日之出水道機器 Product Lineup

■Reasons and Challenges for Using Granite in Equipment Frames (Bases) Granite is widely used for the frames (bases) of semiconductor manufacturing equipment due to its high dimensional stability and excellent damping properties. However, when it comes to complex shapes, the high processing costs of granite and the extended manufacturing lead times pose significant challenges. ■Solution: Mineral Casting and High-Precision Transfer Technology Material Characteristics: Polymer concrete, which has material properties similar to granite, such as approximately 10 times the damping capacity and low thermal conductivity compared to cast iron. Manufacturing Features: The casting method allows for the integral shaping of complex geometries, and the high-precision transfer technology enables the production of ultra-high-precision flat surfaces with flatness of 3 to 7 μm without machining. By applying mineral casting to complex-shaped equipment frames expected to be produced in medium to large lots, significant cost reductions and shortened manufacturing lead times can be achieved compared to processed granite products. The Hinode Group offers a one-stop solution from material development to processing and logistics, providing optimal solutions for our customers.

Are you experiencing extended takt times due to "micro-vibrations" that do not settle after high-speed movement during bonding and inspection processes? The instability in positioning accuracy is fundamentally caused not only by a lack of rigidity but also by the low "damping" characteristics of the material itself. ■ Three Factors Causing Residual Vibration - Material: While steel has high rigidity, it has a weak ability to absorb vibration energy, resulting in residual oscillation. - Structure: An imbalance of rigidity and mass in the structure can lead to increased oscillation. ■ Solution: Mineral Casting Using polymer concrete made from resin and aggregates, it possesses an overwhelming vibration damping capacity approximately 10 times that of cast iron (FC250). By adopting it for vibration-sensitive components, the overall damping of the equipment can be improved. The "settling time," during which vibrations stabilize to a certain amplitude, can be reduced by about 60%. ■ Criteria for Re-evaluation 1. High Damping: Use mineral casting for areas where immediate cessation of oscillation is desired. 2. High Rigidity: In cases with space constraints where rigidity must also be maintained, consider a hybrid structure with cast iron. The Hinode Group provides comprehensive support from material development to structural analysis. We propose optimal structures based on the rigidity and vibration analysis of the current structure.

In semiconductor manufacturing equipment, where high precision is accelerating, how to address vibrations emitted from the equipment itself and those from the floor significantly affects yield. Why not effectively utilize material properties to tackle the challenge of persistent vibrations? ■ Recommended materials by application Base/Frame: "Mineral Casting" with nearly 100 times the damping capacity of steel Column/Stand: "Mineral Casting × Cast Iron Hybrid Structure" that balances space-saving with rigidity and damping High-speed moving parts: Lightweight high-rigidity aluminum alloy "ATHIUM/ALSTIF" with rigidity equivalent to cast iron Head: "High Damping Cast Iron" with 2.5 times the damping capacity of flake graphite cast iron (FC250) The Hinode Group utilizes new materials and topology optimization to propose high-performance, low-cost equipment components. We provide one-stop solutions for foundry solutions, from development to mass production, to maximize equipment performance.

Are you struggling with "vibration not settling and cycle time extending" in semiconductor manufacturing equipment, where the demand for high throughput is expanding? In environments where miniaturization is progressing, the vibration absorption capacity of the components themselves affects yield. ■Essential Cause of Unsettled Vibration Although steel has high rigidity, its low "damping" means that once vibrations occur, they persist for a long time. ■Solution: Mineral Casting This is a type of polymer concrete made by solidifying resin and aggregates (crushed stone). It has overwhelming vibration damping properties, about 100 times that of steel (such as SS400) and about 10 times that of cast iron (such as FC250), instantly suppressing vibrations. ■Benefits of Implementation By adopting mineral casting for the base (frame) of the equipment, both equipment precision and throughput are improved. In spaces with strict spatial constraints, such as columns, there are successful cases where a hybrid structure of high-rigidity cast iron and high-damping mineral casting has reduced settling time by approximately 60% compared to conventional structures. To unlock the potential of the equipment, a review of material selection is essential. The Hinode Group offers optimal damping solutions.

Are you struggling with accuracy issues due to vibration and rigidity, or the costs and lead times of welded assembly structures (fabrication) in device development? We can solve that problem with castings! ■ Benefits of Casting by Application Area - Frame/Base: The material properties of cast iron and mineral casting (vibration damping and free-forming capability) can enhance rigidity and damping, improving device accuracy and productivity. Additionally, by using integrated molding, manufacturing lead times can be shortened compared to fabrication. - Moving Parts (Arms/Columns/Beams/Heads, etc.): By integrating multiple components, optimizing structures, and applying lightweight high-rigidity materials, we can achieve significant weight reduction while maintaining rigidity, enabling energy savings and increased speed for the device. - Chamber: The near-net shape of castings (material shape close to the final product shape) allows for lower costs compared to machining from block materials. The Hinode Group supports the improvement of your device performance and stable procurement from material and structural design to prototyping and mass production. Would you like to reconsider your device from the perspective of "materials"? [For more details, please download the catalog from the link below.]

Are you experiencing a decrease in positioning accuracy due to the vibration of components not settling during high-speed operation in post-processing bonding and testing? As equipment becomes larger and more refined, the selection of materials for the base and columns is a crucial decision that affects equipment performance. ■ The decisive differences between FC250 (flake graphite) and FCD450 (spheroidal graphite) Vibration damping: FC250 has approximately three times the absorption capacity of FCD450, allowing vibrations to settle quickly. Stiffness and strength: FCD450 has a high Young's modulus of about 165 GPa, making it less prone to deformation compared to FC250 (about 90 GPa). Cost: FC250 excels in yield during manufacturing and has less distortion after processing compared to FCD450, making it easier to produce at a lower cost and with stable quality. Applications: FC is suitable for equipment bases, while FCD is appropriate for arms and other components where strength and stiffness are required. ■ Selection guidelines 1. If precision is a priority: Choose FC, which excels in vibration settling, to shorten stabilization time. 2. If addressing load and deformation: Pursue thin and lightweight components with high-strength FCD. The Hinode Group can provide optimal material proposals tailored to design challenges, such as "high-damping cast iron" and "mineral casting." 【For more details, download the catalog from the link below】

"Mineral Casting" is a polymer concrete that solidifies aggregates with resin, featuring high damping properties, low thermal conductivity, and electrical insulation. By adopting it in machinery, high levels of damping can be achieved, and through a hybrid structure that fills a cast iron frame with mineral casting, it can also achieve high rigidity equivalent to cast iron. [Features] - Approximately 10 times the damping performance compared to cast iron (FC300), about 1/30 the thermal conductivity, and high electrical insulation - Significant reduction in manufacturing processes by incorporating insert nuts, grounding wires, coolant pipes, etc. (total cost reduction) - No melting process, greatly reducing CO2 emissions - High-precision transfer technology (0.003 to 0.007mm/1000mm) reduces costs through processing-free methods - Purely domestically produced with stable supply (production line with a capacity of 2000t/year will be fully operational from April) - Maximum size of 3,900×3,100mm, height of 4,000mm, and capable of handling up to 15t *For more details, please refer to the materials. Feel free to contact us with any inquiries.

"Mineral Casting" is a type of polymer concrete that solidifies resin and aggregates, using ores of varying particle sizes as aggregates, bonded with epoxy resin to create a high-performance composite material. It is primarily used in industrial machinery applications that require high precision and high-speed operation, particularly in Europe. Hinode Water Supply Equipment has recently formed a business partnership with the German RAMPF Group to begin the development, manufacturing, and sales of Mineral Casting products. We are building a system to deliver better products to our customers safely and quickly. 【Features】 ■ High vibration damping properties ■ Low thermal conductivity comparable to glass ■ Capable of integrated casting for piping, sensors, etc. ■ High precision transferability, achieving processing-free results *For more details, please refer to the materials. Feel free to contact us with any inquiries.

The composite material "Mineral Casting" is a stone material alternative that excels in supply stability due to being completely domestically produced, from raw material procurement to processing, contributing to the resolution of procurement risks associated with natural stone. It significantly simplifies the processing steps through the incorporation of functional parts and precision machining via high-precision transfer, achieving a reduction in lead time while ensuring the necessary accuracy. This artificial stone reproduces dimensional stability close to that of natural stone and can be applied to high-precision processing machines and measuring instruments. ■ Raw material procurement and manufacturing are possible within Japan, making it less susceptible to external factors, thus achieving stable supply. ■ Since parts like insert nuts can be integrally formed during casting, secondary processing is unnecessary. High-precision transfer is possible, reducing the polishing processes that were required with conventional stone, thereby shortening manufacturing time. ■ With low thermal conductivity and high vibration damping properties, it can be applied to processing machines and measuring instruments that require high precision, contributing to the high precision and speed of semiconductor manufacturing equipment and machine tools. ■ Additionally, if greater rigidity is required, a hybrid structure of cast iron and mineral casting can be proposed, which is effective for parts with strict dimensional constraints and fit requirements. *For more details, please download the PDF or feel free to contact us.

This material is a new substance developed as a high-grade version of mineral casting, applying and advancing the material development and manufacturing technologies of polymer concrete that our company has cultivated over many years. *For details about mineral casting, please refer to the catalog. - Features of this material: 1. It has a rigidity approximately 2 to 3 times greater than that of mineral casting. 2. It is a material with excellent low thermal expansion properties, achieving about 65% of the linear expansion coefficient compared to mineral casting. 3. Like mineral casting, it is a material that can be molded by pouring into a mold at room temperature, providing higher moldability compared to machined products. 【Properties of Hinogranite Material】 1. Static elastic modulus: 97 GPa 2. Linear expansion coefficient: 7.3×10^-6/K (average value in room temperature environment: 10 to 30°C) 3. Density: 3.2 g/cm³