A new type of aligner that is not affected by wafer material.
A new type of aligner compatible with various wafer sizes from 100 to 200 mm. It can perform alignment without being affected by wafer materials such as silicon wafers, silicon wafer BG tape (milky white), transparent, and translucent wafers. Utilizing a uniquely developed image sensor, it incorporates a motor driver and controller within the main unit. It is also possible to change the spindle diameter, shape, and material according to wafer size and material. Bernoulli spindles can also be equipped. Control method: RS232C and parallel photo I/O. It is possible to accommodate notches and orifices that are not specified in SEMI standards. Models with a Z-axis capable of wafer re-gripping operations can also be produced.
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basic information
○Transported items: SEMI standard 100-200mm wafers (transparent, translucent, silicon) (Flexible customization is also available for other special workpieces and materials) ○Positioning accuracy: Centering: within ±0.1mm ○Oriflan notch locate: within ±0.1 degrees ○Positioning time: 3 seconds (does not include wafer transfer time) ○Sensor: Wafer edge detection using LED lighting + image sensor unit ○Position correction range: within a radius of 4mm ○Wafer holding method: Retention by vacuum suction ○Cleanliness: ISO Class 2 (during exhaust of drive parts) ○Mass: Approximately 10kg ○Utility: Current voltage: DC24V±10% 3A Vacuum: -53kPa or more
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New type aligner compatible with various wafers from 100 to 200 mm.
Company information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."
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