Ultra-high-speed sheet-type sputtering device SOLARIS family

Providing mass production solutions for high-speed and flexible substrate film deposition applications!

The "SOLARIS Family" is a high-speed film deposition system that enables film formation in as fast as 3 seconds per sheet, with a maximum disk diameter of 430mm. Combining the know-how gained from delivering over 5,000 high-speed optical disk systems and experience from more than 3,000 semiconductor PVD systems, it allows for ultra-fast thin film deposition. It can be applied to various sputter deposition processes, including optical filters, reflective films, transparent electrodes, scratch-resistant coatings, decorative coatings, and corrosion-resistant coatings, with the possibility of combining surface cleaning etching. It is also applicable for protective coatings for fuel cell metal separators, decorative coatings for automotive interior parts, and anti-reflective transparent electrode coatings for in-vehicle displays. 【Features】 - Introduces a "high-speed inline" sheet-type architecture for substrate film formation - Improves throughput and eliminates manual processing through robotic handling - Provides high-speed production solutions for various film deposition processes Additionally, Evatec offers PVD, ALD, PECVD, and etching solutions for metals, piezoelectric films, insulating films, etc., for semiconductor wafers, advanced packaging, MEMS, and wireless filters.

Sputtering EquipmentEtching Equipment