6in・8in wafer dual-use non-contact tweezers
High-temperature 6in・8in wafer-compatible non-contact tweezers
It is possible to grasp 6-inch and 8-inch wafers with the same non-contact tweezers.
"6in・8in Dual-Use Non-Contact Tweezers" (Patent) We have adopted a new gas vertical jet method. The gas vertical jet method allows the gas flow ejected from the nozzle to create a vertical gas jet in the cushion chamber, reducing friction loss of the gas flow within the cushion chamber, enhancing the effect of negative pressure generation, and significantly increasing the suspension capability compared to conventional types. This increases the holding stability and makes it more resistant to shocks, while nearly halving the gas consumption. The non-contact transport device "Float Chuck" (patent) at the tip of the handle of the "6in・8in Dual-Use Non-Contact Tweezers" allows for the ON-OFF control of air supply through hand operation, enabling non-contact suction and detachment of wafers. ◎ Features 1. 6-inch and 8-inch wafers can be handled with the same tweezers. 2. Operated by hand. 3. No scratches or dirt attachment. 4. Simple to use. ◎ Applications 1. 6-inch and 8-inch wafers (Other wafer sizes are also manufactured.) 2. Glass substrates 3. Lenses 4. Chips 5. Solar cells
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basic information
"6in・8in Dual-Use Non-Contact Tweezers" (Patent) We have adopted a new gas vertical jet method. The gas vertical jet method allows the gas flow ejected from the nozzle to create a vertical gas jet in the cushion chamber, reducing friction loss of the gas flow within the cushion chamber, enhancing the effect of negative pressure generation, and significantly increasing the suspension capability compared to conventional types. This increases the holding stability, makes it more resistant to shocks, and nearly halves the gas consumption. The non-contact transport device "Float Chuck" (Patent) at the tip of the handle of the "6in・8in Dual-Use Non-Contact Tweezers" allows for the ON-OFF control of air supply through the operation of the hand holding the handle, enabling the non-contact suction and detachment of the wafer. The "6in・8in Dual-Use Non-Contact Tweezers" has the function of non-contact suspension holding of the wafer by creating a negative pressure inside according to the distance from the workpiece through the ejector effect and Bernoulli effect by ejecting air, and by creating a positive pressure through the pressure chamber type air cushion effect and the cushioning effect of the air flow.
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Applications/Examples of results
High-temperature wafer non-contact tweezers Wafer non-contact transport Wafer R&D Wafer transfer Wafer CVD processing Wafer etching processing
Company information
Manufacturing of non-contact transport devices and application devices for wafers, liquid crystal glass substrates, PDPs, ceramics, printed circuit boards, FPC substrates, films, paper, cloth, etc., using our patented non-contact transport device "Float Chuck" based on the vertical gas jet method developed by our company.
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