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This device is a film-forming apparatus capable of installing up to four target sputter guns.
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basic information
【Features】 〇 The source offers a wide range of proven systems, from low-cost 1" sputter guns to 2" to 4" sputter gun deposition recipes (PC-controlled). 〇 It is equipped with numerous options. 〇 Substrate holders (various optional types, including rotation, XY, heating, cooling, and additional shutter mechanisms). ● For more details, please contact us or download the catalog.
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Company information
Vacuum Products designs and manufactures vacuum systems and vacuum components. Our vacuum systems are developed for various research fields, including film deposition devices (such as PLD, sputtering, CVD, and multi-source evaporation devices), accelerator peripheral equipment (such as lenses, deflectors, and goniometers), and low-speed positron beam devices. In the industrial sector, we have developed and commercialized various processing devices focusing on the "large area" theme for film deposition equipment. For vacuum components, we have newly developed a two-component mixed gas concentration measurement device based on the technology of our original crystal vacuum gauge, and we plan to sell it as a compact ozone concentration meter in the first phase.