Cost-reduction model of Prestige II developed specifically for 8-inch wafers. It is capable of simultaneously inspecting defects and irregularities on the wafer.
PRESTIGE V is a budget version of the existing PRESTIGE II. The size of the device has been reduced by 50%, making it more space-efficient. The camera angle is set during the evaluation stage and fixed at the time of factory shipment. Although there are limitations on wafer size, it inherits the inspection capabilities of the PRESTIGE II as a budget version product.
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basic information
● Equipped with pixel resolutions of 7μm for high resolution and 38μm for high throughput, suitable for a wide range of inspections. ● Utilizes RGB three-color LEDs for optimal lighting according to the pattern. ● Camera angle can be set during evaluation, allowing for miniaturization of the device. ● Simultaneous processing of defect inspection and unevenness inspection. ● Compatible with 6/8-inch sizes.
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In the semiconductor manufacturing process, we want to perform uniform manufacturing processes on each die on the wafer, including film formation, resist coating, lithography, etching, and CMP. However, in reality, variations such as foreign matter contamination, pattern defects, and film thickness lead to non-uniformities on the wafer. By incorporating automated inspection equipment into each of these processes, we can enable fine-tuning of semiconductor process operations. Additionally, not only for semiconductor wafers but also for metal etching products, defects and distortions are inspected visually. However, as the quantity of these processed products increases, the likelihood of oversight in visual inspections rises, along with significantly increased labor costs. To reduce these oversights and labor costs, introducing Prestige into the inspection processes for semiconductor and metal etching products allows for the reduction of costs from oversight in the inspection process.
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Appearance Inspection Device Prestige V
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Company information
A semiconductor inspection equipment manufacturer established in Hangzhou, China in April 2008. We develop and design wafer probers, testers, and handlers, supplying them to major semiconductor manufacturers. In 2017, we were listed on the Shenzhen Stock Exchange in China, established a Taiwan office, and in July 2018, we set up a Japan office. In 2019, we acquired Semiconductor Technologies & Instruments Ptd Ltd, an appearance inspection equipment manufacturer in Singapore, and in September 2020, we absorbed the semiconductor division of Sato Product Co., Ltd., providing better inspection equipment to the market for inspection equipment manufacturers.