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Vacuum pump×アルバック／ULVAC, Inc. - List of Manufacturers, Suppliers, Companies and Products

Vacuum pump Product List

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Gas Analyzer Software Qulee QCS

Gas Analyzer Software Qulee QCS

Software compatible with ULVAC's residual gas analyzers/process gas monitors.

"Qulee QCS" is software compatible with ULVAC's residual gas analyzers/process gas monitors. This software is compatible with most gas analyzers manufactured by ULVAC, allowing anyone to perform measurements and save data with simple click operations. 【Features】 ○ Standard software for Qulee → Standardly adopted across the entire Qulee series (compatible with Windows XP/7) ○ Easy operation → Simple operation with a comprehensive set of shortcut buttons ○ Rich measurement modes → Includes scan mode, trend mode, analog mode, sensitivity calibration mode, etc. ○ Enhanced leak test functionality → Easy leak checks possible with helium leak test mode ○ Gas composition name display available → Gas composition names can be displayed in scan mode For more details, please contact us or download the catalog.

  • Other measurement, recording and measuring instruments

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G-TRAN Series Multi-Ion Gauge SH2-1/SH2-2

G-TRAN Series Multi-Ion Gauge SH2-1/SH2-2

While enabling wideband measurements, we have significantly reduced running costs. 【ULVAC】

ULVAC has developed and commercialized the transducer-type "G-TRAN Series Multi-Ion Gauge" (patent pending), which allows for the connection of measuring elements with different measurement ranges. In conventional multi-principle vacuum gauges, we often hear customer feedback such as "a failure of one measuring element requires the complete replacement of all measuring elements," "the measuring elements are complex and prone to failure," and "the measuring elements are expensive." With this new approach, we can enable wide-range measurements while significantly reducing running costs and addressing low environmental impact. 【Product Lineup】 ○SH2-1 Standard Specification ○SH2-2 Serial Communication Specification For more details, please contact us or download the catalog.

  • Pressure

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Dry Vacuum Pump GR Series

Dry Vacuum Pump GR Series

This is a pump with a simple structure designed for general industrial use. 【ULVAC】

The GR Series dry vacuum pumps are designed with a simple structure for general industry, based on the proven and reliable LR and HR series. They can be used for high-load applications such as repeated exhaust from atmospheric pressure to vacuum and continuous operation in high-pressure areas. They are ideal for exhausting load lock chambers that require high throughput. 【Product Lineup】 ○ GR60A ○ GR90A ○ GR180A For more details, please contact us or download the catalog.

  • Vacuum pump

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Dry Vacuum Pump LR/HR/UR Series

Dry Vacuum Pump LR/HR/UR Series

Achieved high durability in hard processes such as CVD and dry etching. [ULVAC]

The LR/HR/UR series has achieved high durability in hard processes such as CVD and dry etching through the effective utilization of compression heat, thanks to its unique high-temperature uniform heating technology. In light processes, it is possible to reduce power consumption by up to approximately 70% in combination with ECO-SHOCK. Additionally, it improves maintainability and reduces noise, and all models are CE compliant (optional). 【Product Lineup】 ○ LR/HR60 ○ LR/HR90 ○ LR180 ○ LR421 ○ LR421-T, etc. For more details, please contact us or download the catalog.

  • Vacuum pump

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Oil rotary vacuum pump VS650A/VS750A

Oil rotary vacuum pump VS650A/VS750A

It is possible to reduce the burden associated with the installation of pumps for foundation work and other related tasks. 【ULVAC】

The VS650A/VS750A is a single-stage vane type (rotary wing type) oil rotary vacuum pump. It offers a large exhaust capacity and stable exhaust performance, and its low vibration helps reduce the burden associated with pump installation for foundation work. Additionally, you can choose between air cooling and water cooling, so please select according to your installation environment. 【Product Lineup】 ○VS650A-A ○VS650A-W ○VS750A-A ○VS750A-W For more details, please contact us or download the catalog.

  • Vacuum pump

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Oil rotary vacuum pump PKS series

Oil rotary vacuum pump PKS series

It is a very robust large oil rotary vacuum pump with stable exhaust characteristics. [ULVAC]

The PKS series is a very robust large oil rotary vacuum pump with stable exhaust characteristics. It can be used in a wide range of applications, including the metal and automotive industries, as well as the chemical, pharmaceutical, and food industries. Disassembly and assembly are extremely easy, and inspecting the exhaust valve is also straightforward. 【Product Lineup】 ○PKS-016 ○PKS-030 ○PKS-070 For more details, please contact us or download the catalog.

  • Vacuum pump

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Crystal Oscillator Film Deposition Controller CRTM-6000G

Crystal Oscillator Film Deposition Controller CRTM-6000G

From single-layer films to multi-layer films, it can be used for a wide range of deposition control. 【ULVAC】

The CRTM-6000G is a quartz oscillator-based film deposition controller that excels in cost performance while enhancing the fundamental capabilities required of a film deposition controller. Despite its compact half-rack size, it is capable of low-rate control and continuous deposition control for multilayer films up to 99 layers. 【Specifications】 ○ Dimensions: W×D×H 240mm×350mm×99mm ○ Weight: Approximately 3.6kg ○ Utility: AC85 ～ 230V 50/60Hz ○ Power Consumption: 30W Max ○ Operating Environment: Temperature: 5 ～ 40℃, Humidity: 5 ～ 95% RH (without condensation) For more details, please contact us or download the catalog.

  • Other measurement, recording and measuring instruments
  • Coating thickness gauge

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Ultra-high vacuum introduction device, zero-length viewport

Ultra-high vacuum introduction device, zero-length viewport

This is a variety of introduction devices compatible with ultra-high vacuum using UFC flanges. 【ULVAC】

This is a variety of feedthroughs compatible with ultra-high vacuum using UFC flanges (bakeable flanges with knife-edge type metal seal). The CMS series is for current and voltage, the TDU series is for rotational motion, and the TSU series is for linear motion, all designed to introduce these elements into an ultra-high vacuum chamber without leakage from the atmosphere. The TVU series is a viewport for observing the interior of the ultra-high vacuum chamber from the atmosphere with a wide field of view. 【Product Lineup】 ○ Current feedthrough terminal: CMS series ○ Ultra-high vacuum rotary feedthrough terminal: TDU series ○ Ultra-high vacuum linear feedthrough terminal: TSU series ○ Ultra-high vacuum zero-length viewport: TVU series For more details, please contact us or download the catalog.

  • Vacuum Equipment

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HPS-N Series EB Power Supply for Film Formation

HPS-N Series EB Power Supply for Film Formation

This is a power supply compatible with electron beam evaporation sources, aimed at stabilizing the circuit and improving performance. [ULVAC]

The HPS-N series is a power supply compatible with electron beam evaporation sources, designed to stabilize circuits and improve performance based on Ulvac's many years of accumulated technology and achievements. By using it in combination with the EB Gun Controller EGC-10GS, it can support both EB guns for optical thin films and EB guns for metallic thin films. 【Product Lineup】 ○HPS-600N ○HPS-1000N ○EGC-10GS For more details, please contact us or download the catalog.

  • power supply

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EB Gun for Metal Vapor Deposition EGN Series

EB Gun for Metal Vapor Deposition EGN Series

This is an electron beam evaporation source developed with a focus on improving maintainability for metal deposition. 【ULVAC】

The EGN series is a metal vapor deposition electron beam evaporation source developed with a focus on improving maintenance. The adoption of a flat-top structure and a 15mm hearth deck reduces the coating area on the electron beam evaporation source, achieving high maintenance efficiency. 【Specifications】 ○ Electron beam deflection angle: 270° ○ Number of crucibles: 6 ○ Cooling water flow rate: 10L/min ○ Dimensions (W×D×H): 260mm×340mm×144mm ○ Weight: 28kg For more details, please contact us or download the catalog.

  • others

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Vacuum Gauge G-TRAN Series Multi-Ion Gauge ST2-1/2-2

Vacuum Gauge G-TRAN Series Multi-Ion Gauge ST2-1/2-2

Improved measurement accuracy! Equipped with an LED that allows for easy confirmation of the vacuum gauge's status at a glance. [ULVAC]

The G-TRAN series vacuum gauge multi-ion gauge ST2-1/ST2-2 achieves long life by maximizing the advantages of the triode type, even in harsh environments for vacuum gauges. ULVAC has developed and commercialized an ion vacuum gauge that can measure accurately for a longer time, even in severe conditions. The triode type metal ion vacuum gauge significantly reduces running costs and can also contribute to improving the yield of various processes. 【Features】 ○ Triode type metal ion vacuum gauge (patent pending) ○ Small, metal measuring element ○ Wideband measurement ○ Measuring elements with different measurement ranges can be connected ○ Accurate atmospheric pressure measurement For more details, please contact us or download the catalog.

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Abnormal Discharge Prevention Unit A2K Series

Abnormal Discharge Prevention Unit A2K Series

High throughput! Large capacity is possible with master-slave connections. [ULVAC]

The A2K series is an abnormal discharge prevention unit that applies a positive voltage pulse to a DC power supply in a reactive sputtering process to neutralize the charge on the target. By reducing abnormal discharges, it enables high power input. The A2K-20K and 40K can be operated in parallel with up to six units each. It is possible to synchronize the output pulses of multiple A2K units. It can be easily installed on existing equipment, achieving improved yield and throughput at a low cost. 【Features】 ○ High throughput ○ Reduced substrate damage ○ Suppressed substrate temperature ○ Simple connectivity ○ Adjustable reverse pulse frequency For more details, please contact us or download the catalog.

  • Power Supplies

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Dry Vacuum Pump ECO-SHOCK

Dry Vacuum Pump ECO-SHOCK

This is a groundbreaking attachment that significantly reduces power consumption. 【ULVAC】

ECO-SHOCK is a revolutionary attachment that can significantly reduce the power consumption of your currently used dry pump by installing it on the dry pump. It is ideal for dry pumps used in inert gas exhaust applications. 【Features】 - Can reduce the power consumption of dry vacuum pumps by up to 80% - No decrease in exhaust speed across all pressure ranges - Easy to install For more details, please contact us or download the catalog.

  • Vacuum pump

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