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Clean Robot(cfrp) - List of Manufacturers, Suppliers, Companies and Products

Clean Robot Product List

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4-axis cylindrical coordinate clean robot MTCR4000 series

4-axis cylindrical coordinate clean robot MTCR4000 series

It is suitable for wafer transport and enables high-speed transport using all-axis AC servos.

The MTCR4000 series, compatible with 300mm for super clean rooms, is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. It enables high-speed transport with full-axis AC servos, offering superior cost performance compared to conventional MTHR models. You can choose between base type and flange type according to your equipment layout. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots

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4-axis horizontal multi-joint clean robot GCR4000-AM series

4-axis horizontal multi-joint clean robot GCR4000-AM series

Specifications of AC servo motors and high-speed transportation through motion trajectory optimization.

The GCR4000-AM series is a multi-axis type, 4-axis horizontal articulated clean robot suitable for wafer transport in semiconductor manufacturing equipment and inspection devices that accommodate 300mm. You can choose between base type and flange type according to the equipment layout. It is possible to use optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots

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4-axis cylindrical coordinate clean robot STHR4000 series

4-axis cylindrical coordinate clean robot STHR4000 series

It is suitable for wafer transport and allows for quick wafer exchange.

The STHR4000 series of super clean room 4-axis cylindrical coordinate twin-arm robots is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices. The two arms allow for quick wafer exchanges. You can choose between base type and flange type to match the equipment layout. S-curve acceleration and deceleration control enables high-speed and high-precision wafer transport. It is possible to accommodate optimal chucks tailored to the transported objects and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots

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4-axis horizontal multi-joint clean robot GCR4280-AM series

4-axis horizontal multi-joint clean robot GCR4280-AM series

Ideal for transporting wafers and other items within semiconductor manufacturing equipment compatible with 300mm and 450mm.

The multi-axis type for super clean rooms, the 4-axis horizontal articulated clean robot GCR4280-AM series, is suitable for transporting wafers, small glass substrates, and other items within semiconductor manufacturing equipment and inspection devices, compatible with 300mm and 450mm sizes. You can choose between base type and flange type according to the equipment layout. It is possible to accommodate optimal chucks tailored to the items being transported and the equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots

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Vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series

Vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series

It can be used for transporting wafers inside a vacuum chamber.

The vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series can be used for transporting wafers within a vacuum chamber. Compared to the SVHR, it has double the payload capacity and offers excellent cost performance. Additionally, it is compatible with the SVHR for installation, allowing for a smooth transition. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots

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3-Axis Cylindrical Coordinate Clean Robot LHR3000 Series

3-Axis Cylindrical Coordinate Clean Robot LHR3000 Series

For Z strokes of 760mm or more, the Z-axis is multi-stage, allowing for low-pass line configuration.

The LHR3000 series clean robot with a 3-axis cylindrical coordinate system compatible with glass substrates is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. With a Z stroke of over 760mm, the Z-axis is multi-stage, allowing for low pass line configuration. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots

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4-axis cylindrical coordinate clean robot LTHR4000 series

4-axis cylindrical coordinate clean robot LTHR4000 series

It is suitable for the transport of glass substrates for inspection devices, etc., within liquid crystal manufacturing equipment.

The LTHR4000 series clean robot with a 4-axis cylindrical coordinate system compatible with glass substrates is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. With a Z stroke of over 760mm, the Z-axis is multi-stage, allowing for low pass line configuration. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots

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4-axis cylindrical coordinate vacuum-compatible clean robot FTVHR4000

4-axis cylindrical coordinate vacuum-compatible clean robot FTVHR4000

Optimal for transporting masks and glass substrates in liquid crystal manufacturing equipment, inspection devices, etc.

The FTVHR4000 series clean robot, compatible with mask and glass substrates and designed for four-axis cylindrical coordinate link-type high vacuum applications, is suitable for transporting mask and glass substrates within LCD manufacturing equipment and inspection devices. It transports glass substrates at high speed and high precision through S-curve acceleration and deceleration control. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots

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