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Cryopumps - List of Manufacturers, Suppliers, Companies and Products

Cryopumps Product List

1～15 item / All 22 items

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Water Vapor Cryo Pump

Water Vapor Cryo Pump

Significantly improve vacuum levels when used in combination with a turbo pump! Vacuum evacuation time can also be greatly reduced!!

The MicroStar manufactured by RICOR is a vacuum auxiliary pump using the Stirling cooler method. When used in conjunction with a turbo pump, it significantly improves vacuum levels and greatly reduces evacuation time. Unlike GM-type cryopumps, it does not require a separate large helium compressor or helium lines, making it compact and low power consumption. It is ideal as a vacuum auxiliary pump for load lock chambers, transfer chambers, process chambers, and vacuum deposition equipment in semiconductor processing systems.

  • Cooling system

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Cryopump CRYO-U20P

Cryopump CRYO-U20P

We deliver high-quality vacuum.

The CRYO-U series from ULVAC Cryo, backed by numerous achievements, offers excellent reliability, high performance and quality, prompt and accurate service, and a diverse range of abundant models, making it safe for use in production lines.

  • Vacuum pump

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Cryopump CRYO-U22H

Cryopump CRYO-U22H

We deliver high-quality vacuum.

The CRYO-U series from ULVAC Cryo, backed by numerous achievements, offers excellent reliability, high performance and quality, prompt and accurate service, and a wide variety of models, making it safe for use in production lines.

  • Vacuum pump

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Cryopump

Cryopump

Cleaner vacuum, more advanced vacuum control, and a wider range of vacuum pressure areas.

Essential "Ultra-High Vacuum" "Ultra-high vacuum" is indispensable in semiconductor manufacturing processes and plays a crucial role in fundamental research related to new materials and elementary particles. Achieving cleaner vacuum, more advanced vacuum control, and a broader range of vacuum pressure areas will lead to greater outcomes in cutting-edge science and technology. High Pumping Speed and Clean Vacuum Quality We have launched a cryopump unit developed from our extensive air conditioning technology, featuring a unique helium compressor and a Sorbey cycle refrigeration method. With high pumping speed, clean vacuum quality, and above all, its reliability and perfected functionality, it has been highly regarded in various fields. In response to the demand for increased productivity and efficiency, we have expanded our lineup, and the increasingly comprehensive Marathon CP series is categorized by series. Here, vacuum quality speaks for itself.

  • Vacuum Equipment

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Cryopump MARATHON CP-8LP CRYOPUMP

Cryopump MARATHON CP-8LP CRYOPUMP

You can choose a system with autoplay controls as an option.

The MARATHON CP-8LP CRYOPUMP allows you to choose a mounting flange from ANSI 6", ISO 200, or CF 10". An optional system with automatic regeneration control is available. With one HC-8E4 or F-70 compressor, you can operate up to two cryopumps. For more details, please contact us or refer to the catalog.

  • Vacuum pump

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Cryopump MARATHON CP-12 CRYOPUMP

Cryopump MARATHON CP-12 CRYOPUMP

We will realize a clean vacuum essential for advanced industries.

The MARATHON CP-12 CRYOPUMP has no oil present in the exhaust system, eliminating reverse diffusion. Since the oil of the roughing pump used before startup can be set to a high crossover pressure, there is no concern about reverse diffusion, achieving a clean vacuum essential for advanced industries. The mounting flange can be selected from ANSI 10", ISO 320, or CF 14". An optional system with automatic regeneration control is available. For more details, please contact us or refer to the catalog.

  • Vacuum pump

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Cryopump MARATHON CP-20 CRYOPUMP

Cryopump MARATHON CP-20 CRYOPUMP

There are no restrictions on the installation direction, allowing for installation that aligns with surrounding conditions and design concepts.

The MARATHON CP-20 CRYOPUMP has no oil present in the exhaust system, eliminating reverse diffusion. Since the oil of the roughing pump used before startup can be set to a high crossover pressure, there is no concern about reverse diffusion, achieving a clean vacuum essential for advanced industries. You can choose from mounting flanges of ISO500, ANSI 20", or wire seal flanges. An optional system with automatic regeneration control is also available. For more details, please contact us or refer to the catalog.

  • Vacuum pump

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Cryopump CRYO-U12HSP

Cryopump CRYO-U12HSP

We deliver high-quality vacuum.

The CRYO-U series from ULVAC Cryo, backed by numerous achievements, offers excellent reliability, high performance and quality, prompt and accurate service, and a wide variety of models, making it safe to use in production lines.

  • Vacuum pump

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Cryopump CRYO-U16

Cryopump CRYO-U16

We deliver high-quality vacuum.

The CRYO-U series from ULVAC Cryo, backed by numerous achievements, offers excellent reliability, high performance and quality, prompt and accurate service, and a wide variety of abundant models, making it safe for use in production lines.

  • Vacuum pump

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Cryopump CRYO-U16P

Cryopump CRYO-U16P

We deliver high-quality vacuum.

The CRYO-U series from ULVAC Cryo, backed by numerous achievements, offers excellent reliability, high performance and quality, prompt and accurate service, and a wide variety of models, making it safe for use in production lines.

  • Vacuum pump

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