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  4. Semiconductor Manufacturing Equipment
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  6. Prototype mass production compatible semi-automatic exposure device

Prototype mass production compatible semi-automatic exposure device

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last updated:Mar 01, 2012

清和光学製作所
清和光学製作所
  • Official site

Alignment accuracy = ±1μm or less!!!

<Features> Provides high-precision patterning and alignment accuracy suitable for prototype mass production.

    Wafer processing/polishing equipmentOther semiconductor manufacturing equipment
R&DSemiAuto

Prototype mass production compatible semi-automatic exposure device

R&DSemiAuto small size.gif
R&DSemiAuto small size.gif
  • Related Link - http://www.seiwaopt.co.jp/products/equip/exposure.…

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basic information

Supports 2, 6, and 8-inch or square substrates; alignment is automatic and parallel, with gap control also automatic, while the loading and unloading of workpieces is done manually. It supports single-sided and double-sided alignment. Alignment accuracy = ±1μm or less. Vibration isolation is a standard feature, and double-sided alignment can choose between dual optical systems and IR optical systems. Exposure methods supported include vacuum contact, hard contact, and proximity.

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Applications/Examples of results

Wafers, etc.

Company information

清和光学製作所

清和光学製作所

Electronic Components and Semiconductors

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We will challenge the unknown world based on optics. The 21st century is said to be the "age of light," with remarkable advancements in optical technology. In our manufacturing company, we aim to accelerate future-oriented technological capabilities centered around "optical technology," actively tackling the information technology, ultra-fine technology, and scientific technology that the times require, and to be a dynamic company that acts swiftly. At the same time, we are committed to continuously promoting innovations suitable for the new century, striving to create safe and reliable products, and to remain a company that is needed by the world, actively working towards a richer society. We sincerely ask for your continued guidance and support.

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