☆★☆【nanoETCH】Soft Etching Device☆★☆

<30W Low Power Control for Damage-Free Etching
Achieves delicate etching processes with an output control precision of 10mW.
A jointly developed product with the graphene research group at the University of Manchester, led by Nobel Prize winners who discovered graphene in 2010.
【Features】
• 2D (Transition Metal Chalcogenides, graphene delamination after material transfer): Surface modification cleaning
• Removal of polymer resists such as PMMA and PPA
• Surface modification and etching on substrates prone to damage, such as Teflon substrates
• h-BN sidewall etching (*Option for "Fluorine Gas Supply Module," requires SF6 gas system)
• SiO2 etching (*Option for "Fluorine Gas Supply Module," requires CHF3 gas system)
【Specifications】
◉ Compatible substrates: Up to Φ6 inches
◉ Easy operation with a 7" touch panel and PLC automatic sequencing
◉ Automatic pressure control (APC)
◉ One Ar gas line (standard) + up to three additional lines for N2 and O2
◉ Connects to a Windows PC with a USB port for automatic etching recipe creation and storage. Data logging on PC.


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Related Documents
Related Links
◉ Graphene and TMDC 2D Applications
◉ Graphene Etching Removal
◉ Removal of Resists such as PPA and PPMA
◉ Damage-Free Etching of Teflon Substrates
Etching of Graphene and Resist Patterns
PPA Etching Removal
h-BN Etching
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