株式会社ナノフィルムテクノロジーズ　ジャパン List of Products and Services

The hydrogen-free DLC film (ta-C) using the Filtered Arc Vacuum Deposition (FCVA) method differs from existing PVD and CVD methods by removing impurities through an electromagnetic filter, resulting in fewer particles, excellent adhesion, and high wear resistance. Additionally, since it is formed at room temperature, it can be deposited on low melting point materials such as plastics and rubber, as well as various materials like ceramics. Furthermore, thick films of over 10 micrometers can be created, enhancing the quality and longevity of automotive parts, thereby increasing added value. Not only DLC films but also metal films can be produced. We also accept contract film deposition and equipment sales. 【Features】 ■ High hardness (~50 GPa) ■ High density ■ High adhesion ■ Wear resistance ■ Low-temperature deposition (<100°C) ■ DLC (ta-C) + decorative films are possible 【Application Fields】 ■ Resin materials, ceramic materials ■ Optical components ■ Automotive parts ■ Printer industry ■ Release films for precision molds used in glass lenses, plastics, etc. We will be exhibiting at the 26th Mechanical Elements Technology Exhibition in Osaka. Venue: Intex Osaka Hall Name: Hall 6A Booth Number: 32-5

• Coating Agent

The hydrogen-free DLC coating (ta-C) produced by our unique FCVA film formation technology differs from existing PVD and CVD methods by removing impurities through an electromagnetic filter, resulting in fewer particles, excellent adhesion, and high wear resistance. Additionally, since it is a room temperature film formation process, it can be applied to low melting point materials such as plastics and rubber, as well as various materials like ceramics. Furthermore, it is possible to create thick films of over 10 micrometers, enhancing the quality and longevity of automotive parts, thereby increasing added value. This technology improves wear resistance for resin and ceramic materials and extends the lifespan of automotive components, achieving functional enhancements across various fields. 【Features】 ■ High hardness film free of particles (droplets) ■ Capable of film formation on various materials, including low melting point materials like resin and rubber, as well as ceramics ■ Improved wear resistance for sliding components ■ Capable of creating thick films over 10 micrometers ■ High corrosion resistance against gases such as ozone and NOx We are currently offering explanatory materials summarizing basic knowledge about coating technology and our unique FCVA film formation technology! *For more details, please download the catalog or feel free to contact us.

• Coating Agent

"TAC-ON" is a DLC (ta-C) coating that revolutionizes the industry with its excellent performance. It has high density and superior adhesion, making it suitable for applications such as surface treatments that provide wear resistance, low friction, and high release properties. Additionally, it demonstrates high quality and unique characteristics. Please feel free to contact us when you need assistance. 【Features】 ■ High density ■ Superior adhesion ■ Low-temperature film formation ■ Hydrogen-free ■ Low surface energy ■ Reduction of impurity particles * You can download the English version of the catalog. * For more details, please refer to the PDF materials or feel free to contact us.

• Coating Agent

We would like to introduce our high hardness, high durability, and high corrosion resistance product, 'Sydrogen.' It can be used in bipolar plates and features a low friction coefficient and low contact resistance. Please feel free to contact us when you need assistance. 【Features】 ■ High hardness ■ High durability ■ Low friction coefficient ■ High corrosion resistance ■ Adjustable SP2/SP3 ratio ■ Low contact resistance * You can download the English version of the catalog. * For more details, please refer to the PDF materials or feel free to contact us.

• Coating Agent

"STAR TAC" is a DLC film that enhances sliding properties and corrosion resistance. It consists of a top layer of ultra-high-density smooth ta-C and a bottom layer of hard CrWC (chromium tungsten carbide). This product reduces the problem of sticking and eliminates the release issues caused by deposits. As a result, it is expected to lighten the maintenance burden, extend the lifespan of molds, and improve productivity. 【Features】 ■ Adjustable surface resistance ■ Dry process under vacuum ■ Excellent adhesion to substrates ■ Room temperature coating ■ Ultra-low friction coefficient ■ High wear resistance *You can download the English version of the catalog. *For more details, please refer to the PDF materials or feel free to contact us.

• Coating Agent

We would like to introduce our hydrogen-free DLC coating, "Rainbow TAC." It is suitable for applications such as "tools," "machining," as well as "drills" and "end mills." Additionally, it is recommended for "machining non-ferrous materials" such as aluminum, copper graphite, and plastics. 【Features】 ■ Wear resistance ■ Low friction coefficient ■ Ultra-thin film ■ High adhesion to the substrate ■ Extended tool life *You can download the English version of the catalog. *For more details, please refer to the PDF document or feel free to contact us.

• Coating Agent

"Nanofabrication" is a one-stop nanofabrication provider that integrates core technology into customized design solutions, manufacturing solutions, and testing solutions. It is suitable for "flash applications," as well as "light illumination" and "VCSEL lighting." Please feel free to contact us when you need assistance. 【Features】 ■ High-precision tooling ■ 5-axis diamond turning nanofabrication ■ One-stop solution for polymer optical components * You can download the English version of the catalog. * For more details, please refer to the PDF materials or feel free to contact us.

• Coating Agent

We would like to introduce our microcrystalline CrN coating, 'MiCC'. It is an environmentally friendly solution for the semiconductor and electronics industries. Applicable to IC packaging molds, plastic injection molds, and rubber molding molds. Please feel free to contact us when you need assistance. 【Features】 ■ High hardness ■ Low friction coefficient ■ High corrosion resistance ■ Low surface energy ■ High adhesion ■ Low-temperature film formation * You can download the English version of the catalog. * For more details, please refer to the PDF materials or feel free to contact us.

• Coating Agent

We would like to introduce our thick DLC film (over 5 microns) called 'i-TAC'. It demonstrates excellent wear resistance and adhesion, making it suitable for components exposed to high loads and wear environments. A dry process under vacuum conditions is possible. Please feel free to contact us if you have any inquiries. 【Features】 ■ Excellent adhesion to substrates ■ Dry process under vacuum ■ Excellent adhesion to substrates ■ Room temperature coating ■ Ultra-low friction coefficient ■ High wear resistance *You can download the English version of the catalog. *For more details, please refer to the PDF document or feel free to contact us.

• Coating Agent

We would like to introduce our "ATS (Aluminum Titanium Silicon Nitride Coating)." It is used for machining materials with very high hardness, such as nickel-based alloys, stainless steel, hardened steel, and titanium. Such materials are commonly used in mold manufacturing, aerospace, and the 3C industry. In these applications, the performance of the materials can be pushed to the limit. 【Features】 ■ Excellent thermal stability ■ Very high oxidation resistance and wear resistance ■ High ductility ■ Long tool life * You can download the English version of the catalog. * For more details, please refer to the PDF materials or feel free to contact us.

• Coating Agent

"ASD" is a protective film designed to prevent electrostatic discharge, which is primarily a concern in the semiconductor industry. It can be used in applications such as "E-chucks," "Wafer handlers," and "Wafer stages." Additionally, it has excellent adhesion to substrates. Please feel free to contact us when you need assistance. 【Features】 ■ Control of surface electrical resistance ■ Excellent adhesion to substrates ■ Room temperature film formation ■ Ultra-low friction coefficient ■ High wear resistance * You can download the English version of the catalog. * For more details, please refer to the PDF materials or feel free to contact us.

• Coating Agent

We would like to introduce our excellent all-purpose solution, 'ACN (Aluminum Nitride Chrome Coating).' It is suitable for a wide range of applications, from cutting tools and metal stamping to punches and dies, as well as aluminum die-casting molds. It demonstrates excellent heat resistance, maintaining hardness up to temperatures of 1,100 degrees and delivering performance. Please feel free to contact us when you need assistance. 【Features】 ■ Excellent thermal shock stability ■ Extremely high wear resistance ■ Superior hot hardness ■ Usable at high cutting speeds ■ Long tool life ■ Reduced defect rate *You can download the English version of the catalog. *For more details, please refer to the PDF materials or feel free to contact us.

• Coating Agent

This document provides basic knowledge of coating technology and details about our "FCVA film formation technology." It explains hydrogen-free DLC coating using "PVD coating," as well as "CVD coating" and "FCVA film formation technology." Coatings can achieve properties suited to their applications, such as wear resistance, heat resistance, and improved sliding properties, depending on the materials used and the coating conditions. We invite you to read it. 【Contents】 ■ What is coating? ■ Types of coating - PVD coating - CVD coating ■ FCVA film formation technology ■ Hydrogen-free DLC coating - TAC - iTAC - STAR TAC ■ Fields of application *For more details, please refer to the PDF document or feel free to contact us.

• Other surface treatment equipment

Hydrogen-free DLC thin film with low resistance and high corrosion resistance using the FCVA method. Coating is performed at low temperatures, preventing deformation and alteration of the substrate material. Established an inline FCVA deposition system for mass production. 【Film Properties of Bipolar Plate Protective Film】 ■ Corrosion Resistance: <1uA/cm2 ■ Contact Resistance: <5mΩcm2 (0.6MPa) ■ Iron Ion Leaching Amount: <25ppb (after 96-hour test) ■ Hardness: ~40GPa

• Coating Agent

MiCC is a CrN film coated using the FCVA method. It is suitable as a release film for semiconductor package molds and injection molding molds. Since the coating is performed at low temperatures, there is no deformation or alteration of the substrate material. In addition to the metal film (MiCC), it is also possible to coat hydrogen-free DLC (TAC) films. 【Features of MiCC】 ■ Low surface energy (improved release properties) ■ Low-temperature synthesis (>150℃) ■ High hardness (~20GPa) ■ Excellent adhesion (critical load >80N @ 200um tip) ■ Low friction coefficient 【Application Fields】 ■ Semiconductor encapsulation package molds ■ Injection molding molds ■ Rubber molding molds For more details, please refer to our website.

• Coating Agent

The deposition of DLC (ta-C) films, which was difficult to coat on plastic and ceramic materials, has become possible. Since the coating is done at low temperatures, there is no deformation or alteration of the substrate materials. Furthermore, by coating a decorative film (metal film) on DLC (TAC), we can provide a high-quality, high-hardness film. Coating of not only DLC (TAC) but also metal films is possible. 【Features】 ■ Low-temperature deposition ■ Scratch resistance ■ DLC (TAC) + decorative film is possible *For more details, please download the PDF or contact us.

• Coating Agent

The hydrogen-free DLC film (ta-C) produced by the Filtered Arc Vacuum Deposition (FCVA) method differs from existing PVD and CVD methods by removing impurities through an electromagnetic filter, resulting in fewer particles, excellent adhesion, and high wear resistance. Additionally, since it is deposited at room temperature, it can be applied to low-melting-point materials such as plastics and rubber, as well as various materials like ceramics. Furthermore, thick films of over 10 micrometers can be created, enhancing the quality and longevity of automotive parts, thereby increasing added value. Not only DLC films, but metal films can also be produced. We also accept contract film deposition and equipment sales. 【Features】 ■ High hardness (~50 GPa) ■ High density ■ High adhesion ■ Wear resistance ■ Low-temperature deposition (<100°C) ■ DLC (ta-C) + decorative films available *For more details, please download the PDF or contact us.

• Other painting machines

We would like to introduce our "DLC (TAC) coating for the interior of pores and the inner diameter of cylinders." Coating of the depths and inner walls of pore sections, which has been difficult until now, is now possible. This contributes to improving the corrosion resistance of materials inside the pores. Coating is possible with an opening diameter of a depth ratio of 1:5. 【Features】 ■ Protection of component surfaces ■ Corrosion resistance *For more details, please feel free to contact us.

• Coating Agent

We would like to introduce our "DLC (TAC) coating for printer parts." By applying DLC (TAC) coating to sliding parts such as the development roller and cleaning blade of printers, we significantly improve the lifespan of these components. Additionally, it is effective in enhancing the corrosion resistance of charged parts. 【Features】 ■ High hardness, high wear resistance ■ Corrosion resistance ■ Low friction coefficient *For more details, please feel free to contact us.

• Coating Agent

We would like to introduce our "Inline Coating System (FCVA)." An inline FCVA device suitable for mass production. The number of chambers can be selected as desired. It can also be combined with sputtering. It features a substrate cleaning mechanism using a heater and ion beam. 【Features】 ■ Equipped with FCVA and sputtering ■ Substrate cleaning mechanism using a heater and ion beam ■ Choice of DC, MF, or RF sputtering power supplies ■ Self-rotating sample holder ■ Number of chambers can be selected as desired ■ Maximum substrate size: φ900mm x 500mm(H) *For more details, please feel free to contact us.

• Coating Agent

We would like to introduce our "Inline Coating System (Sputter)." This inline sputtering device is suitable for mass production. It can form films on flat samples up to 1.5m in height. It can be used for metal films, ceramic films, flat panel displays, and more. 【Features】 ■ Maximum substrate size: <3m(L) x 1.5m(H) ■ Uniformity: within ±5% ■ 90° vertical transport system ■ Number of chambers can be selected as needed *For more details, please feel free to contact us.

• Coating Agent

We would like to introduce our "Batch-type FCVA Device." It is effectively used for film formation on sliding parts such as automotive components and printer parts. It demonstrates a uniform film thickness distribution thanks to the self-rotating sample holder. 【Features】 ■ Adoption of a self-rotating sample holder ■ Customizable ■ Contributes to improved productivity *For more details, please feel free to contact us.

• Coating Agent

We would like to introduce our "Load Lock Type FCVA Device." The load lock method improves membrane stability and suppresses particle adhesion. It is used by major lens manufacturers as a device for forming release films for glass lens molds. The substrate rotation mechanism allows for a good film thickness distribution. It is possible to combine elemental technologies such as "FCVA Carbon Source," "FCVA Metal Source," "Ion Beam," and "Sputtering" into a single device. 【Features】 ■ Load lock method ■ Improves membrane stability and suppresses particle adhesion ■ Good film thickness distribution achieved through substrate rotation mechanism ■ Customizable *For more details, please feel free to contact us.

• Coating Agent

We would like to introduce our "EMI (Electromagnetic Wave Shielding) Coating." It enables metal coating on plastic materials, allowing for the replacement of metal materials previously used for electromagnetic shielding. It significantly contributes to the lightweighting of components and the improved processability of base material shapes. It is effective for cost reduction. [Features] ■ Coating of high-hardness metal films on plastic *For more details, please feel free to contact us.

• Coating Agent

Introducing the "High Hardness Decorative Film." The DLC (TAC) film formed by FCVA has a characteristic bluish-black color. It exhibits high hardness along with a luxurious color. Additionally, we offer various decorative films produced by PVD. Coating is possible even on complex shapes such as plastic substrates and meshes. 【Features】 ■ Luxurious bluish-black (FCVA DLC (TAC) film) ■ High hardness and excellent wear resistance ■ Decorative films available in various colors ■ Coating possible on plastic substrates ■ Coating possible on complex shapes such as meshes *For more details, please feel free to contact us.

• Coating Agent

We would like to introduce our "DLC (TAC) coating on ceramic materials." Thanks to FCVA technology, it has become possible to apply DLC (TAC) coating on ceramic materials, which was previously difficult. By leveraging the characteristics of DLC (TAC), such as high hardness and low friction, we effectively address scratching issues in sliding parts, significantly improving durability. 【Features】 ■ High hardness ■ Wear resistance ■ Low friction coefficient ■ Excellent adhesion *For more details, please feel free to contact us.

• Coating Agent

Coating on metals and DLC (TAC), which was difficult for plastic and ceramic materials, has become possible. This also contributes to the replacement of metal materials with plastic materials! Since the coating is done at low temperatures, there is no deformation or alteration of the substrate materials. Furthermore, by coating a decorative film (metal film) on DLC (TAC), we can provide a high-hardness film that exudes luxury. Coating is possible not only on DLC (TAC) but also on metal films. 【Features】 ■ High hardness ■ Scratch resistance ■ DLC (TAC) + decorative film is possible *For more details, please download the catalog or feel free to contact us.

• Coating Agent

Hydrogen-free DLC films (ta-C) using the filtered arc method differ from existing PVD and CVD methods by removing impurities through an electromagnetic filter, resulting in fewer particles, excellent adhesion, and high wear resistance. Additionally, since the film is formed at room temperature, it can be applied to low melting point materials such as plastics and rubber, as well as various materials like ceramics. Furthermore, it is possible to create thick films of over 10 micrometers, enhancing the quality and longevity of automotive parts, thereby increasing added value. In addition to DLC films, please also try our composite metal film "MiCC film," which excels in release properties during plastic molding. 【Features】 ■ High hardness film free of particles (droplets) ■ Applicable to various materials including low melting point materials like resins and rubber, as well as ceramics ■ Improved wear resistance for sliding components ■ Capable of creating thick films over 10 micrometers ■ High corrosion resistance against gases such as ozone and NOx *For more details, please download the catalog or feel free to contact us.

• Coating Agent

FCVA (Filtered Cathodic Vacuum Arc) provides high-quality coatings that are on a different level compared to existing methods such as PVD and CVD. Additionally, since no heating is required during the film formation process, deformation of the substrate does not occur, allowing for coatings on resin components as well. In particular, DLC films (ta-C) have the following characteristics: 1) Extremely close to diamond (high sp3 bonding) 2) Very high hardness, adhesion, and wear resistance 3) Hydrogen-free 4) Film thickness: from a few nm to 10 nm 5) Can be deposited on inner diameters These features make it suitable for various fields such as hard disks, precision molds, and wear-resistant parts. *For more details, please download the catalog or contact us.*

• Other painting machines

The hydrogen-free DLC film (ta-C) using the FCVA method differs from existing PVD and CVD methods by removing impurities through an electromagnetic filter, resulting in fewer particles, excellent adhesion, and high wear resistance. Additionally, since film formation is possible at room temperature, it can be applied to various materials such as low melting point materials like resins, ceramics, and rubber. Furthermore, thick films of over 10 micrometers can be created, enhancing the quality of automotive parts and increasing added value through longer lifespan. In addition to the DLC film, please also try the composite metal film "MiCC film," which excels in release properties during plastic molding. 【Features】 ■ Achieves high hardness, strong adhesion, and excellent wear resistance ■ Capable of creating thick films over 10 micrometers ■ Film formation possible at room temperature ■ Applicable to various materials *For more details, please download the PDF document or feel free to contact us.

• Coating Agent

At NanoFilm Technologies Japan, we provide a wide range of low-cost film deposition services for various industries, particularly for wear-resistant applications. Our FCVA technology can produce ta-C films (above DLC level), oxide films (e.g., Al2O3, TiO2), and metal films (e.g., Cu, Al, Ti) with excellent uniformity and quality. 【Features】 ○ Ability to meet diverse customer needs → Utilizing various sources and complete systems, we leverage a range of equipment tailored to different deposition requirements. ○ Experienced research and development engineers → We study the requirements of diverse applications and determine the optimal processes based on that. ○ Established in-house infrastructure for production, research and development, and quality control → We provide high-quality film deposition services to maximize customer satisfaction. For more details, please contact us or download our catalog.

• Surface treatment contract service

Nano Film Technologies Japan's FCVA technology can produce ta-C (tetrahedral amorphous carbon) films (a level above DLC) with excellent uniformity and quality. ta-C has an amorphous structure of sp3 and sp2 bonds and does not contain hydrogen. The ta-C thin films produced by Nano Film's FCVA technology contain approximately 40-85% sp3 bonds. 【Features】 - High hardness - Variable film thickness - Low surface energy, excellent adhesion, excellent non-adhesion - Low wear rate, low friction coefficient (high contact angle) - Easy peelability (via RIE process) For more details, please contact us or download the catalog.

• Surface treatment contract service

The "Micc membrane" is a solution that was developed after several years of research, and it has been practically proven to improve separation characteristics by more than double when used on mold surfaces. It is compatible with handling and processing conditions of H-Cr. Additionally, it significantly reduces adhesion issues in green epoxy molding compounds. 【Features】 ○ Efficiently peels off the membrane ○ Significantly extends the maintenance cycle intervals ○ Covers the tips and side walls of the cavity without gaps ○ Prevents blades from becoming rounded ○ Excellent adhesion to EDM surfaces For more details, please contact us or download the catalog.

• Surface treatment contract service

NanoFilm Technologies Japan Co., Ltd. can meet the diverse needs of our customers by utilizing various devices that match different film deposition requirements, using a variety of sources and complete systems. Our experienced research and development engineers study the requirements of diverse applications and determine the optimal processes based on that research. Additionally, we are fully committed to providing high-quality film deposition services by establishing in-house infrastructure for production, research and development, and quality control, maximizing customer satisfaction. 【Coating Systems】 ○ FS Series: FCVA Source ○ B Series: Batch System ○ L Series: Load/Lock System ○ M Series: Inline Coating System For more details, please contact us or download the catalog.

• Surface treatment contract service

To achieve a dramatic improvement in the performance of hard disk drives, the thinning of the slider head protective film has been considered. With the nano-spacing of the head and disk, a harder and more elastic carbon film is required to minimize wear caused by contact between the head and the disk surface, leading to the demand for a dense film with excellent corrosion resistance and no pinholes. The ta-C film produced by the FCVA coating method has been widely adopted in the industry as a carbon film that meets these performance requirements and offers excellent productivity while being particle-free. 【Application Examples】 ○ Conventional DLC films posed practical issues in the thin film region below 4nm. ⇒ The use of ta-C films has enabled the practical application of 1.5nm thin films. ○ In vertical magnetic recording systems, the application of ta-C films as a disk surface protective film is also being considered. ⇒ Challenge: There is a need for faster coating compared to sliders. For more details, please contact us or download the catalog.

• Surface treatment contract service

In small devices represented by digital still cameras and mobile phones, there is a growing need for aspherical lenses that can deliver higher performance. Conventional DLC films have been adopted as coating films due to their hardness and low friction coefficient, but cases have emerged where they cannot achieve sufficient molding lifespan due to the diversification of glass materials' performance. The 'ta-C film' is harder than DLC due to its high diamond bond Sp3 component, has a lower friction coefficient, and can be easily peeled from the mold surface due to reactive etching, leading to its adoption as a replacement for DLC films. 【Application Examples】 - Simple ta-C films are prone to peeling from the mold during lens molding. ⇒ Achieving a multilayer film by applying a bias voltage, a feature of the FCVA coating method. - There have been cases where the lifespan has increased fourfold compared to conventional DLC films. For more details, please contact us or download the catalog.

• Surface treatment contract service

The router for cutting printed circuit boards faced the challenge of achieving a long lifespan while maintaining dimensional accuracy. To address this, a carbon film that surpasses the conventional DLC film in hardness, smoothness, elasticity, and adhesion to the substrate was required, leading to the adoption of the 'ta-C film' produced by the FCVA method, which meets these performance requirements. It is also used in end mills (aluminum cutting tools) for processing aluminum die-cast back plates in the HDD industry. 【Application Example (Router for Cutting Printed Circuit Boards)】 ○ Significantly extended the machining length within dimensional accuracy ○ Enabled improvement of the process capability index Cpk For more details, please contact us or download the catalog.

• Surface treatment contract service

In recent years, not only the durability of molds but also the complexity of surface shapes has made surface treatment of molds a challenge. The films formed by FCVA at NanoFilm Technologies Japan have low friction coefficients, excellent wear resistance, and release properties, solving many problems and contributing to increased productivity. 【Application Examples (Mold Surface Treatment)】 ○ Resin: ABS + 30% GF + 40% Ceramic Powder ⇒ Mold life improved by 5 to 10 times ○ Resin: PPS + 45% GF, PVC ⇒ Mold life improved by 3 to 10 times ○ Resin: Rubber ⇒ Mold life improved by 2 to 5 times For more details, please contact us or download the catalog.

• Surface treatment contract service

The aesthetically superior ta-C film "Cosmetic TAC Coating" has approximately double the hardness compared to conventional DLC films, and it optimally adjusts internal stress, providing excellent peel resistance and good adhesion to the substrate. It can achieve a bluish-black appearance that is not found in traditional DLC. It is highly advanced, has excellent wear resistance, is difficult to scratch, and has increased resistance to oxidation. 【Features】 ■ Unique development of beautiful DLC color (Bluish black) ■ Excellent wear resistance ■ High hardness film: 2300HV ■ Can form a film on complex shapes such as meshes ◎ For more details, please contact us or refer to the catalog.

• Surface treatment contract service