日本スターテクノ Product Lineup

The "MS Series" is a mass flow meter manufactured by ALICAT that can measure the flow of 130 types of gases, including corrosive gases and refrigerant gases, with a single unit. It provides accurate flow measurements of ±(0.8% Reading + 0.2% F.S.) and has a fast response time of 10ms, allowing it to quickly follow changes in flow. Additionally, it includes models like the "MW Series," which can measure with extremely low differential pressure. 【Features】 ■ 10ms fast response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Range from 0.5 SCCM to 3000 SLPM ■ Standard analog output and RS-232C communication ■ Standard backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

The "MQ Series" is a high-pressure mass flow meter manufactured by ALICAT that can measure the flow of 98 types of gases, including mixed gases, with a single unit. It provides accurate flow measurement of ±(0.8% Reading + 0.2% F.S.) and quickly responds to flow changes with a fast response time of 10 ms. 【Features】 ■ Maximum operating pressure is 320 PSIA (2.2 MPaA). ■ Pressure resistance is 400 PSIA (2.7 MPaA). ■ Fast response time of 10 ms ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Available flow range from 0.5 SCCM to 5000 SLPM ■ Standard equipped with analog output and RS-232C communication ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

The "M Series" is a mass flow meter manufactured by ALICAT that can measure 98 types of gas flow rates, including mixed gases, with a single unit. It provides accurate flow measurement of ±(0.8% Reading + 0.2% F.S.) and has a fast response time of 10 ms to quickly follow flow changes. In addition, the lineup includes the "MS Series," which supports 130 types of gases including corrosive gases and refrigerants, and the "MW Series," which can measure with extremely low differential pressure. 【Features】 ■ 10 ms fast response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Range from 0.5 SCCM to 5000 SLPM ■ Standard analog output and RS-232C communication ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

The "MW Series" is a mass flow meter manufactured by ALICAT, which can measure with very small differential pressure, resulting in minimal pressure loss, making it ideal for environments where low pressure is used. It provides accurate flow measurement of ±(0.8% Reading + 0.2% F.S.) and has a fast response time of 10 ms, quickly adapting to changes in flow. In addition, we offer the "MS Series," which supports 130 types of gases, including corrosive gases and refrigerants. 【Features】 ■ 10 ms fast response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Range from 0.5 SCCM to 1000 SLPM ■ Standard analog output and RS-232C communication ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

The "Coriolis CODA Series" is a Coriolis mass flow meter/controller manufactured by ALICAT that can accurately measure high-pressure, low-flow, and various types of fluids. 【Dosage】 Accurate dosing of additives is crucial in catalyst research and food production. The CODA series is ideal for measuring and controlling components with its ultra-low flow capability. 【High-Pressure Operation】 In fuel cell and rocket research, it is necessary to meet high precision requirements. It can accurately measure fluids at 4,000 PSI both on the ground and in the air. 【Variable System】 Accurate measurement is important even in processes where the composition of the fluid is unknown. It enables flexible measurement in changing environments, such as in bioreactors, variable fluid mixtures, and measuring outflows in chemical reactions. 【Corrosive Liquids】 From chemical coatings to semiconductors, corrosive liquids pose challenges for material compatibility in many fluid control systems in manufacturing. It is designed to handle corrosive fluid environments. *For more details, please refer to the PDF materials or feel free to contact us.

The "MCS/MCRS series" is a mass flow controller manufactured by ALICAT that can measure 128 types of gas flow, including corrosive gases and refrigerant gases, with a single unit. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. Additionally, it includes the "MW series," which can measure with extremely small differential pressures. 【Features】 ■ 100 ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Range from 0.5 SCCM to 3000 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

The "MCE/MCES series" is a mass flow controller manufactured by ALICAT, featuring a built-in valve that complies with SEMI standards. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 10 SCCM to 20 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

The "MC/MCP/MCR series" is a mass flow controller manufactured by ALICAT that can handle 98 different types of diverse gases with a single unit. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. In addition, we offer a lineup that supports 128 types of gases, including corrosive gases and refrigerant gases, such as the "MCS/MCRS series," "MCW/MCRW series," and "MCV/MCVS series." 【Features】 ■ 100 ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 0.5 SCCM to 5000 SLPM ■ Standard analog output and RS 232C communication ■ Supports mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

The "MCW/MCRW series" is a mass flow controller manufactured by ALICAT, ideal for environments where low pressure is used, as it can measure with very small differential pressure, resulting in minimal pressure loss. It achieves fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. In addition, we offer the "MCS/MCRS series," which supports 128 types of gases, including corrosive gases and refrigerants. 【Features】 ■ 100 ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Range from 0.5 SCCM to 1000 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

The "MCV/MCVS series" is a mass flow controller manufactured by ALICAT, equipped with a shut-off valve for vacuum applications. It achieves a fast response through a laminar flow method (differential pressure type). It is equipped with a highly accurate differential pressure sensor to measure flow rates precisely. 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Available from 10 SCCM to 20 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

The "MC/MCP/MCR series" is a high-pressure mass flow controller manufactured by ALICAT that can handle 98 different types of diverse gases with a single unit. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. In addition, we offer a lineup such as the "MCHQS/MCRQS series," which supports 128 types of gases, including corrosive gases and refrigerant gases. 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 0.5 SCCM to 5000 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

The "MCD/MCDS series" is a mass flow controller manufactured by ALICAT that can handle 98 different types of diverse gases with a single unit. It achieves fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. In addition, we offer a lineup that supports 128 types of gases, including corrosive gases and refrigerant gases, such as the "MCDS series" and "MCDW series." 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 0.5 SCCM to 5000 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

Mass flow measurement is performed using MEMS sensors combined with ALICAT's standard control valves and PID algorithms. ■ 100ms control response - Achieves target flow quickly through PD control. It rapidly follows flow changes and provides stable flow control. - Warm-up time is 70ms, allowing for immediate operation. ■ Standard analog output/input and RS-485 communication - Control flow can be set using a 0-5VDC input. - Current flow is output as 0-5VDC, allowing for recording with loggers and other devices. - RS-485 is standard, enabling centralized monitoring with PLCs and other systems.

The 【BIO Series】 is a mass flow controller manufactured by ALICAT that features a laminar flow method (differential pressure type) with a fast response time of 10 ms. - Long-term stability: Extremely low zero drift - Assurance against process water contamination - High contrast, clear display - ASME (American Society of Mechanical Engineers) recommended: 316L stainless steel and USP Class VI, FDA (Food and Drug Administration) grade elastomers - Gas selection switching possible without recalibration and without loss of accuracy - Industrial Ethernet - Wide range flow: 1 SCCM to 5000 SLPM - Response speed of 10 ms enables high-speed data recording - Flexible process connection (SAE standard)

In the semiconductor manufacturing industry, precise gas flow control during the manufacturing process is essential for the stable production of high-quality products. In particular, processes such as film deposition, etching, and CVD are directly affected by gas flow rates, which impact product quality and yield. Inadequate gas control can lead to wafer defects and equipment downtime. ALICAT Coriolis mass flow meters/controllers accurately measure high-pressure, low-flow gases with various characteristics, addressing the challenges of gas control in semiconductor manufacturing processes. 【Application Scenarios】 - Gas flow control in the film deposition process - Gas flow control in the etching process - Gas flow control in the CVD process - Gas flow control in the sputtering process 【Benefits of Implementation】 - Stable supply of high-quality semiconductor products - Improved yield - Reduced manufacturing costs - Process optimization