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Mass Flow Controller Product List and Ranking from 17 Manufacturers, Suppliers and Companies

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

Mass Flow Controller Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. ITWジャパン Tokyo//Machine elements and parts
  2. Fujikin Incorporated Tokyo//Machine elements and parts
  3. ＩＢＳ Osaka//Other manufacturing
  4. 4 コフロック 本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡 Kyoto//Industrial Machinery
  5. 5 センシリオン Kanagawa//Electronic Components and Semiconductors
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Mass Flow Controller Product ranking

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. Mass Flow Controller/ Meter "SLAMf Series" ITWジャパン
  2. Fujikin Inc. "Mass Flow Controller" Fujikin Incorporated
  3. Mass Flow Controller/ Meter "5850E Series" ITWジャパン
  4. 4 System [Flow Control Device] FCS Pressure Series Fujikin Incorporated
  5. 5 Mass Flow Controller "Aera FC-R7700 Series" ＩＢＳ

Mass Flow Controller Product List

16～30 item / All 60 items

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Mass Flow Controller "SFC5400"

Mass Flow Controller "SFC5400"

The main body is made of metal! A version without a valve is also available.

The "SFC5400" is a versatile mass flow controller that can connect to various interfaces and fluid connections. It can measure a maximum flow rate from 50 sccm to 200 slm, and the sensor signal is calibrated on the chip and directly converted into a temperature-compensated digital signal. Additionally, it can store multiple gas calibration data in one device, allowing you to check whether the operating gas calibration value matches the actual gas being measured. 【Specifications (partial)】 ■ Full-scale flow rates: 1, 2, 5, 10, 20, 50, and 100 slm ■ Full-scale flow rates: 50, 100, 200, and 500 sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector ports: Swagelok, VCO, VCR, Downmount *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "SFC5500-2slm"

Mass Flow Controller "SFC5500-2slm"

Utilizing CMOSens MEMS technology! Available as standard products suitable for a wide range of applications.

The "SFC5500-2slm" is a mass flow controller that does not drift and does not require recalibration in the market. It combines multiple gas calibrations and interchangeable fittings, making it available as a standard product suitable for a wide range of applications. Additionally, it is suitable for a variety of environments in medical, analytical, and industrial settings, and you can choose from standard pre-set variations. 【Specifications (partial)】 ■ Full-scale flow: 2 slm ■ Full-scale flow: 2000 sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 8 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller 'SFC5500-0.5slm'

Mass Flow Controller 'SFC5500-0.5slm'

A culmination of our 20 years of achievements in the precise control of gas flow!

The "SFC5500-0.5slm" is a mass flow controller that combines multiple gas calibrations and interchangeable fittings. This product is based on the microthermal measurement principle and utilizes our proven CMOSens MEMS technology. Additionally, unlike other products on the market, it does not drift and does not require recalibration in the market. 【Specifications (partial)】 ■ Full scale flow rate: 0.5slm ■ Full scale flow rate: 500sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "SFC5500-200slm"

Mass Flow Controller "SFC5500-200slm"

Utilizing CMOSens MEMS technology! Suitable for a wide range of applications in medical, analytical, and industrial environments.

The "SFC5500-200slm" is a mass flow controller that can accommodate multiple flow ranges in a single product. It can be obtained as a standard product suitable for a wide range of applications by combining multiple gas calibrations and interchangeable fittings. Additionally, it does not drift and does not require recalibration in the market. Please feel free to contact us when you need assistance. 【Specifications (partial)】 ■ Full-scale flow: 200slm ■ Full-scale flow: 200000sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, and N2 flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Aera PI-980 Pressure-Insensitive MFC

Aera PI-980 Pressure-Insensitive MFC

Next-generation PI technology that meets tomorrow's process needs.

This groundbreaking technology platform improves responsiveness, gas flow stability, and measurement accuracy compared to conventional technologies, demonstrating excellent performance in real-time process control. Its superior flow stability enhances process reproducibility between chambers and improves production yield. The PI-980 series reduces the need for expensive gas panel components traditionally used in conventional thermal structures by integrating pressure sensors, temperature sensors, and our proprietary NeuralStep control technology. Additionally, the multi-gas, multi-range functionality dramatically reduces the need for spare inventory, further contributing to cost efficiency. This next-generation MFC technology, combined with the integrated diagnostic capabilities and the platform of our proven D980 series products in the field, enhances equipment uptime and enables rapid and easy troubleshooting.

  • CVD Equipment
  • Sputtering Equipment
  • Etching Equipment

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Mass Flow Controller "1000 Series"

Mass Flow Controller "1000 Series"

Suppresses overshoot at startup! High-performance gas flow controller at a low price.

The "1000 Series" is a high-performance gas flow controller that specializes in the basic functions of mass flow controllers, designed as an analog low-cost model. It can be used in a wide range of fields such as various analyses, film formation, physical and chemical experiments, and manufacturing applications. Additionally, we offer a dedicated power supply "PA01" with a simple design that only includes flow rate setting and display, making it easy to operate. 【Features】 ■ Low cost ■ Compact size ■ Suppresses overshoot at startup ■ Valve type: Normally open ■ Flow control range: 5–100% F.S. *For more details, please refer to the PDF materials or feel free to contact us.

  • Other process controls

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Mass Flow Controller/ Meter "5850E Series"

Mass Flow Controller/ Meter "5850E Series"

Excellent long-term stability, maintaining production accuracy! We perform highly reliable, precise, and repeatable measurements and controls.

The "5850E Series" is an elastomer-sealed thermal mass flow controller/meter. This series has a proven track record of being actively used in thousands of applications worldwide for several decades, equipped with a unique stable flow sensor that provides high reliability, accuracy, and repeatability necessary for the demanding industrial production processes of today. 【Features】 ■ Removable flow sensor ■ No influence from mounting position ■ Mechanical/electrical compatibility with other mass flow controllers ■ Electric valve override ■ Corrosion-resistant valve *For more details, please refer to the related link page or feel free to contact us.

  • Flow Meter
  • Flow Control

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Mass Flow Controller/ Meter "SLAMf Series"

Mass Flow Controller/ Meter "SLAMf Series"

Durability that withstands harsh environments! Precision mass flow control that achieves excellent accuracy.

Dust, humidity, extreme temperatures, moisture, and other harsh conditions—no matter the environment, the 'SLAMf Series' elastomer seal thermal mass flow controllers/meters achieve high precision and long-term stability unique to the proven 'SLA5800 family' of meters and controllers. The specially designed NEMA4X/IP66 rated enclosure protects advanced digital electronic components, enabling stable and accurate measurement and control of gas/fluid mass flow essential for processes. 【Features】 ■ High durability enclosure rated NEMA4X / IP66 ■ Wide range of rated flow - from 0.003 to 2500 slpm ■ Compatible with a wide range of temperature and pressure conditions ■ Achieves excellent accuracy ■ Configurable multi-gas/multi-range functionality *For more details, please refer to the related link page or feel free to contact us.

  • IPROS50435174974327297356.png
  • Flow Meter
  • Flow Control

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High-performance mass flow controller MC-3000L series

High-performance mass flow controller MC-3000L series

This is a high-performance digital mass flow controller that employs our proprietary self-temperature compensation method (patented in the U.S. and Japan).

This is a digital mass flow controller that achieves high precision of 1.0% S.P. with its unique patented technology and is compatible with various surface mount standards (1.125 inches). 【Features】 ○ High-performance 1.125-inch size digital mass flow controller (piezo valve, high precision (S.P. guaranteed), digital control) ○ Maintains compatibility with analog mass flow controllers ○ Universal interface RS485 is available ○ Standard ultra-clean specifications with metal seals and precision polished inner surfaces ○ Compatible with various surface mount standards of SEMI STD. *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control

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MODEL 8700 SERIES

MODEL 8700 SERIES

Integrated display type with various functions available! Introducing mass flow controllers/meters.

The "MODEL 8700 SERIES" is a mass flow controller/meter with a display that accommodates a wide range of flow rates. Various functions (instantaneous/integrated flow display, alarm settings) are available. The target fluids include gases such as N2, Air, H2, He, Ar, O2, and CO2. Additionally, it features RS485 communication capabilities and analog input/output of 0-5VDC (which can be changed to 4-20mA). 【Features】 ■ Target fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM when converted to N2) ■ Analog input/output can be changed via the display (0-5VDC at the time of shipment) *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter

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MODEL 3660 SERIES

MODEL 3660 SERIES

Standard mass flow controller compatible with a wide flow range for N2, Air, H2, He, and others!

We would like to introduce our standard mass flow controller, the 'MODEL 3660 SERIES'. It supports a wide flow range from F.S. 10 SCCM to F.S. 100 SLM, converted to N2. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 10 SCCM to 100 SLM. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM, converted to N2) *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter

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MODEL 3200 SERIES

MODEL 3200 SERIES

Reduction of dead volume! Introducing a high-grade mass flow controller with an accuracy of ±1% F.S.

The "MODEL 3200 SERIES" is a high-grade mass flow controller that accommodates very low flow rates starting from F.S. 1 SCCM when converted to N2. It reduces dead volume through a diaphragm seat valve. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 1 SCCM to 20 SLM. 【Features】 ■ Applicable fluids: Gases N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases 1 SCCM to 20 SLM ■ Accuracy: ±1% F.S. ■ Supports very low flow rates (from F.S. 1 SCCM when converted to N2) *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter

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Mass Flow Controller MODEL 8700/3660 SERIES

Mass Flow Controller MODEL 8700/3660 SERIES

It is less affected by temperature and pressure, allowing for high-precision flow measurement and control! Gases such as N2, Air, H2, He, and Ar are the targets.

We would like to introduce our mass flow controllers, the 'MODEL 8700/3660 SERIES'. The mass flow controller/indicator "MODEL 8700 SERIES" features analog input/output of 0-5VDC (which can be changed to 4-20mA) and offers various functions such as instantaneous/integrated flow display and alarm settings. The standard mass flow controller "MODEL 3660 SERIES" accommodates a wide flow range from F.S. 10 SCCM to F.S. 100 SLM, equivalent to N2. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM equivalent to N2) ■ Analog input/output can be changed via the display (MODEL 8700 SERIES) *For more details, please refer to the PDF document or feel free to contact us.

  • Other measurement, recording and measuring instruments

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