Mass Flow Controller Product List and Ranking from 15 Manufacturers, Suppliers and Companies

[New Product] AMF Series (Small Mass Flow Controller/Meter)

Support for liquid fluid management in environmental, bio, and materials processes through non-contact liquid monitoring, high-precision Coriolis measurement, and the use of software.

Achieving compact design and high-precision control. Contributing to miniaturization and high performance of devices. The AMF series is a compact mass flow controller/meter that realizes high-precision flow control even in limited installation spaces. With excellent responsiveness and stable flow control, it caters to a wide range of applications from research and development to manufacturing equipment. It contributes to space-saving designs and increased design flexibility of devices. ■ Benefits of Introduction Increased design flexibility of devices due to compact design High-precision and high-response flow control Miniaturization and lightweight of devices Improved quality through stable process control ■ Main Applications Analytical and measurement instruments Research and development equipment OEM devices Bio and life sciences fields General industrial gas supply systems Brooks Instrument provides optimal solutions for your applications and processes based on over 70 years of technology and rich experience in the field of precision fluid measurement and control. Even in the development of devices requiring miniaturization and high performance, we support our customers with high-quality products and comprehensive technical support. *For more details, please refer to the related link page or feel free to contact us.

Company：ITWジャパン
Price：Other

Flow Meter
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Brooks Instrument "Gas Flow Control" Lineup

High-precision gas flow control solutions that support the development of decarbonization and environmental technologies.

In the field of environment and energy, high-precision gas flow control tailored to specific applications is required for CO₂ reduction technologies, exhaust gas treatment, and alternative fuel research and development. Brooks Instrument offers optimal mass flow controllers/meters for each stage, from research and development to demonstration testing and production processes. We propose the best products according to application and process conditions. ■ For applications and challenges like these: Research and development of CO₂ reduction and CCUS technologies Exhaust gas treatment and environmental impact reduction Catalyst evaluation and reaction process development Research and development of alternative fuels and synthetic fuels Fuel cell and hydrogen-related processes Gas flow control for furnaces, heat treatment, and material processes *For more details, please refer to the related catalog or feel free to contact us.

Company：ITWジャパン
Price：Other

Flow Control
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GC Series Selection and Specification Consultation Guide | For Research and Development and Small Devices

Research and development of gas flow control for small devices, made more compact.

Mass Flow Controller for Research and Development / Compact Devices Achieving miniaturization and high-precision control. Broadly applicable from research and development to environmental and energy fields. The GC series is an ultra-compact mass flow controller that employs MEMS sensors. It achieves high precision, fast response, and excellent reproducibility even in limited installation spaces, enhancing the design flexibility of analytical instruments, research and development equipment, and compact OEM devices. ■ For those facing the following challenges: - Miniaturization and lightweighting of devices - Integration of high-performance flow control equipment into limited spaces - High precision and reproducibility in flow control for evaluation tests and experiments - Stable flow control for multiple gases - Replacement of existing MFCs with compact, low-power models *For more details, please refer to the catalog or feel free to contact us.

Company：ITWジャパン
Price：Other

Flow Meter
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Selection Guide: CCUS, Methanation, Synthetic Fuels

Supply CO₂ and H₂ according to the reaction conditions. Explain flow control from research to demonstration and production facilities.

In the research and development of CCUS, methanation, and synthetic fuels, it is important to stably supply raw gases such as CO₂ and H₂ according to the set reaction conditions. Furthermore, as research progresses to demonstration and production facilities, the required flow rate range, pressure, temperature, fluid, and installation environment also change. We will organize the key points of flow control in each process, including raw gas supply, mixing/dilution, catalytic reactions, temperature/pressure condition testing, pilot facilities, and liquid raw material supply. We will introduce the selection methods for mass flow controllers/meters according to applications and conditions, as well as the differentiation of AMF, SLA5800, SLAMf, and QMC. Please utilize this information for the new design of research and evaluation facilities, as well as for product selection during scale-up to demonstration and production facilities. ■ For those facing such challenges: - Stabilization of CO₂ and H₂ mixing ratios - Improvement of reproducibility in catalyst evaluation and reaction testing - Flow control in evaluation facilities using multiple gases - Response to harsh conditions such as high pressure and high temperature - High-precision control of liquid raw materials and reaction liquids - Scale-up from research to demonstration facilities

Company：ITWジャパン
Price：Other

Flow Meter
Flow Control
Other environmental equipment
Mass Flow Controller

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High-performance mass flow controller MC-3000L series

This is a high-performance digital mass flow controller that employs our proprietary self-temperature compensation method (patented in the U.S. and Japan).

This is a digital mass flow controller that achieves high precision of 1.0% S.P. with its unique patented technology and is compatible with various surface mount standards (1.125 inches). 【Features】 ○ High-performance 1.125-inch size digital mass flow controller (piezo valve, high precision (S.P. guaranteed), digital control) ○ Maintains compatibility with analog mass flow controllers ○ Universal interface RS485 is available ○ Standard ultra-clean specifications with metal seals and precision polished inner surfaces ○ Compatible with various surface mount standards of SEMI STD. *For other functions and details, please download the catalog.

Company：リンテック東京営業所
Price：100,000 yen-500,000 yen

Piping Materials
Vacuum Equipment
Flow Control
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MODEL 8700 SERIES

Integrated display type with various functions available! Introducing mass flow controllers/meters.

The "MODEL 8700 SERIES" is a mass flow controller/meter with a display that accommodates a wide range of flow rates. Various functions (instantaneous/integrated flow display, alarm settings) are available. The target fluids include gases such as N2, Air, H2, He, Ar, O2, and CO2. Additionally, it features RS485 communication capabilities and analog input/output of 0-5VDC (which can be changed to 4-20mA). 【Features】 ■ Target fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM when converted to N2) ■ Analog input/output can be changed via the display (0-5VDC at the time of shipment) *For more details, please refer to the PDF document or feel free to contact us.

Company：コフロック本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡
Price：Other

Flow Meter
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MODEL 3660 SERIES

Standard mass flow controller compatible with a wide flow range for N2, Air, H2, He, and others!

We would like to introduce our standard mass flow controller, the 'MODEL 3660 SERIES'. It supports a wide flow range from F.S. 10 SCCM to F.S. 100 SLM, converted to N2. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 10 SCCM to 100 SLM. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM, converted to N2) *For more details, please refer to the PDF document or feel free to contact us.

Company：コフロック本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡
Price：Other

Flow Meter
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MODEL 3200 SERIES

Reduction of dead volume! Introducing a high-grade mass flow controller with an accuracy of ±1% F.S.

The "MODEL 3200 SERIES" is a high-grade mass flow controller that accommodates very low flow rates starting from F.S. 1 SCCM when converted to N2. It reduces dead volume through a diaphragm seat valve. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 1 SCCM to 20 SLM. 【Features】 ■ Applicable fluids: Gases N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases 1 SCCM to 20 SLM ■ Accuracy: ±1% F.S. ■ Supports very low flow rates (from F.S. 1 SCCM when converted to N2) *For more details, please refer to the PDF document or feel free to contact us.

Company：コフロック本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡
Price：Other

Flow Meter
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Mass Flow Controller MODEL 8700/3660 SERIES

It is less affected by temperature and pressure, allowing for high-precision flow measurement and control! Gases such as N2, Air, H2, He, and Ar are the targets.

We would like to introduce our mass flow controllers, the 'MODEL 8700/3660 SERIES'. The mass flow controller/indicator "MODEL 8700 SERIES" features analog input/output of 0-5VDC (which can be changed to 4-20mA) and offers various functions such as instantaneous/integrated flow display and alarm settings. The standard mass flow controller "MODEL 3660 SERIES" accommodates a wide flow range from F.S. 10 SCCM to F.S. 100 SLM, equivalent to N2. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM equivalent to N2) ■ Analog input/output can be changed via the display (MODEL 8700 SERIES) *For more details, please refer to the PDF document or feel free to contact us.

Company：コフロック本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡
Price：Other

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System [Flow Control Device] FCS Thermal Series

This is a flow control device that adopts a thermal flow sensor control method.

Achieved further total cost reduction and shortened lead time with a digital interface-equipped mass flow controller. 【Features】 ○ High precision Flow accuracy of ±1% ○ High-performance sensor Adoption of low-temperature flow sensors, achieving optimal structure for highly reactive gases and gases with low stability ○ High-reliability diaphragm valve with reduced gas contact area and prevention of particle generation Adoption of high-speed response piezo actuators Significant improvement in gas replacement characteristics due to dead space-free structure Minimal particle generation ○ Standard digital interface RS485 ○ RoHS compliant ● For other functions and details, please download the catalog.

Company：Fujikin Incorporated
Price：Other

Flow Control
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System [Flow Control Device] FCS Pressure Series

This is a flow control device that adopts a pressure control method for ultra-high purity applications.

A flow control system that enables high-precision flow control, which cannot be achieved with conventional mass flow controllers, by controlling pressure. 【Features】 ○ Simple and dead space-free structure ○ Excellent pressure fluctuation characteristics Since the output value does not fluctuate even when the upstream pressure varies, it can be installed on the upstream side. Additionally, it allows for the elimination of regulators from the gas system, achieving both cost reduction and miniaturization of the gas system. ○ Adoption of flow factor Compatible with various types of gases ○ Excellent accuracy ○ Equipped with flow self-diagnosis function ○ Quick response ○ Mount position free ○ Supports device network communication ● For other functions and details, please download the catalog.

Company：Fujikin Incorporated
Price：Other

Flow Control
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Burkert Laboratory Catalog [Compressed Version]

We can further miniaturize and optimize laboratory equipment/research equipment.

This document describes how each of Bürkert's products can be utilized in laboratory equipment and other applications. We hope it will be of some assistance in improving your design and manufacturing processes. Due to the file size limitations of Ipros (with a maximum file size limit of 2MB), this document is in a compressed format (distributed as a single sheet printed with two pages). If you would like an uncompressed version, please contact Bürkert.

Company：ビュルケルトジャパン
Price：Other

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Coriolis Mass Flow Controller Type 8756 High Precision Measurement Principle

The liquid MFC (mass flow controller) based on Burkert's Coriolis measurement principle can measure and control liquid flow rates from 10 to 280 g/min.

Burkert's Coriolis MFC (Mass Flow Controller for liquids) measures and controls liquid flow rates from 10 to 280 g/min. Compared to liquid mass flow controllers available on the market, it allows for the control of larger flow rates.

Company：ビュルケルトジャパン
Price：1 million yen-5 million yen

valve
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Mass Flow Controller "Type GM51A"

Built-in user interface allows for easy changes to range and gas type, reducing inventory!

The "Type GM51A" is a mass flow controller with a metal seal of 1.125" (28.6mm) width, suitable for a wide range of applications, with a full-scale flow rate of 5sccm to 50slm converted to N2. It combines a proven patented thermal sensor design with digital flow control electronics. With digital control electronics using the MKS control algorithm, it provides a standard response time of 500 msec and a fast, highly reproducible response to flow set points. It can be used in a multi-range for various gas types with a full-scale flow rate of 5sccm to 50slm converted to N2. Parameters for over 100 types of gases and gas mixtures are already registered in memory. The electropolished metal seal makes it suitable for high-purity process applications. 【Features】 ■ Excellent zero stability due to patented thermal sensor design ■ High precision and accurate process control at a set point of 1% (calibration gas) ■ Built-in user interface ■ Easy to change range and gas type, reducing inventory ■ In-situ equipment monitoring and data collection possible *For more details, please refer to the PDF document or feel free to contact us.

Company：日本エム・ケー・エス
Price：Other

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ALICAT Mass Flow Controller MCS (Corrosive/Refrigerant Compatible)

Supports mixed gases! Equipped with standard analog output, RS-232C communication, and a backlit LCD display.

The "MCS/MCRS series" is a mass flow controller manufactured by ALICAT that can measure 128 types of gas flow, including corrosive gases and refrigerant gases, with a single unit. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. Additionally, it includes the "MW series," which can measure with extremely small differential pressures. 【Features】 ■ 100 ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Range from 0.5 SCCM to 3000 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

Company：日本スターテクノ
Price：Other

Flow Meter
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ALICAT Mass Flow Controller MCE Series SEMI Standard

Mass flow controller with built-in valve from ALICAT, compliant with SEMI standards.

The "MCE/MCES series" is a mass flow controller manufactured by ALICAT, featuring a built-in valve that complies with SEMI standards. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 10 SCCM to 20 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

Company：日本スターテクノ
Price：Other

Flow Meter
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ALICAT Mass Flow Controller MCQ Series (High Pressure Type)

The maximum operating pressure is 320 PSIA (2.2 MPaA). The pressure resistance is 400 PSIA (2.7 MPaA). It is also compatible with mixed gases!

The "MC/MCP/MCR series" is a high-pressure mass flow controller manufactured by ALICAT that can handle 98 different types of diverse gases with a single unit. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. In addition, we offer a lineup such as the "MCHQS/MCRQS series," which supports 128 types of gases, including corrosive gases and refrigerant gases. 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 0.5 SCCM to 5000 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

Company：日本スターテクノ
Price：Other

Flow Meter
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ALICAT Mass Flow Controller MCD (Dual Valve)

Equipped with two valves, it allows for bidirectional control. Control can be performed using pressurization, negative pressure, or vacuum. Models that accommodate corrosive gases and low-pressure loss are also available in the lineup.

The "MCD/MCDS series" is a mass flow controller manufactured by ALICAT that can handle 98 different types of diverse gases with a single unit. It achieves fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. In addition, we offer a lineup that supports 128 types of gases, including corrosive gases and refrigerant gases, such as the "MCDS series" and "MCDW series." 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 0.5 SCCM to 5000 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

Company：日本スターテクノ
Price：Other

Flow Control
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High-pressure Smart Series Mass Flow Controller SLA5850

Equipped with both analog and digital interfaces.

A mass flow controller capable of handling ultra-high pressure specifications up to 30MPa, thanks to its distinctive valve structure.

Company：川口液化ケミカル川口事業所
Price：Other

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Coriolis mass flow controller for liquids and gases

Adoption of a groundbreaking design (patented) Coriolis mass flow sensor.

A mass flow controller for liquids and gases that offers unparalleled high precision and zero stability in the field of small flow liquids, which are considered difficult to measure.

Company：川口液化ケミカル川口事業所
Price：Other

Flow Control
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mini CORI-FLOW mass flow controller (flow meter)

Mass flow controller with high-speed control capability due to fast sensor response.

The "mini CORI-FLOW(R) mass flow controller (flow meter)" features high stability control output and fast response. Due to the fast sensor response (50…200 msec), high-speed control has become possible. Therefore, applications such as split delivery can be expected. 【Features】 ○ Directly connected control valve ○ Fast response For more details, please contact us or download the catalog.

Company：ブロンコスト・ジャパン
Price：Other

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Application of mini CORI-FLOW (Pump System Case 2)

[Pump System Case 2] Supercritical Gas Measurement and Control

Fluids near the supercritical region; measuring substances like carbon dioxide (CO2) and ethylene (C2H4) is not easy. For example, carbon dioxide CO2 enters the critical region when the temperature exceeds 20°C and the pressure is around 30 bara. Under such conditions, the physical properties, such as density and specific heat, change rapidly as a result of temperature and pressure variations. Therefore, measuring these fluids using thermal methods becomes very difficult. The "Mini CORI-FLOW(R)" provides true mass flow measurement regardless of physical properties, thus solving these issues all at once. 【Application Examples】 ○ Measures the mass of the molecules themselves, whether the fluid is in gas, liquid, or at their boundary. ○ This measurement principle has been field-validated to provide high precision and stable measurements. For more details, please contact us or download the catalog.

Company：ブロンコスト・ジャパン
Price：Other

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Mass Flow Controller EL-FLOW Classic

Ideal for OEMs. A thermal digital mass flow controller dedicated to analog I/O, pursuing cost reduction and flexibility for various applications.

The EL-FLOW Classic series digital mass flow controllers are models that focus on the fundamental functions of flow measurement and control while incorporating Bronkhorst's latest technology at a competitive price. They are compatible with analog I/O (not supporting digital communication) and are available only for standard gases (Air, N2, H2, O2, He, Ar, CO, CO2, N2O, CH4), which helps to shorten delivery times. For more details, please refer to the catalog or contact us.

Company：ブロンコスト・ジャパン
Price：Other

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Mass Flow Controller 'SFC6000D-5slm'

The supply chain is robust because the number of electronic components used is very small! For semiconductors, analytical instruments, and medical devices.

The SFC6000D-5slm is a highly attractive mass flow controller with an excellent price-performance ratio and a delivery time of 8 weeks. Its small and lightweight design allows for optimization of device size and weight, providing a decisive advantage, especially for portable devices. Furthermore, it demonstrates outstanding performance in terms of reproducibility, accuracy, control range, and speed. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, allowing for optimization of device size and weight ■ Outstanding performance in terms of reproducibility, accuracy, control range, and speed ■ Very few electronic components used, resulting in a robust supply chain *For more details, please download the PDF or feel free to contact us.

Company：センシリオン
Price：Other

Flow Control
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Mass Flow Controller 'SFC6000D-20slm'

Excellent price-performance ratio! This is a very attractive product with a delivery time of 8 weeks.

The "SFC6000D-20slm" is a mass flow controller that is very small and lightweight, allowing for optimization of the device's size and weight. Due to advanced integration and a very low number of electronic components used, the supply chain is robust. Furthermore, it demonstrates excellent performance in terms of reproducibility, accuracy, control range, and speed. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, enabling optimization of device size and weight ■ Outstanding performance in terms of reproducibility, accuracy, control range, and speed ■ Robust supply chain due to the very low number of electronic components used *For more details, please download the PDF or feel free to contact us.

Company：センシリオン
Price：Other

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Mass Flow Controller 'SFC5500-50sccm'

Combined multiple gas calibrations and interchangeable fittings! Suitable for a wide range of applications in medical, analytical, and industrial environments.

The "SFC5500-50sccm" is a mass flow controller based on micro-thermal measurement principles. It utilizes proven CMOSens MEMS technology, ensuring no drift and eliminating the need for recalibration in the market. Additionally, its wide range of flow control capabilities allows a single product to accommodate multiple flow ranges. 【Specifications (partial)】 ■ Full-scale flow: 0.05slm ■ Full-scale flow: 50sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

Company：センシリオン
Price：Other

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Mass Flow Controller 'SFC5500-10slm'

Full-scale flow rate is 10 slm! A series that combines multiple gas calibrations and interchangeable fittings.

The "SFC5500-10slm" is a mass flow controller available as a standard product suitable for a wide range of applications. This product boasts superior performance equivalent to the "SFC5400," making it ideal for various applications in medical, analytical, and industrial environments. Additionally, a single unit can accommodate multiple flow ranges of conventional mass flow controllers. 【Specifications (partial)】 ■ Full-scale flow: 10slm ■ Full-scale flow: 10000sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

Company：センシリオン
Price：Other

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Mass Flow Controller "MARU3000s"

It has excellent corrosion resistance and demonstrates outstanding performance for the cost! A reasonably priced high-flow thermal mass flow controller.

This product is a mass flow controller (MFC) with a thermal sensor base that applies a metal seal for high flow rates (up to 500 slm). It features excellent performance relative to cost while being reasonably priced. By applying a metal seal, it offers outstanding corrosion resistance. 【Features】 ■ Reasonably priced MFC ■ Excellent performance relative to cost ■ Outstanding corrosion resistance *For more details, please download the PDF or feel free to contact us.

Company：世奉（セボン・SEBONG）
Price：Other

Flow Control
Mass Flow Controller

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Mass Flow Controller Product List and Ranking from 15 Manufacturers, Suppliers and Companies | IPROS GMS

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