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  6. [Hot Stage] Ultra High Temperature Substrate Heating Stage Max 1800℃

[Hot Stage] Ultra High Temperature Substrate Heating Stage Max 1800℃

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last updated:Sep 14, 2026

テルモセラ・ジャパン 本社
テルモセラ・ジャパン 本社
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An ultra-high temperature substrate heating stage that allows for substrate elevation, rotation, and RF/DC substrate bias all in one device! 'All-In-One' component.

Semiconductors, electronic substrates, vacuum thin film process equipment and research and development【Ultra-high temperature substrate heating mechanism】 Compatible substrate sizes: Φ2 to 6 inches Can be used in vacuum (UHV compatible), inert gas, O2, and various process reactive gas atmospheres, etc. (Details to be discussed separately)

    Sputtering Equipment
Hot-Stage_2024-1.png

[Hot Stage] Ultra High Temperature Substrate Heating Stage Max 1800℃

Hot-Stage_2024-1.png
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  • Thermosera Japan - Hot Stage Listing Page
  • Special site - Product/service details - https://pr.mono.ipros.com/thermocera/product/

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basic information

◉ Compatible with ultra-high vacuum, inert gas atmosphere, and various other process gas atmospheres ◉ Stage vertical movement (substrate or heater elevation, two-stage elevation for substrate & heater) ◉ Substrate rotation ◉ RF (1KW)/DC (800V) bias application (reverse sputtering) ◉ Selection of elements according to the operating environment: Graphite, CC composite, halogen lamp heater, graphite/SiC coating, graphite/PBN coating, PG coating, AlN heater ◉ Various vacuum flange connections: ICF, ISO (KF/LF), JIS (VG/VF) flanges ◉ K, C, R thermocouples included ◉ Other options: temperature control unit, Inc, graphite or SiC substrate holder

Price information

For details, please contact our company. Prices may vary depending on specifications, so feel free to contact us.

Delivery Time

Please contact us for details

※For more details, please contact us.

Applications/Examples of results

【Applications】 CVD/PVD (vacuum deposition/sputtering equipment), various high-temperature annealing applications, etc. 【Examples】 - TCVD, PECVD, sputtering and other film deposition equipment - High-temperature upgrades of existing thin film equipment heating stages, installation of additional mechanisms for up/down, rotation, and bias - Installation on new process evaluation machines and prototype machines

Detailed information

  • 4inch-hot-stage.jpg

    4-inch hot stage max 1200°C with RF bias example

  • 4inch-hot-stage-with-water-cooling.jpg

    4-inch hot stage with water cooling Installation example of 4-inch hot stage with water-cooled housing Max 1200℃ graphite element Inconel wafer holder

  • Air-side-Z-shift-50mm-stroke.jpg

    Atmospheric Side Z-axis Drive Motor Atmospheric Side Z-axis Drive Motor (50mm Stroke Example) RF Bias

  • 2inch-hot-stage-1000C-with-1KW-bias.jpg

    2inch hot stage NiCr element max1000C with bias 2inch hot stage NiCr element max1000C with bias Inconel wafer holder

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【PyroMini】Small High-Performance Infrared Temperature Sensor Image

■□【PyroMini】□■ Compact High-Performance Infrared Temperature Sensor

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High-performance touch panel converter for easy setup, data logging, and data storage on microSD card. The PM2.2 model can also measure glossy metal surfaces. 【Overview】 With a highly visible high-brightness touch panel display, parameters such as temperature range, emissivity, and sampling rate can be intuitively operated and set. Long-term data storage and management are possible with a microSD card. (*An option for a converter without a display is also available.) The compact sensor head, measuring φ18mm x 45mm, allows for temperature measurement in tight spaces. It employs sensors and cables with excellent noise resistance, making it suitable for integration into moving equipment such as robotic arms. The PM2.2 model uses a short wavelength of 2.2um, supporting high temperatures (Max 2000℃) and measurements of glossy metal material surfaces. 【Features】 ◎ Wide range: -20 to 1000℃ (PM), 100 to 2000℃ (PM2.2) ◎ Excellent basic performance: Accuracy ±1%, reproducibility ±0.5%, 240msec fast response ◎ Measurement wavelength range: 8 to 14μm (PM), 2.0 to 2.2μm (PM2.2) ◎ Compact Φ18mm x 45mm

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PyroNFC Smartphone Configurable Infrared Radiation Temperature Sensor Image

★★【PyroNFC】Smartphone Configurable Infrared Radiation Temperature Sensor★★

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Temperature range, emissivity, alarm, and other parameters can be set using a smartphone or tablet without the need for a display instrument or power supply for the instrument. ● Settings can be made using a smartphone or tablet. ● A dedicated app can be downloaded for free from Google Play (Android 4.1 to 5.1). ● Using Android's NFC communication, simply touch the sensor part to read and write data. ● Ultra-compact sensor (Φ31mm x t29mm) allows temperature measurement in tight spaces. ● Fast response time of 125 msec, high accuracy of ±1.5%. ● Voltage output (0-5V or 0-10V), or K thermocouple output. 【Other Specifications】 ◉ Field of view: 15:1 ◉ Temperature range: 0℃ to 1000℃ ◉ Measurement wavelength range: 8 to 14μm ◉ Emissivity: 0.2 to 1.0 ◉ Power supply: 24VDC (minimum 6V/10V to maximum 28VDC) ◉ Cable: 1m included (extension up to 30m possible) 【Options】 ◉ Body mounting bracket ◉ Extension cable ◉ Air purge kit

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PyroCouple infrared temperature sensor image

■□【PyroCouple】□■ Small Non-Contact Infrared Temperature Sensor

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Compact measurement, robust body, high accuracy ±1%, 240msec fast response. It can be applied for industrial machine control, temperature monitoring in production sites, and various other purposes. 【Features】 ◎ Integrated amplifier and sensor ◎ 4-20mA output (standard), 0-50mV, thermocouple K, J, T output (optional) ◎ Accuracy: ±1% or ±1℃ (whichever is larger) ◎ Repeatability: ±0.5% or ±0.5℃ (whichever is larger) ◎ Response speed: 240msec ◎ Protection rating: IP65 【Other Specifications】 ◉ Field of view: 2:1 or 15:1 ◉ Temperature range: ・LT (-20℃ to 100℃) ・MT (0 to 250℃) ・HT (0 to 500℃) ◉ Measurement wavelength range: 8 to 14μm ◉ Emissivity: 0.95 (fixed) ◉ Power supply: 24VDC ◉ Body dimensions: Φ18mm (diameter) x 103mm (length) ◉ Weight: approximately 95g ◉ Cable 1m (standard included): maximum extension 3m (optional)

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PyroUSB high-precision infrared temperature sensor image

■□【PyroUSB】□■ USB-connected high-precision infrared temperature sensor

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【Overview】 Connect to a Windows PC using the standard accessory "CalexConfig" and the included USB cable (1.8m), allowing you to set measurement parameters for the sensor, analyze measurement results, and output them in CSV format. 1) 4-20mA output 2) USB output (operates on USB bus power) 3) Simultaneous use of 4-20mA/USB output These three methods of use are possible. 【Features】 ◎ Simultaneous use of USB data logging and 4-20mA analog output ◎ Excellent basic performance: accuracy ±1%, reproducibility ±0.5%, 200msec fast response ◉ PUA2: Covers short wavelengths from 2.0 to 2.4μm, capable of measuring metal surfaces ◉ PUA5: Optimal for measuring glass surfaces, wavelength 5μm ◉ PUA8: General-purpose, suitable for a wide range of applications, wavelength 8-14μm 【Other Specifications】 ◉ Field of view: 15:1, 25:1, 30:1, or 75:1 ◉ Emissivity setting range: 0.1 to 1.0 ◉ Power supply: 24VDC ◉ Body dimensions: Φ27.6mm (diameter) x 61mm (length) ◉ Weight: approximately 155g ◉ Analog signal cable 1m (standard included, extendable up to 30m) *USB cable 1.8m (USB cable cannot be extended)

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テルモセラ・ジャパン

テルモセラ・ジャパン 本社

Industrial Electrical Equipment

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【Endless possibility_thermal engineering...】 Our company sells vacuum thin film devices for semiconductor and electronic device fundamental research, ultra-high temperature heaters for CVD substrate heating, experimental furnaces, temperature measurement equipment, and more. To meet the endless demand for "heat," which is indispensable in any era, and to respond to various requests in the field of fundamental technology development, we aim to introduce the latest equipment and contribute to research and development in Japan.

Product/Service List (56)

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