THKプレシジョン List of Products and Services

In the semiconductor field, where product miniaturization is advancing, and in optical fields such as silicon photonics, the demand for positioning accuracy is increasingly high. Achieving ultra-precise positioning on the nanometer scale requires a perfect match between mechanisms and control. Our company has over 20 years of experience as a specialized manufacturer of products suitable for ultra-precise positioning, known as "piezo stages," and we offer a rich lineup of catalog standard products. Furthermore, we actively support custom designs, allowing us to provide products tailored to specific applications when selection from standard products is challenging. 【Product Lineup】 ＜Ultra-Precise Piezo Stages＞ ■ Capable of ultra-precise position control with a maximum resolution of 1nm and high-speed response in areas smaller than 800μm ■ A wide variety of types available, including tilt for mirrors and focus for objectives ＜Precision Piezo Motor Stages＞ ■ Achieves reliable position control with ±20nm repeatability over a travel range of up to 25mm ■ Maintains position through self-locking even when the power is off *For more details, please refer to the materials. Feel free to contact us with any inquiries.

• others

Don't you ever feel the need for a load sensor with higher detection accuracy? "I want to measure small forces at the milligram (mg) level." Our high-sensitivity load sensor, the 'Force Sensor Series,' can detect minute forces at the μN (mgf) level with high sensitivity! By simply connecting the sensor amplifier to your voltage measuring device, you can easily measure pressing and pulling forces. Compact and lightweight, it is easy to integrate into your equipment. It can be utilized in research and development, as well as manufacturing management. We offer four standard models based on measurement range and sensitivity. 【Features】 ■ Customizable for shape and sensitivity changes ■ Selectable for "pressing," "pulling," or "both" based on detection direction ■ Arm-type sensors are also available, capable of measuring contact reaction forces at the tip. *You can view a comparison table of micro-force sensors and load cells from the <PDF Download>. Please feel free to contact us.

• Sensors

■Compatible with objective lenses from various manufacturers - You can choose from four screw sizes to fit the lens screw diameters of different manufacturers. - A "screw diameter conversion adapter" is also available for purchase separately. - Please consult us for mounting non-standard lenses. Four selectable types 【Horizontal type】 - Features a structure that minimizes the thickness of the main body. - Offers a wide variety of stroke options; this type is recommended for applications requiring long travel distances. 【Vertical type】 - A type that emphasizes high rigidity and responsiveness. - Suitable for use with heavy lenses or long barrels, or when high-speed focusing is required. 【Box type】 - Designed with a symmetrical dual-holding structure centered around the objective lens, allowing for stable focusing even with heavy lenses. - Can be securely fixed with four screws, making it suitable for integration into manufacturing or inspection equipment. 【For optical tubes】 - Allows for fine adjustment in the focusing direction by attaching a microscope optical tube. *For more details, please refer to the PDF document or feel free to contact us.

• Other machine elements

■Customizable for large diameter mirrors The driving source, a piezo element, has a high output force (in the hundreds of N range), allowing for stable and high-precision positioning even for heavy large diameter mirrors. ■Easy angle control Both "static motion," where the angle is moved to a specified numerical value, and "vibrational motion," which involves continuous back-and-forth oscillation, can be easily performed through a controller/driver. *For more details, please refer to the PDF materials or feel free to contact us.

• Other machine elements

■Rotation guidance using an elastic hinge mechanism The uniquely designed elastic hinge mechanism amplifies the slight expansion and contraction of the piezo element while supporting stable rotational motion. With no friction or wear, it excels in smooth and high-speed movement, making it suitable for applications requiring fine angle adjustments. *For more details, please refer to the PDF document or feel free to contact us.*

• Other machine elements

■From Compact to Large Aperture We offer a range from compact apertures suitable for small devices to large aperture types that can align large panel substrates. ■Smooth and Accurate Scanning High-precision feedback control enables reliable operation in accordance with command signals. *For more details, please refer to the PDF materials or feel free to contact us.

• Other machine elements

■Performance Classification by Two Mechanisms They are classified into "Direct Drive Mechanism," which emphasizes high-speed response with a high resonance frequency, and "Displacement Amplification Mechanism," which ensures stroke. Direct Drive Mechanism - This mechanism moves the stage directly using piezoelectric elements. - By limiting the stroke, it excels in resolution and response. - It has high rigidity, allowing stable positioning even under heavy loads. Displacement Amplification Mechanism - This mechanism mechanically amplifies the extension of the piezoelectric elements. - Depending on the amplification ratio, it can achieve strokes several times to over a dozen times that of direct drive. - Position reproducibility is maintained through feedback control using built-in displacement sensors. *For more details, please refer to the PDF document or feel free to contact us.

• Other machine elements

This is a piezo stage with ultra-high resolution and fast response, featuring a maximum resolution of 1nm. It enables highly reliable positioning through feedback control using an integrated displacement sensor. 【Usage Examples】 ■ Semiconductor and LCD inspection equipment, interferometer devices, analytical instruments, microscope lens focusing, ultra-precision machining, laser-related equipment, nanometer positioning, etc. 【Reasons for Choosing This Product】 ■ Customization available from a single unit ■ Compatible with vacuum and non-magnetic requirements ■ Combination unit support A wide range of products and numerous application examples are available! For more details, please download the catalog or contact us.

• Other FA equipment

This is the X-axis stage of the PS Basic Series of ultra-precision positioning piezo stages. The stroke ranges from 600 to 700 μm. Thanks to the high responsiveness of the piezoelectric elements and closed-loop control using built-in displacement sensors, it enables high-speed, high-resolution, and highly reproducible positioning. The interface is user-friendly, and the control controller can be selected with both "analog input" and "digital input" interfaces, allowing for easy position commands from a computer. Sample software (free of charge) is also available. Additionally, we offer custom solutions even for single units, designing and manufacturing piezo stages tailored to various requirements, including vacuum and non-magnetic specifications, as well as adaptations for integration into devices beyond standard catalog products. For more details, please contact us or download the catalog.

• Other machine elements

This is the XY-axis stage of the PS Basic Series, which features ultra-precision positioning piezo stages. The XY-axis stage offers a comprehensive lineup of products with strokes ranging from 30/30μm to 500/500μm. The PS Basic Series enables high-speed, high-precision positioning through the high responsiveness of piezoelectric elements and closed-loop control using built-in displacement sensors, allowing for fast, high-resolution, and highly reproducible positioning. It boasts an easy-to-use interface, and the control controller can be selected with both analog and digital input interfaces, making it simple to issue position commands from a computer. Sample software (free of charge) is also available. Additionally, we offer custom solutions from single units, and we can design and manufacture piezo stages tailored to various requirements, including vacuum or non-magnetic specifications, as well as integration into devices, beyond the standard catalog products. *For more details, please download the materials or feel free to contact us.*

• Other machine elements

This is the Z-axis stage of the PS Basic Series, which features ultra-precision positioning piezo stages. The Z-axis stages are available in a wide range of products with strokes from 6μm to 300μm and body sizes from 35×35×26mm to 80×80×60mm. The PS Basic Series enables high-speed, high-precision positioning thanks to the high responsiveness of the piezoelectric elements and closed-loop control using built-in displacement sensors, allowing for fast, high-resolution, and highly reproducible positioning. It boasts an easy-to-use interface, and the control controller can be selected with both analog and digital input interfaces, allowing for simple position commands from a computer. Sample software (free of charge) is also available. Additionally, we offer custom solutions from single units, and we can design and manufacture piezo stages tailored to various requirements, including vacuum or non-magnetic specifications, as well as integration into equipment, beyond the standard catalog products. *For more details, please download the materials or feel free to contact us.*

• Other machine elements

This is the XYZ axis stage of the PS Basic Series, which features ultra-precision positioning piezo stages. The XYZ axis stages are available in a comprehensive lineup with strokes ranging from 20/20/12μm to 80/80/80μm. The PS Basic Series enables high-speed, high-precision positioning due to the high responsiveness of the piezoelectric elements and closed-loop control using built-in displacement sensors, allowing for fast, high-resolution, and highly reproducible positioning. It boasts an easy-to-use interface, and the control controller can be selected with both analog and digital input interfaces, allowing for easy position commands from a computer. Sample software (free of charge) is also available. Additionally, we offer custom solutions from single units, and we can design and manufacture piezo stages tailored to various requirements, including vacuum or non-magnetic specifications, as well as integration into devices, beyond standard catalog products. *For more details, please download the materials or feel free to contact us.*

• Other machine elements

This is a type of PK opening piezo stage for the X-axis with ultra-precise positioning. We offer strokes of 30μm and 100μm. It is suitable for laser transmission, fine observation combined with microscopes and analytical instruments, and high-precision mapping measurements. ■ High-speed, high-precision scanning operation Thanks to the high responsiveness of the piezoelectric elements and closed-loop control using built-in displacement sensors, positioning can be achieved with high speed, high resolution, and high reproducibility. In small ranges, it provides faster and more reliable operation compared to stepping motor stages. ■ User-friendly interface The control controller allows for the selection of both analog and digital input interfaces, enabling easy position commands from a computer. It supports not only point-to-point movement but also continuous reciprocating motion like raster scanning and arc motion that describes a perfect circle. We also accommodate requests for special environments (such as vacuum and non-magnetic), so please feel free to consult us. *For more details, please download the materials or feel free to contact us.

• Other machine elements

This is a type of XY-axis stage with a PK opening, designed for ultra-precision positioning piezo stages. You can choose from five different models with strokes ranging from 100/100μm to 300/300μm and resolutions from 2/2nm to 6/6nm. This lineup features an opening (transparent hole) in the center of the moving table. It is suitable for laser transmission, fine observation combined with microscopes and analytical instruments, and high-precision mapping measurements. ■ From compact to large openings We offer a compact opening type suitable for small devices, as well as a large opening type that can align large panel substrates. ■ Smooth and precise scanning High-precision feedback control allows for reliable operation according to command signals. We also accommodate requests for special environments (vacuum, non-magnetic, etc.), so please feel free to consult with us. *For more details, please download the materials or feel free to contact us.

• Other machine elements

This is a PK opening type XYZ axis stage with ultra-precision positioning piezo stage. We offer products with strokes ranging from 100/100/30μm to 300/300/100μm. The PK opening type features an opening (transparent hole) in the center of the moving table. It is ideal for fine observation and high-precision mapping measurements when combined with microscopes and analytical instruments. With high-speed, high-precision scanning operations, the high responsiveness of the piezoelectric elements and closed-loop control using built-in displacement sensors enable positioning with high speed, high resolution, and high reproducibility. In small ranges, it provides faster and more reliable operation compared to stepping motor stages. The user-friendly interface control controller allows for the selection of both analog and digital input interfaces, enabling easy position commands from a computer. It supports not only point-to-point movement but also continuous reciprocating motion like raster scanning and arc motion that describes a perfect circle. Additionally, we can accommodate requests for special environments (such as vacuum and non-magnetic), so please feel free to consult us. *For more details, please download the materials or feel free to contact us.

• Other machine elements

The piezo stage PT tilt and rotation type allows for precise adjustments of minute tilts, rotations, and skew angles. It is ideal for laser beam scanning, mirror alignment, and surface matching. Using piezoelectric elements, it can perform angular displacements such as rotation and tilt quickly and accurately. This type features a flexible hinge structure that enables rapid small-angle displacements. In addition to rotation and tilt, linear motion is also possible through simultaneous control of multiple axes. The high responsiveness of the piezoelectric elements, combined with feedback control from built-in sensor signals, enables high-speed and high-precision alignment of small angles. The simple design of the components allows for a compact main body, making it easy to integrate into devices. We offer a variety of angle adjustment options, including simple tilt types, rotation types, goniometer types with a virtual rotation center, and even planar skew types with a three-point support structure. *For more details, please download the materials or feel free to contact us.

• Other machine elements

The piezo stage type for PT optical mirrors allows for precise adjustments of minute tilts, rotations, and skew angles. It is ideal for laser beam scanning, mirror alignment, and surface matching. Using piezoelectric elements, it can perform angular displacements such as rotation and tilt at high speed and with precision. This type features a flexible hinge structure that enables rapid small-angle displacements. In addition to rotation and tilt, simultaneous control of multiple axes allows for linear motion as well. The high responsiveness of the piezoelectric elements, combined with feedback control from built-in sensor signals, enables high-speed and high-precision alignment of small angles. The simple structure of the components allows for a compact main body size, making it easy to integrate into devices. We offer a variety of angle adjustment options, including simple tilt types, rotation types, goniometric types with a virtual rotation center, and planar skew types with three-point support. *For more details, please download the materials or feel free to contact us.*

• Other machine elements

The piezo stage PT tilt and rotation type allows for adjustments of minute tilts, rotations, and skew angles. It is ideal for laser beam scanning, mirror alignment, and surface matching. Using piezoelectric elements, it can perform angular displacements such as rotation and tilt quickly and precisely. It features a type with an elastic hinge structure that enables rapid small angular displacements. In addition to rotation and tilt, linear motion is also possible through simultaneous control of multiple axes. The high responsiveness of the piezoelectric elements, combined with feedback control from built-in sensor signals, allows for high-speed and high-precision alignment of small angles. The simple composition of the components enables a compact main body size, making it easy to integrate into devices. We offer a variety of angle adjustment options, including simple tilt types, rotation types, goniometer types with virtual rotation centers, and planar skew with a three-point support structure. *For more details, please download the materials or feel free to contact us.

• Other machine elements

This is a PF objective lens focus type horizontal piezo stage for ultra-precision positioning. The horizontal type is thin, compact, and offers a wide variety of stroke options. We provide a lineup of strokes ranging from 15nm to 400nm. The PF objective lens focus type is specially designed for adjusting the focus of objective lenses. By integrating it into microscopes, observation equipment, various inspection and manufacturing devices, and laser processing machines, it enables faster and more precise focus adjustments of the lenses. We offer several screw sizes to accommodate revolvers and objective lenses from various manufacturers. Additionally, the high responsiveness of the piezoelectric elements and feedback control from the built-in displacement sensor allow for quick and accurate focusing on moving subjects. *For more details, please download the materials or feel free to contact us.*

• Other machine elements

This is a vertical type PF objective lens focusing stage with ultra-precision positioning. The vertical type is designed with high rigidity, emphasizing the rapid response of the lens. The PF objective lens focusing type is specifically designed for adjusting the focus of objective lenses. By integrating it into microscopes, observation instruments, various inspection and manufacturing devices, and laser processing machines, it enables faster and more precise focus adjustments of the lenses. We offer several screw sizes to accommodate various manufacturers' revolvers and objective lenses. Additionally, with the high responsiveness of the piezoelectric elements and feedback control from the built-in displacement sensor, it can quickly and accurately focus on moving subjects. *For more details, please download the materials or feel free to contact us.*

• Other machine elements

The piezo stage type for ultra-precision machining is ideal for applications in ultra-precision machining of axes. It can be used as a fast tool servo (FTS) for cutting tool engagement and movement of the workpiece, enabling precise mold machining. It is equipped with a laminated piezoelectric element that has several times greater output force compared to other types. ■ Dust and drip protection measures It features a sealed structure that addresses issues with cutting fluids and mist, preventing the intrusion of small cutting debris. ■ Robust main body To ensure stability during machining, steel material is used for the main body. It has a robust structure that does not compromise machining accuracy due to vibrations or chatter. *For more details, please download the materials or feel free to contact us.

• Other machine elements

This is a stage that enables nano and micro machining in precision cutting. It can control the position of the tool's cutting and the workpiece (the object being processed) with high speed and high precision. Precision mold processing can be achieved using FTS (Fast Tool Servo) for the cutting of the tool and the movement of the workpiece. ■ Dust and drip prevention measures It has a sealed structure to address cutting fluid and mist issues, preventing the intrusion of small chips and other debris. ■ Robust main body To ensure stability during processing, steel material is used for the main body. It features a robust structure that does not compromise processing accuracy due to vibration or cutting load. *For more details, please download the materials or feel free to contact us.

• Other machine elements

The "Ultrasonic Motor Stage" is a high-precision positioning stage capable of micro-feeding movements in nanometer units up to a maximum of 100mm. It operates with a dedicated controller and closed-loop control using an internal linear scale. It is ideal for optical experiments and analytical measurement instruments that require high positioning reproducibility. It features lower heat generation and magnetic fields compared to electromagnetic motor types, making it suitable for special environments such as vacuum and non-magnetic conditions. We offer a lineup that includes "X-axis stages," "XY-axis stages," and "rotary stages." For more details, please download the catalog or contact us.

• Actuator

The "force sensor" is a sensor capable of detecting and measuring microforces at the μN level and high pressing forces in the 100N class. It is available in "microforce type" and "high rigidity type." This force sensor utilizes capacitive sensing technology and can be customized to meet specific environmental conditions and requirements. Examples of applications for the "microforce type": ■ Contact detection of probes ■ Monitoring of microfriction and thrust forces ■ Contact management of small components ■ Tensile and compressive force measurements of small test specimens Examples of applications for the "high rigidity type": ■ Measurement of cutting and grinding forces during precision machining ■ Detection of contact between the cutting edge of a tool and the workpiece ■ Measurement of pressing and pulling forces ■ Strength testing *For more details, please request documentation or view the PDF data available for download.

• Other measurement, recording and measuring instruments
• Sensors

The NS1000 series realizes high-precision positioning in micro areas by leveraging the excellent characteristics of piezoelectric actuators and displacement sensors. 【Features】 ■ Composed of stages with a stroke of 30μm or less ■ Structure that directly transmits the minute displacement of the piezoelectric element to the table ■ High resolution and fast response ⇒ Suitable for ultra-high precision positioning in micro areas. *For more details, please download the materials or feel free to contact us.

• Other FA equipment

This is the "Ultra-Precision Positioning Piezo Stage Comprehensive Catalog" from THK Precision, featuring a maximum resolution of 1nm and excellent responsiveness. The catalog includes a wide range of products suitable for various applications: - "Basic Type PS," ideal for a wide range of uses with a rich lineup. - "Open-Type PK," perfect for combinations with microscopes and optical transmission devices. - "Objective Lens Type PF," optimal for focusing objective lenses. - "Tilt and Rotate Type PT," best for alignment and surface matching. - "Precision Machining Type PU," ideal for nano and micro processing in ultra-precision cutting. - "Controller NC," which drives with closed-loop control using displacement sensors. - "Driver PH," which operates with open-loop control by applying voltage. Many products are featured in the catalog. Available for free download via "PDF Download."

• Other FA equipment

This is a guide for "precision instruments" from THK Precision, ideal for applications such as microscopes, inspection equipment, ultra-precision machining machines, micro force measurement, and precise displacement measurement. - Ultra-high resolution stage for microscopes using elastic hinge guides and piezoelectric actuators: "Nano Servo Stage for Microscopes" - High-precision positioning stage using SIDM actuators: "Nano Step Slider for Microscopes" - Tools optimal for nano and micro machining and machining force measurement in ultra-precision cutting: "Stage and Sensor for Precision Mold Processing" - Micro force sensor using high-sensitivity thin film strain gauges and capacitive sensors: "Force Sensor for Micro Loads" We have many more products to introduce. *For more details, please download the materials or feel free to contact us.

• Other FA equipment

The "Core Punch Actuator Impact Assist" is an electronic hammer that utilizes the inertial force generated when a piezoelectric actuator is rapidly elongated to deliver impact force to an object and move it. By applying a steep voltage to the piezoelectric actuator, impact force is generated in the core punch actuator. The impact force varies depending on the waveform of the voltage applied to the piezoelectric actuator, the size of the piezoelectric actuator, and the weight of the load. 【Applications】 ■ Positioning of parts in a temporary fastening state ■ Precision press-fitting ■ Centering of disks and rotating parts ■ Alignment of lenses ■ Vibration source ■ Optical axis adjustment for laser optics *For more details, please download the materials or feel free to contact us.

• Actuator