Wafer automatic cleaning device, sheet-type automatic cleaning device, dip type.
Demo units available for loan! This is a sheet-type cleaning device that can accommodate up to Φ300.
This machine is a dip-type single-sheet processing machine that vertically lifts the workpiece in the loader section and performs each processing step with a transport robot. After the final cleaning is completed, the workpiece is returned horizontally by the inversion mechanism, and spin drying is performed. It is a cassette-to-cassette cleaning machine. For more details, please contact us.