Appearance Inspection Device Prestige V

basic information

● Equipped with pixel resolutions of 7μm for high resolution and 38μm for high throughput, suitable for a wide range of inspections. ● Utilizes RGB three-color LEDs for optimal lighting according to the pattern. ● Camera angle can be set during evaluation, allowing for miniaturization of the device. ● Simultaneous processing of defect inspection and unevenness inspection. ● Compatible with 6/8-inch sizes.

Price range

Delivery Time

Applications/Examples of results

In the semiconductor manufacturing process, we want to perform uniform manufacturing processes on each die on the wafer, including film formation, resist coating, lithography, etching, and CMP. However, in reality, variations such as foreign matter contamination, pattern defects, and film thickness lead to non-uniformities on the wafer. By incorporating automated inspection equipment into each of these processes, we can enable fine-tuning of semiconductor process operations. Additionally, not only for semiconductor wafers but also for metal etching products, defects and distortions are inspected visually. However, as the quantity of these processed products increases, the likelihood of oversight in visual inspections rises, along with significantly increased labor costs. To reduce these oversights and labor costs, introducing Prestige into the inspection processes for semiconductor and metal etching products allows for the reduction of costs from oversight in the inspection process.

Detailed information

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  Appearance Inspection Device Prestige V