer

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