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controller Product List

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High-Temperature Mass Flow Controller MC-3000L-TC series

High-Temperature Mass Flow Controller MC-3000L-TC series

This is a high-temperature compatible model of the high-performance digital mass flow controller MC-3000L series, which has a variety of features.

This is a high-temperature digital mass flow controller in a 1.125-inch size that achieves high precision of 1.0% F.S. with proprietary patented technology. It is ideal for controlling high-temperature gases such as water vapor. 【Features】 ○ RoHS compliant ○ Operating temperature up to 120°C, baking temperature up to 150°C (non-energized) ○ Equipped with a digital interface RS-485 ○ Features a sensor with proprietary patented technology ○ High-temperature compatible, high-precision digital MFC *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control

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DeviceNet compatible mass flow controller MC-5000L

DeviceNet compatible mass flow controller MC-5000L

It is a super high-performance mass flow controller compatible with DeviceNet.

Mass flow controller compatible with DeviceNet, adopting our unique self-temperature correction sensor (patented in the U.S. and Japan) and supporting various surface mount standards (1.125 inches). 【Features】 ○ Digital mass flow controller with DeviceNet interface (SEMI E54, ODVA SEMI SIG MFC Profile) ○ High performance (metal seal, piezo valve, high precision, multi-gas compatible) ○ Operates on a single power supply of +11 to 24V DC ○ Supports various surface mount standards (SEMI STD.) ○ Adopts our unique self-temperature correction sensor (patented in the U.S. and Japan) ○ Connector type (horizontal or vertical) selectable ○ Fully digital operation ○ Ultra-high performance 1.125-inch width ○ Compatible with surface mount gas interface *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control

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Liquid Mass Flow Controller LC-3000L series

Liquid Mass Flow Controller LC-3000L series

We precisely control the flow of various liquids using our proprietary sensors.

This is a normally open type mass flow controller for liquids. It can control flow rates from 0.01 to 2.0 g/min (equivalent to C2H5OH). Any liquid that does not corrode stainless steel is acceptable. 【Features】 - Long-term flow stability with a flow sensor using Lintec's unique ambient temperature compensation method - Compact design with a body width of 28.6 mm and an integrated valve structure - Equipped with a general-purpose digital interface (RS-485 compliant) - High-speed response due to the use of a piezo actuator - Diaphragm valve structure adopted (Minimal dead space, structure that minimizes bubble generation) - Bypass-less structure (Easy liquid introduction and internal purging, free installation orientation) - RoHS compliant *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control

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Low Differential Pressure Mass Flow Controller MC-3000S series

Low Differential Pressure Mass Flow Controller MC-3000S series

It is a mass flow controller that can operate at low differential pressure such as SDS.

This is a mass flow controller that can control gas flow rates even at low pressure using proprietary technology. 【Features】 ○ Capable of controlling 10 SCCM (N2) at a differential pressure of 6 Torr due to its unique low-pressure loss structure ○ Suitable for applications such as AsH3 and PH3, and can control gases from liquids without heating ○ Compatible with the general-purpose interface RS485 ○ Standard ultra-clean specifications with metal seals and precision polished inner surfaces ○ Equipped with a high-speed, high-performance piezo actuator *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control

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Low-cost mass flow controller MC-10RC series

Low-cost mass flow controller MC-10RC series

A mass flow controller developed for analysis devices and various film deposition equipment, which is low-cost yet equipped with basic performance. It contributes to the improvement of semiconductor manufacturing costs.

The MC-10 series mass flow controller for gases is a low-cost model that can contribute to improving semiconductor manufacturing costs through short delivery times. It achieves low pricing by utilizing solenoid actuators and rubber seals. 【Features】 - Achieves low pricing by adopting rubber seals - Guarantees flow accuracy of ±1.0% F.S. - Supports a wide flow range - With the optional variable range function, it can accommodate multiple specifications with a single unit (gas type, F.S., and flow can be changed) - Stable operation even in environments with high-frequency noise and direct current magnetic fields, thanks to the use of a metal case and various filters *For other functions and details, please download the PDF.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control

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EtherCAT-compatible mass flow controller MC-5000C

EtherCAT-compatible mass flow controller MC-5000C

It is a high-precision mass flow controller compatible with EtherCAT.

Mass flow controller compatible with EtherCAT, adopting our unique self-temperature compensation sensor (patented in the US and Japan) and supporting various surface mount standards (1.125 inches). 【Features】 ○ Digital mass flow controller with digital interface (SEMI E54. 20-1108) ○ High performance (metal seal, piezo valve, high precision, multi-gas compatible) ○ Operates on a single power supply of +11 to 24V DC ○ Supports various surface mount standards (SEMI STD.) ○ Adopts Lintec's unique self-temperature compensation sensor (patented in the US and Japan) ○ Fully digital operation ○ Ultra-high performance with a width of 1.125 inches ○ Compatible with surface mount gas interfaces *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control

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High-performance mass flow controller MC-3000L series

High-performance mass flow controller MC-3000L series

This is a high-performance digital mass flow controller that employs our proprietary self-temperature compensation method (patented in the U.S. and Japan).

This is a digital mass flow controller that achieves high precision of 1.0% S.P. with its unique patented technology and is compatible with various surface mount standards (1.125 inches). 【Features】 ○ High-performance 1.125-inch size digital mass flow controller (piezo valve, high precision (S.P. guaranteed), digital control) ○ Maintains compatibility with analog mass flow controllers ○ Universal interface RS485 is available ○ Standard ultra-clean specifications with metal seals and precision polished inner surfaces ○ Compatible with various surface mount standards of SEMI STD. *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control

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Variable Range Compatible Mass Flow Controller MC-700

Variable Range Compatible Mass Flow Controller MC-700

It is a mass flow controller that supports multi-range while being low-cost.

This is a mass flow controller that can be changed for various gases and ranges using the rotary switch located on the upper part of the MFC. 【Features】 ○ Short delivery time model ○ Equipped with high-speed, high-performance piezo actuator ○ Universal interface RS485 is available ○ Standard ultra-clean specification with metal seals and precision polished inner surfaces ○ Various gases and ranges can be changed using the rotary switch *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control

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High-speed response mass flow controller "MC-7000 Series"

High-speed response mass flow controller "MC-7000 Series"

Adopts Au seal and piezo actuators! Compatible with various digital interfaces.

The "MC-7000 Series" is a high-speed response mass flow controller that achieves a response time of less than 200 msec with a thermal sensor. By adopting Lintec's unique self-temperature compensation method, it can handle corrosive gases and liquefied gases, ensuring a flow accuracy of ±1.0% S.P. It also supports various digital interfaces such as DeviceNet and EtherCAT. 【Features】 ■ Uses Au seals and piezo actuators ■ Achieves a response time of less than 200 msec with a thermal sensor ■ Adopts Lintec's unique self-temperature compensation method ■ Compatible with corrosive gases and liquefied gases ■ Guarantees flow accuracy of ±1.0% S.P. *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Control
  • Weighing Control

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