Advanced digital MFC/MFM with excellent versatility, compatible with many systems.
To be used in accordance with existing main control methods and communication methods, analog or digital control is performed according to various output forms. This product is available in a single gas model and a multi-gas, multi-range model to meet customer requirements. The multi-gas, multi-range model contributes to a significant reduction in spare MFC inventory, thereby achieving cost reduction. Additionally, to comprehensively monitor and control flow rates, it utilizes RS-485 communication functionality (with RS-232 communication functionality via a converter) and multiple diagnostic and alarm functions, allowing for quick access to operational parameters.
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basic information
Features - Selection of gas and flow range available * - Mode selection: Analog, Analog/Digital, Digital - Piezo-controlled valve - Various alarm/diagnostic functions - Various alarm/diagnostic functions - Metal seal maintaining a leak rate of 1x10-10 - Electropolished, UHP-treated gas contact surfaces * Supported by multi-gas, multi-range specification models.
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Applications/Examples of results
In the markets for semiconductors, FPD, data storage devices, industrial vacuum equipment, industrial coatings, etc., applications using non-corrosive gases, including CVD, PVD, etching, ion implantation, sputtering, thermal oxidation films, optical glass coatings, optical fibers, surface treatment, and other coating processes are included.
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Company information
Thank you for your continued support. Since our establishment as Tokiko Pressure Gauge Co., Ltd. in 1964 through a joint investment by Tokiko Co., Ltd. (now Hitachi Automotive Systems, Ltd.) and Nagano Keiki Co., Ltd., we have continuously grown across a wide range of fields, including general industrial equipment, railway vehicles, office supplies, home appliances, medical devices, and infrastructure-related industries, and we have celebrated our 50th anniversary thanks to your support. In 2015, while centering on the products of Hitachi Automotive Systems, Ltd. and Nagano Keiki Co., Ltd., we transformed into Hitachi Automotive Systems & Nagano Co., Ltd. as a member of the Hitachi Group, aiming to create a safe, secure, and comfortable living environment and to challenge all industries, products, and services. Moving forward, in addition to our core products, we will strive to be a trusted comprehensive distribution company by expanding our trading company functions and enhancing our engineering capabilities, and we will work hard to propose systems that meet your satisfaction. We kindly ask for your continued strict guidance and warm support.