List of Transport and handling robots products

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• Sensors

We can accommodate high resistance over 10,000 ohms, with diameters ranging from approximately 30 mm to 8 inches, and we also offer thinning and chip processing arrangements!

• Other semiconductors
• Processing Contract
• Wafer

It is suitable for wafer transport in semiconductor manufacturing equipment, inspection devices, etc.

• Transport and handling robots
• Other industrial robots

Optimal for transporting masks and glass substrates in liquid crystal manufacturing equipment, inspection devices, etc.

• Transport and handling robots
• Other industrial robots

The S-shaped acceleration and deceleration control enables high-speed and high-precision transport of glass substrates.

• Transport and handling robots
• Other industrial robots

It is suitable for the transport of glass substrates for inspection devices, etc., within liquid crystal manufacturing equipment.

• Transport and handling robots
• Other industrial robots

For Z strokes of 760mm or more, the Z-axis is multi-stage, allowing for low-pass line configuration.

• Transport and handling robots
• Other industrial robots

Equipped with a multi-axis GCR and a glass-compatible aligner SAL3361GR inside the device.

• Transport and handling robots
• Other industrial robots

A buffer function has been implemented in the Alaina, allowing for wafer replacement.

• Transport and handling robots
• Other industrial robots

It is possible to position the susceptor at high speed and high precision using a gripping method in a vacuum environment.

• Transport and handling robots
• Other industrial robots

Alignment possible with minimized wafer damage using the Bernoulli method.

• Transport and handling robots
• Other industrial robots

It is possible to minimize contact with the wafer by adopting an edge grip method.

• Transport and handling robots
• Other industrial robots

Support for transport requiring positioning of wafers (silicon, GaAs, glass).

• Transport and handling robots
• Other industrial robots

Alignment of 2-inch, 3-inch, and 100-150mm wafers is possible.

• Transport and handling robots
• Other industrial robots

We have achieved a reduced footprint with small-diameter wafer compatibility.

• Transport and handling robots
• Other industrial robots

The control method is RS232C and parallel photo I/O.

• Transport and handling robots
• Other industrial robots

High-speed, high-precision positioning of silicon wafer centering and Orifla notch.

• Transport and handling robots
• Other industrial robots