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  6. Ultrasonic Megasonic Cleaning Device for MEMS Device Manufacturing

Ultrasonic Megasonic Cleaning Device for MEMS Device Manufacturing

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Sonosys

last updated:Oct 01, 2026

ティックコーポレーション 本社
ティックコーポレーション 本社
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Surface cleaning for MEMS device manufacturing with Sonosys ultrasonic cleaning.

In MEMS device manufacturing, the removal of fine foreign substances and residues is a critical issue that affects product quality. Even slight contamination on the wafer surface can lead to decreased device performance and lower yield. Sonosys's ultrasonic megasonic cleaning equipment addresses these challenges by achieving high cleaning power and uniform cleaning, contributing to quality improvement in MEMS device manufacturing. 【Application Scenarios】 - Removal of foreign substances in the MEMS device manufacturing process - Cleaning of precision parts - Rinse process after chemical cleaning 【Benefits of Implementation】 - Reduction in cleaning time - Improvement in cleaning quality - Enhancement of yield

    Ultrasonic OscillatorUltrasonic CleanerUltrasonic cleaner
ソノシス社製超音波洗浄スプレーノズル(枚葉洗浄).jpeg

Ultrasonic Megasonic Cleaning Device for MEMS Device Manufacturing

ソノシス社製超音波洗浄スプレーノズル(枚葉洗浄).jpeg
ソノシス社製超音波洗浄スプレーノズル(枚葉洗浄).jpeg Triple-nozzle-ecf5619c.jpg 超音波洗浄装置(バス・タンク式).jpeg Zerstäuber-Demo.jpg
  • What is the Megasonic cleaning device manufactured by Sonosys?
  • Special site - Product/service details - https://pr.mono.ipros.com/ticjapan/product/

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【Features】 ≪Ultra-Precision High-Frequency Megasonic Cleaning Spray Nozzle≫ - Diverse cleaning needs addressed through combinations of single, dual, and triple channel nozzles and frequencies - Megasonic immersion-type transducers ranging from 400kHz to 9MHz ≪Ultra-Precision High-Frequency Megasonic Immersion Cleaning System≫ - Stainless steel or plastic transducers - Compatible with 4", 6", and 8" substrate sizes - Improved cost-effectiveness through bath-tank cleaning 【Our Strengths】 Tick Corporation focuses on providing products that meet customer needs. With years of experience and a wide range of product offerings, we propose optimal cleaning solutions.

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Applications/Examples of results

Single Wafer Cleaning Systems Applications • Non-contact cleaning of single substrates • High-precision particle removal • Megasonic cleaning using pure water as the medium • High-purity cleaning of semiconductor and optical components Examples • Introduced as custom cleaning equipment with single, dual, and triple nozzle configurations to semiconductor manufacturers Megasonic Cleaning Nozzles Applications • Single wafer cleaning • Photomask cleaning • Non-contact cleaning of MEMS and microstructures • Lift-off processes • Improved chemical cleaning efficiency in semiconductor front-end processes • Energy-saving in wet bench processes (reduction of chemicals and electricity) Examples • Adopted worldwide as semiconductor front-end cleaning equipment using high-frequency megasonics from 400 kHz to 9 MHz • Used by MEMS manufacturers as a cleaning solution that minimizes damage to fine micro and nano structures

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Next-generation digital generator for single nozzle type that improves the precision and manageability of megasonic cleaning.

Next-generation digital generator for single nozzle type that improves the precision and manageability of megasonic cleaning.

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Next-generation digital generator with dual nozzle type that improves the precision and manageability of megasonic cleaning.

Next-generation digital generator with dual nozzle type that improves the precision and manageability of megasonic cleaning.

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Ultrasonic cleaning spray nozzle (single) 1~5MHz

Ultrasonic cleaning spray nozzle (single) 1~5MHz

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Ultrasonic cleaning spray nozzle single (600kHz)

Ultrasonic cleaning spray nozzle single (600kHz)

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Ultrasonic cleaning spray nozzle Duel (type with 2 nozzles included)

Ultrasonic cleaning spray nozzle Duel (type with 2 nozzles included)

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Ultrasonic cleaning device (bath/tank type cleaning) 4-inch substrate generator (made of PVDF)

Ultrasonic cleaning device (bath/tank type cleaning) 4-inch substrate generator (made of PVDF)

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Ultrasonic cleaning device (bath/tank type cleaning) 6-inch substrate generator (made of PVDF)

Ultrasonic cleaning device (bath/tank type cleaning) 6-inch substrate generator (made of PVDF)

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Ultrasonic cleaning device (bath/tank type cleaning) 4-inch substrate generator (made of stainless steel)

Ultrasonic cleaning device (bath/tank type cleaning) 4-inch substrate generator (made of stainless steel)

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Ultrasonic cleaning device (bath/tank type cleaning) 6-inch substrate generator (made of stainless steel)

Ultrasonic cleaning device (bath/tank type cleaning) 6-inch substrate generator (made of stainless steel)

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Sonosys Company Overview (Ultrasonic Cleaning Equipment)

Sonosys Company Overview (Ultrasonic Cleaning Equipment)

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[Sonosys] Sonosys Company Overview (Ultrasonic Cleaning Equipment) (Revised 2021)

[Sonosys] Sonosys Company Overview (Ultrasonic Cleaning Equipment) (Revised 2021)

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[Sonosys] (Case Study) Ultrasonic Spray Nozzle Improvement of Non-Woven Fabric Coating Line

[Sonosys] (Case Study) Ultrasonic Spray Nozzle Improvement of Non-Woven Fabric Coating Line

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Lechler Sonosys (Case Study) Spray Nozzles and Ultrasonic Spray Nozzles for Semiconductor Equipment

Lechler Sonosys (Case Study) Spray Nozzles and Ultrasonic Spray Nozzles for Semiconductor Equipment

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Mega Sonic Ultrasonic Cleaning Spray Nozzle Triple (Type with 3 Nozzles Included)

Mega Sonic Ultrasonic Cleaning Spray Nozzle Triple (Type with 3 Nozzles Included)

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News about this product(3)

Announcement of the product page launch for the SONOSYS Megasonic Cleaning Nozzle System | Precision Cleaning for Semiconductors and MEMS

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We are pleased to announce that Tick Corporation has launched a product introduction page for the SONOSYS megasonic cleaning nozzle system. The megasonic cleaning technology from SONOSYS utilizes high-frequency energy ranging from 600 kHz to 9 MHz to precisely remove fine particles while minimizing damage to microstructures such as semiconductor wafers, photomasks, and MEMS. The new page features the characteristics of single, double, and triple nozzles, as well as applications for semiconductors, MEMS, optical components, and LCD/FPD substrates. If you are considering fine particle removal, precision cleaning using ultra-pure water (DI Water), or megasonic cleaning at frequencies such as 600 kHz or 1 MHz, please take a look.

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The NHK program "The Wall of Truth" will feature a video of semiconductor wafer cleaning provided by our company.

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We are pleased to announce that a video provided by Tick Corporation showcasing semiconductor wafer cleaning will be featured in the NHK program "The Wall of Truth." The theme for this episode is "The Truth of Water (tentative)." The program is scheduled to briefly introduce the process of cleaning wafers with pure water during semiconductor manufacturing. Our company offers cleaning and spraying technologies, including megasonic cleaning, for the semiconductor and electronic components sectors. We are truly honored that our footage will be utilized in the production of this NHK program. Broadcast schedule: September 12, 2026 (Saturday) from 8:30 PM to 8:59 PM (tentative). For more details about the program, please visit the official NHK "The Wall of Truth" page. https://www.nhk.jp/g/ts/N8JX1V6V69/ *Please note that the broadcast date and content may be subject to change.

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Mega Sonic Cleaning Device (Single)

Announcement of the release of the latest leaflet for the SONOSYS Corporation's megasonic cleaning device.

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We have updated the product leaflet for the SONOSYS megasonic cleaning device from Germany to the latest version. SONOSYS's megasonic cleaning technology is a non-contact precision cleaning technique that efficiently removes fine particles by transmitting high-frequency ultrasonic energy through liquids such as pure water (DI Water) to the surface of the target object. It is particularly suitable for the precision cleaning of products with fine structures, such as semiconductor wafers, photomasks, MEMS, various substrates, and optical components, and is utilized in various fields that require high cleanliness, starting with semiconductor manufacturing processes. SONOSYS offers a range of frequencies depending on the application and the particles to be removed, as well as a megasonic nozzle system that accommodates various cleaning conditions, including Single Nozzle, Dual Nozzle, and Triple Nozzle. Customers who have challenges such as "wanting to remove fine particles from wafers," "wanting to clean photomasks and MEMS while minimizing damage," or "wanting to review existing cleaning processes" are encouraged to take a look at the latest leaflet.

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ティックコーポレーション

ティックコーポレーション 本社

Machine elements and parts

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Tick Corporation is committed to providing products that contribute to solving various issues faced by companies, such as improving production efficiency, enhancing cost efficiency, improving quality, and considering environmental conservation. We have been widely collecting product information from around the world and providing products that meet market needs. In the future, we will continue to develop and deliver products that contribute to rationalization and particularly to environmental conservation, which has become increasingly stringent in recent years. ◇◆Main Products◇◆ - Precision industrial spray nozzles - Agricultural spray nozzles - Air nozzles / Air knives - Special spray nozzles - Tank cleaning nozzles - Blowers - Ultrasonic spray nozzles (Nebulizers / Atomizers) - Ultrasonic cleaning devices - Air conveying devices - Ventilators - Plastic connectors - Cutting torches (nozzles for gas cutters) - Latex testers - In-house manufactured tubing pumps (dispensers) - Syringe pumps

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If you're having trouble draining water after ultrasonic cleaning, use air blow for complete drainage.
Scientific and Physics Equipment
If you're having trouble draining water after ultrasonic cleaning, use air blow for complete drainage.
バリューイノベーションジャパン
Ideal for drying workpieces after ultrasonic cleaning. Instant complete drying with air blow.
Scientific and Physics Equipment
Ideal for drying workpieces after ultrasonic cleaning. Instant complete drying with air blow.
バリューイノベーションジャパン

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