プレシテック・ジャパン Product Lineup

The "Flying Spot Scanner" is an optical measuring device that can perform wide-area scans (up to φ80) using XY2-axis galvanometer mirrors. Since stage scanning is not required, there is no influence from vibrations of the stage. Thanks to the principle of spectral interference, it can measure thickness, dimensional shapes, and inspect surface defects. Additionally, because the incident and reflected light are in a coaxial optical system, good results can be obtained even on glossy surfaces. 【Features】 ■ Wide-area scanning ~φ80mm ■ High resolution XY 6.5μm~, Z 1nm~ Minimum beam spot diameter 13μm, high Z resolution due to spectral interference method ■ No XY stage required, no stage vibrations Area scanning using galvanometer mirrors ■ Reduced development costs and shortened development lead times Software development kit (DLL, etc.) available for device integration ■ Applications Thickness measurement of glass substrates for FPD and LCD, measurement of wafer warp (distortion), lens shape inspection, PCB board shape inspection, height measurement of small precision parts, etc. *For more details, please refer to the materials. Feel free to contact us with any inquiries.

• Optical Measuring Instruments
• Other inspection equipment and devices

The "CHRocodile MPS2L" is a new color aberration confocal sensor (MPS) that can measure 24 points simultaneously. The wavelength difference corresponds to a constant thickness. It can handle multiple points with a single probe head. There is no damage, deformation, or impact on the shape of the sample. 【Features】 ■ Optical and non-contact ■ No consumables required ■ No damage, deformation, or impact on the shape of the sample ■ Capable of measuring inclined workpieces ■ Compatible with hot end processes *For more details, please refer to the PDF document or feel free to contact us.

• Optical Measuring Instruments
• Sensors

This document provides information about wafer thickness measurement sensors. We introduce the "CHRocodile 2 Series," which is suitable for replacement with contact gauges, as well as the design of optical measurement heads for in-process semiconductor applications. Please take a moment to read it. 【Contents】 ■ CHRocodile 2 Series ■ Design of optical measurement heads for in-process semiconductor applications ■ Advantage: Use of chromatic aberration confocal principle ■ Advantage: Use of spectral interference principle ■ Si thickness measurement data during wafer in-process *For more details, please refer to the PDF document or feel free to contact us.

• Optical Measuring Instruments
• Sensors

The "CHRomatic Vision Camera" is a line camera for high-speed appearance inspection. Utilizing the principle of chromatic aberration confocal, it has a wide depth of field of up to 3mm. Focusing is unnecessary, allowing for high-contrast images to be captured even on uneven surfaces. It can obtain two-dimensional images. Additionally, with a high-speed scan of up to 140kHz, inline appearance inspection (for shape defects such as cracks and scratches, as well as foreign object inspection) is possible. 【Features】 ■ High resolution XY 0.9um~2.9um (the 3mm depth of field type is 2.9um) ■ High contrast for various materials ■ High speed and resistant to vibration ■ Contributes to reduced development costs and shortened development lead times, with a software development kit (DLL, etc.) available for device integration. Interfaces such as CameraLink and GigE are supported. ■ Proven results in appearance inspection for semiconductors, consumer electronics, and glass. *For more details, please refer to the materials. Feel free to contact us with any inquiries.

• Optical Measuring Instruments
• Sensors

"CHRocodile C" is a chromatic aberration confocal sensor that measures displacement or thickness due to chromatic aberration using white light. It has a compact size of under 440g. It is compatible with all surfaces, including "rough," "mirror," and "colored materials." The probe head is available in sizes from 200μm to 10mm. 【Features】 ■ Compact ■ Surface-independent ■ Accurate and stable measurements even at inclinations of up to ±45° ■ Shape-independent ■ Probe heads available from 200μm to 10mm *For more details, please refer to the PDF document or feel free to contact us.

• Optical Measuring Instruments
• Sensors

We would like to introduce the 'CHRocodile 2IT DW1000' handled by PreciTech Japan Co., Ltd. The light source is NIR SLD. The measurement range is 80um to 8200um (n=1) and 20um to 2000um (n=3.7). Additionally, it comes with a 5-axis encoder. 【Product Specifications】 ■ Light Source: NIR SLD ■ Measurement Range: 80um to 8200um (n=1), 20um to 2000um (n=3.7) ■ External Trigger, Synchronous IO ■ 5-axis Encoder Included ■ Ethernet, RS422 ■ Analog I Output Included *For more details, please refer to the PDF document or feel free to contact us.

• Optical Measuring Instruments
• Other measurement, recording and measuring instruments

Presitech is a specialist in laser material processing and optical measurement technology. We are not just a supplier of systems and components, but a professional partner in ensuring a smooth processing process for our customers. We offer consultations from the foundational stage and accurately consult with our customers on their needs and objectives. This allows us to provide appropriate solutions for our customers' applications. 【Business Activities】 ■ Laser Material Processing ■ Optical Measurement Technology *For more details, please refer to the PDF document or feel free to contact us.

• Optical Measuring Instruments
• Laser Components

The "CHRocodile 2DW Series" is a device that can non-contact measure the thickness of materials such as wafers and coatings. It is capable of measuring doped wafers and can be applied in-line, with a proven track record among many customers. In addition to measuring the thickness of semiconductor wafers like sapphire, Si, and SiC, it can also measure the thickness of films, resins, glass, and solar cells. It supports interference film thickness of up to 16 layers. 【Features】 　■ Wide range of thickness measurement, compatible with various materials 　　　With a rich lineup of probes, it covers thickness from thin films (a few micrometers) to thick films (780 micrometers). It supports doped wafers. 　■ High resolution (sub-micron, minimum 1nm) 　■ Contributes to reducing development costs and shortening development lead times, 　　　with a software development kit (DLL, etc.) available for device integration 　■ Extensive track record in the semiconductor industry *For more details, please refer to the documentation. Feel free to contact us with any inquiries.

• Other measurement, recording and measuring instruments
• Sensors

The PreciTech 2IT series is a non-contact thickness measurement sensor that utilizes spectral interference methods. It excels in high-speed and high-precision thickness measurements and is used for measuring and inspecting the thickness of wafers, films, coatings, and air gaps. It is also capable of measuring impurity/doped wafers. Other features include a wide measurement range, large allowable angles, and compatibility with various materials. There is also an area scanner that allows for surface measurements without scanning via a moving stage. There are numerous instances of its incorporation into semiconductor manufacturing equipment, and it is also used in LCD manufacturing equipment, film thickness monitoring, in-situ, and inline inspections. Additionally, it is utilized as a sensor for desktop machines such as standalone units. **Applications**: Thickness measurement before and after wafer processing (such as polishing), thickness measurement during processing, film/coating thickness measurement, glass wafer thickness inspection, TTV, thickness distribution, PCB coating thickness, battery foil thickness, glass thickness, air gaps, and more.

• Other measurement, recording and measuring instruments
• Sensors

The "Flying Spot Scanner" is a scanner that combines spectral interference measurement technology with a high-speed scanning system. It can perform high-speed scans of a diameter of 80mm, suitable for offline, inline, and quality control applications. It allows for easy inspection of target areas with definable scanning shapes and filters. Additionally, it can achieve good results even on reflective surfaces. 【Features】 ■ Ultra-fast optical scanning ■ The measurement object and optical sensor are fixed ■ No XY stage required ■ Thickness and distance (displacement) measurement based on spectral interference principles *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices
• Other measurement, recording and measuring instruments
• Scanner

The "CHRocodile CLS" enables high-speed 3D shape measurement at 1 million points per second. It also offers very high precision with a maximum resolution of XY 1µm and Z 0.02µm. We provide up to six types of measurement heads based on range, resolution, and accuracy, and it can be applied inline as well. 【Features】 　■ Non-contact 3D shape measurement over a wide area 　　　Maximum line width of 8.3mm 　■ Wide acceptance angle 　　　Can accommodate reflective surfaces at ±45°, edges, and steep slopes 　■ Contributes to reduced development costs and shortened development lead times, 　　　with a compact unit and a software development kit (DLL, etc.) for equipment integration available 　■ Extensive track record across multiple industries 　　　Semiconductor industry, consumer electronics, glass manufacturing, medical field *For more details, please refer to the materials. Feel free to contact us with any inquiries.

• 3D measuring device
• Other inspection equipment and devices
• Other measurement, recording and measuring instruments

"CHRocodile C" is an inexpensive optical single-point sensor. It maintains high speed and high precision comparable to other models, and can be used as a thickness sensor capable of measuring distances with nm resolution, simultaneously measuring up to 4 surfaces and 3 layers of thickness. Additionally, it is compact and palm-sized with the probe integrated into the main body, achieving space-saving during embedding, and is also recommended for inline use. This sensor is compatible with all surface types, including rough, mirror, and colored materials, and has a wide measurement range. It can also be used for measuring the thickness of graphite coatings. 【Features】 ■ Wide thickness measurement range, compatible with various materials A rich lineup of probes covers thickness from a few micrometers to thick films (up to 10mm). ■ High resolution (sub-micron, with a minimum of 8nm) ■ Contributes to reducing development costs and shortening development lead times, with a software development kit (DLL, etc.) available for device integration. ■ Extensive track record across multiple industries Semiconductor industry, consumer electronics, glass manufacturing, medical field *For more details, please refer to the materials. Feel free to contact us with any inquiries.

• Other inspection equipment and devices
• Other measurement, recording and measuring instruments
• Sensors

The "CHRomatic Vision Camera" is a product based on line camera technology that applies the principle of chromatic aberration confocal microscopy. It is compact and designed for embedded systems (no external light source required), and the chromatic objective lens can be replaced depending on the application and range. By adopting all the advantages of line sensors, it enables high-speed scanning and inline inspection within the area with ease. 【Features】 ■ Clear images even for non-flat workpieces ■ No influence from vibrations ■ High contrast for all materials ■ Maximum data acquisition: 100kHz (200MPixel/sec) ■ Depth of focus: 150μm to 3mm ■ Resolution: 1 to 5μm *For more details, please refer to the PDF document or feel free to contact us.

• Color camera
• Other inspection equipment and devices
• Other measurement, recording and measuring instruments