ITWジャパン Product Lineup

The "GF100 Series" is a metal-sealed mass flow controller/meter that achieves high purity and ultra-high purity process gas supply with excellent response speed and repeatability. It ensures high repeatability and stable performance, providing reliability that exceeds industry standards. It achieves the highest level of gas cleanliness in the industry while enhancing process flexibility and efficiency, maximizing yield and productivity. 【Features】 ■ Long-term zero point stability: less than 0.5% full scale/year ■ Settling time: less than 700 ms - 1 second ■ Maximum full-scale flow rate: 300 slpm ■ Metal-sealed flow path: surface finish options of 4µ or 10µ inch Ra ■ Corrosion-resistant Hastelloy(R) T-Rise sensor improves measurement reproducibility even with rising temperatures, among other features. *For more details, please download the PDF or feel free to contact us.

• Flow Control
• Flow Meter

The "GF125 Series," equipped with ultra-fast response times and high levels of cleanliness, is a second-generation multivariable measurement, PTI (Pressure Variation Resistance) metal-sealed mass flow controller. It minimizes fluctuations in process gas flow due to variations in pressure and temperature. With standard MultiFlo technology, it supports thousands of combinations of gas types and ranges without disconnecting from the gas line or sacrificing accuracy. As a result, it reduces the need for pressure regulators, pressure transducers, and related hardware installations at each point, thereby shrinking the size and cost of gas panels while maximizing yield and productivity with industry-leading PTI performance. 【Features】 ■ Long-term zero stability: less than 0.5% full scale/year ■ Settling time: less than 300 ms - 700 ms ■ Maximum full-scale flow rate: 300 slpm ■ Metal-sealed flow path: 4µ inch Ra surface finish ■ SEMI F20 compliant materials for gas and liquid contact parts ■ Corrosion-resistant Hastelloy® T-Rise sensor, etc. *For more details, please download the PDF or feel free to contact us.

• Flow Control
• Flow Meter

The GP200 series adopts differential pressure sensors instead of conventional pressure sensors and places the control valve downstream of the sensor, significantly improving the accuracy and reproducibility of flow measurement compared to traditional pressure-based MFCs. 【Features】 ■ Reduction of measurement error ■ Suitable for all process conditions ■ High-precision flow control ■ Reduces valve leakage to 1/100 *For more details, please contact us.

• Other measurement, recording and measuring instruments

In various experiments conducted at research institutions, the accuracy of flow control significantly affects the reliability of data. Particularly in the microflow range, even slight fluctuations can lead to variations in measurement results and decreased reproducibility. The GP200 series mass flow controllers utilize differential pressure sensor technology to achieve excellent responsiveness and high-precision control. By providing stable flow supply, they contribute to enhancing the reliability of experimental data and ensuring reproducibility. 【Benefits of Implementation】 - Improved reliability of experimental data through high-precision control - Establishment of a highly reproducible measurement environment - Increased experimental efficiency due to stable flow supply

• Other measurement, recording and measuring instruments

In the film deposition process of semiconductor manufacturing, even slight variations in gas flow can have a significant impact on film thickness and quality. Particularly in CVD, PVD, and ALD processes, high-precision and highly reproducible flow control is a crucial factor that influences device performance and yield. The GP200 series achieves high-precision flow measurement and excellent reproducibility through differential pressure sensors and optimized control valve design. It supports stable process control and contributes to the formation of high-quality thin films. 【Application Scenarios】 - CVD (Chemical Vapor Deposition) process - PVD (Physical Vapor Deposition) process - ALD (Atomic Layer Deposition) process 【Benefits of Implementation】 - Improved film thickness uniformity - Enhanced composition control accuracy - Yield improvement through process stabilization - Increased reproducibility of gas supply

• Other measurement, recording and measuring instruments

The "5850EMH Series" is a high-temperature mass flow controller with a metal seal that ensures high leak integrity and allows for flexible application support. By combining various options, it achieves advanced high-temperature gas measurement and control. At the core of this product is a highly stable sensor that displays electronic output signals and flow rates. This signal is used for display, recording, and control without the need for an automatic zero adjustment circuit. 【Features】 ■ High leak integrity (10-11 Pa.m3/s (10-10 atm.cc/s) He or less) ■ Wide flow range (0.003 to 100 slpm) ■ High-purity VAR 316L stainless steel ■ Prevents particle generation ■ Helium leak check port *For more details, please refer to the related link page or feel free to contact us.

• controller
• Other measurement, recording and measuring instruments

The "5850E Series" is an elastomer-sealed thermal mass flow controller/meter. This series has a proven track record of being actively used in thousands of applications worldwide for several decades, equipped with a unique stable flow sensor that provides high reliability, accuracy, and repeatability necessary for the demanding industrial production processes of today. 【Features】 ■ Removable flow sensor ■ No influence from mounting position ■ Mechanical/electrical compatibility with other mass flow controllers ■ Electric valve override ■ Corrosion-resistant valve *For more details, please refer to the related link page or feel free to contact us.

• Flow Meter
• Flow Control

The "4800 Series" is a thermal mass flow controller/meter with elastomer seals that improves process efficiency and productivity as response time improves. The advanced MEMS thermal sensor is equipped with a dedicated PID algorithm optimized for response to the control valve, allowing the product to quickly follow the actual flow rate even when the set point is changed arbitrarily. 【Features】 ■ Flow response time (settling time) of 0.75 seconds or less ■ Innovative MEMS sensor and dedicated PID algorithm ■ Compact size, half that of conventional thermal MFCs ■ Digital compatibility via RS-232 ■ Optional Local Operator Interface (LOI) to streamline setup and operation *For more details, please refer to the related link page or feel free to contact us.

• Flow Meter
• Flow Control

The "5700 Series" is an elastomer-sealed mass flow meter designed to meet the needs of purge gas, process analysis, and flow measurement. It features electronic output signals as an alternative to turbine meters, area flow meters, and other volumetric flow meters, excelling in cost efficiency and stability. If you need a compact and economical mass flow meter that provides stable flow measurements over the long term without the need for temperature or pressure adjustments, please choose our product. 【Features】 ■ Dedicated for measurement ■ Wide flow range ■ Stainless steel gas contact materials ■ Single-sided power input ■ 0.5 V output signal *For more details, please refer to the related link page or feel free to contact us.

• Flow Meter
• Flow Control

The "MT3809G Series" is a metal tube area flow meter equipped with a digital LCD display for local operator use, capable of displaying valuable process outputs such as total quantity and alarm signals. Parameters can be changed by the user without removing the cover. Changes can also be made in hazardous areas. Additionally, even when power is unavailable, communication with the control system is possible via analog or digital interfaces. 【Features】 ■ Wide flow range support - Covers from micro flow to large flow ■ Rated temperature -198°C to 420°C ■ Pressure rating: up to 6,000 psi (standard products) and up to 20,000 psi (custom models) ■ Large/small flow alarm functions compliant with SIL2 requirements ■ ATEX IIC/Class 1 Div 1 compliant 316 stainless steel explosion-proof housing suitable for harsh hazardous locations, etc. *For more details, please download the PDF or feel free to contact us.

• Flow Meter

The "Model GT1600" is a glass tube area flow meter made from high-quality materials selected for safe use, suitable for both indoor and outdoor applications. The scale window can be rotated 360 degrees for visibility from any preferred direction. It is also compatible with replacements for the GT1000xx series and GT1300 series Full-View products. 【Features】 ■ SUS316 stainless steel frame ■ Transparent polycarbonate cover ■ 316/316L dual-certified stainless steel fittings ■ Fittings and connection directions can be horizontal or vertical ■ Easy internal maintenance, etc. *For more details, please download the PDF or feel free to contact us.

• Flow Meter

In the water treatment process, even a slight difference in the amount of chemical injection can significantly impact water quality and operational costs. Excessive injection leads to increased costs, while insufficient injection results in decreased treatment performance, making accurate flow management essential. The GT1600 glass tube flowmeter allows for the selection of scales/gradations according to the application, visualizing the chemical injection amount with high precision. Stable monitoring supports the optimization and efficiency improvement of the water treatment process. 【Usage Scenarios】 - Chemical injection management in wastewater treatment facilities - Chemical injection processes at water purification plants - Flow monitoring in industrial water treatment lines 【Benefits of Implementation】 - Cost reduction through optimization of chemical usage - Stabilization of water quality management and reduction of variability - Improvement of treatment efficiency and visibility of operations

• Flow Meter

In the gas combustion process, flow management that balances safety and efficiency is essential. Even a slight deviation in flow can lead to combustion failure, equipment issues, and energy loss. The Model GT1600 accurately measures and visualizes gas flow, enabling stable combustion control and efficiency improvements. 【Usage Scenarios】 - Flow adjustment and optimization in gas burners - Fuel supply management for boilers - Combustion control in industrial furnaces and heating furnaces 【Benefits of Implementation】 - Energy savings through optimization of combustion efficiency - Improved safety and reduced risk of issues - Reduction in energy costs

• Flow Meter

The "Show Rate Model 1350G, 1355G" is a glass tube area flow meter suitable for various types of gases and liquids. The basic structure consists of a tapered tube made of borosilicate glass, integrated into an aluminum frame along with end blocks, adapters, and valves made of 316SS. In addition, to provide appropriate configurations for various applications, other materials and flow controllers can also be selected as options. 【Features】 ■ Tapered tube replacement possible without removing the meter ■ Transparent polycarbonate cover with an enlarged lens shape for easy reading ■ Sturdy frame construction ■ Positioning block for easy centering during tapered tube installation ■ Tapered tube and float replacement possible *For more details, please refer to the PDF materials or feel free to contact us.

• Flow Meter

In combustion control, even slight fluctuations in gas flow can significantly impact combustion efficiency and safety. Particularly in low flow areas, higher precision measurements and stable reproducibility are required. The Sho-Rate series supports the optimization of combustion processes and stable operations through high-precision measurements specialized for low flow. 【Main Use Cases】 - Micro flow control for gas burners - Fuel supply management for boilers - Combustion adjustment in industrial furnaces 【Benefits of Implementation】 - Energy optimization through improved combustion efficiency - Enhanced safety and reduced risk of troubles - Stabilization of product quality and improved reproducibility

• Flow Meter

The Vapor Delivery Module (VDM) features an energy-efficient design that generates ultra-pure vaporized gas even at low temperatures. It employs proven steam delivery technology and is equipped with advanced digital control and comprehensive diagnostic functions. Compared to flash vaporization systems, it achieves superior accuracy, high flow rates, a wide control range, and low power consumption. Based on proven thermal mass flow measurement technology, it generates steam even in non-heated conditions and eliminates the influence of pure water, ensuring high reliability and cleanliness in manufacturing. An independent service port and an intuitive GUI (graphic user interface) provide user-friendly data logging and diagnostic capabilities. **Benefits** - Utilizes proven and reliable thermal mass flow measurement and control technology - Compatible with various water supply pressures - Enhanced corrosion resistance - Clean manufacturing - Tool interface using analog or digital communication - Direct interface for enhanced data collection or troubleshooting *For more details, please download the PDF or feel free to contact us.*

• Flow Control
• Flow Meter

【Points for Choosing the SLA Series】 1. Wide differential pressure compatibility 2. Covers small to large flow rates 3. Selection proposals tailored to applications 4. Proven track record in general industry and furnace processes *For more details, please refer to the related materials. Feel free to contact us.

• Flow Meter
• Flow Control