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アイティ・テック

EstablishmentJanuary 19, 2006
capital1200Ten thousand
addressTokyo/Taito-ku/Taitung 3-7-3
phone03-5846-3460
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last updated:May 28, 2012
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アイティ・テック List of Products and Services

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Appearance Automatic Inspection Machine IMS-3000

Ideal for foreign matter inspection of substrates after cleaning, internal defect inspection of glass substrates, and length measurement inspection of transparent electrode patterns.

We inspect the minute defects of various products such as panel substrates, films, and semiconductor components in the diversifying industrial sector using the latest line sensor appearance inspection system. By integrating mechanical, optical, and image processing technologies through cutting-edge optical alliance technology, we propose a unique high-speed and high-precision inspection machine. This appearance inspection machine is equipped with inspection units that cover a range from micro to macro, allowing for various inspections, and can be constructed with multifunctional units for inspection, review, processing, and adjustments tailored to specific purposes. For more details, please download the catalog or contact us.

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  • Visual Inspection Equipment

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Standard scale 50mm

You can perform dimensional measurements directly on the measurement object using magnification calibration for image processing and other methods.

This is a standard glass scale. It comes with a 15x magnifying glass. For more details, please download the catalog or contact us.

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Bernoulli Drop (Meteorological Agency PAT)

A floating experimental device to investigate the shape of raindrops.

The vertically rectified rising air and axial flow fan create a high peripheral pressure two-layer flow that suspends raindrops in the internal pocket area. You can conduct aerial battles with various sizes and multiple suspended droplets, as well as fusion and decomposition experiments. For more details, please download the catalog or contact us.

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Height measurement inspection machine

Microscope-type non-contact height/step/thickness measuring instrument compatible with 300mmφ wafers.

High-precision measurements can be performed semi-automatically with image detection of the target's left and right lines and automatic control of the Z-axis. For more details, please download the catalog or contact us.

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Dual-Sided Position Confirmation Microscope DVM-400NEW

A microscope that superimposes images of both sides of the specimen within the field of view and compares the amount of displacement, which can be measured using a measuring system.

This is a microscope that overlays images of both sides of the specimen within the field of view and compares the amount of displacement for observation, allowing measurement with a measuring system. The objective lenses come in five types, with magnifications ranging from 50x to 1000x, accommodating a wide variety of samples. It features NIR visible/infrared transmission type. There is also a camera position synthesis device available. For more details, please download the catalog or contact us.

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ITO Film Inspection Device for Touch Panels

Measurement of ITO film on PET film with a resolution of 1μm. Inspection device equipped with image autofocus function.

This is an appearance inspection device for ITO films on PET film. It allows for clear observation of the presence or absence of the ITO film using a halation optical system, and it is easy to operate. The optical system movement to specified coordinates and imaging/measurement are controlled by the system. It also features an image auto-focus function. For more details, please download the catalog or contact us.

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Inspection of large glass substrates with a large panel microscope.

The movement amount is displayed on a digital counter using a microscope that inspects large glass substrates. There are manual and electric types available.

This is an inspection microscope for inspecting large substrates. Large substrates can be placed on the stage and moved for microscope inspection. The movement amount is displayed on a digital counter, allowing for line width and position measurements. The manual type features a half-nut mechanism for free movement and a handle for fine adjustment. The electric type can be remotely operated with stepping drive. For more details, please download the catalog or contact us.

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Length measuring microscope for module product inspection.

Panels up to 60" can be inspected for clear field transmission, reflection, and differential interference using an electric revolver and autofocus for focused image inspection.

This is a length measurement microscope that inspects module products up to 60 inches. With an extended optical tube, visual inspection and monitor inspection can be performed at hand. As it is a fixed-type microscope, visual inspection and monitor inspection can be conducted with the extended optical tube, and automatic measurement can be performed in conjunction with the stage movement. For more details, please download the catalog or contact us.

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Small microscope for inspecting large FPD panel substrates and large glass substrates.

A testing machine capable of visual inspection and monitor inspection that reads FPD panels at increments of 1μm.

This is a microscope for inspecting FPD panels. You can place the panel on a glass stage and slide it in the XY direction using a hand handle, and position it precisely with a fine adjustment handle. The movement can be read in 1μm increments using a digital counter, allowing for visual inspection and monitor inspection, and inspection images can be saved as files. For more details, please download and view the catalog.

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Inline front and back appearance inspection device

An inline board appearance inspection machine that can automatically inspect surface and back defects on a panel manufacturing line.

The "front and back appearance inspection device" is an inline substrate appearance inspection machine. It is installed above and below the inspection substrate to detect the running substrate with sensors and perform appearance inspection using a line camera. For more details, please download the catalog or contact us.

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Panel electrode inspection machine

It can be installed on the existing manufacturing line to perform image inspection of the electrode part.

The panel electrode inspection machine inspects the disconnection/semi-disconnection of the G electrode lines on the transport substrate in the panel manufacturing line. It sets up a bridge on the conveyor and inspects the large panel's electrode lines moving at 300mm/second from two locations on the top, using high-speed line cameras and optical systems with a resolution of 5μm. For more details, please download and view the catalog.

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Microspot exposure microscope

Ultraviolet light inspection can be performed in a microscopic area.

The micro spot exposure microscope is a high-precision review inspection microscope for mask defects that can perform slit exposure on small areas of the screen. It places a mask coated with resist on a stage, automatically reproduces the defect positions from the defect inspection machine's data, determines the exposure range with an XY slit, and uses a timer to expose with a mercury spectrum in a spot irradiation microscope. For more details, please download and view the catalog.

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Portable Groove Shape Measuring Instrument Model MRI-1500

Regular maintenance of the main roller allows for checking wear and shape abnormalities.

The portable groove shape measuring device, model MRI-1500, is used for inspecting the groove shape of the main roller of wire cutting machines and the grooves of wire mounting rollers. The inspection device can be placed on the roller, allowing for high-precision camera display of the groove shape profile and image measurement inspection of the shape. For more details, please download and view the catalog.

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Infrared microscope

You can perform inspections in IR bright field and dark field using adjustments to infrared light illumination.

Non-destructive monitoring and inspection of internal defects in infrared-transmitting materials such as semiconductor wafers can be performed simultaneously with visible and infrared images, allowing for the detection of pattern misalignment and internal defects. The surfaces of TSV through-silicon vias and stacked wafers can be monitored simultaneously with visible imaging and IR focus adjustment to observe the interior of the wafers. For more details, please download and view the catalog.

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Sapphire Automatic Inspection Machine

Inspection data files and defect image files can be displayed using judgment or macro MAP.

It is a high-speed automatic inspection machine for sapphire wafer defects and foreign material defects. It uses a double cassette system to load, inspect, and unload at a cycle time of 30 seconds per wafer. For more details, please download and view the catalog.

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Laura Measuring Device Model WCR-1000

High-speed, high-precision, non-contact measurement of angles from 0 degrees, easy to use.

This is a non-contact measurement device for the groove shape of rollers in a wire cutting machine that cuts silicon ingots. It captures the groove shape of the outer circumference of the roller using a line camera moving in a cross-sectional projection method, measuring all groove data in 60 seconds. For more details, please download and view the catalog.

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Chip element defect inspection machine

It is a high-precision XYZ auto stage.

Automatically inspects chip element defects on wafers. The system controls a microscope color camera and auto stage to automatically identify defects at the chip element level. For more details, please download and view the catalog.

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Wafer BG Terrace Inspection Machine

We will perform auto-alignment and automatic inspection with a high throughput of 30 seconds per sheet.

The terrace width and edges on the top surface of the wafer's outer circumference can be measured and inspected for defects using a line camera. When the wafer is placed on the set plate, auto-alignment and automatic inspection are performed at a high throughput of one wafer every 30 seconds. For more details, please download and view the catalog.

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Wafer Chip Monitor Inspection Machine Model WBM-2000E

High-quality monitor inspection at optimal magnification is possible with the Takara Leica APO zoom optical system!

This is a visual inspection system for wafer chips that allows operators to reliably identify defective chips while viewing high-quality optical images. It can accurately classify defect locations/categories and image files. The system features an expanding stage that moves in steps, enabling color monitor inspections at optimal magnification suited to chip sizes. For more details, please download and view the catalog.

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Inspection machine stack counter

Compact design with an integrated tabletop type that allows for count inspection via touch panel operation!

The number of wafers inside the stack case for wafer shipment is counted from outside the case. This is an inspection machine that can count the number of wafers packaged in the stack container from outside the container. For more details, please download and view the catalog.

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Ultramicroscope

We will inspect the thickness and warping of the workpiece with precise focus using autofocus!

This is a real-time imaging microscope that automatically conducts high-precision, high-speed microscopic inspections of various materials, such as wafer masks. It is an automatic inspection microscope with the world's fastest and highest resolution, featuring a resolution that approaches the limits of optical microscopes and a high-resolution color camera for live reviews. For more details, please download and view the catalog.

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MEMS wafer chip inspection machine

High-precision cleanroom-compatible auto-review microscope

This is an autofocus microscope that inspects fine chip defects on MEMS wafers. The autofocus microscope is mounted on the XYZ electric body. By placing the wafer and controlling the XYZ stage with software, it can inspect the device chip on the wafer and input focused images of defect locations at the optimal magnification for inspection. For more details, please download and view the catalog.

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Wafer Edge Inspection Machine

Low price compared to other companies without reducing measurement resolution!

We will simultaneously capture images of the edge surfaces and the top and bottom surfaces of the wafer's outer circumference to inspect for scratches, foreign objects, cracks, and chip defects. The inspection wafer is adhered, and the camera recognizes the wafer shape, such as notches and orifices, to optimize drive control. The newly developed triple optical system and integrated lighting achieve optimal illumination for image processing. The inspection time is fast, taking only 10 seconds per wafer. With external communication capabilities, it can be integrated directly into an automatic machine. For more details, please download and view the catalog.

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Wafer Edge Inspection Machine WEG3000

Achieve optimal lighting with a triple optical system and integrated lighting!

This is an automatic inspection machine for the cross-sectional profile shape inspection of the outer edge of a 300mm wafer and for the image defect inspection around the entire edge. It allows for review inspection of edge defects and can create image files. For more details, please download and view the catalog.

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Wafer Defect Automatic Inspection Machine WEG8000

It is a cassette-to-cassette type wafer edge automatic inspection machine.

It is a cassette-to-cassette type wafer edge automatic inspection machine. It achieves a high throughput with a 10-second inspection time per wafer and a 30-second takt time. A robot takes out one wafer at a time from a cassette that holds 25 wafers, performs automatic alignment, inspects it, and then stores it back in the cassette. The operation is simple.

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Autofocus unit

Autofocus device for microscopes and image inspection.

It is an autofocus device for microscopes and image inspection. As the magnification of the optical system increases, the focus of the image becomes less sharp. Additionally, sample deformation and movement accuracy can also reduce focusing precision, which decreases the accuracy of image inspection. The autofocus device solves these problems. It is easy to operate due to software control and follows changes with a focusing precision of less than ±1μm. For more details, please download and view the catalog.

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Auto Focus Microscope LSAF2

AF device for high-resolution microscope inspection of wafer chip patterns.

This is an AF device for high-resolution microscope inspection of wafer chip patterns. Even when the workpiece is moved using an electric XY stage, pattern matching inspection can always be performed with a focused image. It also has a function for auto-review image files of sample height at the optimal magnification for inspection, controlled by coordinates from file data. After inspection, a macro MAP can be displayed to confirm defect locations.

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Auto Focus Microscope LSAF1

It is an autofocus microscope for single-object use. With the focus stage included, it can be easily attached to the device to become an AF microscope.

Features 1. It is a V-type that can be integrated into various optical systems. 2. It automatically controls focus with a focusing accuracy of less than 1μ.

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