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  6. Ultrasonic Megasonic Cleaning Equipment for Semiconductor Wafers

Ultrasonic Megasonic Cleaning Equipment for Semiconductor Wafers

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Sonosys

last updated:Oct 01, 2026

ティックコーポレーション 本社
ティックコーポレーション 本社
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Thorough removal of fine contaminants from wafers. High-quality cleaning achieved by Sonosys.

In the semiconductor industry, particularly in wafer manufacturing, the removal of fine contaminants is a critical issue that affects product quality. Fine particles and organic substances adhering to the wafer surface can lead to decreased device performance and lower yields. Our ultrasonic megasonic cleaning equipment effectively removes these contaminants from the wafer surface using megasonic technology. This supports the production of high-quality semiconductor products. 【Usage Scenarios】 - Cleaning in the wafer manufacturing process - Removal of fine contaminants and organic substances - Production of high-quality semiconductor products 【Benefits of Implementation】 - Improved cleaning quality - Enhanced yield - Increased product reliability

    Ultrasonic OscillatorPhotomaskUltrasonic Cleaner
ソノシス社製超音波洗浄スプレーノズル(枚葉洗浄).jpeg

Ultrasonic Megasonic Cleaning Equipment for Semiconductor Wafers

ソノシス社製超音波洗浄スプレーノズル(枚葉洗浄).jpeg
ソノシス社製超音波洗浄スプレーノズル(枚葉洗浄).jpeg 超音波洗浄装置(バス・タンク式).jpeg Triple-nozzle-ecf5619c.jpg
  • Special site - Product/service details - https://pr.mono.ipros.com/ticjapan/product/

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basic information

【Features】 - High-efficiency cleaning with a megasonic nozzle - Wide frequency range from 400 kHz to 9 MHz - Flexible response with immersion-type transducers - Improved cost-effectiveness through bath and tank cleaning - Stainless steel or plastic transducers 【Our Strengths】 Tick Corporation is committed to providing products that meet our customers' needs, offering a wide range of products. In addition to ultrasonic cleaning devices, we can also provide various related products.

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Applications/Examples of results

Cleaning of semiconductor wafers, photomasks, and MEMS.

catalog(14)

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Ultrasonic cleaning spray nozzle (single) 1~5MHz

Ultrasonic cleaning spray nozzle (single) 1~5MHz

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Ultrasonic cleaning spray nozzle single (600kHz)

Ultrasonic cleaning spray nozzle single (600kHz)

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Ultrasonic cleaning spray nozzle Duel (type with 2 nozzles included)

Ultrasonic cleaning spray nozzle Duel (type with 2 nozzles included)

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Ultrasonic cleaning device (bath/tank type cleaning) 4-inch substrate generator (made of PVDF)

Ultrasonic cleaning device (bath/tank type cleaning) 4-inch substrate generator (made of PVDF)

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Ultrasonic cleaning device (bath/tank type cleaning) 6-inch substrate generator (made of PVDF)

Ultrasonic cleaning device (bath/tank type cleaning) 6-inch substrate generator (made of PVDF)

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Ultrasonic cleaning device (bath/tank type cleaning) 4-inch substrate generator (made of stainless steel)

Ultrasonic cleaning device (bath/tank type cleaning) 4-inch substrate generator (made of stainless steel)

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Ultrasonic cleaning device (bath/tank type cleaning) 6-inch substrate generator (made of stainless steel)

Ultrasonic cleaning device (bath/tank type cleaning) 6-inch substrate generator (made of stainless steel)

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Next-generation digital generator for single nozzle type that improves the precision and manageability of megasonic cleaning.

Next-generation digital generator for single nozzle type that improves the precision and manageability of megasonic cleaning.

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Next-generation digital generator with dual nozzle type that improves the precision and manageability of megasonic cleaning.

Next-generation digital generator with dual nozzle type that improves the precision and manageability of megasonic cleaning.

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Sonosys Company Overview (Ultrasonic Cleaning Equipment)

Sonosys Company Overview (Ultrasonic Cleaning Equipment)

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[Sonosys] Sonosys Company Overview (Ultrasonic Cleaning Equipment) (Revised 2021)

[Sonosys] Sonosys Company Overview (Ultrasonic Cleaning Equipment) (Revised 2021)

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[Sonosys] (Case Study) Ultrasonic Spray Nozzle Improvement of Non-Woven Fabric Coating Line

[Sonosys] (Case Study) Ultrasonic Spray Nozzle Improvement of Non-Woven Fabric Coating Line

TECHNICAL
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Lechler Sonosys (Case Study) Spray Nozzles and Ultrasonic Spray Nozzles for Semiconductor Equipment

Lechler Sonosys (Case Study) Spray Nozzles and Ultrasonic Spray Nozzles for Semiconductor Equipment

TECHNICAL
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Mega Sonic Ultrasonic Cleaning Spray Nozzle Triple (Type with 3 Nozzles Included)

Mega Sonic Ultrasonic Cleaning Spray Nozzle Triple (Type with 3 Nozzles Included)

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News about this product(2)

Announcement of the product page launch for the SONOSYS Megasonic Cleaning Nozzle System | Precision Cleaning for Semiconductors and MEMS

  • Company news

We are pleased to announce that Tick Corporation has launched a product introduction page for the SONOSYS megasonic cleaning nozzle system. The megasonic cleaning technology from SONOSYS utilizes high-frequency energy ranging from 600 kHz to 9 MHz to precisely remove fine particles while minimizing damage to microstructures such as semiconductor wafers, photomasks, and MEMS. The new page features the characteristics of single, double, and triple nozzles, as well as applications for semiconductors, MEMS, optical components, and LCD/FPD substrates. If you are considering fine particle removal, precision cleaning using ultra-pure water (DI Water), or megasonic cleaning at frequencies such as 600 kHz or 1 MHz, please take a look.

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Mega Sonic Cleaning Device (Single)

Announcement of the release of the latest leaflet for the SONOSYS Corporation's megasonic cleaning device.

  • Catalog news

We have updated the product leaflet for the SONOSYS megasonic cleaning device from Germany to the latest version. SONOSYS's megasonic cleaning technology is a non-contact precision cleaning technique that efficiently removes fine particles by transmitting high-frequency ultrasonic energy through liquids such as pure water (DI Water) to the surface of the target object. It is particularly suitable for the precision cleaning of products with fine structures, such as semiconductor wafers, photomasks, MEMS, various substrates, and optical components, and is utilized in various fields that require high cleanliness, starting with semiconductor manufacturing processes. SONOSYS offers a range of frequencies depending on the application and the particles to be removed, as well as a megasonic nozzle system that accommodates various cleaning conditions, including Single Nozzle, Dual Nozzle, and Triple Nozzle. Customers who have challenges such as "wanting to remove fine particles from wafers," "wanting to clean photomasks and MEMS while minimizing damage," or "wanting to review existing cleaning processes" are encouraged to take a look at the latest leaflet.

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ティックコーポレーション

ティックコーポレーション 本社

Machine elements and parts

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  • Special site
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Tick Corporation is committed to providing products that contribute to solving various issues faced by companies, such as improving production efficiency, enhancing cost efficiency, improving quality, and considering environmental conservation. We have been widely collecting product information from around the world and providing products that meet market needs. In the future, we will continue to develop and deliver products that contribute to rationalization and particularly to environmental conservation, which has become increasingly stringent in recent years. ◇◆Main Products◇◆ - Precision industrial spray nozzles - Agricultural spray nozzles - Air nozzles / Air knives - Special spray nozzles - Tank cleaning nozzles - Blowers - Ultrasonic spray nozzles (Nebulizers / Atomizers) - Ultrasonic cleaning devices - Air conveying devices - Ventilators - Plastic connectors - Cutting torches (nozzles for gas cutters) - Latex testers - In-house manufactured tubing pumps (dispensers) - Syringe pumps

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ティックコーポレーション 本社
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Why does warm water work for degreasing and cleaning gaskets?
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The related categories of Ultrasonic Oscillator

  • Scientific and Physics Equipment
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