ITWジャパン Product Lineup

The "GF125 Series," equipped with ultra-fast response times and high levels of cleanliness, is a second-generation multivariable measurement, PTI (Pressure Variation Resistance) metal-sealed mass flow controller. It minimizes fluctuations in process gas flow due to variations in pressure and temperature. With standard MultiFlo technology, it supports thousands of combinations of gas types and ranges without disconnecting from the gas line or sacrificing accuracy. As a result, it reduces the need for pressure regulators, pressure transducers, and related hardware installations at each point, thereby shrinking the size and cost of gas panels while maximizing yield and productivity with industry-leading PTI performance. 【Features】 ■ Long-term zero stability: less than 0.5% full scale/year ■ Settling time: less than 300 ms - 700 ms ■ Maximum full-scale flow rate: 300 slpm ■ Metal-sealed flow path: 4µ inch Ra surface finish ■ SEMI F20 compliant materials for gas and liquid contact parts ■ Corrosion-resistant Hastelloy® T-Rise sensor, etc. *For more details, please download the PDF or feel free to contact us.

The Quantim® QMC Coriolis mass flow controller and meter provide extremely accurate, stable, and reproducible measurement and control for very low flow rates of gases and liquids. This third-generation new Quantim QMC Coriolis mass flow controller and meter contribute to shortening the scale-up period from lab to pilot plant to production by enhancing process quality, production yield, and throughput. The new Quantim QMC Coriolis mass flow series is compatible in terms of mounting dimensions and functionality with the old models of Quantim from Brooks Instrument. 【Features】 ■ True mass flow measurement ■ Accurate density measurement ■ Additional I/O options: 0-10 Vdc, 0-20 mA, RS485 S-Protocol ■ A wide range of seal materials, certificates, and certification options ■ Easily accessible service port *For more details, please refer to the related link page or feel free to contact us.

The thermal mass flow controller/meter "SLA5800 series" is equipped with gas control and measurement functions that are useful for research and development of carbon neutrality, and is compatible with gases such as hydrogen, methane, LNG, carbon dioxide, and ammonia. The "SLA5850 mass flow controller with normally closed valve" has obtained certification from the High-Pressure Gas Safety Institute of Japan (KHK), allowing for a very smooth introduction as the completion inspection in prefectures can be completed with just the submission of the certification. (It is also possible to respond with a flow meter.) 【Features】 ■ Obtained type certification for domestic explosion-proof (JPEx) from DEKRA (Applicable products: mass flow controllers/meters, pressure controllers) ■ Active in fields such as chemicals, petrochemicals, fuel cells, and life sciences ■ Flow range that covers a wide spectrum ■ Capable of handling multiple gases and flow ranges with a single unit *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

The "5850E Series" is an elastomer-sealed thermal mass flow controller/meter. This series has a proven track record of being actively used in thousands of applications worldwide for several decades, equipped with a unique stable flow sensor that provides high reliability, accuracy, and repeatability necessary for the demanding industrial production processes of today. 【Features】 ■ Removable flow sensor ■ No influence from mounting position ■ Mechanical/electrical compatibility with other mass flow controllers ■ Electric valve override ■ Corrosion-resistant valve *For more details, please refer to the related link page or feel free to contact us.

We sell equipment related to flow and pressure control, such as mass flow controllers, pressure controllers, and transducers. We offer a wide range of highly reliable products that can operate stably over long periods. We also provide services such as technical training, calibration, and repair maintenance. Currently, we are compiling and presenting materials that introduce equipment suitable for the bio, EPC, and thin film industries, along with their features and implementation benefits. [Material Lineup] ■ Flow and pressure measurement equipment for the biopharmaceutical and life sciences industries ■ Area flow meters for EPC flow solutions ■ Mass flow controllers for gases and liquids for vacuum and pressure measurement and control * Each document can be viewed via "PDF Download." Please feel free to contact us with any inquiries.

Dust, humidity, extreme temperatures, moisture, and other harsh conditions—no matter the environment, the 'SLAMf Series' elastomer seal thermal mass flow controllers/meters achieve high precision and long-term stability unique to the proven 'SLA5800 family' of meters and controllers. The specially designed NEMA4X/IP66 rated enclosure protects advanced digital electronic components, enabling stable and accurate measurement and control of gas/fluid mass flow essential for processes. 【Features】 ■ High durability enclosure rated NEMA4X / IP66 ■ Wide range of rated flow - from 0.003 to 2500 slpm ■ Compatible with a wide range of temperature and pressure conditions ■ Achieves excellent accuracy ■ Configurable multi-gas/multi-range functionality *For more details, please refer to the related link page or feel free to contact us.

The "4800 Series" is a thermal mass flow controller/meter with elastomer seals that improves process efficiency and productivity as response time improves. The advanced MEMS thermal sensor is equipped with a dedicated PID algorithm optimized for response to the control valve, allowing the product to quickly follow the actual flow rate even when the set point is changed arbitrarily. 【Features】 ■ Flow response time (settling time) of 0.75 seconds or less ■ Innovative MEMS sensor and dedicated PID algorithm ■ Compact size, half that of conventional thermal MFCs ■ Digital compatibility via RS-232 ■ Optional Local Operator Interface (LOI) to streamline setup and operation *For more details, please refer to the related link page or feel free to contact us.

The "GF100 Series" is a metal-sealed mass flow controller/meter that achieves high purity and ultra-high purity process gas supply with excellent response speed and repeatability. It ensures high repeatability and stable performance, providing reliability that exceeds industry standards. It achieves the highest level of gas cleanliness in the industry while enhancing process flexibility and efficiency, maximizing yield and productivity. 【Features】 ■ Long-term zero point stability: less than 0.5% full scale/year ■ Settling time: less than 700 ms - 1 second ■ Maximum full-scale flow rate: 300 slpm ■ Metal-sealed flow path: surface finish options of 4µ or 10µ inch Ra ■ Corrosion-resistant Hastelloy(R) T-Rise sensor improves measurement reproducibility even with rising temperatures, among other features. *For more details, please download the PDF or feel free to contact us.

The "GF40 Series" is a mass flow controller/meter that supports multiple gases with a single unit, enhancing process flexibility and productivity. Equipped with the manufacturer's unique "MultiFlo Technology," it enables high-precision flow control and measurement, making it suitable for systems that use diverse gases. It excels in processes and facilities where the type of gas is frequently changed or where it is necessary to readjust the range while maintaining measurement and control accuracy. Additionally, the "0254" is a readout unit equipped with an RS232 serial port, in addition to power supply and analog control functions. Compliant with the RoHS directive, it offers user-friendly operability. There are installation options that allow for easy installation in various applications, providing power to up to four Brooks mass flow or pressure devices. 【Features】 ◎ "GF40 Series" ■ Equipped with abundant actual gas data ■ Capable of changing gas types and flow ranges, allowing one unit to accommodate various research themes ◎ "0254" ■ Flow settings support instantaneous control and batch control, with flow display options for instantaneous and cumulative readings ■ Space-saving design allows for connection of up to four mass flow controllers/meters

The manufacturing of biopharmaceuticals is one of the most demanding manufacturing processes in the world. Mass flow and pressure control technologies help improve the yield of cell culture and reduce bioprocess costs, while flow and pressure controllers establish global standards for reliability, reproducibility, and long-term stability. Additionally, mass flow controllers (MFCs) meet the key requirements for biotechnology research and production. [Features] ■ High-efficiency and long-term stable process control ■ Assurance of highly accurate measurement data ■ Flexibility and ease of use ■ Quick and effective transition from low flow to high flow ■ Service and support focused on operational rates *For more details, please refer to the PDF materials or feel free to contact us.

Surfaces of industrial and consumer products may be coated to optimize their finish. For example, it is possible to improve the wear resistance of cutting tools, scratch resistance of glass, thermal properties of plate glass, and aesthetics of household appliances. There are various coating methods such as chemical vapor deposition, physical vapor deposition, plasma treatment processes, and thermal spraying, but they are often performed as the final stage of the manufacturing process. Brooks Instrument's mass flow, vacuum, pressure measurement, and control devices cover PVD and CVD process applications. Additionally, our products are suitable for surface treatment applications such as heat treatment and plasma processing. 【Features】 ■ High reproducibility and precision gas supply ■ Excellent quality, accurate thickness, and uniform film thickness ■ Long-term stable process control ■ High-functionality flow diagnostics and trend analysis in the field to maximize process yield *For more details, please refer to the PDF document or feel free to contact us.

A world where miniaturization and high performance are progressing daily. Mobile phones now have features that were unimaginable just a few years ago. The realization of such high performance is thanks to thin film technology, which is utilized in a wide range of applications as listed below. 【Applications of Thin Film Technology】 - Microelectronics - Anti-reflective coatings for glass - Antibacterial metal coatings for medical devices - Flexible solar cells Thin film technology is defined as "the process of creating, coating, and processing thin film materials on a substrate surface." This document introduces an explanation of thin film technology, a comparison of CVD and PVD, applications of flow meters and pressure gauges, digitalization of process control, and case studies. We encourage you to read it. ★ We also offer foundational knowledge materials that delve deeper into CVD and PVD, as well as basic knowledge related to glass coatings for the glass industry! *For more details, please refer to the PDF document or feel free to contact us.

This document is a comprehensive catalog featuring Brooks Instrument's flow, pressure, steam, and vacuum products. It includes pressure controllers such as the "SLA Series," which eliminates closed-loop, boost, and hysteresis, as well as thermal mass flow devices like the "GF40 Series," which can cover multiple gas types and flow ranges with a single unit, along with area flow meters, pressure/vacuum products, and more. This is a very informative book, so please take a look when considering implementation. 【Contents】 ■ Mass Flow & Pressure Controllers ■ Area Flow Meters ■ Pressure/Vacuum Products ■ Secondary Electronics & Software ■ Communication Protocols ■ Service & Support *For more details, please download the PDF or feel free to contact us.

Hydrogen, fuel cells, CCUS, biofuels, CNT manufacturing. There are technologies on-site that monitor the precise flow to support future energy. Brooks Instrument's flow meters support the energy transition. 【Application Case Introduction】 *For more details, please download the PDF or feel free to contact us.

In the metal heat treatment industry, it is essential to accurately and stably control the gas flow in the heat treatment process, which significantly affects product quality. In particular, the atmosphere gas within the heat treatment furnace directly impacts the hardness and strength of the products, making proper flow management crucial for reducing the occurrence of defective products. The SLA5800 series accommodates a variety of gases used in heat treatment processes, such as hydrogen, methane, LNG, carbon dioxide, and ammonia, achieving high reproducibility and stability required for atmosphere control. Furthermore, as a KHK certified product, it simplifies inspection and application procedures for high-pressure gas equipment, supporting smooth equipment installation. Additionally, by adopting an elastomer seal structure, it achieves an excellent balance between cost and durability. This also contributes to reducing maintenance burdens during long-term operation, supporting the stable operation of heat treatment equipment. 【Usage Scenarios】 - Gas supply to heat treatment furnaces - Flow control of atmosphere gases - High-precision temperature management 【Benefits of Implementation】 - Improvement in heat treatment process quality - Reduction in defect rates - Simplification of procedures related to high-pressure gases

In various experiments conducted at research institutions, the ability to accurately control and measure gas flow rates and pressures significantly affects the reliability and reproducibility of experimental results. This is particularly true for experiments involving gases such as hydrogen, methane, LNG, carbon dioxide, and ammonia, especially in carbon-neutral related research, where even slight control errors can lead to variations in results and uncertainties in evaluations. Inaccurate gas control undermines the reproducibility of experimental conditions and can lead to increased verification work and delays in research schedules. The SLA5800 series addresses these challenges in research settings by providing high-precision and stable gas flow control and measurement performance. It strongly supports research and development by improving the reproducibility of experimental conditions and ensuring the reliability of data. Additionally, its design allows for compatibility with a wide range of gas types, making it a versatile mass flow controller that can flexibly adapt to various research themes, from fundamental research to applied research and evaluation tests. **Usage Scenarios** - Gas analysis - Reaction experiments - Material synthesis - Fuel cell research **Benefits of Implementation** - Improved reliability of experimental data - Enhanced research efficiency - Simplification of procedures related to high-pressure gases

The SLA5800 series can handle up to 14 types of pressure and flow with a single unit, achieving high reproducibility and precise control. The thermal mass flow controller/meters "SLA5800 series" support a variety of applications, including research and development related to carbon neutrality, enabling high-precision control and measurement for gases such as hydrogen, methane, LNG, carbon dioxide, and ammonia. Furthermore, the "SLA5850 mass flow controller (normally closed valve)" is certified by the High Pressure Gas Safety Association (KHK), and completion inspections at the prefectural level can be handled simply by submitting the certification. This significantly simplifies the procedures during installation and ensures a smooth equipment startup. *Support for flow meter specifications is also available. 【Features】 ■ Obtained type approval certificate for domestic explosion-proof (JPEx) from DEKRA (Applicable products: mass flow controllers/meters, pressure controllers) ■ Active in fields such as chemicals, petrochemicals, fuel cells, and life sciences ■ Flow range covering a wide spectrum ■ Capable of handling multiple gases and flow ranges with a single unit *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

Hydrogen, fuel cells, CCUS, biofuels, CNT manufacturing. Supporting the energy of the future, there is technology that monitors the precise flow on-site. Brooks Instrument's flow meters support the energy transition. Equipped with gas control and measurement functions useful for carbon-neutral research and development, we offer the thermal mass flow controller/meter "SLA5800 Series," as well as the elastomer-sealed thermal mass flow controller/meter "SLAMf Series," which achieves high accuracy and long-term stability even under the most demanding conditions. Please feel free to contact us when you need assistance. 【SLA5800 Series Features】 ■ Obtained type approval certificate for domestic explosion-proof (JPEx) from DEKRA (Applicable products: mass flow controllers/meters, pressure controllers) ■ Active in fields such as chemicals, petrochemicals, fuel cells, and life sciences ■ Covers a wide range of flow rates ■ Capable of handling multiple gases and flow ranges with a single unit *For more details, please download the PDF or feel free to contact us.

In metal processing and heat treatment processes, the stability of gas flow and control accuracy significantly influence product quality. Thanks to the high measurement accuracy and reproducibility unique to thermal methods, stable supply of protective gases and reactive gases is achieved. This helps to suppress process variations and contributes to uniform heat treatment quality. The elastomer seal design allows for flexible adaptation to general industrial applications and excels in maintainability. It supports reliable flow management for the control of protective gases such as nitrogen and argon in vacuum furnaces and atmosphere furnaces, brazing and sintering processes, and various metal component manufacturing lines. This contributes to stable operation of equipment and improved yield. With precise flow control, achieve stable heat treatment quality. The GF40 series is a solution that combines practicality and reliability in the field of metal processing and heat treatment. 【Features】 ◎ 'GF40 Series' ■ Equipped with abundant actual gas data ■ Can change gas types and flow ranges, allowing a single unit to address diverse research themes ◎ '0254' ■ Flow setting supports instantaneous control and batch control, with flow display accommodating both instantaneous and cumulative readings ■ Space-saving design allows connection of up to four mass flow controllers/meters.

In pharmaceutical manufacturing, even slight fluctuations in the mixing process flow can affect the efficacy and safety of the product. Therefore, high-precision and stable control of gas flow is essential. The SLAMf series mass flow controllers achieve optimized formulation balance through high-precision control and excellent long-term stability. They support improved consistency in quality across a wide range of processes, from manufacturing to research and development. 【Application Scenarios】 - Gas mixing and supply control in pharmaceutical manufacturing - Precise gas mixing in research and development - Flow measurement and monitoring in quality control processes 【Benefits of Implementation】 - Stabilization of product quality through improved mixing accuracy - Realization of highly reproducible process control - Increased manufacturing efficiency and reduced losses

In the field of research and development in chemistry, materials, and energy, the development of environmental technologies is advancing, focusing on CO₂ reduction, exhaust gas treatment, and alternative fuel evaluation. The GC series is a MEMS-based ultra-compact mass flow controller that achieves high reproducibility in the small flow range required for these applications, along with stable gas control in a space-saving design. It supports gases such as Air, N₂, O₂, CO₂, Ar, CO, CH₄, C₃H₈, and N₂O, with a full-scale flow rate of 210 to 5000 sccm (Air equivalent), a control range of 100:1, a reproducibility of ±0.25% S.P., and a response time of less than 2 seconds (when the set value exceeds 10% of full scale). It is suitable for laboratory equipment, small test devices, and analytical facilities, and can be utilized as a gas control technology that supports the development of environmental technologies themselves.

The Quantim QMC Coriolis mass flow controller measures and controls minute flow rates of gases and liquids with high precision and stability. By providing true mass flow measurement, it contributes to the enhancement of accuracy in environmental monitoring and exhaust gas analysis. **[Solving Challenges in Exhaust Gas Measurement]** - High-precision measurement of minute flow rates of gases and liquids - Improved reliability of exhaust gas measurement data - Strengthened compliance with environmental regulations and emission standards - Reduction of measurement errors due to flow rate variations - High-precision control compatible with both gases and liquids - Stable management of minute flow rates for semiconductor, chemical, and research applications - Improved flow management in vacuum processes and precision coating processes ************************* We will be exhibiting at the 2026 New Environmental Exhibition (Tokyo Big Sight)! May 20 (Wed), May 21 (Thu), May 22 (Fri) from 10 AM to 5 PM (until 4 PM on the last day) Exhibition booth: Booth number R811, within the Japan Instrumentation booth (East Hall 8) *************************

The Quantim QMC Coriolis mass flow controller accurately and stably measures and controls minute flows of gases and liquids. By providing true mass flow measurement, it contributes to the optimization and stable operation of gas mixing processes. 【Problem Solving】 - High-precision gas mixing control in the minute flow range - Reduction of variability in gas mixing ratios - Smooth scale-up from pilot plants to mass production - Flow optimization for improved energy efficiency - Establishment of a highly reproducible flow measurement and control environment ************************* We will be exhibiting at the 2026 New Environment Exhibition (Tokyo Big Sight)! ************************* Dates: May 20 (Wednesday) to May 22 (Friday), 2026 Hours: 10:00 AM to 5:00 PM (until 4:00 PM on the last day) Venue: Tokyo Big Sight, East Exhibition Hall Booth: R811 (East Hall 8) *Exhibiting within the booth of Japan Instrument Co., Ltd. We sincerely look forward to your visit. *************************

Visualization and High-Precision Control of Liquid Processes BCU Series (Clamp-On Ultrasonic Liquid Flow Meter) ■ Non-contact, clamp-on design ■ Reduces contamination risk and simplifies cleaning by not touching the process liquid ■ Reduces maintenance burden with no moving parts or consumables ■ Factory calibration and field calibration options ■ Accuracy ±1% of rate ■ Standard support for EtherNet/IP Quantim(R) QMC Series (Low Flow Coriolis Liquid Mass Flow Meter) ■ Third-generation digital architecture ■ Direct measurement of the true mass flow rate of liquids ■ Simultaneous measurement/output of mass flow rate, volumetric flow rate, density, and temperature ■ Wide range for liquids from 0.001 to 27 kg/h ■ Liquid accuracy ±2% of rate ■ Compact design with integrated sensor/valve/PID ■ IP40/IP66 selectable *For more details, please refer to the related link page or feel free to contact us.

The "BCU Series" and "Quantim QMC Series" offered by Brooks Instrument are two products that solve the challenges of liquid flow management in environmental, bio, and materials processes. ■ BCU Series Using a clamp-on ultrasonic method, it measures flow rate in real-time without cutting the tube or coming into contact with the fluid at all. It eliminates contamination risks and cleaning efforts, making it ideal for single-use hybrid bioprocesses. It comes standard with EtherNet/IP, enabling seamless integration into automated skids. ■ Quantim QMC Series This is a Coriolis low-flow mass flow controller/meter that adopts third-generation digital architecture. It directly measures the true mass flow rate of liquids and simultaneously outputs mass flow rate, volumetric flow rate, density, and temperature. With a wide range of 0.001 to 27 kg/h and a liquid accuracy of 0.2% of rate, it strongly supports research and manufacturing environments that require high-precision control of small flow rates. Both products are designed to enhance the efficiency of setup, diagnostics, and maintenance using software. *For more details, please refer to the PDF document. We look forward to your inquiries.

【Points for Choosing the SLA Series】 1. Wide differential pressure compatibility 2. Covers small to large flow rates 3. Selection proposals tailored to applications 4. Proven track record in general industry and furnace processes *For more details, please refer to the related materials. Feel free to contact us.

In the fields of environment and energy, such as CO₂ utilization technology, exhaust gas treatment, and fuel evaluation, high-precision gas flow control tailored to specific applications is required. The GF series accommodates a wide range of applications, from multi-gas and multi-range evaluations to high-purity gases and high-temperature processes. It allows for the selection of the optimal model based on process conditions, achieving stable flow control from research and development to production processes. [GF40] MultiFlo compatible / Suitable for multi-gas and multi-range evaluation □ Ideal for research and development and evaluation tests □ Supports multiple gases and multiple ranges with a single unit □ Contributes to shortening development time and improving equipment efficiency [GF100] MultiFlo compatible / Suitable for high-purity and multi-condition processes □ Compatible with high-purity gas processes □ High-precision control across a wide range of process conditions □ Also ideal for semiconductor and research and development applications [GF120xHT] Suitable for high-temperature and corrosion-resistant processes □ Supports high-temperature gas supply □ Excellent corrosion-resistant design □ Achieves stable flow control even in harsh process environments *For more details, please refer to the PDF materials. Inquiries are also welcome.

Achieving compact design and high-precision control. Contributing to miniaturization and high performance of devices. The AMF series is a compact mass flow controller/meter that realizes high-precision flow control even in limited installation spaces. With excellent responsiveness and stable flow control, it caters to a wide range of applications from research and development to manufacturing equipment. It contributes to space-saving designs and increased design flexibility of devices. ■ Benefits of Introduction Increased design flexibility of devices due to compact design High-precision and high-response flow control Miniaturization and lightweight of devices Improved quality through stable process control ■ Main Applications Analytical and measurement instruments Research and development equipment OEM devices Bio and life sciences fields General industrial gas supply systems Brooks Instrument provides optimal solutions for your applications and processes based on over 70 years of technology and rich experience in the field of precision fluid measurement and control. Even in the development of devices requiring miniaturization and high performance, we support our customers with high-quality products and comprehensive technical support. *For more details, please refer to the related link page or feel free to contact us.