microscope Product List and Ranking from 178 Manufacturers, Suppliers and Companies

[SMM] Scanning Microwave Microscopy Method

Scanning Microwave Microscopy

SMM scans the measurement sample using a conductive probe to observe its surface topography. Simultaneously, microwaves are irradiated from the probe to the sample, and by measuring the reflected response, it is possible to obtain signals correlated with carrier concentration, particularly in the case of semiconductors. The intensity of the SMM signal is linearly correlated with carrier concentration, which is a characteristic feature that provides high quantitativeness. - For Si devices, sensitivity is present for carrier concentrations around 10^15 to 10^20 cm^-3. - Since signals correlated linearly with carrier concentration can be obtained, quantitative evaluation (semi-quantitative) is possible under certain assumptions. - AFM images can also be acquired. - Various semiconductors such as Si, SiC, GaN, InP, and GaAs can be measured. This document introduces application examples, principles, and data examples. For more details, please download the document or contact us.

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[Analysis Case] Observation of the Cross-Section of Tooth Enamel Prisms

Applying FIB processing technology, the entire interface of enamel/dental adhesive is observed.

In dental caries treatment, adhesives are used to integrate the filling material used to fill the "cavity" with the tooth structure. The adhesive must have a strong bonding strength with the tooth and the ability to withstand acids and heat that may occur in the oral cavity over a long period after treatment. Observing the adhesive interface is an effective means for evaluation and consideration. By using a manufacturing method that employs FIB processing technology, we were able to achieve effective results that could not be obtained with conventional ultra-thin sections made with diamond knives, and we would like to introduce this.

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[Analysis Case] Evaluation of Si Anode in Lithium-ion Secondary Batteries

It is possible to evaluate the state of the electrodes before and after charging, as well as the presence and distribution of Li.

Silicon (Si) is one of the candidates for high-capacity anode active materials, but it is said to suffer from severe cycle degradation due to the very large volume changes during charge and discharge. We dismantled and observed the Si anode before and after charging under controlled atmospheric conditions. Furthermore, we created cross-sectional observation samples using the FIB micro-sampling method and conducted shape observation and EELS measurements with a Cs-corrected STEM device to evaluate the condition of the Si electrode and the distribution of Li within the electrode.

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[Analysis Case] Cross-sectional Observation and Elemental Analysis of Soft Materials

Direct evaluation of the structure of solution samples through cryo-SEM observation and EDX analysis.

To observe and analyze the internal structure of organic materials and liquid samples that are sensitive to heat, it is necessary to suppress temperature increases caused by processing or electron beam irradiation and to conduct a series of analyses while maintaining the original structure of the sample. In this case study, we will introduce an example where a cosmetic was used as an evaluation sample, and structural analysis was performed from cross-section FIB processing to SEM observation and EDX analysis while maintaining a cooling environment.

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[Analysis Case] SCM Analysis of SiC Planer Power MOS

You can visualize the diffusion layer structure of SiC devices.

In SCM, it is possible to identify the p/n polarity of semiconductors and visualize the shape of the diffusion layer. This method has been utilized for Si devices, but it can also be applied to SiC devices in areas where the carrier concentration is sufficiently high. This document presents the results of SCM analysis conducted on a cross-section of a SiC Planar Power MOS.

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[Analysis Case] Observation of Emulsions in Cryo FIB-SEM Processed Food

Observe the dispersion state of moisture and oil while maintaining the structure.

Emulsions are dispersion systems in which water-soluble and fat-soluble components are mixed without separation due to the action of emulsifiers, and various emulsion technologies are widely used in processed foods. Mayonnaise is a representative processed food of the O/W type (oil-in-water emulsion). As a result of evaluation using cryo FIB-SEM observation, we were able to visualize the distribution of water, oil, emulsifiers, and other components. By conducting magnified observations, we can evaluate the fine structure, which is expected to be applied to sensory evaluations such as the smoothness and flavor of food.

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[Analysis Case] Structural Evaluation of Magnetic Head MTJ Section

High-resolution TEM observation using Cs-corrected TEM

By using a Cs-corrected TEM device that compensates for spherical aberration, it is possible to observe the cross-sectional structure of devices with high resolution. In this case, we present data from high-resolution (HR)-TEM observations of the MTJ: magnetic tunnel junction part, extracted from a commercially available hard disk. Thus, it is possible to clearly observe the structure even in multilayer structures of ultra-thin metal films.

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[Analysis Case] Atomic Level Structural Analysis of CIGS Thin-Film Solar Cells

Atomic-level resolution EDX analysis using Cs-corrected STEM.

By using a Cs-corrected TEM device that compensates for spherical aberration, it is possible to observe the cross-sectional structure of devices with high resolution. This case presents data from high-resolution (HR)-STEM observation and EDX elemental distribution analysis of the light-absorbing layer of CIGS thin-film solar cells. In CIGS, which has a polycrystalline structure composed of four elements, atomic resolution EDX analysis was performed, visually revealing the distribution of atoms.

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[Analysis Case] Observation of Fine Structures under Ultra-Low Acceleration Voltage Conditions using SEM

Evaluation of separator structure by ultra-low acceleration SEM observation.

As exemplified by the separators used in lithium-ion secondary batteries, the microstructure of materials, such as porosity and shape, significantly influences the characteristics and functions of products. When materials have a low softening point, such as resins or polypropylene (PP), they may be damaged by electron beam irradiation during observation, leading to changes in their original structure. We will present a case where ultra-low acceleration SEM observation at an acceleration voltage of 0.1 kV was used to suppress alteration and evaluate the surface morphology of the sample in detail.

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[Analysis Case] Evaluation of Particle Size and Composition of Catalyst Materials using TEM and EDX

Evaluation of catalyst particles using STEM-EDX.

The electrodes of fuel cells are supported by Pt particles or Pt alloy (such as PtRu) particles as catalysts on carbon. Due to the fine structure of these catalyst particles, which are on the order of a few nanometers, SEM and TEM analyses are used for morphological observation and compositional analysis. In addition to evaluations in the initial state, degradation after current application has been reported, including modulation of alloy composition, leaching of Ru, and an increase in the diameter of catalyst particles; HAADF observation and high-resolution EDX analysis are very effective for these evaluations. Furthermore, multi-field observation and analysis enable the assessment of particle size and compositional distribution.

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[Analysis Case] Atomic Column Observation of Strontium Titanate SrTiO3

High-resolution STEM observation using Cs-corrected STEM

ABF-STEM images (scanning transmission annular dark field images) allow for the direct observation of atomic positions of light elements. Simultaneous acquisition with HAADF-STEM images enables more detailed structural analysis. In this case, we present an example of observing atomic columns of strontium titanate (SrTiO3). By combining EDX elemental distribution analysis, we can visually clarify the distribution of atoms. Measurement methods: TEM・EDX Product fields: LSI・Memory Analysis purposes: Shape evaluation・Structural evaluation For more details, please download the materials or contact us.

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[Analysis Case] Polarity Evaluation of GaN by ABF-STEM Observation

Atomic-level observation is possible with the Cs collector-equipped STEM.

GaN, which is being utilized as a power device and optical device, has a hexagonal wurtzite structure and exhibits crystallographic asymmetry (Ga polarity and N polarity) in the c-axis direction. The growth processes of epitaxial films differ between Ga polarity and N polarity, and the surface physical properties and chemical reactivity of the crystal also vary. In this document, the polarity of GaN was evaluated through annular bright field (ABF)-STEM observation. As a result, the positions of the Ga sites and N sites were identified, allowing for a visual clarification of the characteristics of Ga polarity and N polarity. Measurement method: TEM Product fields: Power devices, optical devices Analysis objectives: Shape evaluation, structural evaluation, thickness evaluation For more details, please download the document or contact us.

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[Analysis Case] Atomic Resolution Analysis of Lithium-Ion Secondary Battery Cathode Materials

Atmosphere control + atomic-level observation under cooling

In MST, atomic-level TEM analysis is possible under atmosphere control (and cooling). This document presents a case where LiCoO2 particles, extracted from a lithium-ion secondary battery without exposure to the atmosphere, were processed using FIB and analyzed with TEM under atmosphere control and cooling. STEM observation and EDX analysis were conducted while cooling to -174°C, allowing for a visual confirmation of the atomic arrangement. This method can be applied to materials with low thermal stability and crystalline materials that undergo changes in the atmosphere for high-resolution analysis.

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[Analysis Case] Observation of Fine Surface Morphology of Three-Dimensional Cultured Human Skin

Visualization of nanoscale roughness on the skin surface using AFM.

In recent years, the development of alternative methods to animal testing for the efficacy and safety testing of pharmaceuticals and cosmetics has been progressing, with particular attention being paid to testing methods using three-dimensional cultured skin. In this case study, a percutaneous absorption test of a cosmetic (lotion) was conducted using three-dimensional cultured human skin, which was measured using AFM (Atomic Force Microscopy). This allows for a visual evaluation of the microstructure of the skin surface, and it is also possible to quantitatively assess the roughness of any specific area. By measuring under atmospheric conditions, it is possible to observe the samples while minimizing alterations that would occur under vacuum conditions.

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[Analysis Case] Observation of Shape Changes of Polymers on a Substrate Using Liquid AFM Measurements

Visualization of structural changes in samples in the atmosphere and in aqueous solutions.

Polymers are known to exhibit diverse functions by altering their composition and structure, and they are utilized in various products. In the evaluation of polymers, assessment in real environments is crucial. This time, we will introduce a case where the shape of polymers on a substrate was visualized in the atmosphere and in aqueous solution using an environmental control atomic force microscope (AFM). Additionally, by combining data analysis, we quantified the dispersion of polymer particles.

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[C-SAM] Ultrasonic Microscopy Method

C-SAM is a non-destructive method for observing defects such as delamination within a sample.

C-SAM is also known as SAT: Scanning Acoustic Tomography. - It is effective for confirming the "bonding state of electrodes" and "adhesion of bonded wafers," which are difficult to verify with X-ray CT observations. - In addition to reflected waves, transmission waves can also be acquired.

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[Analysis Case] AFM Analysis of Smartphone Protective Films

Quantitative evaluation of the quality of sensory products is possible.

The penetration rate of smartphones is increasing year by year, and along with that, the protective films applied to their surfaces are diversifying in functionality. In this instance, we will introduce a case where two types of films (A and B) with fingerprint prevention and anti-reflection features were quantitatively evaluated in terms of roughness, simulating the sensation of touch through AFM analysis.

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[Analysis Case] Evaluation of the Distribution of Drug Components Administered to the Eye

It is possible to process the eyeball and visualize the drug components (imaging).

Knowing how administered drugs distribute within the body is important information for drug development. In this case, the drug was directly administered into the vitreous body of fish eyes, and the distribution of the drug components was evaluated in cross-sections of the eyeball. As a result, the drug components were strongly detected near the administration site, showing their distribution within the eye. By using a mass microscope called TOF-SIMS, it is possible to apply this to the pharmacokinetics of various biological organs, including the eyeball.

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[Analysis Case] High Sensitivity Evaluation of SNDM's SiCMOS

The diffusion layer structure of SiC devices can be visualized (high-sensitivity evaluation of the diffusion layer structure).

In SNDM (Scanning Nonlinear Dielectric Microscopy), it is possible to identify the p/n polarity of semiconductors and visualize the shape of the diffusion layer. This method encompasses the functions of the traditionally used SCM (Scanning Capacitance Microscopy), allowing for sufficient evaluation of next-generation power devices, such as SiC, which are difficult to assess with SCM, from low to high concentrations. It is characterized by high sensitivity and can be applied to all compound semiconductor devices. As an example, we will introduce a case where a cross-section of a SiC Planer Power MOS was fabricated and analyzed using SNDM.

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[Analysis Case] Comparison of Secondary Electron Images of Cu Surface Using SEM and SIM

It is effective to differentiate between the two methods depending on the surface structure of interest.

Scanning Electron Microscopy (SEM) and Scanning Ion Microscopy (SIM) are both techniques used to evaluate the structure near the surface of a sample by obtaining secondary electron images. Differences in the primary probes lead to variations in contrast and spatial resolution, making it effective to choose between the two methods depending on the surface structure of interest. This document summarizes the comparison of the two methods and presents an example of measurements observing a Cu surface.

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[Analysis Case] Investigation of Voids Inside Bonded Wafers Using C-SAM

We will evaluate the internal structure of the device in a comprehensive manner.

MST offers a range of technologies suitable for evaluating the internal structures of electronic devices, and we propose analytical methods tailored to the observation field and objectives. This document presents case studies investigating specific areas of devices using X-ray CT and FIB-SEM. First, we observed the internal structure of the entire sample using X-ray CT to explore specific areas. Next, we used FIB-SEM to examine the detailed structures of the specific features identified on the vias.

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"Basics of TEM" "Applications and Case Studies of TEM" *A gift for all interested participants.

Basic knowledge and analysis examples of TEM (Transmission Electron Microscopy) used in a wide range of research and development fields such as polymers and semiconductors.

TEM (Transmission Electron Microscopy) is a method that involves irradiating a thin sample with electrons, imaging the electrons that have passed through or scattered from the sample, and observing it at high magnification. At MST, we are offering "Basics of TEM," which includes fundamental knowledge such as the characteristics of TEM and sample preparation methods, and "Applications and Examples of TEM," which features representative analysis cases and examples of combined analysis with other methods! This material is presented in an easy-to-understand manner using photographs and diagrams. [Contents (partial)] <Basics of TEM> 　■What can be understood with TEM and STEM ■Characteristics of TEM and STEM 　■Sample preparation methods ■Factors affecting contrast 　■Differentiation between TEM and STEM ■Ultra-high resolution HAADF observation <Applications and Examples of TEM> 　■Analysis examples 　　・TEM analysis under controlled atmosphere and cooling 　　・Evaluation of contact electrodes in SiC power MOSFETs 　　・Structural evaluation of fine transistors *If you would like a booklet, please check the box for "Request for catalog" in the "Contact Us" section to apply. (The downloadable PDF material consists of the first few pages.)

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[Analysis Case] 3D Observation of Cosmetics Using X-ray CT and Cryo-SEM

It is possible to confirm the shape of emulsified particles and inorganic powders! Visualizing the film of liquid foundation from macro to micro levels.

We would like to introduce a case study of 3D observation of cosmetics using X-ray CT and cryo-SEM, analyzed by the foundation. Liquid foundation applied to a plastic substrate was observed using X-ray CT and cryo-SEM, visualizing the dispersion state within the sample. X-ray CT allows for the confirmation of macroscopic morphology in a non-destructive and non-contact manner, while cryo-SEM enables the observation of even more microscopic structures. 【Features】 ■ The internal structure of the liquid foundation film can be evaluated through macroscopic morphological observation. ■ Detailed structural observation using an electron microscope allows for the confirmation of the shapes of emulsified particles and inorganic powders. *For more details, please refer to the PDF document or feel free to contact us.

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[Analysis Case] Structural Evaluation of Positive Electrode Active Material in Secondary Batteries

Evaluation of particle size and crystal orientation of living materials, atomic-level observation is possible.

Lithium-ion secondary batteries undergo changes in the composition and crystal structure of the electrode active materials due to ion extraction and insertion during charging and discharging. As a structural evaluation of the positive electrode active material Li(NiCoMn)O2 (NCM), we assessed the particle size and orientation of primary particles using EBSD. Furthermore, we conducted high-resolution STEM observations on the primary particles whose orientations were confirmed, showcasing the atomic positions of light elements (Li, O) in ABF-STEM images and the atomic positions of transition metals (Ni, Co, Mn) in HAADF-STEM images. Measurement methods: SEM, EBSD, TEM Product field: Secondary batteries Analysis purpose: Shape evaluation, structural evaluation, product investigation For more details, please download the materials or contact us.

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[Analysis Case] Cell Cycle Assessment from Bacterial Images

By using deep learning and data analysis, we can evaluate sample characteristics by utilizing large amounts of data.

We observed a sample mixed with three types of lactic acid bacteria using SEM, and extracted the bacteria by type using deep learning from the obtained images. Furthermore, we conducted data analysis to determine the presence ratio on the cell cycle based on the shape of the lactic acid bacteria. Measurement methods: SEM, computational science, AI, data analysis Product fields: Biotechnology, pharmaceuticals, daily necessities, cosmetics, food Analysis purpose: Shape evaluation, product investigation For more details, please download the materials or contact us.

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[Analysis Case] AFM Video Observation of Temporal Changes During Heating and Cooling Processes

Evaluate the shape change of the sample surface in situ.

Polymers can change shape depending on environmental factors such as temperature, humidity, and solvents, and by varying the environmental conditions during evaluation, we can deepen our understanding of their physical properties. In this study, we conducted heating and cooling experiments using polycaprolactone (PCL), which is known for its biodegradability. PCL has a melting point of approximately 60°C, and we continuously observed through video how it changes from a crystalline state to an amorphous state upon heating, and how it recrystallizes upon cooling. Measurement method: AFM Product fields: Biotechnology, Pharmaceuticals, Daily Goods, Food Analysis purpose: Shape evaluation For more details, please download the materials or contact us.

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[Analysis Case] Trench-type Si-MOSFET IDSS Leakage Location Analysis

One-stop service from identifying device defects to analyzing causes.

Power devices are attracting attention from the perspective of power and energy conservation as switches for high voltage and large current. In power devices, wiring defects and electrical failures occur due to the application of high voltage. Additionally, identifying and analyzing the causes of defects is essential for improving product reliability. This document presents a case study where the identification of defective areas was conducted using EMS (Emission Microscopy Method), and the analysis of defect causes was evaluated using SCM (Scanning Capacitance Microscopy) and SEM (Scanning Electron Microscopy). Measurement methods: EMS, SCM, SEM Product field: Power devices Analysis purpose: Failure analysis and defect analysis For more details, please download the document or contact us.

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[Analysis Case] Evaluation of Ion Implantation Damage Layer in Gallium Oxide Ga2O3

Confirming the differences due to variations in annealing conditions after ion implantation.

Gallium oxide (Ga2O3) has a wider bandgap than SiC and GaN, and possesses excellent physical properties, making it a focus of attention as a material for power devices that can be expected to be high-efficiency and low-cost. Controlling impurity concentration and crystallinity, which influence the characteristics of the devices, is crucial for their development. This document presents the results of observations of the damage layer and changes in surface roughness caused by disturbances in the crystal structure due to ion implantation, under various annealing conditions. Measurement methods: TEM, AFM Product fields: Oxide semiconductors, power devices Analysis objectives: Shape evaluation, structural evaluation For more details, please download the document or contact us.

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[PFM] Piezoelectric Response Microscope

By using a probe coated with a conductive film and applying an alternating voltage to the sample surface, the sample surface is vibrated to obtain electromechanical information.

- Visualization of attraction and repulsion due to the electric dipole effect of piezoelectric samples is possible. - Quantitative evaluation of the sample's expansion and contraction due to piezoelectric response is a reference value. - AFM images can also be obtained simultaneously.

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Identification of resistance anomalies due to absorption current

You can identify high resistance and open areas in the wiring from the absorption current image.

- Possible to identify high resistance abnormal areas - The current flowing through the wiring is weak (pA) - Measurement is possible even with a surface protective film present - Measurement is possible even with multilayered wiring - Measurement is possible under conditions almost identical to SEM observation

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microscope Product List and Ranking from 178 Manufacturers, Suppliers and Companies | IPROS GMS

microscope Manufacturer, Suppliers and Company Rankings

microscope Product ranking