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  6. High-resolution capacitive sensor

High-resolution capacitive sensor

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Lion Corporation Capacitive Sensor CPL190

last updated:Jan 15, 2013

翔栄システム
翔栄システム
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High-resolution capacitive sensor

Standard products support a range from 10nm to 6000nm (6mm)! It can measure any material! It can even measure non-conductors. It is used for wafer thickness measurement and as a precision positioning device. With a resolution of 0.2nm, it is suitable for ultra-fine measurements!!

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cpl190_.jpg

High-resolution capacitive sensor

cpl190_.jpg
cpl190_.jpg

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basic information

Standard products support a range from 10nm to 6000nm (6mm)! It can measure any material! Non-conductive materials can also be measured. It is used for wafer thickness measurement and as a precision positioning device. With a resolution of 0.2nm, it is suitable for ultra-fine measurements!!

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Applications/Examples of results

●Wafer thickness measurement ●Rotating body axis runout measurement ●Detection of adhesive on paper ●Non-conductor thickness measurement ●Position detection of the staging stage

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Lion Corporation Capacitive Sensor

Lion Corporation Capacitive Sensor

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翔栄システム

翔栄システム

Testing, Analysis and Measurement

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Shoei System Co., Ltd. operates under the motto of "continuously providing what is necessary for society and aiming for sustained growth together with our customers," specializing in the design and sales of low-cost, optimal servo systems. If you have any issues with applications using precision devices, please feel free to consult with Shoei System! We would like to use all our capabilities to assist you as much as possible.

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