Providing mass production solutions for high-speed and flexible substrate film deposition applications!
The "SOLARIS Family" is a high-speed film deposition system that enables film formation in as fast as 3 seconds per sheet, with a maximum disk diameter of 430mm. Combining the know-how gained from delivering over 5,000 high-speed optical disk systems and experience from more than 3,000 semiconductor PVD systems, it allows for ultra-fast thin film deposition. It can be applied to various sputter deposition processes, including optical filters, reflective films, transparent electrodes, scratch-resistant coatings, decorative coatings, and corrosion-resistant coatings, with the possibility of combining surface cleaning etching. It is also applicable for protective coatings for fuel cell metal separators, decorative coatings for automotive interior parts, and anti-reflective transparent electrode coatings for in-vehicle displays. 【Features】 - Introduces a "high-speed inline" sheet-type architecture for substrate film formation - Improves throughput and eliminates manual processing through robotic handling - Provides high-speed production solutions for various film deposition processes Additionally, Evatec offers PVD, ALD, PECVD, and etching solutions for metals, piezoelectric films, insulating films, etc., for semiconductor wafers, advanced packaging, MEMS, and wireless filters.
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Metals, transparent electrodes, optical thin films, protective films, corrosion-resistant films, insulating films, suitable for decorative film formation. PVD (DC/DC pulse/RF sputtering, reactive sputtering, etching processes can be equipped). 【Product Lineup】 ■SOLARIS S151 ■SOLARIS S380 *For more details, please refer to the related links or feel free to contact us.
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SOLARIS
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Evatec's technology has been utilized worldwide for 70 years since the establishment of Balzers AG in 1946. Now, Evatec's thin film manufacturing technology is revolutionizing our lives and ways of working. The Internet of Things (IoT) offers the potential to connect 7 trillion devices for a global population of 7 billion people, and Evatec's thin film manufacturing technology makes this possible. Semiconductor devices manufactured with Evatec's equipment enable millions of people around the world to connect through high-speed wireless networks, changing the way we work due to the evolution of AI. Additionally, autonomous driving made possible by AI semiconductors and high-precision sensing is transforming lifestyles, while power semiconductors allow various devices to operate with less power, addressing energy issues. We provide cutting-edge solutions for thin film manufacturing with high-performance electrical and optical properties, ranging from high-frequency filters essential for wireless communication, high-brightness LEDs for automotive and lighting applications, AI and optoelectronic integrated semiconductors for highly integrated data centers, to touch panels for mobile phones.
