Automation of pressure calibration tests for semiconductor products.

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■Pressure Controller PACE 5000 / 6000 〇User-friendly touch panel system combining high precision, fast response, and long-term stability. Compatible with dynamic range. Measurement test programs can be easily set up. Many semiconductor subsystems and MEMS manufacturers have significantly improved production efficiency after implementing PACE. 〇Gauge pressure range: 2.5 kPa to 21 MPa (negative pressure calibration standard) 〇Communication: RS232, USB, IEEE-488, SCPI, etc. (varies by model) 〇Power supply: AC90–130V, AC180–260V (47–63Hz) ■Pressure Indicator PACE 1000 This single unit can measure pressure on production lines. It can display up to three pressure values simultaneously! A high-precision pressure indicator that can display gauge pressure and atmospheric pressure at the same time. It has two standard external sensor ports, with a maximum of three connections possible. Data logging that can be replayed on the screen (standard). Multiple pressure monitoring is possible, allowing for cost reduction in inspection processes! ○Pressure range up to 100 MPa ○Various accuracies up to 0.005% FS ○Stability up to 0.01% rdg/year For more details, please contact us or refer to the catalog.

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【PACE Pressure Controller Case Studies】 There are numerous achievements in the automation of pressure measurement tests for MEMS pressure sensors (automotive pressure sensors, pressure modules for medical devices, pressure control equipment for semiconductor devices, etc.). These systems were introduced during the expansion of manufacturing lines, and we have received feedback that manufacturing costs and production efficiency have dramatically improved. Others: 〇 Replacement of heavy water systems in the quality control room's pressure standards 〇 Example test programs: switch tests, leak tests, test programs, burst tests, etc. 〇 PACE5000 is single-channel, while 6000 is dual-channel. 【PACE1000 Pressure Indicator Case Studies】 Introduced into the pressure inspection process of production lines for temperature control equipment and air conditioning systems, achieving stabilization of automatic pressure adjustment and simultaneous reduction of production costs. Others: 〇 Digitalization replacing mercury columns and aneroid barometers 〇 For multiple pressure monitors 〇 Simplification of calibration returns (reduction of maintenance costs) 〇 For atmospheric pressure measurement 【Various Pressure Sensors for Semiconductor Equipment】 We can provide high-precision pressure sensors for semiconductor equipment and subsystems, as well as for mass flow controllers. (Please refer to the comprehensive catalog or links within the page.)