Flexibility, compact design, and low investment costs! An ideal choice for small-scale production.
The "LLS EVO II" is a versatile batch sputtering system with a vertical and dynamic concept, capable of accommodating up to five different materials, and features a device that separates the substrate load chamber and process chamber (LC, PC). It supports various substrate sizes and shapes up to 200×230mm. It can be equipped with configurable power supplies to enhance process flexibility. The degassing and etching of substrates in the load chamber ensure high-purity processes in the process chamber, allowing for easy conversion to various substrate sizes in under five minutes, making it a flexible manufacturing device. 【Features (partial)】 ■ Up to five sputter sources with DC, DC pulse, RF, and RF/DC ■ Simultaneous sputtering from up to three cathodes ■ Reactive sputtering with oxygen and nitrogen ■ High vacuum system configuration with turbo pump, cryo pump, and water trap *For more details, please refer to the related links or feel free to contact us.
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【Other Features】 ■ Substrate heater for degassing and process heating ■ Compatible with various types of substrates up to 200×230mm in size and a maximum thickness of 17mm ■ Substrate tooling for full-area coating or customized edge cutting, edge masking, and shadow masking ■ Optional automatic cassette-to-cassette processing with a 6-axis robot *For more details, please refer to the related links or feel free to contact us.
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【Applications】 ■ Metals, dielectrics, magnetic films *For more details, please refer to the related links or feel free to contact us.*
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LLS EVO II
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Evatec's technology has been utilized worldwide for 70 years since the establishment of Balzers AG in 1946. Now, Evatec's thin film manufacturing technology is revolutionizing our lives and ways of working. The Internet of Things (IoT) offers the potential to connect 7 trillion devices for a global population of 7 billion people, and Evatec's thin film manufacturing technology makes this possible. Semiconductor devices manufactured with Evatec's equipment enable millions of people around the world to connect through high-speed wireless networks, changing the way we work due to the evolution of AI. Additionally, autonomous driving made possible by AI semiconductors and high-precision sensing is transforming lifestyles, while power semiconductors allow various devices to operate with less power, addressing energy issues. We provide cutting-edge solutions for thin film manufacturing with high-performance electrical and optical properties, ranging from high-frequency filters essential for wireless communication, high-brightness LEDs for automotive and lighting applications, AI and optoelectronic integrated semiconductors for highly integrated data centers, to touch panels for mobile phones.
