This is an introduction to various lamps that showcase the culmination of development and application capabilities in light sources and optical system technology.
High-performance laser lithography equipment for research and development.
High-output, high-stability LED light source device. High-power UV output up to 15W, mercury-free, with selectable built-in LEDs.
High-speed maskless aligner capable of fine drawing at 0.6μm.
High-speed high-resolution laser exposure device
Wafer size post-process projection exposure equipment MRS adopts UV-LED light source as the standard light source (enabling reduction of running costs without sacrificing productivity!)
Single-phase/three-phase specifications, compatible with high currents. Used for high-frequency noise countermeasures (up to 1GHz).
A five-phase stepper motor driver with good high-speed torque characteristics.
A high-output, high-stability LED light source device capable of mounting multiple modules of the same wavelength. Maximum high-power UV output of 80W, mercury-free.
Device for forming circuits on flexible printed circuit boards (FPC).
The conveying system can be used inline with a roller conveyor method!
A highly productive and user-friendly aligner, such as a microscope auto-move.
Non-contact transport of ultra-thin glass substrates with a thickness of 50μm - Non-contact transport device "50μm Thick Ultra-Thin Glass Non-Contact Transport Device LNAS Type"
Before cutting is the key factor. We focus on specification confirmation, proposal of construction methods, process and jig design, tool selection, program creation, and machining simulation.
Coating equipment for manufacturing functional films for Flexible Displays.
A method of production that mounts a substrate in a single chamber.
Leave the technical services for semiconductor manufacturing equipment to us.
We can provide a wide range of proposals tailored to your needs.
2-phase bipolar micro-stepping driver "PMB212C"
5-phase AC power micro-stepping motor driver "5D1AM"
A two-phase motor driver that rotates very smoothly up to a maximum of 1/200.
Maximum 50W ultra-high output. LED irradiator as a replacement for mercury lamps. Usable for UV curing, semiconductor inspection equipment, and more.
A lineup of auto-aligner devices capable of fully automatic comprehensive exposure.
Both-side alignment and the ability for proximity and soft contact exposure are possible.
Equipped with an image processing automatic alignment system using a CCD camera.
It is a high-precision exposure device equipped with a Fresnel lens.
Here is the lineup of parallel light exposure devices.
A mask aligner that achieves a high throughput of 190 WPH.
We provide service for Canon FPA3000 and Nikon NSR.
Low-vibration stepping driver integrated from single axis to three axes.
Compatible with substrates up to 8 inches and supports semi-auto alignment exposure equipment.
Manual exposure machine compatible with up to 4-inch square substrates.
High-speed semiconductor mask laser drawing device 'ULTRA'
We specialize in processing sizes from 500 to 1200 mm and can guarantee precision in the 1000s range. Please feel free to consult with us first.
Maximum processing size φ1000×500, short delivery time through process consolidation, high-precision machining of complex shapes using multi-surface approaches.
We can perform excavations up to a maximum diameter of 1000 mm and a depth of 600 mm. We are committed to providing products that prioritize not only precision but also aesthetics.