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Mass Flow Controller Product List and Ranking from 17 Manufacturers, Suppliers and Companies

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

Mass Flow Controller Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. ITWジャパン Tokyo//Machine elements and parts
  2. Fujikin Incorporated Tokyo//Machine elements and parts
  3. ＩＢＳ Osaka//Other manufacturing
  4. 4 コフロック 本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡 Kyoto//Industrial Machinery
  5. 5 センシリオン Kanagawa//Electronic Components and Semiconductors
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Mass Flow Controller Product ranking

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. Mass Flow Controller/ Meter "SLAMf Series" ITWジャパン
  2. Fujikin Inc. "Mass Flow Controller" Fujikin Incorporated
  3. Mass Flow Controller/ Meter "5850E Series" ITWジャパン
  4. 4 System [Flow Control Device] FCS Pressure Series Fujikin Incorporated
  5. 5 Mass Flow Controller "Aera FC-R7700 Series" ＩＢＳ

Mass Flow Controller Product List

31～45 item / All 60 items

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System [Flow Control Device] FCS Thermal Series

System [Flow Control Device] FCS Thermal Series

This is a flow control device that adopts a thermal flow sensor control method.

Achieved further total cost reduction and shortened lead time with a digital interface-equipped mass flow controller. 【Features】 ○ High precision Flow accuracy of ±1% ○ High-performance sensor Adoption of low-temperature flow sensors, achieving optimal structure for highly reactive gases and gases with low stability ○ High-reliability diaphragm valve with reduced gas contact area and prevention of particle generation Adoption of high-speed response piezo actuators Significant improvement in gas replacement characteristics due to dead space-free structure Minimal particle generation ○ Standard digital interface RS485 ○ RoHS compliant ● For other functions and details, please download the catalog.

  • Flow Control

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System [Flow Control Device] FCS Pressure Series

System [Flow Control Device] FCS Pressure Series

This is a flow control device that adopts a pressure control method for ultra-high purity applications.

A flow control system that enables high-precision flow control, which cannot be achieved with conventional mass flow controllers, by controlling pressure. 【Features】 ○ Simple and dead space-free structure ○ Excellent pressure fluctuation characteristics Since the output value does not fluctuate even when the upstream pressure varies, it can be installed on the upstream side. Additionally, it allows for the elimination of regulators from the gas system, achieving both cost reduction and miniaturization of the gas system. ○ Adoption of flow factor Compatible with various types of gases ○ Excellent accuracy ○ Equipped with flow self-diagnosis function ○ Quick response ○ Mount position free ○ Supports device network communication ● For other functions and details, please download the catalog.

  • Flow Control

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Burkert Laboratory Catalog [Compressed Version]

Burkert Laboratory Catalog [Compressed Version]

We can further miniaturize and optimize laboratory equipment/research equipment.

This document describes how each of Bürkert's products can be utilized in laboratory equipment and other applications. We hope it will be of some assistance in improving your design and manufacturing processes. Due to the file size limitations of Ipros (with a maximum file size limit of 2MB), this document is in a compressed format (distributed as a single sheet printed with two pages). If you would like an uncompressed version, please contact Bürkert.

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Coriolis Mass Flow Controller Type 8756 High Precision Measurement Principle

Coriolis Mass Flow Controller Type 8756 High Precision Measurement Principle

The liquid MFC (mass flow controller) based on Burkert's Coriolis measurement principle can measure and control liquid flow rates from 10 to 280 g/min.

Burkert's Coriolis MFC (Mass Flow Controller for liquids) measures and controls liquid flow rates from 10 to 280 g/min. Compared to liquid mass flow controllers available on the market, it allows for the control of larger flow rates.

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Mass Flow Controller "Type GM51A"

Mass Flow Controller "Type GM51A"

Built-in user interface allows for easy changes to range and gas type, reducing inventory!

The "Type GM51A" is a mass flow controller with a metal seal of 1.125" (28.6mm) width, suitable for a wide range of applications, with a full-scale flow rate of 5sccm to 50slm converted to N2. It combines a proven patented thermal sensor design with digital flow control electronics. With digital control electronics using the MKS control algorithm, it provides a standard response time of 500 msec and a fast, highly reproducible response to flow set points. It can be used in a multi-range for various gas types with a full-scale flow rate of 5sccm to 50slm converted to N2. Parameters for over 100 types of gases and gas mixtures are already registered in memory. The electropolished metal seal makes it suitable for high-purity process applications. 【Features】 ■ Excellent zero stability due to patented thermal sensor design ■ High precision and accurate process control at a set point of 1% (calibration gas) ■ Built-in user interface ■ Easy to change range and gas type, reducing inventory ■ In-situ equipment monitoring and data collection possible *For more details, please refer to the PDF document or feel free to contact us.

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  • Other process controls

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ALICAT Mass Flow Controller MC Series (Delivery time: 4 weeks)

ALICAT Mass Flow Controller MC Series (Delivery time: 4 weeks)

Supports mixed gases! Standard features include analog output, RS-232C communication, and a backlit LCD display. Current delivery time is 4 weeks.

The "MC/MCP/MCR series" is a mass flow controller manufactured by ALICAT that can handle 98 different types of diverse gases with a single unit. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. In addition, we offer a lineup that supports 128 types of gases, including corrosive gases and refrigerant gases, such as the "MCS/MCRS series," "MCW/MCRW series," and "MCV/MCVS series." 【Features】 ■ 100 ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 0.5 SCCM to 5000 SLPM ■ Standard analog output and RS 232C communication ■ Supports mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

  • Other measurement, recording and measuring instruments

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ALICAT Mass Flow Controller MCE Series SEMI Standard

ALICAT Mass Flow Controller MCE Series SEMI Standard

Mass flow controller with built-in valve from ALICAT, compliant with SEMI standards.

The "MCE/MCES series" is a mass flow controller manufactured by ALICAT, featuring a built-in valve that complies with SEMI standards. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 10 SCCM to 20 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

  • Other measurement, recording and measuring instruments

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High-pressure Smart Series Mass Flow Controller SLA5850

High-pressure Smart Series Mass Flow Controller SLA5850

Equipped with both analog and digital interfaces.

A mass flow controller capable of handling ultra-high pressure specifications up to 30MPa, thanks to its distinctive valve structure.

  • Flow Control

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Mass Flow Controller "Aera FC-R7800 Series"

Mass Flow Controller "Aera FC-R7800 Series"

Flow stabilizes in less than 1 second after setting input! High precision and high reliability metal seal model!

The "Aera FC-R7800 Series" is a system that not only performs high-precision flow control but also features excellent airtightness due to its metal seals. It is suitable for major gas control applications. Thanks to advancements in technology, such as the incorporation of highly sensitive and fast-response small sensors, it demonstrates excellent controllability. 【Features】 ■ Corrosion-resistant design ■ Metal seal adoption ■ VCR and Swagelok compatible connections ■ Full-scale flow range from 10 sccm to 200 slm ■ Normally closed or normally open solenoid control valves *For more details, please refer to the PDF materials or feel free to contact us.

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Application of mini CORI-FLOW (Pump System Case 2)

Application of mini CORI-FLOW (Pump System Case 2)

[Pump System Case 2] Supercritical Gas Measurement and Control

Fluids near the supercritical region; measuring substances like carbon dioxide (CO2) and ethylene (C2H4) is not easy. For example, carbon dioxide CO2 enters the critical region when the temperature exceeds 20°C and the pressure is around 30 bara. Under such conditions, the physical properties, such as density and specific heat, change rapidly as a result of temperature and pressure variations. Therefore, measuring these fluids using thermal methods becomes very difficult. The "Mini CORI-FLOW(R)" provides true mass flow measurement regardless of physical properties, thus solving these issues all at once. 【Application Examples】 ○ Measures the mass of the molecules themselves, whether the fluid is in gas, liquid, or at their boundary. ○ This measurement principle has been field-validated to provide high precision and stable measurements. For more details, please contact us or download the catalog.

  • Flow Control
  • Other pumps
  • Other process controls

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Mass Flow Controller EL-FLOW Classic

Mass Flow Controller EL-FLOW Classic

Ideal for OEMs. A thermal digital mass flow controller dedicated to analog I/O, pursuing cost reduction and flexibility for various applications.

The EL-FLOW Classic series digital mass flow controllers are models that focus on the fundamental functions of flow measurement and control while incorporating Bronkhorst's latest technology at a competitive price. They are compatible with analog I/O (not supporting digital communication) and are available only for standard gases (Air, N2, H2, O2, He, Ar, CO, CO2, N2O, CH4), which helps to shorten delivery times. For more details, please refer to the catalog or contact us.

  • Other measurement, recording and measuring instruments
  • Flow Meter

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Mass Flow Controller 'SFC6000D-5slm'

Mass Flow Controller 'SFC6000D-5slm'

The supply chain is robust because the number of electronic components used is very small! For semiconductors, analytical instruments, and medical devices.

The SFC6000D-5slm is a highly attractive mass flow controller with an excellent price-performance ratio and a delivery time of 8 weeks. Its small and lightweight design allows for optimization of device size and weight, providing a decisive advantage, especially for portable devices. Furthermore, it demonstrates outstanding performance in terms of reproducibility, accuracy, control range, and speed. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, allowing for optimization of device size and weight ■ Outstanding performance in terms of reproducibility, accuracy, control range, and speed ■ Very few electronic components used, resulting in a robust supply chain *For more details, please download the PDF or feel free to contact us.

  • Flow Control

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Mass Flow Controller 'SFC6000D-20slm'

Mass Flow Controller 'SFC6000D-20slm'

Excellent price-performance ratio! This is a very attractive product with a delivery time of 8 weeks.

The "SFC6000D-20slm" is a mass flow controller that is very small and lightweight, allowing for optimization of the device's size and weight. Due to advanced integration and a very low number of electronic components used, the supply chain is robust. Furthermore, it demonstrates excellent performance in terms of reproducibility, accuracy, control range, and speed. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, enabling optimization of device size and weight ■ Outstanding performance in terms of reproducibility, accuracy, control range, and speed ■ Robust supply chain due to the very low number of electronic components used *For more details, please download the PDF or feel free to contact us.

  • Flow Control

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Mass Flow Controller 'SFC5500-50sccm'

Mass Flow Controller 'SFC5500-50sccm'

Combined multiple gas calibrations and interchangeable fittings! Suitable for a wide range of applications in medical, analytical, and industrial environments.

The "SFC5500-50sccm" is a mass flow controller based on micro-thermal measurement principles. It utilizes proven CMOSens MEMS technology, ensuring no drift and eliminating the need for recalibration in the market. Additionally, its wide range of flow control capabilities allows a single product to accommodate multiple flow ranges. 【Specifications (partial)】 ■ Full-scale flow: 0.05slm ■ Full-scale flow: 50sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller 'SFC5500-10slm'

Mass Flow Controller 'SFC5500-10slm'

Full-scale flow rate is 10 slm! A series that combines multiple gas calibrations and interchangeable fittings.

The "SFC5500-10slm" is a mass flow controller available as a standard product suitable for a wide range of applications. This product boasts superior performance equivalent to the "SFC5400," making it ideal for various applications in medical, analytical, and industrial environments. Additionally, a single unit can accommodate multiple flow ranges of conventional mass flow controllers. 【Specifications (partial)】 ■ Full-scale flow: 10slm ■ Full-scale flow: 10000sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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