Air supply on-off manual operation non-contact wafer tweezers
Using a valve attached to a handle, the air supply is manually operated to turn ON and OFF, allowing the wafer, chip, lens, and solar cell substrate, as well as the glass substrate, to be grasped non-contact.
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basic information
The "Bernoulli tweezers" have the function of holding substrates in a suspended state without contact by using air supply ON-OFF controlled by a valve attached to the handle, similar to tweezers, to grip wafers, chips, lenses, solar cell substrates, and glass substrates non-contact. By ejecting air, it creates a negative pressure inside according to the distance from the workpiece through the ejector effect and Bernoulli effect, and also generates positive pressure through the pressure chamber type air cushion effect and the cushioning effect of the airflow.
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Applications/Examples of results
Using a valve attached to the handle, the air supply is turned ON and OFF by hand to grasp the wafer, chip, lens, solar cell substrate, and glass substrate in a non-contact manner, similar to using tweezers.
Company information
Manufacturing of non-contact transport devices and application devices for wafers, liquid crystal glass substrates, PDPs, ceramics, printed circuit boards, FPC substrates, films, paper, cloth, etc., using our patented non-contact transport device "Float Chuck" based on the vertical gas jet method developed by our company.
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