We have compiled a list of manufacturers, distributors, product information, reference prices, and rankings for Cryopumps.
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Cryopumps Product List and Ranking from 6 Manufacturers, Suppliers and Companies

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

Cryopumps Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. アルバック・クライオ Kanagawa//Testing, Analysis and Measurement
  2. キヤノンアネルバ 栗木本社 Kanagawa//Machine elements and parts
  3. ラジカル Kumamoto//Industrial Machinery
  4. 4 アイ・アール・システム Tokyo//Trading company/Wholesale
  5. 5 ナガセテクノエンジニアリング 横浜センター Kanagawa//Other manufacturing
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Cryopumps Product ranking

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. POWER Series High-Performance Cryopump (Compact) キヤノンアネルバ 栗木本社
  2. Radical Corporation Business Introduction "Cryopump Maintenance" ラジカル
  3. Water Vapor Cryo Pump アイ・アール・システム
  4. 4 Cryopump CRYO-U Series アルバック・クライオ
  5. 5 Cryopump ナガセテクノエンジニアリング 横浜センター

Cryopumps Product List

1～15 item / All 25 items

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Water Vapor Cryo Pump

Water Vapor Cryo Pump

Significantly improve vacuum levels when used in combination with a turbo pump! Vacuum evacuation time can also be greatly reduced!!

The MicroStar manufactured by RICOR is a vacuum auxiliary pump using the Stirling cooler method. When used in conjunction with a turbo pump, it significantly improves vacuum levels and greatly reduces evacuation time. Unlike GM-type cryopumps, it does not require a separate large helium compressor or helium lines, making it compact and low power consumption. It is ideal as a vacuum auxiliary pump for load lock chambers, transfer chambers, process chambers, and vacuum deposition equipment in semiconductor processing systems.

  • Cooling system

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Cryopump CRYO-U20P

Cryopump CRYO-U20P

We deliver high-quality vacuum.

The CRYO-U series from ULVAC Cryo, backed by numerous achievements, offers excellent reliability, high performance and quality, prompt and accurate service, and a diverse range of abundant models, making it safe for use in production lines.

  • Vacuum pump

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Cryopump CRYO-U22H

Cryopump CRYO-U22H

We deliver high-quality vacuum.

The CRYO-U series from ULVAC Cryo, backed by numerous achievements, offers excellent reliability, high performance and quality, prompt and accurate service, and a wide variety of models, making it safe for use in production lines.

  • Vacuum pump

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Cryopump

Cryopump

Cleaner vacuum, more advanced vacuum control, and a wider range of vacuum pressure areas.

Essential "Ultra-High Vacuum" "Ultra-high vacuum" is indispensable in semiconductor manufacturing processes and plays a crucial role in fundamental research related to new materials and elementary particles. Achieving cleaner vacuum, more advanced vacuum control, and a broader range of vacuum pressure areas will lead to greater outcomes in cutting-edge science and technology. High Pumping Speed and Clean Vacuum Quality We have launched a cryopump unit developed from our extensive air conditioning technology, featuring a unique helium compressor and a Sorbey cycle refrigeration method. With high pumping speed, clean vacuum quality, and above all, its reliability and perfected functionality, it has been highly regarded in various fields. In response to the demand for increased productivity and efficiency, we have expanded our lineup, and the increasingly comprehensive Marathon CP series is categorized by series. Here, vacuum quality speaks for itself.

  • Vacuum Equipment

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Cryopump MARATHON CP-8LP CRYOPUMP

Cryopump MARATHON CP-8LP CRYOPUMP

You can choose a system with autoplay controls as an option.

The MARATHON CP-8LP CRYOPUMP allows you to choose a mounting flange from ANSI 6", ISO 200, or CF 10". An optional system with automatic regeneration control is available. With one HC-8E4 or F-70 compressor, you can operate up to two cryopumps. For more details, please contact us or refer to the catalog.

  • Vacuum pump

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Cryopump MARATHON CP-12 CRYOPUMP

Cryopump MARATHON CP-12 CRYOPUMP

We will realize a clean vacuum essential for advanced industries.

The MARATHON CP-12 CRYOPUMP has no oil present in the exhaust system, eliminating reverse diffusion. Since the oil of the roughing pump used before startup can be set to a high crossover pressure, there is no concern about reverse diffusion, achieving a clean vacuum essential for advanced industries. The mounting flange can be selected from ANSI 10", ISO 320, or CF 14". An optional system with automatic regeneration control is available. For more details, please contact us or refer to the catalog.

  • Vacuum pump

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Cryopump MARATHON CP-20 CRYOPUMP

Cryopump MARATHON CP-20 CRYOPUMP

There are no restrictions on the installation direction, allowing for installation that aligns with surrounding conditions and design concepts.

The MARATHON CP-20 CRYOPUMP has no oil present in the exhaust system, eliminating reverse diffusion. Since the oil of the roughing pump used before startup can be set to a high crossover pressure, there is no concern about reverse diffusion, achieving a clean vacuum essential for advanced industries. You can choose from mounting flanges of ISO500, ANSI 20", or wire seal flanges. An optional system with automatic regeneration control is also available. For more details, please contact us or refer to the catalog.

  • Vacuum pump

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Radical Corporation, Vacuum Equipment Division

Radical Corporation, Vacuum Equipment Division

We accept modifications, aging countermeasures, and repairs for the equipment currently in use.

Radical Corporation's Vacuum Equipment Division is engaged in the repair of a very specialized vacuum pump called a "cryopump," which creates a vacuum state using ultra-low temperature refrigeration, in Japan, Taiwan, and South Korea. We also design and manufacture various vacuum equipment, including vacuum deposition systems and sputtering devices. In particular, we cater to specific industry-specific machines that major vacuum manufacturers do not support. Furthermore, we accept modifications, aging countermeasures, and repairs for currently used equipment. We can also assist with older equipment for which the manufacturer can no longer provide support. For more details, please contact us or refer to our catalog.

  • Vacuum Equipment
  • Vacuum pump

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Radical Corporation Business Introduction "Cryopump Maintenance"

Radical Corporation Business Introduction "Cryopump Maintenance"

We can repair all cryopumps, regardless of manufacturer or model!

Radical Corporation can only maintain "cryopumps." However, you can leave everything related to cryopumps to us. Radical is not affiliated with any pump manufacturers. We support all pumps with our unique technology. 【Features】 ○ Capable of repairing all cryopumps, regardless of manufacturer or model ○ Equipped with high technical skills and extensive experience ○ Reduces maintenance costs ○ Supports not only cryopumps but all peripheral equipment → Compressors, adsorbers, etc. For more details, please contact us or download the catalog.

  • Vacuum pump
  • Calibration and repair

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POWER Eco Series High-Performance Energy-Saving Cryopump

POWER Eco Series High-Performance Energy-Saving Cryopump

In addition to small models, we also offer medium and large sizes! They have significant advantages in both performance and energy efficiency.

The POWER Eco series product is a high-performance energy-saving cryopump developed with the aim of reducing power consumption and cooling water usage from an energy-saving perspective. Due to the increased efficiency of refrigeration units and multi-wave control, the number of cryopumps that can be operated with a single compressor has increased, significantly reducing power consumption and cooling water usage per unit. 【Features】 ■ Effective for energy and resource savings [Power consumption, cooling water usage: Reduction of 15-70% possible] ■ Shortened regeneration and startup time [Less than half compared to conventional models (compared to our company)] ■ Improved exhaust performance [Substantially increased effective argon exhaust capacity by 1.5 to 4 times (compared to our company)] ■ Low vibration [Approximately 1/10 or less compared to conventional models] *For more details, please refer to the PDF materials or feel free to contact us.

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  • Vacuum pump

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Cryopump CRYO-U12HSP

Cryopump CRYO-U12HSP

We deliver high-quality vacuum.

The CRYO-U series from ULVAC Cryo, backed by numerous achievements, offers excellent reliability, high performance and quality, prompt and accurate service, and a wide variety of models, making it safe to use in production lines.

  • Vacuum pump

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