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Mass Flow Controller Product List and Ranking from 15 Manufacturers, Suppliers and Companies | IPROS GMS

Last Updated： Aggregation Period:Apr 08, 2026～May 05, 2026
This ranking is based on the number of page views on our site.

Mass Flow Controller Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:Apr 08, 2026～May 05, 2026
This ranking is based on the number of page views on our site.

  1. ITWジャパン Tokyo//Machine elements and parts
  2. Fujikin Incorporated Tokyo//Machine elements and parts
  3. センシリオン Kanagawa//Electronic Components and Semiconductors
  4. 4 コフロック 本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡 Kyoto//Industrial Machinery
  5. 5 ビュルケルトジャパン Tokyo//Industrial Machinery
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Mass Flow Controller Product ranking

Last Updated： Aggregation Period:Apr 08, 2026～May 05, 2026
This ranking is based on the number of page views on our site.

  1. Ultra-compact MFC "GC Series" supporting the development of decarbonization and environmentally friendly technologies. ITWジャパン
  2. Fujikin Inc. "Mass Flow Controller" Fujikin Incorporated
  3. Mass Flow Controller/ Meter "5850E Series" ITWジャパン
  4. System [Flow Control Device] FCS Pressure Series Fujikin Incorporated
  5. 5 High-speed response MFC (Mass Flow Controller) that follows in 0.3 seconds. ビュルケルトジャパン

Mass Flow Controller Product List

31～60 item / All 65 items

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Mass Flow Controller MODEL 8700/3660 SERIES

Mass Flow Controller MODEL 8700/3660 SERIES

It is less affected by temperature and pressure, allowing for high-precision flow measurement and control! Gases such as N2, Air, H2, He, and Ar are the targets.

We would like to introduce our mass flow controllers, the 'MODEL 8700/3660 SERIES'. The mass flow controller/indicator "MODEL 8700 SERIES" features analog input/output of 0-5VDC (which can be changed to 4-20mA) and offers various functions such as instantaneous/integrated flow display and alarm settings. The standard mass flow controller "MODEL 3660 SERIES" accommodates a wide flow range from F.S. 10 SCCM to F.S. 100 SLM, equivalent to N2. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM equivalent to N2) ■ Analog input/output can be changed via the display (MODEL 8700 SERIES) *For more details, please refer to the PDF document or feel free to contact us.

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System [Flow Control Device] FCS Thermal Series

System [Flow Control Device] FCS Thermal Series

This is a flow control device that adopts a thermal flow sensor control method.

Achieved further total cost reduction and shortened lead time with a digital interface-equipped mass flow controller. 【Features】 ○ High precision Flow accuracy of ±1% ○ High-performance sensor Adoption of low-temperature flow sensors, achieving optimal structure for highly reactive gases and gases with low stability ○ High-reliability diaphragm valve with reduced gas contact area and prevention of particle generation Adoption of high-speed response piezo actuators Significant improvement in gas replacement characteristics due to dead space-free structure Minimal particle generation ○ Standard digital interface RS485 ○ RoHS compliant ● For other functions and details, please download the catalog.

  • Flow Control
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System [Flow Control Device] FCS Pressure Series

System [Flow Control Device] FCS Pressure Series

This is a flow control device that adopts a pressure control method for ultra-high purity applications.

A flow control system that enables high-precision flow control, which cannot be achieved with conventional mass flow controllers, by controlling pressure. 【Features】 ○ Simple and dead space-free structure ○ Excellent pressure fluctuation characteristics Since the output value does not fluctuate even when the upstream pressure varies, it can be installed on the upstream side. Additionally, it allows for the elimination of regulators from the gas system, achieving both cost reduction and miniaturization of the gas system. ○ Adoption of flow factor Compatible with various types of gases ○ Excellent accuracy ○ Equipped with flow self-diagnosis function ○ Quick response ○ Mount position free ○ Supports device network communication ● For other functions and details, please download the catalog.

  • Flow Control
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Burkert Laboratory Catalog [Compressed Version]

Burkert Laboratory Catalog [Compressed Version]

We can further miniaturize and optimize laboratory equipment/research equipment.

This document describes how each of Bürkert's products can be utilized in laboratory equipment and other applications. We hope it will be of some assistance in improving your design and manufacturing processes. Due to the file size limitations of Ipros (with a maximum file size limit of 2MB), this document is in a compressed format (distributed as a single sheet printed with two pages). If you would like an uncompressed version, please contact Bürkert.

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Coriolis Mass Flow Controller Type 8756 High Precision Measurement Principle

Coriolis Mass Flow Controller Type 8756 High Precision Measurement Principle

The liquid MFC (mass flow controller) based on Burkert's Coriolis measurement principle can measure and control liquid flow rates from 10 to 280 g/min.

Burkert's Coriolis MFC (Mass Flow Controller for liquids) measures and controls liquid flow rates from 10 to 280 g/min. Compared to liquid mass flow controllers available on the market, it allows for the control of larger flow rates.

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Mass Flow Controller "Type GM51A"

Mass Flow Controller "Type GM51A"

Built-in user interface allows for easy changes to range and gas type, reducing inventory!

The "Type GM51A" is a mass flow controller with a metal seal of 1.125" (28.6mm) width, suitable for a wide range of applications, with a full-scale flow rate of 5sccm to 50slm converted to N2. It combines a proven patented thermal sensor design with digital flow control electronics. With digital control electronics using the MKS control algorithm, it provides a standard response time of 500 msec and a fast, highly reproducible response to flow set points. It can be used in a multi-range for various gas types with a full-scale flow rate of 5sccm to 50slm converted to N2. Parameters for over 100 types of gases and gas mixtures are already registered in memory. The electropolished metal seal makes it suitable for high-purity process applications. 【Features】 ■ Excellent zero stability due to patented thermal sensor design ■ High precision and accurate process control at a set point of 1% (calibration gas) ■ Built-in user interface ■ Easy to change range and gas type, reducing inventory ■ In-situ equipment monitoring and data collection possible *For more details, please refer to the PDF document or feel free to contact us.

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ALICAT Mass Flow Controller MC Series (Delivery time: 4 weeks)

ALICAT Mass Flow Controller MC Series (Delivery time: 4 weeks)

Supports mixed gases! Standard features include analog output, RS-232C communication, and a backlit LCD display. Current delivery time is 4 weeks.

The "MC/MCP/MCR series" is a mass flow controller manufactured by ALICAT that can handle 98 different types of diverse gases with a single unit. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. In addition, we offer a lineup that supports 128 types of gases, including corrosive gases and refrigerant gases, such as the "MCS/MCRS series," "MCW/MCRW series," and "MCV/MCVS series." 【Features】 ■ 100 ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 0.5 SCCM to 5000 SLPM ■ Standard analog output and RS 232C communication ■ Supports mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

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ALICAT Mass Flow Controller MCE Series SEMI Standard

ALICAT Mass Flow Controller MCE Series SEMI Standard

Mass flow controller with built-in valve from ALICAT, compliant with SEMI standards.

The "MCE/MCES series" is a mass flow controller manufactured by ALICAT, featuring a built-in valve that complies with SEMI standards. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 10 SCCM to 20 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

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High-pressure Smart Series Mass Flow Controller SLA5850

High-pressure Smart Series Mass Flow Controller SLA5850

Equipped with both analog and digital interfaces.

A mass flow controller capable of handling ultra-high pressure specifications up to 30MPa, thanks to its distinctive valve structure.

  • Flow Control
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Coriolis mass flow controller for liquids and gases

Coriolis mass flow controller for liquids and gases

Adoption of a groundbreaking design (patented) Coriolis mass flow sensor.

A mass flow controller for liquids and gases that offers unparalleled high precision and zero stability in the field of small flow liquids, which are considered difficult to measure.

  • Flow Control
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mini CORI-FLOW mass flow controller (flow meter)

mini CORI-FLOW mass flow controller (flow meter)

Mass flow controller with high-speed control capability due to fast sensor response.

The "mini CORI-FLOW(R) mass flow controller (flow meter)" features high stability control output and fast response. Due to the fast sensor response (50…200 msec), high-speed control has become possible. Therefore, applications such as split delivery can be expected. 【Features】 ○ Directly connected control valve ○ Fast response For more details, please contact us or download the catalog.

  • Flow Meter
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Application of mini CORI-FLOW (Pump System Case 2)

Application of mini CORI-FLOW (Pump System Case 2)

[Pump System Case 2] Supercritical Gas Measurement and Control

Fluids near the supercritical region; measuring substances like carbon dioxide (CO2) and ethylene (C2H4) is not easy. For example, carbon dioxide CO2 enters the critical region when the temperature exceeds 20°C and the pressure is around 30 bara. Under such conditions, the physical properties, such as density and specific heat, change rapidly as a result of temperature and pressure variations. Therefore, measuring these fluids using thermal methods becomes very difficult. The "Mini CORI-FLOW(R)" provides true mass flow measurement regardless of physical properties, thus solving these issues all at once. 【Application Examples】 ○ Measures the mass of the molecules themselves, whether the fluid is in gas, liquid, or at their boundary. ○ This measurement principle has been field-validated to provide high precision and stable measurements. For more details, please contact us or download the catalog.

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Mass Flow Controller EL-FLOW Classic

Mass Flow Controller EL-FLOW Classic

Ideal for OEMs. A thermal digital mass flow controller dedicated to analog I/O, pursuing cost reduction and flexibility for various applications.

The EL-FLOW Classic series digital mass flow controllers are models that focus on the fundamental functions of flow measurement and control while incorporating Bronkhorst's latest technology at a competitive price. They are compatible with analog I/O (not supporting digital communication) and are available only for standard gases (Air, N2, H2, O2, He, Ar, CO, CO2, N2O, CH4), which helps to shorten delivery times. For more details, please refer to the catalog or contact us.

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Mass Flow Controller 'SFC6000D-5slm'

Mass Flow Controller 'SFC6000D-5slm'

The supply chain is robust because the number of electronic components used is very small! For semiconductors, analytical instruments, and medical devices.

The SFC6000D-5slm is a highly attractive mass flow controller with an excellent price-performance ratio and a delivery time of 8 weeks. Its small and lightweight design allows for optimization of device size and weight, providing a decisive advantage, especially for portable devices. Furthermore, it demonstrates outstanding performance in terms of reproducibility, accuracy, control range, and speed. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, allowing for optimization of device size and weight ■ Outstanding performance in terms of reproducibility, accuracy, control range, and speed ■ Very few electronic components used, resulting in a robust supply chain *For more details, please download the PDF or feel free to contact us.

  • Flow Control
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Mass Flow Controller 'SFC6000D-20slm'

Mass Flow Controller 'SFC6000D-20slm'

Excellent price-performance ratio! This is a very attractive product with a delivery time of 8 weeks.

The "SFC6000D-20slm" is a mass flow controller that is very small and lightweight, allowing for optimization of the device's size and weight. Due to advanced integration and a very low number of electronic components used, the supply chain is robust. Furthermore, it demonstrates excellent performance in terms of reproducibility, accuracy, control range, and speed. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, enabling optimization of device size and weight ■ Outstanding performance in terms of reproducibility, accuracy, control range, and speed ■ Robust supply chain due to the very low number of electronic components used *For more details, please download the PDF or feel free to contact us.

  • Flow Control
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Mass Flow Controller 'SFC5500-50sccm'

Mass Flow Controller 'SFC5500-50sccm'

Combined multiple gas calibrations and interchangeable fittings! Suitable for a wide range of applications in medical, analytical, and industrial environments.

The "SFC5500-50sccm" is a mass flow controller based on micro-thermal measurement principles. It utilizes proven CMOSens MEMS technology, ensuring no drift and eliminating the need for recalibration in the market. Additionally, its wide range of flow control capabilities allows a single product to accommodate multiple flow ranges. 【Specifications (partial)】 ■ Full-scale flow: 0.05slm ■ Full-scale flow: 50sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller 'SFC5500-10slm'

Mass Flow Controller 'SFC5500-10slm'

Full-scale flow rate is 10 slm! A series that combines multiple gas calibrations and interchangeable fittings.

The "SFC5500-10slm" is a mass flow controller available as a standard product suitable for a wide range of applications. This product boasts superior performance equivalent to the "SFC5400," making it ideal for various applications in medical, analytical, and industrial environments. Additionally, a single unit can accommodate multiple flow ranges of conventional mass flow controllers. 【Specifications (partial)】 ■ Full-scale flow: 10slm ■ Full-scale flow: 10000sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "SEC-Z4400 Series"

Mass Flow Controller "SEC-Z4400 Series"

Suitable for a wide range of processes and applications! Ideal for refurbishing used equipment.

We handle the mass flow controller 'SEC-Z4400 series' manufactured by Horiba Stec, which complies with the RoHS directive and CE marking. The gas contact parts are made of metal, and it is equipped with a piezo valve. Additionally, compatibility with the fitting sizes and pin arrangements of the SEC-7300 and 4400 series is ensured. 【Features】 ■ Replacement and upgrade ■ High performance and high reliability ■ Flexibility ■ Compliance with RoHS directive and CE marking *For more details, please download the PDF or contact us.

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マスフローコントローラ/メータ『GF40シリーズ』

マスフローコントローラ/メータ『GF40シリーズ』

デバイス1台でさまざまなガスと流量に対応し、柔軟な対応を実現しました！

『GF40シリーズ』は、当社独自のMultiFloテクノロジーを搭載したサーマル式のマスフロー コントローラ/メータです。 さまざまなガスを使用する場合、ガスの種類を頻繁に変更する場合、制御精度は維持したまま、 フルスケールレンジを変更する必要のあるシステムやプロセスに好適です。 MultiFloテクノロジーは、比類のない柔軟性を提供します。 1台のデバイスで、数千パターンの異なるガス・流量範囲の組み合わせに対応しています。 【特長】 ■専用のソフトウェアで設定変更が可能な、マルチガス/マルチレンジ機能 ■エラストマシールのオプションが豊富ため、さまざまなガスに対応 ■長期安定性に優れたハステロイ製センサを採用 ■実ガス試験に基づく100種類以上のガスデータを搭載 ■負荷の高いアプリケーションでも、1秒未満の応答時間とセットポイント 　±1%の制御精度を実現 ※詳しくは関連リンクページをご覧いただくか、お気軽にお問い合わせ下さい。

  • Flow Meter
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Mass Flow Controller/ Meter "4800 Series"

Mass Flow Controller/ Meter "4800 Series"

Ultra-fast response for flow processes focused on speed! Suitable for a wide variety of non-corrosive gases.

The "4800 Series" is a thermal mass flow controller/meter with elastomer seals that improves process efficiency and productivity as response time improves. The advanced MEMS thermal sensor is equipped with a dedicated PID algorithm optimized for response to the control valve, allowing the product to quickly follow the actual flow rate even when the set point is changed arbitrarily. 【Features】 ■ Flow response time (settling time) of 0.75 seconds or less ■ Innovative MEMS sensor and dedicated PID algorithm ■ Compact size, half that of conventional thermal MFCs ■ Digital compatibility via RS-232 ■ Optional Local Operator Interface (LOI) to streamline setup and operation *For more details, please refer to the related link page or feel free to contact us.

  • Flow Meter
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Auto Pressure Controller "SLA/SLAMf Series"

Auto Pressure Controller "SLA/SLAMf Series"

Automate pressure control and use it as a pressure/back pressure regulator!

The Auto Pressure Controller "SLA/SLAMf Series" is equipped with a wealth of options and features. By combining the SLA/SLAMf series mass flow controllers and meters, you can achieve consistency in control (process) with the advantages of a single platform. The SLA/SLAMf series uses a primary flow calibration system that is traceable to international standards, characterized by high precision, long-term stability of the zero point, and excellent reproducibility based on our superior measurement systems and methods.

  • DS-PR-SLA5800-SLAMf-Series-RevB-PC-RT-ipn201701.jpg
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Mass Flow Controller/ Meter "GF40 Series" and two other products.

Mass Flow Controller/ Meter "GF40 Series" and two other products.

Mass flow controller/meters that support multiple gases with a single device. A compact readout unit that can connect up to four devices is also introduced.

The "GF40 Series" is a mass flow controller/meter that supports multiple gases with a single unit, enhancing process flexibility and productivity. Equipped with the manufacturer's unique "MultiFlo Technology," it enables high-precision flow control and measurement, making it suitable for systems that use diverse gases. It excels in processes and facilities where the type of gas is frequently changed or where it is necessary to readjust the range while maintaining measurement and control accuracy. Additionally, the "0254" is a readout unit equipped with an RS232 serial port, in addition to power supply and analog control functions. Compliant with the RoHS directive, it offers user-friendly operability. There are installation options that allow for easy installation in various applications, providing power to up to four Brooks mass flow or pressure devices. 【Features】 ◎ "GF40 Series" ■ Equipped with abundant actual gas data ■ Capable of changing gas types and flow ranges, allowing one unit to accommodate various research themes ◎ "0254" ■ Flow settings support instantaneous control and batch control, with flow display options for instantaneous and cumulative readings ■ Space-saving design allows for connection of up to four mass flow controllers/meters

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Flow, pressure, steam, and vacuum products "Comprehensive Catalog" *Includes flow meters and more!

Flow, pressure, steam, and vacuum products "Comprehensive Catalog" *Includes flow meters and more!

The lineup also includes Coriolis mass flow meters and our company's first pressure-based mass flow controllers.

This document is a comprehensive catalog featuring Brooks Instrument's flow, pressure, steam, and vacuum products. It includes pressure controllers such as the "SLA Series," which eliminates closed-loop, boost, and hysteresis, as well as thermal mass flow devices like the "GF40 Series," which can cover multiple gas types and flow ranges with a single unit, along with area flow meters, pressure/vacuum products, and more. This is a very informative book, so please take a look when considering implementation. 【Contents】 ■ Mass Flow & Pressure Controllers ■ Area Flow Meters ■ Pressure/Vacuum Products ■ Secondary Electronics & Software ■ Communication Protocols ■ Service & Support *For more details, please download the PDF or feel free to contact us.

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Realizing Precision Control in Energy Innovation <Application Case Introduction>

Realizing Precision Control in Energy Innovation <Application Case Introduction>

Solutions that support a sustainable future

Hydrogen, fuel cells, CCUS, biofuels, CNT manufacturing. Supporting the energy of the future, there is technology that monitors the precise flow on-site. Brooks Instrument's flow meters support the energy transition. Equipped with gas control and measurement functions useful for carbon-neutral research and development, we offer the thermal mass flow controller/meter "SLA5800 Series," as well as the elastomer-sealed thermal mass flow controller/meter "SLAMf Series," which achieves high accuracy and long-term stability even under the most demanding conditions. Please feel free to contact us when you need assistance. 【SLA5800 Series Features】 ■ Obtained type approval certificate for domestic explosion-proof (JPEx) from DEKRA (Applicable products: mass flow controllers/meters, pressure controllers) ■ Active in fields such as chemicals, petrochemicals, fuel cells, and life sciences ■ Covers a wide range of flow rates ■ Capable of handling multiple gases and flow ranges with a single unit *For more details, please download the PDF or feel free to contact us.

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Ultra-compact MFC "GC Series" supporting the development of decarbonization and environmentally friendly technologies.

Ultra-compact MFC "GC Series" supporting the development of decarbonization and environmentally friendly technologies.

Achieving high reproducibility and space-saving in small flow domains. Ultra-compact mass flow controllers that support research and development for CO₂ reduction, exhaust gas treatment, and alternative fuel evaluation.

In the field of research and development in chemistry, materials, and energy, the development of environmental technologies is advancing, focusing on CO₂ reduction, exhaust gas treatment, and alternative fuel evaluation. The GC series is a MEMS-based ultra-compact mass flow controller that achieves high reproducibility in the small flow range required for these applications, along with stable gas control in a space-saving design. It supports gases such as Air, N₂, O₂, CO₂, Ar, CO, CH₄, C₃H₈, and N₂O, with a full-scale flow rate of 210 to 5000 sccm (Air equivalent), a control range of 100:1, a reproducibility of ±0.25% S.P., and a response time of less than 2 seconds (when the set value exceeds 10% of full scale). It is suitable for laboratory equipment, small test devices, and analytical facilities, and can be utilized as a gas control technology that supports the development of environmental technologies themselves.

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24/7 Support "Worldwide Support"

24/7 Support "Worldwide Support"

This is a support service for customers using Bronco products. You can use our service line available 24 hours a day, 7 days a week.

This is a service system for customers using Bronco products. Thanks to our global service network, we can also provide support at night.

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[English Market Research Report] Global Market for Mass Flow Controllers

[English Market Research Report] Global Market for Mass Flow Controllers

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The mass flow controller market size is expected to reach 3 billion USD by 2030, with a projected market growth of 8.3% CAGR during the forecast period. In 2022, the market reached a volume of 1,980,600 units, achieving a growth of 8.1% (2019-2022). Furthermore, alternative energy sources often rely on precise gas flow control during the production process. For example, in the manufacturing of solar cells, MFCs control the flow of gases used in the chemical vapor deposition (CVD) process to deposit thin films of semiconductor materials on substrates. Therefore, the demand for alternative energy sources will drive market growth.

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  • Mass Flow Controller

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Precision Mass Flow Controller for Pharmaceuticals "SLAMf Series"

Precision Mass Flow Controller for Pharmaceuticals "SLAMf Series"

Precision mass flow controller. Enhances the accuracy of the mixing process and contributes to the stabilization of pharmaceutical quality.

In pharmaceutical manufacturing, even slight fluctuations in the mixing process flow can affect the efficacy and safety of the product. Therefore, high-precision and stable control of gas flow is essential. The SLAMf series mass flow controllers achieve optimized formulation balance through high-precision control and excellent long-term stability. They support improved consistency in quality across a wide range of processes, from manufacturing to research and development. 【Application Scenarios】 - Gas mixing and supply control in pharmaceutical manufacturing - Precise gas mixing in research and development - Flow measurement and monitoring in quality control processes 【Benefits of Implementation】 - Stabilization of product quality through improved mixing accuracy - Realization of highly reproducible process control - Increased manufacturing efficiency and reduced losses

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  • Flow Meter
  • Flow Control
  • Mass Flow Controller

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