ティー・ケイ・エス List of Products and Services

In the quantum dot display industry, vibrant color reproduction and high display quality are required. In particular, the purity of quantum dot materials significantly affects color reproduction, and the presence of impurities can lead to a decrease in color purity and display unevenness. Our ultra-high purity sublimation purification equipment ensures a stable supply of high-purity materials, contributing to the improvement of color reproduction in quantum dot displays. 【Application Scenarios】 - Quantum dot display manufacturing - Color reproduction evaluation - Development of high-performance materials 【Effects of Implementation】 - Improvement in color purity - Enhancement of display quality - Improvement in yield

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the organic EL display industry, there is a demand for products that are high in brightness and have a long lifespan. In particular, the purity of organic EL materials greatly affects brightness and lifespan, making a stable supply of high-quality materials essential. Contamination with impurities can lead to reduced brightness and accelerated degradation. Our ultra-high purity sublimation purification equipment provides high-purity materials and contributes to the enhancement of brightness in organic EL displays. 【Usage Scenarios】 - Purification of organic EL materials - Development of high-brightness displays 【Benefits of Implementation】 - Improvement in brightness due to enhanced material purity - Enhanced product performance through stable supply of high-quality materials - Reduction in material costs

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the compound semiconductor industry, improving the purity of materials that influence product performance is essential. The contamination of impurities can lead to a deterioration in product performance, so a stable supply of high-quality materials is required. Our ultra-high purity sublimation purification equipment achieves both high purity and high yield, contributing to the improvement of compound semiconductor quality. 【Application Scenarios】 - Purification of semiconductor materials - Purification of organic EL materials - Development of high-functionality materials 【Effects of Implementation】 - Improvement in product yield due to increased material purity - Enhancement of product performance through stable supply of high-quality materials - Reduction in material costs

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the battery industry, extending the lifespan of products is an important challenge. In particular, the repeated charging and discharging can lead to the degradation of electrode materials and the decomposition of electrolytes, resulting in decreased performance. Therefore, a stable supply of high-quality materials is required. Our ultra-high purity, ultra-high yield sublimation refining equipment contributes to the longevity of batteries by supplying high-purity materials. 【Application Scenarios】 - Refinement of lithium-ion battery materials - Development of all-solid-state battery materials - Research on next-generation battery materials 【Effects of Implementation】 - Improved battery performance due to enhanced material purity - Extended battery lifespan through stable supply of high-quality materials - Suppression of degradation in battery materials

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the sensor industry, improving the purity of materials is essential to achieve high sensitivity. Particularly in sensors that capture minute signals, the presence of impurities can create noise and potentially degrade performance. Our ultra-high purity sublimation purification equipment contributes to the enhancement of sensor sensitivity through the stable supply of high-purity materials. 【Application Scenarios】 - Purification of high-sensitivity sensor materials - Development of micro-signal detection sensors - Manufacturing of environmental measurement sensors 【Effects of Implementation】 - Improved sensor performance due to enhanced material purity - Improved yield through the stable supply of high-quality materials - Realization of high-precision measurements through noise reduction

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the optical fiber industry, high purity of materials is required to minimize transmission loss. In particular, it is crucial to limit the contamination of impurities to the utmost in order to suppress the attenuation of optical signals. Our ultra-high purity sublimation purification equipment enables a stable supply of high-purity materials, contributing to the reduction of loss in optical fibers. 【Application Scenarios】 - Purification of optical fiber materials - Performance enhancement of optical communication systems 【Benefits of Implementation】 - Reduction of transmission loss due to improved material purity - Enhancement of system performance through stable supply of high-quality materials - Long-term cost reduction

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the LED industry, improving the purity of materials is essential to enhance the luminous efficiency of products. Particularly for materials that influence the performance of LEDs, the presence of impurities can lead to a decrease in luminous efficiency, making a stable supply of high-quality materials indispensable. Our ultra-high purity sublimation purification equipment achieves both high purity and high yield, contributing to the improvement of LED luminous efficiency. 【Application Scenarios】 - Purification of LED materials - Development of high-brightness LEDs - LED displays 【Effects of Implementation】 - Improvement in luminous efficiency due to increased material purity - Enhancement of product performance through stable supply of high-quality materials - Reduction in material costs

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the solar cell industry, the improvement of conversion efficiency is always sought after. To efficiently convert sunlight into electrical energy, it is important to enhance the purity of materials and minimize the incorporation of impurities. Impurities can be a factor that degrades the performance of solar cells. Our ultra-high purity sublimation purification equipment achieves a stable supply of high-purity materials and contributes to the improvement of solar cell efficiency. 【Usage Scenarios】 - Purification of solar cell materials - Development of high-efficiency solar cells 【Effects of Implementation】 - Improvement of conversion efficiency through enhanced material purity - Enhancement of product performance through stable supply of high-quality materials - Reduction of material costs

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the display industry, improving the purity of thin film materials that influence product performance is essential. Particularly in organic EL displays, the contamination of impurities can lead to reduced yield and performance degradation, making a stable supply of high-quality materials necessary. Our ultra-high purity sublimation refining equipment achieves both high purity and high yield, contributing to the improvement of display quality. 【Application Scenarios】 - Refining organic EL display materials - Developing thin film materials 【Benefits of Implementation】 - Improved product yield due to enhanced material purity - Enhanced product performance through stable supply of high-quality materials - Reduction in material costs

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the semiconductor industry, improving the purity of materials that influence product performance is essential. Contamination by impurities can lead to reduced product yield and performance degradation, making a stable supply of high-quality materials necessary. Our ultra-high purity, ultra-high yield sublimation purification equipment achieves both high purity and high yield, contributing to the improvement of semiconductor material quality. 【Application Scenarios】 - Purification of semiconductor materials - Purification of organic EL materials - Development of high-functionality materials 【Effects of Implementation】 - Improvement of product yield through enhanced material purity - Enhancement of product performance through stable supply of high-quality materials - Reduction of material costs

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the food industry, foreign matter contamination is a serious issue that not only undermines corporate trust but also poses potential health risks to consumers. Compliance with stringent hygiene standards such as HACCP and PIC/S GMP Annex 1 is required. Seamless metal belt conveyor systems address these challenges by preventing the generation of fine particles from the belt and maintaining a clean environment. 【Usage Scenarios】 - Food manufacturing lines - Packaging lines - Clean room environments 【Benefits of Implementation】 - Reduction of foreign matter contamination risks - Achievement of a high level of cleanliness - Compliance with various regulations such as HACCP

• Conveyor Components
• Pharmaceutical Packaging Machine
• Pharmaceutical related factory equipment

In the cell culture industry, it is important to minimize the risk of contamination and maintain the cleanliness of the culture environment. In particular, the intrusion of microparticles and foreign substances that can affect cell proliferation and quality is strictly managed. The PureSteel metal belt, with its seamless structure, suppresses the generation of microparticles and is compatible with autoclave sterilization, thereby maintaining a high level of cleanliness. 【Application Scenarios】 - Transport of culture media and cells in the cell culture process - Movement of cell products in a cleanroom environment - Transport of culture containers that require aseptic conditions 【Benefits of Implementation】 - Reduction of contamination risk - Stabilization of the culture environment - Improvement of product quality

• Conveyor Components
• Pharmaceutical Packaging Machine
• Pharmaceutical related factory equipment

In the pharmaceutical industry's aseptic filling process, it is essential to minimize the risk of contamination to ensure product quality and safety. In particular, the transport systems in aseptic environments must prevent the ingress of particulates and foreign substances while meeting strict hygiene management standards. Seamless metal belts have been developed to meet these requirements. 【Usage Scenarios】 - Aseptic filling lines - Pharmaceutical manufacturing processes - Biotechnology field 【Benefits of Implementation】 - Suppresses the generation of particulates, reducing the risk of product contamination - Easy to clean, maintaining cleanliness - High durability enables stable operation over a long period

• Conveyor Components
• Pharmaceutical Packaging Machine
• Pharmaceutical related factory equipment

In the sensor industry, improving material purity is essential to achieve high sensitivity. Particularly in sensors that capture weak signals, the presence of impurities can create noise and potentially degrade performance. Our ultra-high purity sublimation purification equipment provides high-purity organic materials, contributing to the enhancement of sensor performance. 【Application Scenarios】 - Development of high-sensitivity sensors - Purification of organic EL display materials - Purification of optical sensor materials 【Effects of Implementation】 - Increased sensor sensitivity - Reduced noise - Improved product reliability

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the fuel cell industry, the performance of catalysts significantly affects the efficiency and lifespan of products. In particular, securing high-purity catalyst materials is essential for improving fuel cell performance. Contamination by impurities can lead to a decrease in catalytic activity and deterioration of durability. Our ultra-high purity, ultra-high yield sublimation purification equipment achieves both high purity and high yield, contributing to the improvement of fuel cell catalyst quality. 【Application Scenarios】 - Research and development of fuel cell catalyst materials - Mass production of fuel cell catalysts - Quality control of high-purity catalyst materials 【Effects of Implementation】 - Improved catalyst performance - Increased efficiency of fuel cells - Reduction in material costs

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the field of space development, reducing the weight of rockets and satellites is an important challenge. Weight reduction allows for lower launch costs and the ability to carry more equipment. Therefore, the use of high-purity, lightweight organic materials is essential. Our ultra-high purity, ultra-high yield sublimation purification equipment enables the refinement of high-purity organic materials, contributing to weight reduction in space development. 【Application Scenarios】 - Rocket components - Satellite components - Space station components 【Benefits of Implementation】 - Manufacturing of lightweight, high-performance components - Cost reduction - Improved reliability

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the optical components industry, the purity of materials is crucial for maximizing product performance. In particular, the contamination of impurities that affects light transmittance can lead to a decrease in transparency and potentially compromise product quality. Our ultra-high purity, ultra-high yield sublimation purification equipment contributes to the improvement of optical component transparency. 【Application Scenarios】 - Optical lenses - Displays - Various filters 【Benefits of Implementation】 - Improved material purity - Enhanced transparency - Increased product quality

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the electronic materials industry, improving the purity of materials that influence product performance is essential. Particularly in semiconductors and organic EL materials, the contamination of impurities can lead to decreased yield and performance degradation, necessitating a stable supply of high-quality materials. Our ultra-high purity and ultra-high yield sublimation purification equipment achieves both high purity and high yield, contributing to the improvement of electronic material quality. 【Usage Scenarios】 - Purification of semiconductor materials - Purification of organic EL materials - Development of high-functionality materials 【Effects of Implementation】 - Improvement of product yield through enhanced material purity - Enhancement of product performance through stable supply of high-quality materials - Reduction of material costs

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the cosmetics industry, the purity and yield of raw materials are crucial for ensuring product quality and safety. Especially when extracting natural-derived ingredients and high-functional components, it is essential to prevent the contamination of impurities and maximize the recovery of active ingredients. Improper refining can lead to a decline in product quality and increased costs. Our ultra-high purity sublimation refining equipment achieves both high purity and high yield, contributing to the improvement of the quality of cosmetic raw materials. [Usage Scenarios] - Extraction of natural-derived ingredients and high-functional components - Small-scale refining in research and development - Securing high-purity raw materials in mass production systems [Effects of Implementation] - Stable supply of high-quality cosmetic raw materials - Reduction of raw material costs - Increased efficiency in research and development

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the fragrance industry, securing high-purity raw materials that influence product quality is crucial. In particular, to enhance the persistence and safety of fragrances, raw materials with minimal impurities are required. Impurities can lead to the degradation or alteration of scents. Our ultra-high purity and ultra-high yield sublimation purification equipment enables the refinement of high-purity fragrance raw materials, contributing to the improvement of product quality. 【Application Scenarios】 - Research and development of fragrances - Purification of perfume and cosmetic ingredients - Production of food flavorings 【Benefits of Implementation】 - Improvement in fragrance quality - Yield enhancement - Cost reduction

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the pharmaceutical industry, advanced purification of raw materials is essential for manufacturing high-quality pharmaceuticals. In particular, contamination with impurities can compromise product quality and potentially affect safety. Our ultra-high-purity organic material sublimation purification equipment achieves both high purity and high yield, optimizing the purification process in pharmaceutical manufacturing. 【Application Scenarios】 - Purification of pharmaceutical active ingredients - Purification of intermediates - Small-scale purification in research and development 【Benefits of Implementation】 - Manufacturing of high-quality pharmaceuticals - Cost reduction through improved yield - Increased efficiency in research and development

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the organic EL display industry, the purity of luminescent materials greatly affects product performance. In particular, factors such as color reproduction and lifespan are easily influenced by impurities in the materials, making it essential to secure high-purity materials for manufacturing high-quality products. Impurities can also lead to decreased efficiency and accelerated degradation of devices. Our ultra-high-purity sublimation purification equipment achieves both high purity and high yield, contributing to the improvement of luminescent material quality. 【Application Scenarios】 - Purification of luminescent materials in organic EL display manufacturing - Procurement of high-purity materials during the research and development phase - Cost reduction through improved yield 【Effects of Implementation】 - Enhanced device performance with high-purity materials - Reduced material costs due to high yield - Optimization of installation space through space-saving design

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the solar cell industry, the improvement of conversion efficiency is always sought after. Particularly in organic solar cells, the purity of materials greatly influences performance. Impurities hinder charge movement and lead to decreased efficiency. Our ultra-high purity, ultra-high yield sublimation purification equipment contributes to improving solar cell efficiency by providing high-purity organic materials. 【Application Scenes】 - Research and development of organic solar cells - Manufacturing processes for solar cell materials - Production of high-performance solar cells using high-purity materials 【Effects of Introduction】 - Improvement in solar cell conversion efficiency due to high-purity materials - Cost reduction through improved yield - Effective use of installation area due to space-saving design

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the thin film process of the display industry, the purity and yield of organic materials are crucial to ensuring high-quality display performance. In particular, impurities in organic materials that affect the uniformity and durability of thin films can lead to reduced yield and performance degradation of the products. Our ultra-high purity and ultra-high yield sublimation purification equipment achieves both high purity and high yield, strongly supporting the thin film process in display manufacturing. 【Usage Scenarios】 - Manufacturing of organic EL displays - Manufacturing of organic thin-film solar cells - Development of high-performance display materials 【Effects of Implementation】 - Improved yield through stable supply of high-purity materials - Reduction in material costs - Enhanced product performance through high-quality thin film formation

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

In the semiconductor industry, achieving ultra-high purity of materials is essential to maximize device performance. Particularly in organic EL and organic semiconductor materials, the presence of impurities is a significant factor in performance degradation. Our ultra-high purity, high-yield sublimation purification equipment achieves a purity of 99.99% and a yield of 98% (after the second purification), addressing the challenge of enhancing the purity of semiconductor materials. 【Application Scenarios】 - Purification of organic EL materials - Purification of organic semiconductor materials - Purification of other semiconductor materials requiring high purity 【Benefits of Implementation】 - Improved device performance - Cost reduction through increased yield - Strengthened competitiveness through the supply of high-quality materials

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

- Extending the lifespan through the replacement of servo motors and drivers - - Reconditioning various power supply modules - - Reconditioning mechanical drive modules and mechanical modules - In recent years, we have received numerous requests for extending the lifespan of operating equipment. In particular, there has been a continuous increase in inquiries regarding the repair, reconditioning, and replacement of servo motors, motor drivers, and various high-frequency power supply modules that are no longer supplied by manufacturers. Recently, the high functionality of equipment and components has led to a specialization in repair responses. With this specialization, it has become increasingly difficult to provide comprehensive "repair" services based on overall diagnosis and verification. Our company was established with the goal of bringing together experienced engineers to ensure the stable operation of our customers' equipment. With the opening of this service center, we will provide one-stop reconditioning and lifespan extension through comprehensive diagnostics of equipment by our skilled engineers and the integration of specialized skills from partner engineers located nationwide.

• DC Motor
• Servo motor
• Other motors

By using a helicon plasma source as the ion source, this groundbreaking method accelerates high-density ions obtained from it by applying a bias voltage to the target, achieving high-rate and highly directional film deposition. Independent current control for the ion source, target, and substrate allows for precise control of not only the sputtering rate but also various reactive sputtering processes such as oxide and nitride films. It enables high-rate film deposition of materials that are difficult to deposit with conventional equipment, such as ferromagnetic materials and dielectric/insulating films from metal targets. <Features> ■ High-speed, high-efficiency ion beam sputtering Optimal solution for dielectric and ferromagnetic targets ■ Helicon plasma ion source and target application Achieves both high-speed sputtering and low contamination Reduces running costs by improving target utilization efficiency Low maintenance due to gridless structure Sputtering while keeping the substrate at low temperatures through remote plasma configuration ■ Single wafer processing Improved step coverage Composite film deposition using cluster tools ■ Excellent directionality High-directionality ion beams enable uniform film thickness deposition, resulting in excellent step coverage in film formation.

• Sputtering Equipment

-Properties and Performance of Metal Belts- PureSteel metal belts are made from stainless steel, allowing for long-term use even in harsh conditions, providing durability. Depending on the usage environment and purpose, it is also possible to supply alloy materials tailored to resist chemicals, temperature, and corrosion. -Durability- PureSteel metal belts are resistant to extreme temperatures, vacuum conditions, and harmful or corrosive environments. They are also unaffected by wear and surface peeling due to elongation or warping from long-term use. -Cleanliness- PureSteel metal belts do not require lubrication. There are no fine particles or gas emissions generated from other materials (such as resin or fiber). They can be sterilized using autoclaves, various fumigation methods, or gas spraying, making them ideal for use in environments where cleanliness is of utmost importance. -Accuracy- PureSteel metal belts do not exhibit pulsation, which is common with other typical belt materials. This allows for precise transmission of the control system's operational profile. They are processed to have smooth edges and accurate dimensions due to very tight tolerances, achieving greater accuracy and reliability compared to other belt materials.

• Conveyor Components
• Pharmaceutical Packaging Machine
• Pharmaceutical related factory equipment

-TKS's Equipment Lifespan Extension Service- Many devices used in domestic semiconductor and electronic device manufacturing have been in operation for over 20 years since their introduction, and many essential devices are still in operation. However, it is not uncommon for modules and parts used in these devices to have already been discontinued. By using current products for the repair and regeneration of worn, degraded, or broken modules, we contribute to the stable operation of the equipment. Additionally, please consult us about domestic production of parts aimed at stable supply and cost reduction. -Extension of Lifespan through Servo Motor and Driver Replacement- Many servo motors are used in operating equipment, but the motor drivers and motors are updated and discontinued every few years even while the equipment is in operation. If a motor driver or motor used in long-operating equipment fails, the only options until now have been to search for used parts or repair them. In such cases, if "no used parts are available!" or "repair is not possible!", the options may be limited to using the equipment within a feasible range or ceasing operation and purchasing new equipment. Our company has sought solutions to such problems and has achieved results.

• Sputtering Equipment
• Solenoid Actuators
• Transport and handling robots

HiTUS Technology Independent current control is performed for the ion source, target, and substrate. With independent control, it becomes possible to freely control not only the sputter rate but also various reactive sputtering processes such as oxide films and nitride films. We strongly support advanced materials research and process development for applications that have been considered difficult with conventional sputtering equipment, such as ferromagnetic film deposition, co-sputtering of metal and ceramic targets, and dielectric/insulating film deposition from metal targets.

• Other metal materials
• alloy
• Surface treatment contract service

- Sublimation - This term refers to the phenomenon where a substance transitions directly from the solid phase to the gas phase without passing through the liquid phase. Conversely, it also refers to the phenomenon of transitioning from the gas phase to the solid phase, but these are generally referred to as deposition, solidification, or recrystallization. - Conditions for the Occurrence of Sublimation - Common substances exhibit three states: solid, liquid, and gas, which are determined by temperature changes. The boundary temperatures are defined by the "vapor pressure" of each substance. Since the phase change temperature is dictated by vapor pressure, by altering the environmental conditions (reducing pressure), sublimation can occur in many substances without passing through the liquid phase. - Applications of Sublimation and Sublimation Purification Devices - Many compounds have their own specific sublimation and solidification temperatures. By utilizing this temperature difference, it is possible to significantly separate mixed compounds. This phenomenon is applied in sublimation purification devices. Taking advantage of the property that allows direct phase transition from solid to gas, it is widely used for the high purification of "insoluble" substances that are difficult to dissolve in solvents.

• Organic EL

PlasmaQuest is a reputable company with a 25-year history in the development and sales of helicon-type high-density ion sources and related application products. The gridless helicon plasma source generates high-density plasma and continues to provide OEM supply to many equipment manufacturers. Utilizing this high-quality plasma source as an ion source, the groundbreaking "HiTUS" system applies bias to the target, enabling sputtering under various conditions and with different targets. It allows for sputtering of high magnetic targets and high dielectric targets, which are considered difficult with conventional magnetron sputtering devices, as well as co-sputtering using heterogeneous targets such as metals and ceramics, making it suitable for a wide range of applications. The company is equipped to flexibly respond to both research applications and production-scale equipment.

• Sputtering Equipment

Independent current control is performed for the ion source, target, and substrate. With independent control, not only the sputter rate but also various reactive sputtering processes such as oxide and nitride films can be freely controlled. This device strongly supports advanced material research and process development, enabling the deposition of difficult-to-deposit materials such as ferromagnetic films, Co-sputtering of metal and ceramic targets, and dielectric/insulating films from metal targets. Independent control of ion supply and sputter rate → Control of sputter rate, film quality, and crystal structure → Control of ionization rate of target materials High-directionality film deposition → High-directionality film deposition characteristic of ion beam sputtering Multi-target mechanism → Wide-ranging multilayer film deposition Independent control of multiple targets → Co-sputtering alloy deposition by controlling the sputter rate of each target → Multilayer deposition by switching targets Conformal film deposition through bias application control to the substrate → Conformal film deposition even under adverse conditions such as deep trenches and overhangs.

• Sputtering Equipment
• Plasma Generator
• Other surface treatment equipment

The ion beam etching equipment manufactured by AVP Technology is a production device equipped with an ICP ion source, offering high uniformity, high etching rates, and excellent operational reproducibility and stability. Compared to other companies' IBE devices, it achieves stable operation, which is essential for manufacturing facilities, through its superior control system. The latest drive mechanism minimizes latency time, thereby improving productivity.

• Sputtering Equipment

This is a high-speed ion beam sputtering (IBD) device that excels in the deposition of dielectrics such as Al2O3 and SiO2, which typically have low deposition rates in conventional magnetron sputtering, as well as ferromagnetic materials like Fe. By using a helicon plasma source as the ion source and a groundbreaking method that accelerates the high-density ions obtained from it through the application of bias voltage to the target, it achieves high-rate and highly directional film deposition. It also contributes to cost reduction in deposition processes using valuable and rare targets by efficiently utilizing the entire target surface. <Features> ■ High-speed, high-efficiency ion beam sputtering Optimal solution for dielectric and ferromagnetic targets ■ Helicon plasma ion source and target application Achieving both high-speed sputtering and low contamination Reduction of running costs through improved target utilization efficiency Maintenance reduction due to gridless structure Sputtering while keeping the substrate at low temperature through remote plasma configuration ■ Wafer processing Improved step coverage Composite film deposition using cluster tools ■ Excellent directionality Uniform film thickness can be achieved with a highly directional ion beam, resulting in excellent step coverage in film deposition.

• Sputtering Equipment

Achieving both stable film formation and cost reduction. This is a high-performance, high-quality "Magnetron Sputter Cathode" manufactured by American Angstrom Science. By adopting the patented Shaped Magnet technology, it utilizes a wide area of the target, making it less likely for changes in the sputtering state due to erosion to occur, thus achieving stable film formation and cost reduction for target replacement. 【Features】 ■ Shaped Magnet high-efficiency technology cathode: Achieves high film formation efficiency and stability ■ Reusable targets: Allows for the reuse of your existing targets, reducing costs ■ Balancing stable film formation and cost reduction: Minimal changes in sputtering state due to erosion, reducing target replacement costs ■ Compatible with existing sputtering equipment from various manufacturers: Can be adapted to other companies' equipment ■ High vacuum compatible: Usable in high vacuum environments suitable for a wide range of applications ■ Compatible with target sizes from φ1 inch to φ12 inches: Flexible selection of target sizes ■ Abundant optional features: Various options available, including shutters and tilt angles *For more details, please refer to the PDF document or feel free to contact us.

• Sputtering Equipment
• Vacuum Equipment
• Other metal materials

The "FHR.STAR-400x300SALD" is a high-speed deposition ALD (Spatial ALD) system designed for film deposition on substrates and textiles ranging from 200mm wafers to 400x300mm. It enables uniform film deposition on three-dimensional shapes up to 10mm thick for 400x300 substrates. Due to its faster deposition compared to conventional thermal ALD methods, it can be used for mass production of devices and is designed to accommodate in-situ ellipsometers and transmission spectrometers, allowing for more precise process control. With a cluster-compatible design, it can integrate transport chambers, load locks, and other process chambers as needed. We also offer equipment compatible with small-diameter wafers, so please inquire for more information. 【Features】 ■ Uniform film deposition on three-dimensional shapes up to 10mm thick (for 400x300 substrates) ■ Faster deposition compared to conventional thermal ALD methods ■ Usable for mass production of devices *You can download the English version of the catalog. *For more details, please refer to the PDF materials or feel free to contact us.

• Other semiconductor manufacturing equipment

Organic Material Deposition Source Creaphys DE Series This is a deposition source evaporator designed for R&D and small-scale production. - Stable operation is possible over a wide temperature range from 50°C to 800°C. - Usable in ultra-high vacuum conditions. - Compatible with existing equipment through available options (shutter, water cooling, various flanges, temperature control, etc.). Please contact us for more details. Also, feel free to inquire about composite deposition sources.

• Other surface treatment equipment

This system is equipped with three sputtering sources and a pre-cleaning etcher, all arranged in a confocal shape, and it is also possible to add a load lock and a transport chamber to enhance productivity. The sputtering sources are equipped with a 100mm diameter shutter, which allows for film deposition control by managing this shutter. Additionally, the distance between the source and the substrate can also be controlled. These controls are optimized for film deposition through auto-control via programming. Main applications: Manufacturing of MEMS products and high-performance optical products Dimensions (L×W×H): 2.3 m × 1.3 m × 2.1 m Weight (with load lock): 1,700 - 2,000 kg Maximum substrate size: Diameter 150 mm Maximum substrate carrier: Diameter 220 mm Compatible process gases: Argon, oxygen, and others For more details, please contact us.

• Sputtering Equipment

This is a roll-to-roll sputtering device for the manufacturing of FCCL (Flexible Copper Clad Laminate). Features: 1. High degree of freedom in equipment configuration 2. High temperature stability 3. Proper seed layer formation 4. Chrome-free adhesive layer available as an option 5. Achieves high peel strength For more details, please contact us.

• Sputtering Equipment

The "DSU Series" is a sublimation purification device for high-purity organic materials developed based on "QUANTIpure Technology," which was created from accumulated process data in organic electronics research. It achieves both high yield and ultra-high purity through a unique purification system born from the redefinition of the sublimation purification process. Once the raw materials are loaded, the entire operation is controlled automatically, and no operator intervention is required until the purification is complete. We offer models that can handle not only small-scale purification of 5g but also large-scale purification of 10kg. All background tasks, such as preparation for operation and product recovery, can be completed by a single operator. 【Features】 ■ Wide range of needs from development to mass production ■ Temperature and pressure control through auto process control ■ Purification from 5g suitable for experiments and development to 10kg/run for mass production ■ Purity of 99.99% and yield of 98% (after the second purification) ■ Space-saving vertical design for installation ■ All tasks can be completed by one operator * You can view the product documentation (in English) via "PDF Download." Please feel free to contact us with any inquiries. * Related product videos can also be viewed at the bottom of this screen.

• Other semiconductor manufacturing equipment
• Refining and Extraction Equipment
• Organic EL

HR-PVD Sputtering Module by AVP Technology - Achieves higher ionization efficiency compared to ICP sources using a remote plasma source with a helicon plasma ion source. - Excellent straightness from the inclined angle direction results in outstanding film thickness uniformity and step coverage. - Enables film formation while keeping the substrate at a low temperature through remote plasma. - Also achieves excellent results in target utilization efficiency. *For more details, please contact us.

• Sputtering Equipment
• Plasma Generator

MBraun is a specialized manufacturer of scientific instruments based in Munich, Germany. Their main products are high-quality glove boxes, but they also offer a wide range of products including vacuum sublimation purification systems and vacuum deposition sources. The MBraun brand is well-regarded in research institutions and development companies around the world as a synonym for high-quality and high-performance products. In addition to providing equipment for sublimation purification of organic materials, MBraun also offers contract purification services through the equipment they have developed. They can flexibly accommodate everything from small-scale test sublimation purification to mass production. Their advanced sublimation purification systems, developed in-house, achieve purification with ultra-high purity and ultra-high yield. By achieving a yield that sets it apart from conventional methods, they minimize the loss of raw materials and realize high purity, contributing to cost reduction. An NDA will be signed when providing services. You can use their sublimation purification for advanced materials with confidence. 【Examples of Applications】 ■Purification of organic electronics materials ■Purification of high-purity advanced semiconductor materials *For more details, please refer to the PDF document or feel free to contact us.

• Organic EL

MBraun is a specialized manufacturer of processes for organic materials based in Dresden, Germany. For depositing organic electronics materials, vacuum evaporation without compositional decomposition is preferable. Based on its expertise in organic materials, MBraun provides experimental small-scale evaporation sources, large-scale linear sources for production, and experimental evaporation equipment. 【Overview】 ■ Evaporation sources for organic materials (point and linear types) ■ Evaporation sources for metal materials ■ Manufacturing of organic material deposition systems and associated components ■ Equipment modification ■ Contract development and engineering services *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum Equipment

In 2023, CreaPhys became a business division through a merger with MBraun. MBraun is a global company that manufactures and sells research and experimental equipment worldwide. The integrated CreaPhys is a group company established by MBraun, which invested in researchers under Professor Karl Leo at Dresden University. With over 20 years of history in the field of organic electronics, we provide sublimation purification systems for organic materials, deposition sources, and evaluation equipment. 【Products and Contract Services】 ■ Vacuum deposition systems for organic materials ■ Measurement and analysis systems ■ Purification of organic materials *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum Equipment