Surface Analysis Equipment Product List and Ranking from 11 Manufacturers, Suppliers and Companies

Book Surface and Depth Analysis Methods [New Edition]

A clear explanation of surface analysis for developers and manufacturers who are not specialists in analysis!

○Publication Date: December 10, 2007 ○Format: B5 size, paperback, 618 pages ○Price: 33,000 yen (excluding tax) → STbook member price: 31,350 yen (excluding tax) First Edition: December 2007 This book is a revised edition of "Surface and Depth Analysis Methods," published in December 2007 (ISBN 978-4-903413-30-3), with updated binding and pricing. The content is the same as the 2007 publication, so please be careful not to make a mistake when purchasing. ○Authors: Hiroyoshi Soejima, Shimadzu Scientific Research Institute, Inc. / Takeshi Teratani, Sumika Chemical Analysis Service, Ltd. / Junichiro Murayama, Sumitomo Metal Technology, Ltd. / Shinji Nagamachi, Ion Engineering Research Institute, Inc. / Keizo Ishii, Tohoku University / Kazutoshi Kakita, Nippon Steel Technoresearch, Inc. / Makoto Nishino, Shimadzu Corporation / Makishi Ishikawa, Cameca Instruments, Inc. / Takahiro Hoshi, ULVAC, Inc. / Satoshi Kawata, SII Nanotechnology, Inc. / Satoshi Yoshimi, Shimadzu Comprehensive Analysis Testing Center / and 45 others.

Company：S&T出版
Price：10,000 yen-100,000 yen

Technical and Reference Books
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Technical Information Magazine 201902-02 Development of Atmospheric Pressure RBS Analysis

The technical information magazine The TRC News provides the latest information on analytical techniques that are useful for research and development, solving production troubles, and quality control.

**Abstract** In many cases, the analysis targets in surface analysis are limited to those that can be maintained in a vacuum. On the other hand, by applying the potential of high-speed ions, it is possible to bring the analysis probe out to atmospheric pressure. At TRC, we examined Rutherford backscattering spectroscopy (RBS) at atmospheric pressure and succeeded in its realization. This paper reports on depth analysis of solid/liquid interfaces using atmospheric pressure RBS, evaluation of depth distribution of quantum dots in HeLa cells, and depth analysis of hydrogen in wet samples using atmospheric pressure RBS/HFS (hydrogen forward scattering analysis). **Table of Contents** 1. Introduction 2. Solid/Liquid Interface Analysis 3. Application to Biological Samples 4. Development of Measurement System at TRC: Atmospheric Pressure RBS/HFS Analysis 5. Conclusion

Company：東レリサーチセンター
Price：Less than 10,000 yen

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Announcement of Exhibition Participation and Exhibitor Presentations "eX-Tech2026"

We will be exhibiting at the eX-Tech 2026 microelectronics show within the JPCA Show 2026.

From June 10 (Wednesday) to June 12 (Friday), 2026, we will be exhibiting at the Microelectronics Show eX-Tech 2026, part of the Total Solutions Exhibition for Electronic Devices "JPCA Show 2026," held at Tokyo Big Sight, East Exhibition Hall.

Company：カネカテクノリサーチ本社、東京営業所、名古屋営業所、大阪分析センター、高砂分析センター
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Surface analysis device "Ultra High Vacuum Surface Structure Analysis Device"

A surface structure analysis device equipped with an EB evaporator suitable for the fabrication of metal thin films!

The "Ultra High Vacuum Surface Structure Analysis Device" is a surface analysis instrument capable of performing LEED diffraction patterns, Auger analysis, and temperature-programmed desorption analysis for semiconductors and model catalysts. The analyzer is equipped with a LEED/AES mass spectrometer and features an EB evaporator suitable for metal thin film fabrication. Please feel free to contact us if you have any inquiries. 【Specifications】 ■ Surface analysis system: LEED/AES ■ Evaporation source: Ultra high vacuum evaporator "AEV series" ■ Gas source: Hydrogen cracking gun "AEV series" ■ Sample heating: Direct electric heating type (TC contact type sample holder) ■ Sample manipulator: 5-axis operation with X, Y, Z, θ, and in-plane rotation axis, etc. *For more details, please contact us.

Company：エイブイシー
Price：Other

Analytical Equipment and Devices
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Surface analysis of discolored and altered materials using XPS (ESCA).

Measures and avoidance of issues are possible! We will introduce examples verified through elemental and bonding state analysis.

Materials often undergo changes and discoloration depending on the usage environment. These changes and discoloration can lead to issues with the product's performance and design, but by understanding and clarifying the changes in molecular structure through chemical analysis, it becomes possible to address or avoid these problems. This document presents case studies that have been compared and verified through elemental and bonding state analysis via surface analysis. [Contents] ■ Analysis Samples ■ Elemental Analysis Results by XPS (ESCA) ■ Bonding State Analysis Results by XPS (ESCA) for Polycarbonate ■ Bonding State Analysis Results by XPS (ESCA) for Polyvinyl Chloride *For more details, please refer to the PDF document or feel free to contact us.

Company：アイテス
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[Analysis Case] Identification and Estimation of Foreign Substances and Contaminants in LCD Panels

We capture foreign substances and dirt from microns to centimeter order as an image.

In the mass production of LCD panels, it is necessary to remove defects (foreign substances and dirt). Therefore, investigating the causes of these foreign substances and dirt is effective for improving yield. Here, we introduce a case study evaluating foreign substances and dirt on LCD panels. TOF-SIMS can capture cleaning residues in the order of micrometers to centimeters as images. Additionally, by comparing with standard spectra, it is possible to estimate the components.

Company：一般財団法人材料科学技術振興財団　MST
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[Analysis Case] Investigation of the Causes of Surface Stains and Water Repellency on Parts Using TOF-SIMS

Properly sampling and measuring surface contamination even on large parts that cannot be cut.

It was found that there are water-repellent stains on the surface of the aluminum material. The stained area was adhered to tape (transferred), and analysis was conducted using TOFSIMS. Fragments identical to those from the stained area on the aluminum surface were detected from the "tape surface where the stained area was transferred," suggesting that the substance causing the stain has been transferred to the tape. This method of transferring and collecting the causative substance onto tape is effective for parts that cannot be cut.

Company：一般財団法人材料科学技術振興財団　MST
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[Analysis Case] Identification of Fluorine-based Lubricants and Polymers using TOF-SIMS

Identify the contaminating components and estimate the contamination occurrence process.

There are various types of fluorine-based compounds. During the investigation of contamination sources, performing qualitative analysis of the types of fluorine compounds allows us to examine the processes that caused the contamination. Therefore, we conducted an analysis using surface-sensitive TOF-SIMS to determine what is adhering to areas with good water repellency. By utilizing the fact that the fragment patterns of the fluorine-based oils used in each process differ by type, we performed a fingerprint matching and found that a substance corresponding to the oil from process B was adhering.

Company：一般財団法人材料科学技術振興財団　MST
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[Analysis Case] Evaluation of Degradation of Lithium-Ion Battery Anode Surface

Measurements and observations will be conducted from pre-treatment to measurement without atmospheric exposure.

As a result of evaluating the surface of lithium-ion secondary battery anodes, which showed a decrease in capacity, without exposure to the atmosphere, a coating layer containing approximately 100-200 nm of Co was confirmed, and it was found that Co is in a metallic state. Applicable observation methods: FIB-TEM, SEM Surface analysis: SIMS, XPS, AES, TOF-SIMS Other structural evaluations are also possible. Measurement methods: SEM, FIB, TEM, XPS, EDX Product field: Secondary batteries Analysis objectives: Evaluation of chemical bonding states, shape evaluation, composition evaluation, identification For more details, please download the materials or contact us.

Company：一般財団法人材料科学技術振興財団　MST
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[Analysis Case] Evaluation of Solid Polymer Electrolyte Membrane for Fuel Cells

Molecular structure evaluation by TOF-SIMS and chemical state evaluation by XPS.

Solid polymer fuel cells (PEFC) are attracting attention for their high output at room temperature, making them suitable for automotive applications, home cogeneration, and mobile use. This time, we will introduce examples of molecular structure evaluation using TOF-SIMS, bonding state analysis using XPS, and quantitative evaluation of solid polymer electrolyte membranes. Additionally, MST allows for comprehensive evaluation of battery materials using various analytical methods under controlled atmospheric conditions.

Company：一般財団法人材料科学技術振興財団　MST
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[Analysis Case] Component Analysis of Organic EL Devices

TOF-SIMS component analysis of slope-polished organic multilayer structure samples.

We conducted TOF-SIMS analysis on an organic EL device (Figure 1) estimated to be formed from four layers of different organic compounds (or organometallic complexes) using XPS. For multilayer structural samples, depth profiling analysis using sputtering is also performed; however, in this case, we created a slope surface to expose each layer without breaking the bonds of the constituent components. Molecular weight-related ions and fragment ions presumed to be Alq3, NPD, and CuPc were obtained, confirming that TOF-SIMS analysis of the slope surface is an effective method for component analysis of organic multilayer films.

Company：一般財団法人材料科学技術振興財団　MST
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[Analysis Case] Evaluation of the Depth Direction State of Stainless Steel Passive Film

Waveform analysis and evaluation of the depth distribution of bonding states by Ar sputtering.

XPS allows for the evaluation of bonding states of oxidized components (components bonded with oxygen) and metallic components (components bonded with metals). Additionally, by using argon ion sputtering, it is also possible to evaluate bonding states in the depth direction. * Regarding the passive film on the surface of stainless steel (with a thickness of several tens of nm to several hundred nm), the results of the above measurements showed that (1) there are many Fe oxidized components on the surface side, (2) Cr oxidized components exist below the Fe oxide layer, and (3) Ni oxidized components are almost nonexistent. * Since it includes changes in bonding states due to sputtering, the evaluation is primarily based on relative comparisons.

Company：一般財団法人材料科学技術振興財団　MST
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[Analysis Case] Component Identification of Foreign Substances Considering Thermal History

Proposal for the use of standard samples with aligned thermal history.

Polymeric materials such as polypropylene (PP) react with oxygen and moisture in the atmosphere when heated, causing changes in their molecular structure. Therefore, when foreign substances or contaminants may be present in polymeric materials, it is necessary to use standard materials processed in the same environment as the measurement sample for comparison data. To investigate how the PP standard material changes due to heat treatment (200°C for 30 minutes), FT-IR and TOF-SIMS measurements were conducted.

Company：一般財団法人材料科学技術振興財団　MST
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[Analysis Case] Depth Direction Analysis of Polyimide Components

Evaluation of the depth direction of surface modification layers of polymers, resins, and films using TOF-SIMS is possible.

Polyimide is a material that is used in various fields, including electronic components, due to its high heat resistance and excellent electrical insulation properties. Since surface modification can enhance adhesion to other materials, it is important to understand the state of the modified layer. In this study, TOF-SIMS measurements were conducted under sputtering conditions that minimize the degradation of organic components, allowing for the evaluation of polyimide components in the depth direction. Using GCIB (Ar cluster) for sputtering enables the measurement of the targeted organic components in the depth direction. *GCIB: Gas Cluster Ion Beam

Company：一般財団法人材料科学技術振興財団　MST
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[Analysis Case] Investigation of the Causes of Wettability Changes Due to Plasma Treatment

Evaluation of the top surface of modified layers of polymers, resins, and films using TOF-SIMS is possible.

On the surface of cell culture dishes, treatments are performed to convert hydrophobic plastic surfaces to hydrophilic ones in order to enhance cell adhesion. In this study, the surfaces of dishes that underwent hydrophilic treatment were evaluated using XPS and TOF-SIMS, revealing an increase in OH and CHO groups. By conducting quantitative evaluations with XPS and qualitative evaluations with TOF-SIMS, it is possible to capture how the surface has changed.

Company：一般財団法人材料科学技術振興財団　MST
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[Analysis Case] Evaluation of Silicon (Si) Oxide Film State

It is possible to capture molecular information of inorganic substances in the depth direction using TOF-SIMS.

In depth-direction analysis of molecular information obtained by TOF-SIMS, (1) the depth resolution is good, (2) it is possible to distinguish the chemical states of inorganic materials such as oxides, nitrides, fluorides, carbides, alloys, and metals, (3) evaluation of trace states is possible, (4) monitoring of OH is possible, (5) relative comparisons between samples (film thickness, composition) are possible, and (6) image analysis allows for a visual capture of the distribution of states at the surface level of a few nanometers. We will summarize the results of natural oxide films and oxide films. Measurement method: TOF-SIMS Product field: LSI, memory Analysis purpose: evaluation of chemical bonding states, evaluation of composition distribution, thickness of corrosion layers For more details, please download the materials or contact us.

Company：一般財団法人材料科学技術振興財団　MST
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[Analysis Case] Distribution and State Evaluation of OH on Aluminum (Al) Surface

It is possible to capture molecular information of inorganic substances in the depth direction using TOF-SIMS.

The presence of OH and fluoride on the surface of aluminum electrodes is one of the causes of electrode corrosion, and investigating the state of the aluminum surface is essential for identifying the causes of defects. TOF-SIMS excels in depth resolution at the very surface and can measure depth distribution with high sensitivity while monitoring the state of inorganic substances. By evaluating the depth distribution along with OH, we discovered a phenomenon where OH increased without a change in the thickness of the oxide film. In this way, TOF-SIMS enables the evaluation of depth distribution of molecular information of inorganic substances that cannot be obtained through elemental analysis.

Company：一般財団法人材料科学技術振興財団　MST
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[Analysis Case] Evaluation of the Cleaning Effect of Organic Ingredients

You can measure the 300mm wafer as it is.

TOF-SIMS has the characteristics of simultaneously evaluating organic and inorganic materials, being capable of analyzing small areas with high sensitivity at the very surface, and allowing evaluation while still in the form of 300mm wafers, making it effective for residue investigations during cleaning processes. We will introduce an analysis case of the removal effect of organic contamination on Si surfaces. TOF-SIMS analysis was conducted on samples where amine-based organic materials were confirmed to be in extremely small quantities by XPS. Even in small areas, it is possible to measure components in such extremely small amounts.

Company：一般財団法人材料科学技術振興財団　MST
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[Analysis Case] Investigation of Contamination Causes on Silicon Wafers

Evaluation of contamination originating from gloves

In semiconductor device manufacturing, it is necessary to investigate what causes thin deposits that lead to defects in order to examine contamination processes. An analysis was conducted using TOF-SIMS on the deposits for which carbon was detected by EDX and quantified by XPS. When compared to the gloves used for standard samples in each process, similar trends were observed with gloves A and B. Furthermore, verification was performed by adhering the standard sample gloves to silicon wafers. As a result, it was found that they were similar to glove A. Adhering standard samples to silicon wafers for verification is an effective method.

Company：一般財団法人材料科学技術振興財団　MST
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[Analysis Case] Analysis of Additive Components in Polymer Films

Surface and depth distribution evaluation of additives in the film using GCIB.

Food wrap films may use additives to ensure stability against thermal exposure during the manufacturing process and to impart plasticity. These additives are required to remain stable under cooking conditions without changing. In this case, we present the results of an investigation using TOF-SIMS to examine whether the state of one of the additives, Irgafos168, changes (bleeds out) before and after heating. *GCIB: Gas Cluster Ion Beam

Company：一般財団法人材料科学技術振興財団　MST
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[Analysis Case] Visualization of the Distribution of Components in Biomaterials

We will handle everything from the preparation of biological material sections to analysis.

In this document, we prepared cross-sectional slices of mouse brain, heart, liver, kidneys, and teeth, and performed imaging using TOF-SIMS. The imaging area can range from approximately 10 μm to several centimeters, allowing for high-resolution analysis tailored to the focus of interest. Slices can be prepared according to the various organs of the organism, enabling imaging of their components. Additionally, this method is effective for visualizing the distribution of administered components within biological materials in pharmacokinetic studies and pharmaceutical research and development. Measurement method: TOF-SIMS Product field: Biotechnology, Pharmaceuticals Analysis purpose: Composition distribution evaluation For more details, please download the document or contact us.

Company：一般財団法人材料科学技術振興財団　MST
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Analysis case: Evaluation of foreign substances present in resin.

Evaluation of foreign substances in resin is possible using TOF-SIMS through cross-section processing of the sample.

When evaluating organic foreign substances present in resin, it may be difficult to assess them in their original state depending on the sample and analysis conditions. Therefore, we will introduce a case where evaluation became possible by cross-sectioning the resin to expose the foreign substances at the surface. After exposing foreign substances measuring several tens of micrometers that were mixed into epoxy resin through cross-sectioning, we evaluated them using TOF-SIMS. We were able to identify the components of the foreign substances and confirm their distribution.

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[Analysis Case] Composition Evaluation of Nozzle Surface and Inner Wall

It is possible to evaluate the compositional distribution of the convex and concave samples.

TOF-SIMS is an effective method for evaluating distribution, as it can simultaneously analyze elemental composition and molecular information of organic and inorganic substances, as well as perform imaging analysis. This document presents a case study analyzing the inner wall of a nozzle. The distribution of the nozzle surface and inner wall was confirmed, and the presence or absence of peaks at various locations was verified. Measurement method: TOF-SIMS Product field: Manufacturing equipment, parts, daily goods Analysis purpose: Composition distribution evaluation For more details, please download the document or contact us.

Company：一般財団法人材料科学技術振興財団　MST
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The influence of adsorbed oxygen in XPS.

XPS: X-ray Photoelectron Spectroscopy

XPS is a method for obtaining information about the composition and bonding state of the sample surface (to a depth of about several nanometers), but by combining it with ion irradiation for sputter etching, it is also possible to evaluate the internal structure of the sample and depth distribution. However, in evaluations involving sputter etching, due to the principles and measurement mechanisms of XPS, the amount of oxygen may be overestimated due to the influence of adsorbed oxygen, so caution is required. In the case of evaluating samples that easily adsorb oxygen (such as Ti, TiN, AlN, etc.) or focusing on trace amounts of oxygen, the influence of adsorbed oxygen becomes significant, so comparisons between samples and analyses using SIMS are recommended.

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[Analysis Case] Verification of Reduction Treatment for Sn Oxide

Comparison of XPS and computational simulations: Analysis of electronic states from the valence band spectrum.

XPS is a method for evaluating the composition and bonding state of a material based on the photoelectron spectrum from inner shell levels. On the other hand, the valence band spectrum, which reflects the states of the outer shell electrons, appears near the Fermi level. This document presents a case study that verifies the reduction treatment of Sn oxides by comparing and discussing the density of states calculated through first-principles calculations with the valence band spectrum obtained by XPS. Utilizing computational simulations allows for a deeper understanding of the XPS spectrum obtained.

Company：一般財団法人材料科学技術振興財団　MST
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All applicants will receive a gift! Basics of surface analysis and examples of contract analysis.

<XPS・TOF-SIMS> A comprehensive explanation of what surface analysis is, the types of surface analysis, and other fundamental aspects. Additionally, representative examples using surface analysis are included.

We will introduce a compilation of basic explanations and analysis examples that will be helpful for your consideration of surface analysis. Please keep it on hand and make use of it for your consideration of analysis services. ★Free gift for all who wish to receive it★ Please check "Request for catalog" in the [Contact Us] section to apply. *You can view the digest version from [PDF Download].

Company：一般財団法人材料科学技術振興財団　MST
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[Analysis Case] Evaluation of Wetting Properties of Ceramics

It is possible to analyze organic substances characteristic of hydrophilic and hydrophobic areas of inorganic materials.

Ceramics are inorganic compound materials widely used in everyday items and electronic components. They possess characteristics such as heat resistance and chemical resistance, and evaluating the surface condition is important for utilizing the functions of ceramics. This document introduces a case where the cause of decreased hydrophobicity in Zr oxide ceramic materials with hydrophobic surface treatment was evaluated using TOF-SIMS. Measurement method: TOF-SIMS Product field: Manufacturing equipment and components Analysis purpose: Composition evaluation and identification For more details, please download the document or contact us.

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[Analysis Case] Evaluation of Component Distribution in Skin Cross-Section

It is possible to visualize molecular information of organic and inorganic substances.

We created skin tissue samples and evaluated the distribution of biogenic components in freeze-dried samples using TOF-SIMS. Since TOF-SIMS identifies components based on the mass of molecular ions, it does not require labels such as fluorescent substances, allowing for the evaluation of distribution without the influence of labeled materials. The mapping results confirmed that arginine, a natural moisturizing factor (NMF), and cholesterol, which retains moisture as an intercellular lipid, are localized in the stratum corneum. This method is also effective for assessing the permeation state during drug application.

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[Analysis Case] Component Evaluation of Positive and Negative Electrode Binders in Secondary Batteries

Identification of organic substances using TOF-SIMS and GS/MS.

The binder for lithium-ion secondary batteries not only serves as an adhesive between active materials but also needs to be insoluble in the electrolyte. Therefore, the selection of suitable materials for both the positive and negative electrodes is crucial. This document presents cases where the components of the binders used in each electrode sheet were identified by measuring the positive electrode binder using TOF-SIMS and the negative electrode binder using GC/MS, and then comparing the results with a materials library database.

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[Analysis Case] XPS Analysis of Metal Pipe Inner Wall Using Combined Cutting Processing

We provide one-stop solutions from sample cutting processing to investigating the causes of discoloration and corrosion.

The inner walls of metal pipes, such as SUS, used in various fields can discolor and corrode due to reactions with incoming gases and liquids, leading to a decline in equipment functionality. Understanding the locations prone to discoloration and corrosion, as well as their causes, is an important issue in equipment maintenance. At MST, we provide a comprehensive evaluation from sample cutting to analysis. This document presents a case study of XPS analysis conducted on the inner walls of SUS pipes used in vacuum equipment, highlighting both normal and discolored areas.

Company：一般財団法人材料科学技術振興財団　MST
Price：Other

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Surface Analysis Equipment

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Surface Analysis Equipment Product List and Ranking from 11 Manufacturers, Suppliers and Companies | IPROS GMS

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