Mass Flow Controller "SFC5400"
The main body is made of metal! A version without a valve is also available.
The "SFC5400" is a versatile mass flow controller that can connect to various interfaces and fluid connections. It can measure a maximum flow rate from 50 sccm to 200 slm, and the sensor signal is calibrated on the chip and directly converted into a temperature-compensated digital signal. Additionally, it can store multiple gas calibration data in one device, allowing you to check whether the operating gas calibration value matches the actual gas being measured. 【Specifications (partial)】 ■ Full-scale flow rates: 1, 2, 5, 10, 20, 50, and 100 slm ■ Full-scale flow rates: 50, 100, 200, and 500 sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector ports: Swagelok, VCO, VCR, Downmount *For more details, please download the PDF or feel free to contact us.
- Company:センシリオン
- Price:Other