What is combinatorial technology?

An almost ideal mixture can be created! It has excellent linearity, and the geometric arrangement and composition within the sample correspond one-to-one.

In combinatorial techniques, thin films are formed on a single sample substrate by varying the composition of binary or ternary materials from 0% to 100%. Using a moving mask, ultra-thin layers with a wedge-shaped thickness gradient are alternately stacked, and since the thickness of the unit layer is 0.2 nm (2 Å), this value is equal to the interatomic distance, allowing for the creation of nearly ideal mixtures. Since all compositions of binary or ternary materials are included in a single sample, analyzing and evaluating a single composition gradient sample enables rapid optimization of composition to achieve new functionalities. 【Features】 - The composition gradient is formed by the mechanical movement of the moving mask. - It exhibits excellent linearity, with the geometric arrangement and composition within the sample corresponding one-to-one. - Since only the composition changes within the sample, the evaluation of the sample's properties is stable and easy. - Due to the unit layer thickness of 0.2 nm, nearly ideal mixtures can be created. *For more details, please refer to the PDF document or feel free to contact us.*

Sputtering Equipment