TECHNOVISION, INC. List of Products and Services

The motor-driven expander is a device that uses an electric motor for the driving mechanism to raise the expansion stage. This device is a wafer expander that employs a motor-driven method with higher precision and excellent repeatability, and it is compatible with 12-inch wafers, known as the "EX-300." *Support for up to 8 inches is also available. The EX series "wafer expander" is a tape expansion device that stretches fully cut wafers along with the dicing tape on the expansion stage, allowing for uniform widening of chip spacing and street width to appropriate dimensions. By using a motor for the drive of the expansion stage, it enables numerical management of the expansion stroke and expansion speed. It also comes standard with an auto-cut function. Techno Vision offers various wafer expanders, including basic models, motor-driven expanders compatible with 12-inch wafers, and expanders with auto-cut functions, allowing for selection based on requirements. After expansion, the grip ring (automatically clamping the inner and outer rings) maintains the expanded state of the tape.

• Other semiconductor manufacturing equipment
• Wafer processing/polishing equipment

Achieving the "excellent workability" sought by operators! This is a model of a wafer expansion device equipped with an automatic cutting function that was not available in conventional devices. The task of separating the excess film (dicing frame) that has been done until now will change to "just pressing a switch." The EX series "Wafer Expander" is a tape expansion device that can uniformly stretch fully cut wafers along with the dicing tape on the expansion stage, adjusting the chip spacing/street width to the appropriate width. By adopting a motor for the drive of the expansion stage, it is possible to manage the numerical values of the expansion stroke and expansion speed. Additionally, it comes standard with an auto-cut function. Technovision offers various wafer expanders, including basic models, motor-driven expanders compatible with 12-inch wafers, and expanders with auto-cut functions, allowing for selection based on requirements. After expansion, the grip ring (automatic clamping of the inner and outer rings) maintains the expanded state of the tape.

• Other semiconductor manufacturing equipment
• Wafer processing/polishing equipment

The EX series "Wafer Expander" is a tape expansion device that stretches fully cut wafers along with the dicing tape on an expansion stage, uniformly widening the chip spacing/street width to the appropriate dimensions. By employing a motor for the drive of the expansion stage, it allows for numerical management of the expansion stroke and speed. It also comes standard with an auto-cut function. Techno Vision offers various wafer expanders, including basic models, motor-driven expanders compatible with 12-inch wafers, and expanders with auto-cut functions, allowing for selection based on requirements. After expansion, the grip ring (automatically clamping the inner and outer rings) maintains the expanded state of the tape.

• Other semiconductor manufacturing equipment
• Wafer processing/polishing equipment

The operator will only handle the setting and removal of the work, and all subsequent tasks will be fully automated. This will contribute to the stability of the tape/film application process and improve yield.

• Wafer processing/polishing equipment
• Other semiconductor manufacturing equipment
• Mounter

The PFM-9008 is a manual wafer mount for pre-cut tape. While expensive specialized equipment was previously required for applying pre-cut tape, this can now be done with a simple manual machine. It is ideal for R&D and small quantity applications.

• Wafer processing/polishing equipment
• Other semiconductor manufacturing equipment
• Mounter

The "Vacuum Mounter" is a vacuum film application device designed for workpieces that should not be subjected to stress. It solves the problem of damage caused by rollers. By applying with vacuum, bubbles do not enter the workpiece, and the application conditions (vacuum level, pressure) can be adjusted. Please consult us for a demo test. 【Features】 ■ Compatible with workpieces that should not be subjected to stress ■ Solves the problem of damage caused by rollers ■ No bubbles enter the workpiece ■ Application conditions can be adjusted *For more details, please refer to the PDF document or feel free to contact us.

• Wafer processing/polishing equipment
• Other semiconductor manufacturing equipment
• Mounter

The "Grip Ring Case" can hold one wafer fitted/attached to a grip ring or dicing frame. It is stackable, allowing for space-saving storage. It is suitable for transporting, shipping, and storing prototypes or small quantities. 【Features】 - Can hold one grip ring or dicing frame - Wafer is non-contact - Stackable for space-saving storage - Made of conductive PP - Ideal for transporting, shipping, and storing prototypes or small quantities *For more details, please refer to the PDF document or feel free to contact us.

• Racks and Cases
• Other semiconductor manufacturing equipment
• cabinet

The "UVC-708" is a compact LED light source UV film curing device that uses a UV-LED with a wavelength of 365nm. It maintains the features of UV-LEDs, such as room temperature irradiation and low running costs, while enabling full-area irradiation for 8-inch wafers. 【Features】 ■ Uses a 365nm UV-LED, with room temperature irradiation and low running costs ■ Compact, tabletop size ■ Easy button operation ■ LED unit error detection function ■ Standard N2 purge mechanism ■ 8-inch sheet type *For more details, please refer to the PDF materials or feel free to contact us.

• Semiconductor inspection/test equipment
• Ultraviolet irradiation equipment
• Other semiconductor manufacturing equipment

The "Tape Mount Handbook" is a technical document from Techno Vision, which develops and sells semiconductor manufacturing equipment, cleaning equipment, and post-process assembly equipment. This document includes an overview of the "Tape Application Process in the Dicing Process," as well as solutions to issues and details about the equipment. [Contents (partial)] ■ Overview ■ Tape Application ■ In the case of manual application ■ If you are already using a tape mount ■ Techno Vision manufactured mount *For more details, please refer to the PDF document or feel free to contact us.

• Other semiconductor manufacturing equipment
• Mounter

Ideal for clean dry air (CDA) used in various drying devices, air knives, drainage devices, and for clean heating of inert gases.

• Other heaters

You can choose the necessary unit for mask cleaning based on your usage environment. ■Main Features - Can be used for mask cleaning up to 7 inches - Ideal for research and development purposes or small-scale mask cleaning - Select the necessary unit to be used in conjunction with existing equipment - Recommended even if the budget for capital investment is tight *For details such as custom support, please feel free to contact us.

• Other semiconductor manufacturing equipment
• Photomask
• Other cleaning machines

A simple mask cleaning device that removes particles larger than 1μm attached to masks. It is a two-tank mask cleaning device, where scrubbing cleaning with a dedicated brush and rinsing are performed in the first tank, and hot pure water drying is carried out in the second tank. In the scrubbing cleaning of the first layer, cleaning with a dedicated chemical solution is also offered as an option. Using the dedicated chemical solution makes it possible to remove resist residues.

• Photomask
• Other semiconductor manufacturing equipment

The wafer mount / tape mount is a tape application device that instantly adheres "wafers," "dicing frames," and various films/tapes without bubbles. It allows for the easy application of uniform tape to wafers, which is considered important in the dicing process. TechnoVision's wafer mount offers a wide range of equipment options tailored to various purposes, from research and development to semi-production applications. The manual type wafer mount is available in three work sizes: - 300mm (12 inches) - 200mm (8 inches) - 150mm (6 inches) (Free demo units are also available for loan.) Additionally, there are devices with specifications tailored for specific applications, such as dicing and back grinding. The application targets are not limited to wafers; the device can accommodate various workpieces such as packages, glass, ceramics, and more. Custom solutions can also be flexibly provided to meet users' special specifications.

• Other semiconductor manufacturing equipment
• Wafer processing/polishing equipment
• Mounter

The 【Model UVC-512】 is a device capable of emitting ultraviolet light at a specific wavelength (365nm). By irradiating UV (ultraviolet) curing type films, it allows for easy separation of chips from the tape after dicing. This device rotates the workpiece during irradiation, making it compact and lightweight, as the length of the light source fits within the radius of the workpiece, while also enabling uniform irradiation across the entire area of the workpiece. It is a UV film curing device / UV irradiation device.

• Other semiconductor manufacturing equipment
• Wafer processing/polishing equipment
• Ultraviolet irradiation equipment

The FM-664 series has been developed as a device that can accommodate both pre-cut tape and normal tape. Two types of wafer sizes are available: ■ FM-6648: Up to 8 inches ■ FM-6643: Up to 12 inches This device can instantly attach various tapes to silicon wafers and dicing frames without bubbles. It has been developed to support both pre-cut tape and normal tape. It can be used not only as a dedicated device for pre-cut tape or normal tape but also as a versatile device that can handle the applications listed below.

• Wafer processing/polishing equipment
• Other semiconductor manufacturing equipment
• Mounter

A semi-automatic tabletop type small tape applicator compatible with 12 inches (300mm) tape. It is the optimal tape applicator that can accommodate the diverse conditions of tape application and lamination. This device responds to customers who wish to "automate the crucial application process" even with a manual device, and further "set application conditions and quantitatively manage application quality!" Even inexperienced operators can perform application tasks with stable quality, similar to that of skilled workers.

• Wafer processing/polishing equipment
• Other semiconductor manufacturing equipment
• Mounter

The TWC-200A has been specifically developed for the cleaning of masks used in the exposure process. The main feature of this device is its ability to simultaneously and fully automatically remove both resist and particles adhered to the mask. In particular, for resist removal, a dedicated cleaning agent was developed in collaboration with a major chemical manufacturer, significantly improving the removal effectiveness while also considering safety and the global environment. The operator simply needs to place a cassette loaded with the mask. This enhances safety by eliminating exposure to hazardous chemicals and greatly contributes to improving the quality of the exposure process and yield.

• Other cleaning machines
• Photomask
• Other semiconductor manufacturing equipment

By adopting a high-output LED driver developed independently by Techno Vision, an irradiation output of 250mW/cm2 (at a 10mm work distance) has been achieved. The light source uniformly irradiates the workpiece while performing a reciprocating scan. Numerous benefits can be obtained, such as reduced thermal damage to the workpiece due to room temperature irradiation, low power consumption, long lifespan, and safety during light source replacement.

• Other semiconductor manufacturing equipment
• Wafer processing/polishing equipment
• Ultraviolet irradiation equipment

A UV film curing device that enables uniform irradiation across the entire area of the wafer by rotating the workpiece during irradiation.

• Other semiconductor manufacturing equipment
• Ultraviolet irradiation equipment

"Advanced cleaning know-how condensed to support high-level purification!" In the context of diversifying semiconductor devices, design rules entering the nano realm, and the increasing demand for yield improvement in an ever-evolving environment, contamination control is positioned as one of the most critical solutions to address these challenges. The cassette cleaning device "Model TCC-803" provided by TechVision condenses this advanced cleaning know-how that supports such high-level purification.

• Other cleaning machines
• Wafer processing/polishing equipment
• Other semiconductor manufacturing equipment

A heater that performs instant heating without contaminating the fluid. High-purity quartz is used in the heating section.

• Other heaters

Scrubbing, rinsing, and drying performed by a single machine Techno Vision's photomask cleaning device is a mask cleaner that performs scrubbing, rinsing, and drying in one unit to clean dust and dirt attached to photomasks. To meet the diverse needs of our customers, we offer a range of cleaning devices, including TWE-200, TW-300, TW-700, and TW-1000, that accommodate photomasks from small to large sizes.

• Other cleaning machines

The Techno Vision photo mask cleaning device is a mask cleaner that performs scrubbing, rinsing, and drying all in one machine to clean dust and dirt attached to photo masks. To meet the diverse needs of our customers, we offer cleaning devices that accommodate a wide range of photo mask sizes, from small to large, including the TW-200, TW-300, TW-700, and TW-1000.

• Other semiconductor manufacturing equipment
• Photomask
• Other cleaning machines

This is a double ring that can hold elastic films, fabrics, and papers between an inner ring (white) and an outer ring (black), maintaining a taut and pinned state. It is a bidirectional grip ring that does not have a specific orientation for fitting. It can be easily removed after use and can be reused multiple times.

• Wafer processing/polishing equipment
• Other machine elements
• Other semiconductor manufacturing equipment

This is a UV film curing device that uses LED light sources. It can maintain the same level of equipment pricing as conventional devices while reducing running costs to less than one-tenth. Compared to mercury lamps and metal halide light sources, it achieves a better level of curing performance (cured state, curing speed). Additionally, this device supports modularization for custom specifications, including bottom and top irradiation, as well as applications for device integration.

• Ultraviolet irradiation equipment
• Other semiconductor manufacturing equipment
• Wafer processing/polishing equipment

The ultraviolet ozone cleaning device emits ultraviolet light of a specific wavelength to generate ozone (O3), which is then used to oxidize and decompose organic compounds, thereby removing organic contamination from the work surface and modifying the surface. The UV ozone cleaning devices UV-208 and UV-312 provided by Technovision utilize high-density grid-shaped low-pressure mercury lamps as the UV light source, allowing for uniform irradiation of the entire work area without the need for complex mechanisms, making it a simple dry cleaning device. It demonstrates its effectiveness as a final cleaning step.

• Ultraviolet irradiation equipment
• Other cleaning machines
• Ozone Generator