テクノメイト List of Products and Services

This device is designed to stably supply and circulate dry solvent HS at a constant pressure and temperature for the characteristic testing of test samples. *For more details about the product, please refer to the "PDF Download" button below. *Feel free to contact us with any inquiries.

• Other semiconductor manufacturing equipment

It is used for supplying concentrated liquid to CMP equipment. 【Features】 ■ Uses PTFE valves ■ Built-in exhaust damper * For more details about the product, please refer to the "PDF Download" button below. * Feel free to contact us with any inquiries.

• Other semiconductor manufacturing equipment

This is a pump unit using an electric plunger pump. The discharge pressure and flow rate can be adjusted according to the customer's requirements, so please feel free to consult us. 【Features】 ■ One pump can accommodate multiple related applications ■ Skeleton housing for easy integration into the customer's equipment * For more details about the product, please see the "PDF Download" button below. * Please feel free to contact us with any inquiries.

• Other pumps

The "FSBL-50" is a pump incorporated into devices designed to spray fluids such as pure water, IPA, and NMP at high pressure to remove films from cleaning targets like wafers. The material of the wetted parts is SUS316, and the check valve features a newly developed poppet valve that ensures a long lifespan without generating metal powder. Additionally, the sealing material in the pressurization section is standardly made of fluoropolymer polyethylene, and it can also accommodate organic solvent specifications such as NMP. 【Features】 ■ Compact design suitable for integration ■ Operation allows control of discharge pressure by varying the air supply pressure ■ Does not use electricity, making it suitable for fire and explosion hazard areas * For more product details, please refer to the "PDF Download" button below. * Feel free to contact us with any inquiries.

• Other physicochemical equipment

The "PU300A" is a booster unit used when there is insufficient pressure in the factory's pure water supply line or when there is insufficient pressure for supply to upper floors in a building. Even if the external load is in a shut-off state during operation, internal circulation is possible due to the operation of the relief valve. 【Features】 ■ Boosts low-pressure pure water for supply to equipment ■ Automatic switching to internal circulation via relief valve during external shut-off operation ■ Detection of rising circulation water temperature (operating temperature 50℃) * For more details about the product, please refer to the "PDF Download" button below. * Feel free to contact us with any inquiries.

• Other pumps

The "Continuous Slurry Supply Device P85" is a device that supplies slurry applied during the wafer polishing process in semiconductor manufacturing. With the downsizing of the refrigeration unit and heater, the device's volume has been reduced by 61% compared to our conventional models, while the supply flow rate has increased. Additionally, the time required to supply from raw material replenishment has been significantly shortened from 52 minutes to 22 minutes compared to our conventional models. 【Features】 ■ Our unique blending method combines slurry and pure water (patent obtained) → Eliminates the need for a pump, achieving over 15% cost reduction compared to our conventional models. ■ Our proprietary heating method heats the slurry (patent obtained) → Achieves high efficiency and high response heating. *For more details about the product, please refer to the "PDF Download" button below. *Feel free to contact us with any inquiries.

• Other semiconductor manufacturing equipment

The "PU201A" is a booster unit used when the pressure of the pure water supply line in the factory is insufficient or when there is insufficient pressure for supply to upper floors in a building. Even if the external load is in a shut-off state during operation, internal circulation is possible due to the operation of the relief valve. 【Features】 ■ Boosts low-pressure pure water for supply to equipment ■ Automatic switching to internal circulation via relief valve during external shut-off operation ■ Detection of rising circulation water temperature (operating temperature 50℃) * For more details about the product, please refer to the "PDF Download" button below. * Feel free to contact us with any inquiries.

• Other pumps

The "SSBL-XX series" is a pump suitable for lift-off devices that remove films by high-pressure injection of pure water, IPA, NMP, etc., onto wafers and other surfaces. It can be used in locations where fire and explosion prevention measures are necessary due to its air-driven design. Fluororesin and ultra-high molecular weight polyethylene are used as sealing materials in the pressurization section. O-rings can be selected from FKM specifications or Kalrez specifications. It has been supplied to the market since 2000 for a period of 25 years. 【Features】 ■ Compact design suitable for embedding ■ Operation allows control of discharge pressure by varying air supply pressure ■ Capable of boosting pressure up to 17.6 MPa at an air pressure of 0.5 MPa (SSBL-37.5A) *For more details, please refer to the PDF materials or feel free to contact us.

• Other physicochemical equipment

The "KPW Series" is a unit that combines the peripheral equipment basically required for high-pressure pumps, making it easy to use for purposes other than dedicated mass production devices. It is a high-pressure water generation unit with an air-driven plunger pump built-in, designed to be suitable for device integration with components such as an air pressure regulator, air pressure gauge, and discharge pressure gauge integrated into one unit. It is used for high-pressure jet cleaning, such as IPA cleaning of wafers and solvent stripping. 【Features】 ■ Compact embedded pump unit (W194×H190×D490) ■ Standard built-in solenoid valve for air supply, air regulator, and pressure gauge ■ Optional built-in solenoid valve for pure water, discharge valve for air drive, and NMP-compatible sealing materials are available *For more details about the product, please refer to the "PDF Download" button below. *Feel free to contact us with any inquiries.

• Other pumps

The "Vacuum Pump Unit P94" is a unit used as a vacuum source to hold the workpiece while cutting it with a chemical solution. It is used as a vacuum generation device for the wafer vacuum chuck of a dicing machine and consists of a water-sealed pump, control valve, flow meter, vacuum pressure gauge, and other components. 【Features】 ■ A water-sealed vacuum pump unit for vacuum chucks in wet processing equipment ■ Suitable for suction of gases containing water droplets and water vapor *For more details about the product, please refer to the "PDF Download" button below. *Feel free to contact us with any inquiries.

• Other pumps

This is designed to cool the heat generated during the emission of a YAG laser using pure water, consisting of a pure water unit, pump, tank, and temperature control unit, and is available in both air-cooled (P23) and water-cooled (P14) versions. 【Features】 ○ Composed of pure water unit, pump, tank, and temperature control unit ○ Applicable laser output: 50W ○ Pure water unit: built-in ○ Filter: 5 microns ○ Pump: stainless steel pump 0.4KW ○ Temperature control method 　Heat exchange between pure water and cooling water via a heat exchanger 　Controlled by opening and closing the cooling water ○ Air-cooled version (P23) also available

• Cooling system

This device is used to heat ultra-pure water, which is utilized for cleaning silicon wafers, liquid crystal glass substrates, hard disk substrates, and various components, using a carbon heater. 【Features】 - The pure water heating container is made of quartz glass. - The pure water contact piping is made of fluororesin. - A carbon heater suitable for pure water heating is used. - Heating efficiency is over 96%. - Stable temperature control within ±1°C using PID control. - Heating up to the operating temperature within 120 seconds from startup. - Compatible with a wide range of flow rates and temperatures. - Temperature adjustment in response to flow rate changes is possible. *For more details about the product, please refer to the "PDF Download" button below. *Feel free to contact us with any inquiries.

• Heating device

This is an experimental supply device for supplying a diluted mixture of slurry liquid from a tank to the equipment. 【Features】 ○ Tank capacity: 125L, ivory PVC ○ Diaphragm pump: 10 liters per minute ○ Supply air: 85 liters per minute ○ Power capacity: AC100V 5A

• Other semiconductor manufacturing equipment

The "Additive Dropping Device P101" is a device designed to supply additives at a uniform concentration by injecting and mixing the additive into deionized water (DIW) in proportion to the flow rate of the cutting fluid, which can be set to any desired concentration. 【Specifications】 〇 Applicable fluid: Cutting fluid 〇 Mixing liquid: Additive 0.2–20 mL/min 〇 Cutting fluid flow rate: 2–20 L/min at 0.2–0.5 MPa, water temperature 20–25℃ 〇 Concentration setting range: 0.01%–0.1% 〇 Mixing accuracy: ±10% ○ Conductivity measurement range: 0–20 μS/cm ○ Alarm output: Displays the following on the screen and outputs an external signal when an alarm occurs ● For other functions and details, please download the catalog.

• Other physicochemical equipment

This device receives commands for hot air generation from the target device and generates hot air for a set period using a built-in timer to supply drying hot air to the wafer. 【Specifications】 ○ Power supply voltage: AC100V±10%, 10A, 50/60Hz ○ Connect directly to the primary side of the power supply breaker without using a terminal block ○ Temperature setting range for each part and upper limit temperature limiter settings ○ Hot air timer setting time: 0-10 minutes 【Safety Specifications】 ○ If the temperature controller detects "sensor abnormality" or "temperature abnormality," it will cut off the power to the temperature controller and illuminate the "operational abnormality" lamp. ○ To prevent temperature rise due to failure in nozzle heater control, monitor with an independent thermometer at the heater outlet, and if the set temperature is exceeded, cut off the power to the temperature controller and illuminate the "temperature abnormality" lamp. ○ Contains a thermometer to measure the temperature at the nozzle tip. ○ Dimensions: W200×D200×H375

• Other physicochemical equipment

This device consists of a cooling plate and a temperature control unit, making it suitable for integration into analytical instruments and similar applications. 【Features】 ○ Automatically measures temperature; if it is lower than the set temperature, it increases, and if it is higher, it decreases. ○ Performance 　・Operating temperature range: 0 to 70℃ (room temperature 20℃) 　・Temperature setting accuracy: ±0.1℃ (at room temperature 20℃, assuming no influence from surrounding airflow) 　・Temperature control accuracy: ±0.2℃ (at room temperature 20℃) ○ Specifications (Cooling Plate Section) 　・External dimensions: W173*D174*H114 　・Plate dimensions: W88*D88*H10 　・Weight: approximately 2 kg 　・Plate material: Aluminum (surface treated with hard anodizing) 　・Heat dissipation method: Forced air cooling 　・Thermo modules: 2 units 　・Sensor: Temperature measuring resistance body Pt100

• Other physicochemical equipment

This device is designed to supply a predetermined concentration of chemical solution to a process device. 【Specifications】 ○External dimensions: W1720*D810*H2010 ○Weight: Approximately 800kg This device is designed to supply a predetermined concentration of chemical solution to a process device. It can supply a maximum of two types of chemical solutions through two systems. Details regarding operation, such as dilution concentration and supply volume, can be tailored to your requirements.

• Other physicochemical equipment

This device dilutes the slurry concentrate, supplies the slurry to the polishing equipment, controls the liquid supply temperature and pH value (optional feature), and is equipped with a mixing tank and a supply tank for continuous slurry supply. *For more details about the product, please refer to the "PDF Download" button below. *Feel free to contact us with any inquiries.

• Heating device

The heater section is coated with PFA, demonstrating excellent chemical resistance. It can be heated directly from within the liquid, resulting in high thermal efficiency. There is a lineup of flange type and screw-in type, allowing for heater replacement without draining the liquid inside the heating tank. 【Features】 ○ The heater section is coated with PFA, demonstrating excellent chemical resistance. ○ It can be heated directly from within the liquid, resulting in high heat transfer efficiency. ○ Flange type and screw-in type can be selected according to the specifications of the device. For more details, please contact us or download the catalog.

• Heating device